JP2012027495A - 半導体装置 - Google Patents
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
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- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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Abstract
【解決手段】半導体膜と基板との間に第1の絶縁膜を介して設けられた第1の配線を、該半導体膜と重ねて設け、遮光膜として用いる。さらに半導体膜上にゲート絶縁膜として用いる第2の絶縁膜を形成し、当該第2の絶縁膜上にゲート電極と第2の配線を形成する。第1及び第2の配線は、第1及び第2の絶縁膜を介して交差する。第2の配線の上層には、層間絶縁膜として第3の絶縁膜を形成し、その上に画素電極を形成する。画素電極は、第1の配線及び第2の配線とオーバーラップさせて形成することが可能であり、反射型の表示装置において画素電極の面積を大型化できる。
【選択図】 図1
Description
第2の配線の上層には、層間絶縁膜として第3の絶縁層を形成し、その上に画素電極を形成する。画素電極は、第1の配線及び第2の配線とオーバーラップさせて形成することが可能であり、反射型の表示装置において画素電極の面積を大型化できる。
特に反射型の液晶表示装置において、開口率を大幅に向上させることが可能である。また、上面放射型のEL表示装置にも適用することができる。
走査線(ゲート線)を形成する材料は、モリブデン(Mo)、タングステン(W)、タンタル(Ta)、チタン(Ti)から選ばれた一種または複数種を成分とする導電性材料が選択される。厚さは100〜400nm、好ましくは150〜250nmで形成する。
レーザーアニールにより作製される多結晶シリコンを用いても良いし、シリコン・ゲルマニウム合金を選択しても良い。また、図1で示す画素を形成する目的においては、非晶質シリコン膜で代替することも可能である。
、タンタル(Ta)、チタン(Ti)から選ばれた一種または複数種を成分とする導電性材料を用いる。第1の配線133と第1の電極102は第1の絶縁層に形成されたコンタクトホールを介して接続し、同じタイミングで同じ電位が印加されるようになっている。本発明の特徴は、この第1の電極と半導体膜が交差して形成されるチャネル形成領域は第1の配線上に配置されることで、第1の配線を遮光膜として機能させている。
従って、図1で示す本発明の画素構造は、第5の電極(画素電極)の占める面積を大きくすることが可能であり、開口率を大幅に向上させることができる。
また、VRAM1906、DRAM1907、フラッシュメモリ1908及びメモリーカード1909が接続されている。CPU1903で処理された情報は、映像信号(データ信号)として映像信号処理回路1904からコントロール回路1913に出力する。コントロール回路1913は、映像信号とクロックを、データ線駆動回路1915と走査線(ゲート線)駆動回路1914のそれぞれのタイミング仕様に変換する機能を持っている。
または、各画素にメモリーを備えておき、静止画像の表示モードに切り替えるなどの処置をとる。こうして電子装置の消費電力を低減させる。
Claims (1)
- 第1の配線と半導体膜の間に形成された第1の絶縁層と、
前記半導体膜と第1の電極との間に形成された第2の絶縁層とを有し、
前記第1の電極は前記第2の絶縁層を介して前記半導体膜と交差部を形成し、かつ、当該交差部の外側で前記第1の配線と接続していることを特徴とする半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2011226588A JP2012027495A (ja) | 2000-09-29 | 2011-10-14 | 半導体装置 |
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JP2000298304 | 2000-09-29 | ||
JP2000298304 | 2000-09-29 | ||
JP2011226588A JP2012027495A (ja) | 2000-09-29 | 2011-10-14 | 半導体装置 |
Related Parent Applications (1)
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JP2001304290A Division JP4974427B2 (ja) | 2000-09-29 | 2001-09-28 | 半導体装置及び電子装置 |
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JP2012280653A Division JP5478703B2 (ja) | 2000-09-29 | 2012-12-25 | 半導体装置 |
JP2014040065A Division JP2014157357A (ja) | 2000-09-29 | 2014-03-03 | 半導体装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020120126A (ja) * | 2013-09-13 | 2020-08-06 | 株式会社半導体エネルギー研究所 | 発光装置 |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100686228B1 (ko) * | 2000-03-13 | 2007-02-22 | 삼성전자주식회사 | 사진 식각용 장치 및 방법, 그리고 이를 이용한 액정 표시장치용 박막 트랜지스터 기판의 제조 방법 |
US6509616B2 (en) * | 2000-09-29 | 2003-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and its manufacturing method |
TW525216B (en) * | 2000-12-11 | 2003-03-21 | Semiconductor Energy Lab | Semiconductor device, and manufacturing method thereof |
SG111923A1 (en) * | 2000-12-21 | 2005-06-29 | Semiconductor Energy Lab | Light emitting device and method of manufacturing the same |
US6825496B2 (en) | 2001-01-17 | 2004-11-30 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
JP4179800B2 (ja) * | 2002-05-24 | 2008-11-12 | ソニー株式会社 | 表示装置及びその製造方法 |
US7094684B2 (en) * | 2002-09-20 | 2006-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
AU2003264515A1 (en) | 2002-09-20 | 2004-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
TW200415945A (en) * | 2002-11-25 | 2004-08-16 | Toshiba Matsushita Display Tec | Organic EL display panel |
IL156945A0 (en) * | 2003-07-15 | 2004-02-08 | Itzhak Tavori | Device and a method for orthopedic delivery of bone reconstruction medium |
TWI248682B (en) * | 2003-09-18 | 2006-02-01 | Au Optronics Corp | Control TFT for OLDE display |
KR100987859B1 (ko) * | 2003-11-03 | 2010-10-13 | 엘지디스플레이 주식회사 | 다결정실리콘 액정표시소자 및 그 제조방법 |
KR100611153B1 (ko) * | 2003-11-27 | 2006-08-09 | 삼성에스디아이 주식회사 | 평판 표시 소자 |
KR100659532B1 (ko) * | 2003-11-28 | 2006-12-19 | 삼성에스디아이 주식회사 | 평판표시장치 및 그의 제조방법 |
KR100617037B1 (ko) * | 2003-12-29 | 2006-08-30 | 엘지.필립스 엘시디 주식회사 | 반사투과형 액정표시장치 및 이의 제조방법 |
JP4884660B2 (ja) * | 2004-08-11 | 2012-02-29 | シャープ株式会社 | 薄膜トランジスタ装置の製造方法 |
JP5117667B2 (ja) * | 2005-02-28 | 2013-01-16 | カシオ計算機株式会社 | 薄膜トランジスタパネル |
JP2006245031A (ja) * | 2005-02-28 | 2006-09-14 | Casio Comput Co Ltd | 薄膜トランジスタパネル |
KR20060111267A (ko) * | 2005-04-22 | 2006-10-26 | 삼성전자주식회사 | 어레이 기판 및 이의 제조 방법 |
US20070054429A1 (en) * | 2005-08-25 | 2007-03-08 | Tsuan-Lun Lung | Back panel manufacturing process |
JP2007258453A (ja) * | 2006-03-23 | 2007-10-04 | Toshiba Matsushita Display Technology Co Ltd | 薄膜トランジスタ、及びその製造方法 |
TWI444731B (zh) | 2006-05-16 | 2014-07-11 | Semiconductor Energy Lab | 液晶顯示裝置和半導體裝置 |
JP2008147418A (ja) * | 2006-12-11 | 2008-06-26 | Hitachi Ltd | 薄膜トランジスタ装置、画像表示装置およびその製造方法 |
JP5270392B2 (ja) * | 2009-01-30 | 2013-08-21 | 浜松ホトニクス株式会社 | 固体撮像装置 |
US8563983B2 (en) * | 2009-08-25 | 2013-10-22 | Sharp Kabushiki Kaisha | Display panel, display device, and method manufacturing same |
KR101772639B1 (ko) | 2009-10-16 | 2017-08-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
WO2011052385A1 (en) | 2009-10-30 | 2011-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20140374744A1 (en) * | 2013-06-19 | 2014-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP6296788B2 (ja) * | 2013-12-25 | 2018-03-20 | キヤノン株式会社 | 撮像装置および撮像システム |
JP6350984B2 (ja) * | 2014-04-24 | 2018-07-04 | Tianma Japan株式会社 | 薄膜トランジスタ及び表示装置 |
TWI726843B (zh) | 2014-05-30 | 2021-05-11 | 日商半導體能源研究所股份有限公司 | 觸控面板 |
TWI563640B (en) * | 2014-08-22 | 2016-12-21 | Innolux Corp | Array substrate of display panel |
TWI578509B (zh) * | 2015-07-23 | 2017-04-11 | 友達光電股份有限公司 | 畫素結構 |
JP6494580B2 (ja) * | 2016-09-28 | 2019-04-03 | シャープ ライフ サイエンス (イーユー) リミテッド | 微小流体装置 |
CN108598172B (zh) * | 2018-04-28 | 2019-08-13 | 武汉华星光电技术有限公司 | 一种低温多晶硅薄膜晶体管及其制作方法 |
CN108767016B (zh) * | 2018-05-21 | 2021-09-21 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及其制作方法、阵列基板、显示装置 |
JP6868069B2 (ja) * | 2018-09-19 | 2021-05-12 | シャープ株式会社 | アクティブマトリクス基板およびアクティブマトリクス基板を用いたタッチセンサ付き液晶表示装置 |
JP7149602B2 (ja) * | 2019-08-19 | 2022-10-07 | 株式会社ユニバーサルエンターテインメント | 遊技機 |
JP7149603B2 (ja) * | 2019-08-19 | 2022-10-07 | 株式会社ユニバーサルエンターテインメント | 遊技機 |
WO2022153665A1 (ja) * | 2021-01-12 | 2022-07-21 | 株式会社ジャパンディスプレイ | 表示装置 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0553147A (ja) * | 1991-08-23 | 1993-03-05 | Nec Corp | 液晶表示装置およびその製造方法 |
JPH05100250A (ja) * | 1991-10-08 | 1993-04-23 | Sony Corp | 液晶表示装置 |
WO1998016868A1 (fr) * | 1996-10-16 | 1998-04-23 | Seiko Epson Corporation | Substrat pour dispositif a cristaux liquides, dispositif a cristaux liquides et dispositif de projection |
JPH10209452A (ja) * | 1997-01-17 | 1998-08-07 | Sony Corp | 薄膜トランジスタ及びその製造方法 |
JPH112844A (ja) * | 1997-06-13 | 1999-01-06 | Nec Corp | 液晶表示パネル及びその製造方法 |
JPH1184423A (ja) * | 1997-09-11 | 1999-03-26 | Seiko Epson Corp | 液晶表示パネルの製造方法 |
JPH11352521A (ja) * | 1998-04-07 | 1999-12-24 | Hitachi Ltd | 液晶表示装置 |
JP2000131716A (ja) * | 1998-10-28 | 2000-05-12 | Sony Corp | 液晶表示装置 |
JP2000180899A (ja) * | 1998-12-14 | 2000-06-30 | Nec Corp | 液晶表示装置 |
JP2001330859A (ja) * | 2000-03-17 | 2001-11-30 | Seiko Epson Corp | 電気光学装置 |
JP2002122889A (ja) * | 2000-08-11 | 2002-04-26 | Seiko Epson Corp | 電気光学装置及び投射型表示装置 |
Family Cites Families (112)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4918504A (en) * | 1987-07-31 | 1990-04-17 | Nippon Telegraph And Telephone Corporation | Active matrix cell |
JP2727562B2 (ja) * | 1988-04-27 | 1998-03-11 | ソニー株式会社 | 表示装置 |
US5576858A (en) | 1991-10-14 | 1996-11-19 | Hosiden Corporation | Gray scale LCD control capacitors formed between a control capacitor electrode on one side of an insulating layer and two subpixel electrodes on the other side |
JP2564725B2 (ja) * | 1991-12-24 | 1996-12-18 | 株式会社半導体エネルギー研究所 | Mos型トランジスタの作製方法 |
JPH05249478A (ja) * | 1991-12-25 | 1993-09-28 | Toshiba Corp | 液晶表示装置 |
JPH05289109A (ja) * | 1992-04-08 | 1993-11-05 | Sony Corp | 液晶表示装置 |
US5807772A (en) | 1992-06-09 | 1998-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming semiconductor device with bottom gate connected to source or drain |
JP3254007B2 (ja) | 1992-06-09 | 2002-02-04 | 株式会社半導体エネルギー研究所 | 薄膜状半導体装置およびその作製方法 |
JP3587537B2 (ja) | 1992-12-09 | 2004-11-10 | 株式会社半導体エネルギー研究所 | 半導体装置 |
FR2702286B1 (fr) * | 1993-03-04 | 1998-01-30 | Samsung Electronics Co Ltd | Affichage à cristaux liquides et procédé pour le fabriquer. |
JP3474604B2 (ja) * | 1993-05-25 | 2003-12-08 | 三菱電機株式会社 | 薄膜トランジスタおよびその製法 |
JPH07335904A (ja) | 1994-06-14 | 1995-12-22 | Semiconductor Energy Lab Co Ltd | 薄膜半導体集積回路 |
US5923962A (en) | 1993-10-29 | 1999-07-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
TW264575B (ja) | 1993-10-29 | 1995-12-01 | Handotai Energy Kenkyusho Kk | |
JPH07302912A (ja) | 1994-04-29 | 1995-11-14 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
DE19500380C2 (de) | 1994-05-20 | 2001-05-17 | Mitsubishi Electric Corp | Aktivmatrix-Flüssigkristallanzeige und Herstellungsverfahren dafür |
CN1230919C (zh) | 1994-06-02 | 2005-12-07 | 株式会社半导体能源研究所 | 有源矩阵显示器和电光元件 |
JP3312083B2 (ja) | 1994-06-13 | 2002-08-05 | 株式会社半導体エネルギー研究所 | 表示装置 |
JP3253808B2 (ja) * | 1994-07-07 | 2002-02-04 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
JPH0926603A (ja) * | 1995-05-08 | 1997-01-28 | Semiconductor Energy Lab Co Ltd | 表示装置 |
JPH0955508A (ja) * | 1995-08-10 | 1997-02-25 | Sanyo Electric Co Ltd | 薄膜トランジスタ及びその製造方法 |
JP2990046B2 (ja) | 1995-08-16 | 1999-12-13 | 日本電気株式会社 | 反射型液晶表示装置及びその製造方法 |
JP3143592B2 (ja) * | 1995-09-14 | 2001-03-07 | キヤノン株式会社 | 表示装置 |
JPH09105953A (ja) | 1995-10-12 | 1997-04-22 | Semiconductor Energy Lab Co Ltd | 液晶表示装置 |
TW329500B (en) | 1995-11-14 | 1998-04-11 | Handotai Energy Kenkyusho Kk | Electro-optical device |
JP3963974B2 (ja) | 1995-12-20 | 2007-08-22 | 株式会社半導体エネルギー研究所 | 液晶電気光学装置 |
US5815226A (en) | 1996-02-29 | 1998-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and method of fabricating same |
JPH09269511A (ja) * | 1996-03-29 | 1997-10-14 | Seiko Epson Corp | 液晶装置、その駆動方法及び表示システム |
JPH1096955A (ja) * | 1996-09-24 | 1998-04-14 | Toshiba Corp | 液晶表示装置 |
JPH10104663A (ja) | 1996-09-27 | 1998-04-24 | Semiconductor Energy Lab Co Ltd | 電気光学装置およびその作製方法 |
JPH10198292A (ja) * | 1996-12-30 | 1998-07-31 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
US6088070A (en) * | 1997-01-17 | 2000-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Active matrix liquid crystal with capacitor between light blocking film and pixel connecting electrode |
JP3856889B2 (ja) | 1997-02-06 | 2006-12-13 | 株式会社半導体エネルギー研究所 | 反射型表示装置および電子デバイス |
JPH10325963A (ja) * | 1997-05-26 | 1998-12-08 | Sharp Corp | アクティブマトリクス型表示装置の製造方法 |
JP3980178B2 (ja) | 1997-08-29 | 2007-09-26 | 株式会社半導体エネルギー研究所 | 不揮発性メモリおよび半導体装置 |
JP3919900B2 (ja) | 1997-09-19 | 2007-05-30 | 株式会社半導体エネルギー研究所 | 液晶表示装置およびその作製方法 |
US6433841B1 (en) * | 1997-12-19 | 2002-08-13 | Seiko Epson Corporation | Electro-optical apparatus having faces holding electro-optical material in between flattened by using concave recess, manufacturing method thereof, and electronic device using same |
US6320204B1 (en) * | 1997-12-25 | 2001-11-20 | Seiko Epson Corporation | Electro-optical device in which an extending portion of a channel region of a semiconductor layer is connected to a capacitor line and an electronic apparatus including the electro-optical device |
TW556013B (en) * | 1998-01-30 | 2003-10-01 | Seiko Epson Corp | Electro-optical apparatus, method of producing the same and electronic apparatus |
JP3980167B2 (ja) * | 1998-04-07 | 2007-09-26 | 株式会社日立製作所 | Tft電極基板 |
JP3702096B2 (ja) * | 1998-06-08 | 2005-10-05 | 三洋電機株式会社 | 薄膜トランジスタ及び表示装置 |
JP3788093B2 (ja) * | 1998-06-11 | 2006-06-21 | セイコーエプソン株式会社 | 液晶パネル用基板、液晶パネル及びそれを用いた電子機器並びに液晶パネル用基板の製造方法 |
JP2001051292A (ja) | 1998-06-12 | 2001-02-23 | Semiconductor Energy Lab Co Ltd | 半導体装置および半導体表示装置 |
KR100451379B1 (ko) | 1998-06-19 | 2005-01-13 | 엘지.필립스 엘시디 주식회사 | 액정표시장치및그제조방법 |
JP3736122B2 (ja) | 1998-06-23 | 2006-01-18 | セイコーエプソン株式会社 | 液晶装置及び電子機器 |
JP2000058839A (ja) * | 1998-08-05 | 2000-02-25 | Semiconductor Energy Lab Co Ltd | 半導体素子からなる半導体回路を備えた半導体装置およびその作製方法 |
JP2000122071A (ja) * | 1998-10-13 | 2000-04-28 | Toshiba Corp | 液晶表示素子及び液晶表示素子の製造方法 |
JP4220030B2 (ja) * | 1998-10-13 | 2009-02-04 | 東芝松下ディスプレイテクノロジー株式会社 | 液晶表示素子の製造方法 |
JP2000124462A (ja) * | 1998-10-20 | 2000-04-28 | Seiko Epson Corp | 半導体装置の製造方法、および液晶装置の製造方法 |
US6274887B1 (en) | 1998-11-02 | 2001-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method therefor |
US6277679B1 (en) | 1998-11-25 | 2001-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing thin film transistor |
JP2000174282A (ja) | 1998-12-03 | 2000-06-23 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
JP4531175B2 (ja) * | 1998-12-03 | 2010-08-25 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2000180862A (ja) * | 1998-12-11 | 2000-06-30 | Ricoh Microelectronics Co Ltd | 液晶表示装置用スペーサ形成方法、液晶表示装置用スペーサ形成装置、及び、液晶表示装置 |
US6469317B1 (en) | 1998-12-18 | 2002-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of fabricating the same |
JP4869464B2 (ja) * | 1998-12-25 | 2012-02-08 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
JP4597295B2 (ja) * | 1998-12-25 | 2010-12-15 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
US6380558B1 (en) * | 1998-12-29 | 2002-04-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of fabricating the same |
EP1020920B1 (en) | 1999-01-11 | 2010-06-02 | Sel Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a driver TFT and a pixel TFT on a common substrate |
KR100312259B1 (ko) * | 1999-02-05 | 2001-11-03 | 구본준, 론 위라하디락사 | 액정표시장치의 불량패턴 제거방법 및 액정표시장치 구조 |
JP2000231122A (ja) * | 1999-02-12 | 2000-08-22 | Sony Corp | 電気光学装置、電気光学装置用の駆動基板、及びこれらの製造方法 |
US6281552B1 (en) | 1999-03-23 | 2001-08-28 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistors having ldd regions |
US6461899B1 (en) | 1999-04-30 | 2002-10-08 | Semiconductor Energy Laboratory, Co., Ltd. | Oxynitride laminate “blocking layer” for thin film semiconductor devices |
US6358759B1 (en) * | 1999-07-16 | 2002-03-19 | Seiko Epson Corporation | Method for manufacturing electro-optical device, electro-optical device, and electronic equipment |
TW478014B (en) | 1999-08-31 | 2002-03-01 | Semiconductor Energy Lab | Semiconductor device and method of manufacturing thereof |
JP4700156B2 (ja) | 1999-09-27 | 2011-06-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US6524877B1 (en) | 1999-10-26 | 2003-02-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, and method of fabricating the same |
US6646692B2 (en) | 2000-01-26 | 2003-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Liquid-crystal display device and method of fabricating the same |
US6825488B2 (en) | 2000-01-26 | 2004-11-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US7023021B2 (en) | 2000-02-22 | 2006-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
TW521303B (en) | 2000-02-28 | 2003-02-21 | Semiconductor Energy Lab | Electronic device |
KR100686228B1 (ko) * | 2000-03-13 | 2007-02-22 | 삼성전자주식회사 | 사진 식각용 장치 및 방법, 그리고 이를 이용한 액정 표시장치용 박막 트랜지스터 기판의 제조 방법 |
TWI301915B (ja) | 2000-03-17 | 2008-10-11 | Seiko Epson Corp | |
US6580475B2 (en) | 2000-04-27 | 2003-06-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of fabricating the same |
US6489222B2 (en) | 2000-06-02 | 2002-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
US6542205B2 (en) | 2000-08-04 | 2003-04-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US6636284B2 (en) | 2000-08-11 | 2003-10-21 | Seiko Epson Corporation | System and method for providing an electro-optical device having light shield layers |
KR100380141B1 (ko) * | 2000-09-25 | 2003-04-11 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치용 어레이 기판 및 그의 제조 방법 |
US6509616B2 (en) * | 2000-09-29 | 2003-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and its manufacturing method |
JP2002333870A (ja) * | 2000-10-31 | 2002-11-22 | Matsushita Electric Ind Co Ltd | 液晶表示装置、el表示装置及びその駆動方法、並びに副画素の表示パターン評価方法 |
JP2002151698A (ja) | 2000-11-14 | 2002-05-24 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP4282219B2 (ja) * | 2000-11-28 | 2009-06-17 | 三洋電機株式会社 | 画素暗点化方法 |
TW525216B (en) | 2000-12-11 | 2003-03-21 | Semiconductor Energy Lab | Semiconductor device, and manufacturing method thereof |
SG111923A1 (en) * | 2000-12-21 | 2005-06-29 | Semiconductor Energy Lab | Light emitting device and method of manufacturing the same |
JP2002236542A (ja) * | 2001-02-09 | 2002-08-23 | Sanyo Electric Co Ltd | 信号検出装置 |
SG103846A1 (en) * | 2001-02-28 | 2004-05-26 | Semiconductor Energy Lab | A method of manufacturing a semiconductor device |
JP3608614B2 (ja) * | 2001-03-28 | 2005-01-12 | 株式会社日立製作所 | 表示装置 |
JP3612494B2 (ja) * | 2001-03-28 | 2005-01-19 | 株式会社日立製作所 | 表示装置 |
US6740938B2 (en) * | 2001-04-16 | 2004-05-25 | Semiconductor Energy Laboratory Co., Ltd. | Transistor provided with first and second gate electrodes with channel region therebetween |
JP2002319679A (ja) | 2001-04-20 | 2002-10-31 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
WO2002095834A1 (en) * | 2001-05-18 | 2002-11-28 | Sanyo Electric Co., Ltd. | Thin film transistor and active matrix type display unit production methods therefor |
US6828584B2 (en) | 2001-05-18 | 2004-12-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US6906344B2 (en) * | 2001-05-24 | 2005-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with plural channels and corresponding plural overlapping electrodes |
US6897477B2 (en) | 2001-06-01 | 2005-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and display device |
US6952023B2 (en) * | 2001-07-17 | 2005-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
US7317205B2 (en) * | 2001-09-10 | 2008-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method of manufacturing a semiconductor device |
US7045373B2 (en) * | 2001-09-25 | 2006-05-16 | Hannstar Display Corp. | Manufacturing method for in-plane switching mode LCD unit with fewer masking process |
TWI237141B (en) * | 2001-09-25 | 2005-08-01 | Hannstar Display Corp | Manufacturing method for in-plane switching mode liquid crystal display (LCD) unit |
US20030076282A1 (en) * | 2001-10-19 | 2003-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for driving the same |
JP4179800B2 (ja) * | 2002-05-24 | 2008-11-12 | ソニー株式会社 | 表示装置及びその製造方法 |
KR100846464B1 (ko) * | 2002-05-28 | 2008-07-17 | 삼성전자주식회사 | 비정질실리콘 박막 트랜지스터-액정표시장치 및 그 제조방법 |
KR100878239B1 (ko) * | 2002-09-06 | 2009-01-13 | 삼성전자주식회사 | 액정 표시 장치 및 그 박막 트랜지스터 기판 |
US7094684B2 (en) * | 2002-09-20 | 2006-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
AU2003264515A1 (en) * | 2002-09-20 | 2004-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
KR100544436B1 (ko) * | 2002-11-26 | 2006-01-23 | 엘지.필립스 엘시디 주식회사 | 유기전계 발광소자와 그 제조방법 |
GB2396244B (en) * | 2002-12-09 | 2006-03-22 | Lg Philips Lcd Co Ltd | Array substrate having color filter on thin film transistor s tructure for LCD device and method of fabricating the same |
KR100484092B1 (ko) * | 2002-12-26 | 2005-04-18 | 엘지.필립스 엘시디 주식회사 | 듀얼패널타입 유기전계발광 소자 및 그 제조방법 |
KR100497095B1 (ko) * | 2002-12-26 | 2005-06-28 | 엘지.필립스 엘시디 주식회사 | 듀얼패널타입 유기전계발광 소자용 어레이 기판 및 그 제조방법 |
KR100503129B1 (ko) * | 2002-12-28 | 2005-07-22 | 엘지.필립스 엘시디 주식회사 | 듀얼패널타입 유기전계발광 소자 및 그 제조방법 |
US7019805B2 (en) * | 2002-12-31 | 2006-03-28 | Lg.Philips Lcd Co., Ltd. | Liquid crystal display device having a multi-domain structure and a manufacturing method for the same |
TWI248682B (en) * | 2003-09-18 | 2006-02-01 | Au Optronics Corp | Control TFT for OLDE display |
KR100670140B1 (ko) * | 2004-08-26 | 2007-01-16 | 삼성에스디아이 주식회사 | 커패시터 |
-
2001
- 2001-09-25 US US09/961,525 patent/US6509616B2/en not_active Expired - Lifetime
-
2002
- 2002-12-30 US US10/330,284 patent/US6765231B2/en not_active Expired - Lifetime
-
2004
- 2004-07-14 US US10/890,129 patent/US7319238B2/en not_active Expired - Fee Related
-
2007
- 2007-11-16 US US11/941,147 patent/US8138555B2/en not_active Expired - Fee Related
-
2011
- 2011-10-14 JP JP2011226588A patent/JP2012027495A/ja not_active Withdrawn
- 2011-10-25 US US13/280,439 patent/US8551796B2/en not_active Expired - Lifetime
-
2012
- 2012-12-25 JP JP2012280653A patent/JP5478703B2/ja not_active Expired - Lifetime
-
2014
- 2014-03-03 JP JP2014040065A patent/JP2014157357A/ja not_active Withdrawn
- 2014-03-04 JP JP2014041427A patent/JP2014150262A/ja not_active Withdrawn
-
2015
- 2015-07-17 JP JP2015142543A patent/JP2015228504A/ja not_active Withdrawn
-
2016
- 2016-07-25 JP JP2016145218A patent/JP2016212433A/ja not_active Withdrawn
-
2017
- 2017-05-03 JP JP2017092021A patent/JP6449370B2/ja not_active Expired - Lifetime
-
2018
- 2018-07-11 JP JP2018131620A patent/JP2018194848A/ja not_active Withdrawn
-
2019
- 2019-03-29 JP JP2019065226A patent/JP6675026B2/ja not_active Expired - Lifetime
- 2019-05-07 JP JP2019087397A patent/JP6682028B2/ja not_active Expired - Lifetime
-
2020
- 2020-03-02 JP JP2020034854A patent/JP2020115542A/ja not_active Withdrawn
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0553147A (ja) * | 1991-08-23 | 1993-03-05 | Nec Corp | 液晶表示装置およびその製造方法 |
JPH05100250A (ja) * | 1991-10-08 | 1993-04-23 | Sony Corp | 液晶表示装置 |
WO1998016868A1 (fr) * | 1996-10-16 | 1998-04-23 | Seiko Epson Corporation | Substrat pour dispositif a cristaux liquides, dispositif a cristaux liquides et dispositif de projection |
JPH10209452A (ja) * | 1997-01-17 | 1998-08-07 | Sony Corp | 薄膜トランジスタ及びその製造方法 |
JPH112844A (ja) * | 1997-06-13 | 1999-01-06 | Nec Corp | 液晶表示パネル及びその製造方法 |
JPH1184423A (ja) * | 1997-09-11 | 1999-03-26 | Seiko Epson Corp | 液晶表示パネルの製造方法 |
JPH11352521A (ja) * | 1998-04-07 | 1999-12-24 | Hitachi Ltd | 液晶表示装置 |
JP2000131716A (ja) * | 1998-10-28 | 2000-05-12 | Sony Corp | 液晶表示装置 |
JP2000180899A (ja) * | 1998-12-14 | 2000-06-30 | Nec Corp | 液晶表示装置 |
JP2001330859A (ja) * | 2000-03-17 | 2001-11-30 | Seiko Epson Corp | 電気光学装置 |
JP2002122889A (ja) * | 2000-08-11 | 2002-04-26 | Seiko Epson Corp | 電気光学装置及び投射型表示装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020120126A (ja) * | 2013-09-13 | 2020-08-06 | 株式会社半導体エネルギー研究所 | 発光装置 |
JP7012775B2 (ja) | 2013-09-13 | 2022-01-28 | 株式会社半導体エネルギー研究所 | 発光装置 |
US11508852B2 (en) | 2013-09-13 | 2022-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11869977B2 (en) | 2013-09-13 | 2024-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
Also Published As
Publication number | Publication date |
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JP2014157357A (ja) | 2014-08-28 |
JP2015228504A (ja) | 2015-12-17 |
JP2017161924A (ja) | 2017-09-14 |
JP2018194848A (ja) | 2018-12-06 |
US20020039813A1 (en) | 2002-04-04 |
JP6449370B2 (ja) | 2019-01-09 |
US20080135844A1 (en) | 2008-06-12 |
US20030132436A1 (en) | 2003-07-17 |
JP2020115542A (ja) | 2020-07-30 |
US7319238B2 (en) | 2008-01-15 |
US20040256623A1 (en) | 2004-12-23 |
US6765231B2 (en) | 2004-07-20 |
JP2013101368A (ja) | 2013-05-23 |
JP2014150262A (ja) | 2014-08-21 |
US20120107985A1 (en) | 2012-05-03 |
JP2019164368A (ja) | 2019-09-26 |
US8551796B2 (en) | 2013-10-08 |
US8138555B2 (en) | 2012-03-20 |
JP6682028B2 (ja) | 2020-04-15 |
JP5478703B2 (ja) | 2014-04-23 |
JP2016212433A (ja) | 2016-12-15 |
JP6675026B2 (ja) | 2020-04-01 |
JP2019149556A (ja) | 2019-09-05 |
US6509616B2 (en) | 2003-01-21 |
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