JP2008547152A - ロジックプロセスで埋め込まれたdramのためのワード線ドライバ - Google Patents
ロジックプロセスで埋め込まれたdramのためのワード線ドライバ Download PDFInfo
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- JP2008547152A JP2008547152A JP2008518472A JP2008518472A JP2008547152A JP 2008547152 A JP2008547152 A JP 2008547152A JP 2008518472 A JP2008518472 A JP 2008518472A JP 2008518472 A JP2008518472 A JP 2008518472A JP 2008547152 A JP2008547152 A JP 2008547152A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/08—Word line control circuits, e.g. drivers, boosters, pull-up circuits, pull-down circuits, precharging circuits, for word lines
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
- G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
- G11C11/4074—Power supply or voltage generation circuits, e.g. bias voltage generators, substrate voltage generators, back-up power, power control circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
- G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
- G11C11/408—Address circuits
- G11C11/4085—Word line control circuits, e.g. word line drivers, - boosters, - pull-up, - pull-down, - precharge
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2207/00—Indexing scheme relating to arrangements for writing information into, or reading information out from, a digital store
- G11C2207/10—Aspects relating to interfaces of memory device to external buses
- G11C2207/104—Embedded memory devices, e.g. memories with a processing device on the same die or ASIC memory designs
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/50—Peripheral circuit region structures
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- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Dram (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】慣用のロジックプロセスで埋め込まれたDRAMセルにアクセスするためのワード線ドライバであって、セルキャパシタに接続したpチャネルアクセストランジスタを含むワード線ドライバを提供する。このワード線ドライバは、深いn型ウェル領域の中に配置したp型ウェル領域に設けたnチャネルトランジスタを含む。その深いn型ウェルはp型基板の中に配置する。ワード線は上記nチャネルトランジスタのドレーンをpチャネルアクセストランジスタのゲートに接続する。負極性のブーストずみ電圧供給源からp型ウェルおよびnチャネルトランジスタのソースに負極性ブーストずみ電圧を供給する。この負極性ブーストずみ電圧は、pチャネルアクセストランジスタのスレッショルド電圧以上の電圧値だけ接地電位よりも低い。深いn型ウェルおよびp型基板は接地電位点に接続する。別の実施例では上述の導電型は逆にすることができる。
【選択図】図3
Description
101,501 pチャネルMOSトランジスタ
102,502 セルキャパシタ
103,503 ビット線
104,504 ワード線
110 ワード線ドライバ
300,600 ワード線ドライバ
310,610 出力ドライバ
315,615 インバータ
320,620 電圧変換回路
330,630 行アドレスデコーダ
311,611 nチャネルトランジスタ
301,304 pチャネルトランジスタ
303,302 pチャネルトランジスタ
313,312 nチャネルトランジスタ
Claims (25)
- メモリセルをドライブするためのワード線ドライバ回路であって、
正極性ブーストずみ電圧、すなわち前記メモリセルのパスゲートトランジスタを通じたサブスレッショルド漏洩およびゲート誘発ドレーン低下(GIDL)漏洩の合計値を最小にするように選んだ第1の電圧だけ正極性電源電圧よりも高い正極性ブーストずみ電圧を受けるように構成した正極性ブーストずみ電圧端子と、
負極性電源電圧よりもトランジスタスレッショルド電圧以上の電圧値だけ深い負極性の電圧値を有する負極性ブーストずみ電圧を受けるように構成した負極性ブーストずみ電圧端子と
を含むワード線ドライバ回路。 - 前記第1の電圧が、0.2ボルトと、前記メモリセルの前記パスゲートトランジスタの前記スレッショルド電圧の絶対値との間の値を有する請求項1記載のワード線ドライバ回路。
- 前記負極性ブーストずみ電圧端子と前記メモリセルの前記パスゲートトランジスタとの間に接続したnチャネルトランジスタであって、n型ウェル領域の中に配置したp型ウェル領域に形成したnチャネルトランジスタ
をさらに含む請求項1記載のワード線ドライバ回路。 - 前記正極性ブーストずみ電圧端子と前記メモリセルの前記パスゲートトランジスタとの間に接続したpチャネルトランジスタ
をさらに含む請求項3記載のワード線ドライバ回路。 - 前記メモリセルが慣用のロジックプロセスで埋め込まれたDRAMセルを含む請求項1記載のワード線ドライバ回路。
- 前記DRAMセルが約10フェムトファラッド(fF)以下の静電容量のキャパシタを含む請求項5記載のワード線ドライバ回路。
- 前記メモリセルが慣用のロジックプロセスで埋め込まれた単一トランジスタスタティックランダムアクセスメモリ(1T SRAM)セルを含む請求項1記載のワード線ドライバ回路。
- 前記正極性ブーストずみ電圧端子および前記負極性ブーストずみ電圧端子に接続され、前記メモリセルの前記パスゲートトランジスタのゲートに接続した出力端子を有する出力ドライバを含む請求項1記載のワード線ドライバ回路。
- 前記出力ドライバの入力端子に接続した電圧変換回路をさらに含む請求項8記載のワード線ドライバ回路。
- 前記パスゲートトランジスタ並びに前記出力ドライバおよび電圧変換回路の中のすべてのトランジスタが同じ厚さのゲート絶縁膜を有する請求項9記載のワード線ドライバ回路。
- セルキャパシタに接続したpチャネルパスゲートトランジスタを含むメモリセルと、
深いn型ウェル領域の中に配置したp型ウェル領域に形成したnチャネルトランジスタを含むワード線ドライバと、
前記nチャネルトランジスタのドレーンを前記pチャネルパスゲートトランジスタのゲートに接続するワード線と
を含む回路。 - 前記p型ウェル領域および前記nチャネルトランジスタのソースに負極性ブーストずみ電圧を供給するように構成した負極性ブーストずみ電圧供給源をさらに含む請求項11記載の回路。
- 前記負極性ブーストずみ電圧が、前記pチャネルパスゲートトランジスタのスレッショルド電圧以上の電圧値だけ接地電位よりも低い請求項12記載の回路。
- 接地電位以上の電圧を前記深いn型領域に供給するように構成した電圧供給源をさらに含む請求項12記載の回路。
- 前記深いn型ウェル領域がp型基板の中に形成されており、前記接地電位供給源が前記p型基板に接続されている請求項14記載の回路。
- 正極性のブーストずみ電圧を前記深いn型ウェル領域に供給するように構成した正極性ブーストずみ電圧供給源をさらに含む請求項12記載の回路。
- 前記ワード線ドライバが、n型ウェル領域内に形成され前記ワード線に接続したドレーンを有するpチャネルトランジスタをさらに含む請求項12記載の回路。
- 前記n型ウェル領域および前記pチャネルトランジスタのソースに正極性ブーストずみ電圧を供給するように構成した正極性ブーストずみ電圧供給源をさらに含む請求項17記載の回路。
- 前記正極性ブーストずみ電圧が正極性電源電圧よりも高く、前記pチャネルパスゲートトランジスタを通じたサブスレッショルド漏洩およびGIDL漏洩の合計値を最小にするように選んだ値を有する請求項18記載の回路。
- 前記pチャネルトランジスタのゲートおよび前記nチャネルトランジスタのゲートに接続した出力端子を有し、前記正極性ブーストずみ電圧および前記負極性ブーストずみ電圧を受けるように接続したインバータをさらに含む請求項18記載の回路。
- 前記正極性ブーストずみ電圧供給源と前記インバータの入力との間に接続したpチャネルトランジスタをさらに含む請求項20記載の回路。
- 前記インバータの入力を前記正極性ブーストずみ電圧供給源または接地電位供給源に接続する手段をさらに含む請求項21記載の回路。
- 前記メモリセルおよび前記ワード線ドライバと同じチップの上に形成した複数のロジックトランジスタをさらに含む請求項11記載の回路。
- 前記セルキャパシタの静電容量が約10フェムトファラッド(fF)以下である請求項11記載の回路。
- 前記パスゲートトランジスタおよび前記nチャネルトランジスタのゲート絶縁膜の厚さが互いに等しい請求項11記載の回路。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/166,856 | 2005-06-24 | ||
US11/166,856 US7274618B2 (en) | 2005-06-24 | 2005-06-24 | Word line driver for DRAM embedded in a logic process |
PCT/US2006/024653 WO2007002509A2 (en) | 2005-06-24 | 2006-06-23 | Word line driver for dram embedded in a logic process |
Related Child Applications (1)
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JP2012116747A Division JP5226144B2 (ja) | 2005-06-24 | 2012-05-22 | ロジックプロセスで埋め込まれたdramのためのワード線ドライバ |
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JP2008547152A true JP2008547152A (ja) | 2008-12-25 |
JP5225837B2 JP5225837B2 (ja) | 2013-07-03 |
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JP2008518472A Expired - Fee Related JP5225837B2 (ja) | 2005-06-24 | 2006-06-23 | ロジックプロセスで埋め込まれたdramのためのワード線ドライバ |
JP2012116747A Expired - Fee Related JP5226144B2 (ja) | 2005-06-24 | 2012-05-22 | ロジックプロセスで埋め込まれたdramのためのワード線ドライバ |
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US (2) | US7274618B2 (ja) |
EP (1) | EP1894202A4 (ja) |
JP (2) | JP5225837B2 (ja) |
KR (2) | KR101392094B1 (ja) |
WO (1) | WO2007002509A2 (ja) |
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WO2007002509A2 (en) | 2007-01-04 |
JP5226144B2 (ja) | 2013-07-03 |
KR101392094B1 (ko) | 2014-05-07 |
KR20140012188A (ko) | 2014-01-29 |
US7274618B2 (en) | 2007-09-25 |
KR101391557B1 (ko) | 2014-05-02 |
KR20080034433A (ko) | 2008-04-21 |
US7447104B2 (en) | 2008-11-04 |
EP1894202A2 (en) | 2008-03-05 |
EP1894202A4 (en) | 2009-03-25 |
US20060291321A1 (en) | 2006-12-28 |
WO2007002509A3 (en) | 2007-06-21 |
JP5225837B2 (ja) | 2013-07-03 |
JP2012181918A (ja) | 2012-09-20 |
US20070109906A1 (en) | 2007-05-17 |
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