JP2008235876A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2008235876A JP2008235876A JP2008036771A JP2008036771A JP2008235876A JP 2008235876 A JP2008235876 A JP 2008235876A JP 2008036771 A JP2008036771 A JP 2008036771A JP 2008036771 A JP2008036771 A JP 2008036771A JP 2008235876 A JP2008235876 A JP 2008235876A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- region
- thin film
- semiconductor layer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 839
- 239000010409 thin film Substances 0.000 claims abstract description 412
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 306
- 239000000758 substrate Substances 0.000 claims abstract description 109
- 229910021332 silicide Inorganic materials 0.000 claims description 43
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 30
- 239000010408 film Substances 0.000 abstract description 333
- 239000010410 layer Substances 0.000 description 1305
- 238000000034 method Methods 0.000 description 227
- 239000012535 impurity Substances 0.000 description 206
- 238000005530 etching Methods 0.000 description 76
- 239000007789 gas Substances 0.000 description 69
- 239000000463 material Substances 0.000 description 60
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 49
- 238000004519 manufacturing process Methods 0.000 description 47
- 238000009832 plasma treatment Methods 0.000 description 43
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 41
- 230000006870 function Effects 0.000 description 39
- 230000002829 reductive effect Effects 0.000 description 36
- 229910052814 silicon oxide Inorganic materials 0.000 description 36
- 238000010438 heat treatment Methods 0.000 description 35
- 229910052710 silicon Inorganic materials 0.000 description 35
- 239000010936 titanium Substances 0.000 description 35
- 239000001301 oxygen Substances 0.000 description 34
- 229910052760 oxygen Inorganic materials 0.000 description 34
- 230000008569 process Effects 0.000 description 32
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 31
- 239000010703 silicon Substances 0.000 description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 30
- 230000007423 decrease Effects 0.000 description 30
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 28
- 238000002425 crystallisation Methods 0.000 description 25
- 239000001257 hydrogen Substances 0.000 description 25
- 229910052739 hydrogen Inorganic materials 0.000 description 25
- -1 polyethylene terephthalate Polymers 0.000 description 25
- 229910052581 Si3N4 Inorganic materials 0.000 description 24
- 229910052757 nitrogen Inorganic materials 0.000 description 24
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 24
- 238000004544 sputter deposition Methods 0.000 description 24
- 238000003860 storage Methods 0.000 description 24
- 230000003647 oxidation Effects 0.000 description 23
- 238000007254 oxidation reaction Methods 0.000 description 23
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 23
- 238000012545 processing Methods 0.000 description 23
- 229920005989 resin Polymers 0.000 description 23
- 239000011347 resin Substances 0.000 description 23
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 22
- 230000008025 crystallization Effects 0.000 description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 19
- 239000000460 chlorine Substances 0.000 description 19
- 229910052721 tungsten Inorganic materials 0.000 description 19
- 229910052782 aluminium Inorganic materials 0.000 description 18
- 238000005229 chemical vapour deposition Methods 0.000 description 17
- 239000010949 copper Substances 0.000 description 17
- 230000005684 electric field Effects 0.000 description 17
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 17
- 229910052719 titanium Inorganic materials 0.000 description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 16
- 230000000694 effects Effects 0.000 description 16
- 239000007790 solid phase Substances 0.000 description 16
- 239000010937 tungsten Substances 0.000 description 15
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 14
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 14
- 239000000956 alloy Substances 0.000 description 14
- 229910052731 fluorine Inorganic materials 0.000 description 14
- 239000011737 fluorine Substances 0.000 description 14
- 229910052698 phosphorus Inorganic materials 0.000 description 14
- 229910052715 tantalum Inorganic materials 0.000 description 14
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 13
- 229910052786 argon Inorganic materials 0.000 description 13
- 229910052759 nickel Inorganic materials 0.000 description 13
- 239000011574 phosphorus Substances 0.000 description 13
- 238000007639 printing Methods 0.000 description 13
- 239000012298 atmosphere Substances 0.000 description 12
- 125000004429 atom Chemical group 0.000 description 12
- 239000011651 chromium Substances 0.000 description 12
- 230000007547 defect Effects 0.000 description 12
- 238000005240 physical vapour deposition Methods 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 12
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 12
- 229910045601 alloy Inorganic materials 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 11
- 239000010931 gold Substances 0.000 description 11
- 230000001590 oxidative effect Effects 0.000 description 11
- 239000000243 solution Substances 0.000 description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 10
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 10
- 229910052796 boron Inorganic materials 0.000 description 10
- 229910052799 carbon Inorganic materials 0.000 description 10
- 229910052801 chlorine Inorganic materials 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 239000013078 crystal Substances 0.000 description 10
- 239000011229 interlayer Substances 0.000 description 10
- 239000012299 nitrogen atmosphere Substances 0.000 description 10
- 238000001020 plasma etching Methods 0.000 description 10
- 229910052697 platinum Inorganic materials 0.000 description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 9
- 239000004642 Polyimide Substances 0.000 description 9
- 239000007864 aqueous solution Substances 0.000 description 9
- 238000000151 deposition Methods 0.000 description 9
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 9
- 238000007667 floating Methods 0.000 description 9
- 229910052734 helium Inorganic materials 0.000 description 9
- 150000004767 nitrides Chemical class 0.000 description 9
- 238000005121 nitriding Methods 0.000 description 9
- 230000010355 oscillation Effects 0.000 description 9
- 229910052763 palladium Inorganic materials 0.000 description 9
- 229920001721 polyimide Polymers 0.000 description 9
- 229920005591 polysilicon Polymers 0.000 description 9
- 238000007650 screen-printing Methods 0.000 description 9
- 229910052709 silver Inorganic materials 0.000 description 9
- 239000002356 single layer Substances 0.000 description 9
- 238000007740 vapor deposition Methods 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 8
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 8
- 239000004695 Polyether sulfone Substances 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 8
- 239000004020 conductor Substances 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- 229910052750 molybdenum Inorganic materials 0.000 description 8
- 239000011733 molybdenum Substances 0.000 description 8
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 8
- 229920006393 polyether sulfone Polymers 0.000 description 8
- 239000011112 polyethylene naphthalate Substances 0.000 description 8
- 229920000139 polyethylene terephthalate Polymers 0.000 description 8
- 239000005020 polyethylene terephthalate Substances 0.000 description 8
- 238000000926 separation method Methods 0.000 description 8
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 8
- 238000001039 wet etching Methods 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052779 Neodymium Inorganic materials 0.000 description 7
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 7
- 229910052804 chromium Inorganic materials 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 7
- 238000007645 offset printing Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 229920003023 plastic Polymers 0.000 description 7
- 239000004033 plastic Substances 0.000 description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 238000004891 communication Methods 0.000 description 6
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 6
- 238000007598 dipping method Methods 0.000 description 6
- 229910052736 halogen Inorganic materials 0.000 description 6
- 229910003437 indium oxide Inorganic materials 0.000 description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 6
- 229910052743 krypton Inorganic materials 0.000 description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 6
- 239000010948 rhodium Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 229920003002 synthetic resin Polymers 0.000 description 6
- 239000000057 synthetic resin Substances 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 229910003902 SiCl 4 Inorganic materials 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 5
- 239000012790 adhesive layer Substances 0.000 description 5
- 229910052785 arsenic Inorganic materials 0.000 description 5
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 5
- 239000000969 carrier Substances 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 5
- 239000003822 epoxy resin Substances 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 5
- 229910052732 germanium Inorganic materials 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 229910052741 iridium Inorganic materials 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 229910052754 neon Inorganic materials 0.000 description 5
- 239000011368 organic material Substances 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 230000003252 repetitive effect Effects 0.000 description 5
- 229910052703 rhodium Inorganic materials 0.000 description 5
- 230000008054 signal transmission Effects 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 229910052724 xenon Inorganic materials 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910000676 Si alloy Inorganic materials 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 4
- 229910052788 barium Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 235000013305 food Nutrition 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 230000036541 health Effects 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- 238000009616 inductively coupled plasma Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 4
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 4
- 229960001730 nitrous oxide Drugs 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229920001709 polysilazane Polymers 0.000 description 4
- 239000010944 silver (metal) Substances 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 238000009279 wet oxidation reaction Methods 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 229910052726 zirconium Inorganic materials 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 3
- 229920000877 Melamine resin Polymers 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 239000004952 Polyamide Substances 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 3
- 229910052769 Ytterbium Inorganic materials 0.000 description 3
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- 150000002291 germanium compounds Chemical class 0.000 description 3
- BIXHRBFZLLFBFL-UHFFFAOYSA-N germanium nitride Chemical compound N#[Ge]N([Ge]#N)[Ge]#N BIXHRBFZLLFBFL-UHFFFAOYSA-N 0.000 description 3
- 229910052735 hafnium Inorganic materials 0.000 description 3
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 3
- 229920001519 homopolymer Polymers 0.000 description 3
- 239000002784 hot electron Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000005499 laser crystallization Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000005011 phenolic resin Substances 0.000 description 3
- 229920000052 poly(p-xylylene) Polymers 0.000 description 3
- 229920002647 polyamide Polymers 0.000 description 3
- 229920002577 polybenzoxazole Polymers 0.000 description 3
- 229920001155 polypropylene Polymers 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 150000003254 radicals Chemical class 0.000 description 3
- 238000004151 rapid thermal annealing Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 125000001424 substituent group Chemical group 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 3
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- 229910018575 Al—Ti Inorganic materials 0.000 description 2
- 101100481702 Arabidopsis thaliana TMK1 gene Proteins 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 239000004693 Polybenzimidazole Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 229910004283 SiO 4 Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910052775 Thulium Inorganic materials 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- 239000004760 aramid Substances 0.000 description 2
- 229920003235 aromatic polyamide Polymers 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 2
- LDDQLRUQCUTJBB-UHFFFAOYSA-O azanium;hydrofluoride Chemical compound [NH4+].F LDDQLRUQCUTJBB-UHFFFAOYSA-O 0.000 description 2
- QHIWVLPBUQWDMQ-UHFFFAOYSA-N butyl prop-2-enoate;methyl 2-methylprop-2-enoate;prop-2-enoic acid Chemical compound OC(=O)C=C.COC(=O)C(C)=C.CCCCOC(=O)C=C QHIWVLPBUQWDMQ-UHFFFAOYSA-N 0.000 description 2
- 230000001413 cellular effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 230000005674 electromagnetic induction Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- 229910052839 forsterite Inorganic materials 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
- 238000005247 gettering Methods 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 2
- 239000003550 marker Substances 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 150000002831 nitrogen free-radicals Chemical class 0.000 description 2
- 239000001272 nitrous oxide Substances 0.000 description 2
- 235000013842 nitrous oxide Nutrition 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 125000000962 organic group Chemical group 0.000 description 2
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 229920002480 polybenzimidazole Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229910021426 porous silicon Inorganic materials 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 150000003377 silicon compounds Chemical class 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 230000017105 transposition Effects 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 239000004954 Polyphthalamide Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910002808 Si–O–Si Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- FIKZYNUYDIQYGA-UHFFFAOYSA-N [O-2].[Zn+2].[In+3].[W+2]=O Chemical compound [O-2].[Zn+2].[In+3].[W+2]=O FIKZYNUYDIQYGA-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003905 agrochemical Substances 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 235000013361 beverage Nutrition 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910000078 germane Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- QFWPJPIVLCBXFJ-UHFFFAOYSA-N glymidine Chemical compound N1=CC(OCCOC)=CN=C1NS(=O)(=O)C1=CC=CC=C1 QFWPJPIVLCBXFJ-UHFFFAOYSA-N 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 244000144972 livestock Species 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 229920006375 polyphtalamide Polymers 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1233—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with different thicknesses of the active layer in different devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1237—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a different composition, shape, layout or thickness of the gate insulator in different devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
- H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/42—Simultaneous manufacture of periphery and memory cells
- H10B41/49—Simultaneous manufacture of periphery and memory cells comprising different types of peripheral transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/42—Simultaneous manufacture of periphery and memory cells
- H10B41/43—Simultaneous manufacture of periphery and memory cells comprising only one type of peripheral transistor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Semiconductor Memories (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
- Non-Volatile Memory (AREA)
- Dram (AREA)
Abstract
【解決手段】絶縁表面を有する同一基板上に半導体層の膜厚の異なる複数種の薄膜トランジスタを有する。高速動作を求められる薄膜トランジスタの半導体層のチャネル形成領域を、電圧に対して高い耐圧性を求められる薄膜トランジスタの半導体層のチャネル形成領域より薄膜化し、チャネル形成領域の膜厚を薄くする。また、ゲート絶縁層においても、高速動作を求められる薄膜トランジスタは、電圧に対して高い耐圧性を求められる薄膜トランジスタより膜厚が薄くてもよい。
【選択図】図1
Description
本実施の形態では、低消費電力で、かつ高信頼性を付与することを目的とした半導体装置、及び半導体装置の作製方法を、図1乃至図3、及び図15を用いて詳細に説明する。
本実施の形態は、低消費電力で、かつ高信頼性を付与することを目的とした他の半導体装置、及びその作製方法を、図4を用いて説明する。本実施の形態は、実施の形態1で作製した半導体装置において、薄膜トランジスタのゲート電極層の側面にサイドウォール構造の絶縁層を設ける例を示す。よって、同一部分又は同様な機能を有する部分の繰り返しの説明は省略する。
本実施の形態は、低消費電力で、かつ高信頼性を付与することを目的とした他の半導体装置、及びその作製方法を、図5、6を用いて説明する。本実施の形態は、実施の形態1及び2で作製した半導体装置において、薄膜トランジスタのソース領域及びドレイン領域にシリサイドを設ける例を示す。よって、同一部分又は同様な機能を有する部分の繰り返しの説明は省略する。
本実施の形態では、低消費電力で、かつ高信頼性を付与することを目的とする半導体装置としてメモリを有する半導体装置の一例に関して図面を用いて説明する。
本実施の形態では、低消費電力で、かつ高信頼性を付与することを目的とする半導体装置としてメモリを有する半導体装置の一例に関して図面を用いて説明する。本実施の形態は、実施の形態4で作製した半導体装置において、薄膜トランジスタ及びメモリ素子のソース領域及びドレイン領域にシリサイドを設ける例を示す。よって、同一部分又は同様な機能を有する部分の繰り返しの説明は省略する。
本実施の形態では、低消費電力で、かつ高信頼性を付与することを目的とする半導体装置として不揮発性半導体記憶装置の一例に関して図面を用いて説明する。
本実施の形態は、実施の形態1乃至6で示す半導体装置において、半導体層への不純物元素の添加の異なる例を示す。よって、同一部分又は同様な機能を有する部分の繰り返しの説明は省略する。本実施の形態の半導体装置の作製工程を図16を用いて説明する。
(実施の形態8)
本実施の形態は、実施の形態1乃至7で示す半導体装置において、半導体層のエッチング形状が異なる例を示す。よって、同一部分又は同様な機能を有する部分の繰り返しの説明は省略する。本実施の形態の半導体装置の作製工程を図25乃至図27を用いて説明する。
本実施の形態では、上記実施の形態で示した半導体装置の使用形態の一例について説明する。具体的には、非接触でデータの入出力が可能である半導体装置の適用例に関して、図面を用いて以下に説明する。非接触でデータの入出力が可能である半導体装置は利用の形態によって、RFIDタグ、IDタグ、ICタグ、ICチップ、RFタグ、無線タグ、電子タグまたは無線チップとも呼ばれる。
本実施の形態では、上述した本発明を用いて形成された非接触でデータの入出力が可能である半導体装置の適用例に関して図面を参照して以下に説明する。非接触でデータの入出力が可能である半導体装置は利用の形態によっては、RFIDタグ、IDタグ、ICタグ、ICチップ、RFタグ、無線タグ、電子タグまたは無線チップともよばれる。
本発明によりプロセッサ回路を有するチップ(以下、プロセッサチップ、無線チップ、無線プロセッサ、無線メモリ、無線タグともよぶ)として機能する半導体装置を形成することができる。本発明の半導体装置の用途は広範にわたり、非接触で対象物の履歴等の情報を明確にし、生産・管理等に役立てる商品であればどのようなものにも適用することができる。例えば、紙幣、硬貨、有価証券類、証書類、無記名債券類、包装用容器類、書籍類、記録媒体、身の回り品、乗物類、食品類、衣類、保健用品類、生活用品類、薬品類及び電子機器等に設けて使用することができる。これらの例に関して図18を用いて説明する。
Claims (7)
- 絶縁表面を有する基板上に設けられたメモリセルアレイ及び駆動回路部を含むメモリを有し、
前記メモリセルアレイは、第1のゲート電極層、第1のソース領域、第1のドレイン領域、及び第1のチャネル形成領域を含む第1の半導体層、並びに第1のゲート絶縁層を含む第1の薄膜トランジスタを有し、
前記駆動回路部は、第2のゲート電極層、第2のソース領域、第2のドレイン領域及び、前記第1のチャネル形成領域より膜厚の薄い第2のチャネル形成領域を含む第2の半導体層、並びに第2のゲート絶縁層を含む第2の薄膜トランジスタを有し、
前記第2のチャネル形成領域は、前記第2の半導体層において局所的に薄膜化された領域であることを特徴とする半導体装置。 - 絶縁表面を有する基板上に設けられたメモリセルアレイ及び駆動回路部を含むメモリを有し、
前記メモリセルアレイは、第1のゲート電極層、第1のソース領域、第1のドレイン領域、及び第1のチャネル形成領域を含む第1の半導体層、並びに第1のゲート絶縁層を含む第1の薄膜トランジスタを有し、
前記駆動回路部は、第2のゲート電極層、第2のソース領域、第2のドレイン領域及び、前記第1のチャネル形成領域より膜厚の薄い第2のチャネル形成領域を含む第2の半導体層、並びに前記第1のゲート絶縁層より膜厚の薄い第2のゲート絶縁層を含む第2の薄膜トランジスタを有し、
前記第2のチャネル形成領域は、前記第2の半導体層において局所的に薄膜化された領域であることを特徴とする半導体装置。 - 請求項1又は請求項2において、前記第1のゲート電極層及び前記第2のゲート電極層の側面にサイドウォール構造の絶縁層が設けられていることを特徴とする半導体装置。
- 請求項1乃至3のいずれか一項において、前記第1のソース領域、前記第1のドレイン領域、前記第2のソース領域、及び前記第2のドレイン領域の表面にシリサイドが設けられていることを特徴とする半導体装置。
- 請求項1乃至4のいずれか一項において、前記第1の半導体層及び前記第2の半導体層は側面にサイドウォール構造の絶縁層を有することを特徴とする半導体装置。
- 請求項1乃至5のいずれか一項において、前記メモリは昇圧回路を有し、
前記昇圧回路は、第3のゲート電極層、第3のソース領域、第3のドレイン領域、及び前記第2の半導体層のチャネル形成領域より膜厚の厚い第3のチャネル形成領域を含む半導体層、並びに第3のゲート絶縁層を含む第3の薄膜トランジスタを有することを特徴とする半導体装置。 - 請求項1乃至5のいずれか一項において、前記絶縁表面を有する基板上に電源回路を有し、
前記電源回路は、第3のゲート電極層、第3のソース領域、第3のドレイン領域、及び前記第2の半導体層のチャネル形成領域より膜厚の厚い第3のチャネル形成領域を含む半導体層、並びに第3のゲート絶縁層を含む第3の薄膜トランジスタを有することを特徴とする半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008036771A JP5216360B2 (ja) | 2007-02-22 | 2008-02-19 | 半導体装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007041685 | 2007-02-22 | ||
JP2007041685 | 2007-02-22 | ||
JP2008036771A JP5216360B2 (ja) | 2007-02-22 | 2008-02-19 | 半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008235876A true JP2008235876A (ja) | 2008-10-02 |
JP2008235876A5 JP2008235876A5 (ja) | 2011-03-31 |
JP5216360B2 JP5216360B2 (ja) | 2013-06-19 |
Family
ID=39714898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008036771A Expired - Fee Related JP5216360B2 (ja) | 2007-02-22 | 2008-02-19 | 半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8581260B2 (ja) |
JP (1) | JP5216360B2 (ja) |
CN (1) | CN101252134B (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010114260A (ja) * | 2008-11-06 | 2010-05-20 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
JP2011071491A (ja) * | 2009-08-25 | 2011-04-07 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP2013021317A (ja) * | 2011-06-17 | 2013-01-31 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP2014030009A (ja) * | 2012-07-06 | 2014-02-13 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
JP2014158029A (ja) * | 2008-10-24 | 2014-08-28 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
WO2015159669A1 (ja) * | 2014-04-18 | 2015-10-22 | ソニー株式会社 | 高周波スイッチ用半導体装置、高周波スイッチおよび高周波モジュール |
JP2019004180A (ja) * | 2011-01-12 | 2019-01-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2019531589A (ja) * | 2016-09-26 | 2019-10-31 | 京東方科技集團股▲ふん▼有限公司Boe Technology Group Co.,Ltd. | アレイ基板及びその製作方法 |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090193676A1 (en) * | 2008-01-31 | 2009-08-06 | Guo Shengguang | Shoe Drying Apparatus |
JP5221172B2 (ja) * | 2008-02-29 | 2013-06-26 | 株式会社東芝 | Nand混載型半導体時限スイッチ |
US7663192B2 (en) * | 2008-06-30 | 2010-02-16 | Intel Corporation | CMOS device and method of manufacturing same |
TWI616707B (zh) | 2008-11-28 | 2018-03-01 | 半導體能源研究所股份有限公司 | 液晶顯示裝置 |
JP5491833B2 (ja) | 2008-12-05 | 2014-05-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TW201023341A (en) * | 2008-12-12 | 2010-06-16 | Ind Tech Res Inst | Integrated circuit structure |
US8441007B2 (en) * | 2008-12-25 | 2013-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US8198666B2 (en) * | 2009-02-20 | 2012-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a nonvolatile memory element having first, second and third insulating films |
IN2012DN05057A (ja) | 2009-12-28 | 2015-10-09 | Semiconductor Energy Lab | |
WO2011089846A1 (en) * | 2010-01-22 | 2011-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9202822B2 (en) | 2010-12-17 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR20130055521A (ko) * | 2011-11-18 | 2013-05-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 소자, 및 반도체 소자의 제작 방법, 및 반도체 소자를 포함하는 반도체 장치 |
US8956929B2 (en) | 2011-11-30 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9343142B2 (en) * | 2012-01-05 | 2016-05-17 | Globalfoundries Inc. | Nanowire floating gate transistor |
US9659889B2 (en) * | 2013-12-20 | 2017-05-23 | Intel Corporation | Solder-on-die using water-soluble resist system and method |
CN104465516B (zh) * | 2014-12-05 | 2017-08-11 | 京东方科技集团股份有限公司 | 阵列基板的制造方法、阵列基板和显示装置 |
US9960283B2 (en) | 2014-12-09 | 2018-05-01 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Thin-film transistor |
CN104465785B (zh) * | 2014-12-09 | 2019-02-12 | 深圳市华星光电技术有限公司 | 薄膜晶体管 |
US9786755B2 (en) | 2015-03-18 | 2017-10-10 | Stmicroelectronics (Crolles 2) Sas | Process for producing, from an SOI and in particular an FDSOI type substrate, transistors having gate oxides of different thicknesses, and corresponding integrated circuit |
FR3034254A1 (fr) * | 2015-03-27 | 2016-09-30 | St Microelectronics Sa | Procede de realisation d'un substrat de type soi, en particulier fdsoi, adapte a des transistors ayant des dielectriques de grilles d'epaisseurs differentes, substrat et circuit integre correspondants |
US20160293596A1 (en) * | 2015-03-30 | 2016-10-06 | Texas Instruments Incorporated | Normally off iii-nitride transistor |
JP2017224676A (ja) * | 2016-06-14 | 2017-12-21 | 株式会社ジャパンディスプレイ | 半導体装置及び表示装置 |
US10263013B2 (en) | 2017-02-24 | 2019-04-16 | Globalfoundries Inc. | Method of forming an integrated circuit (IC) with hallow trench isolation (STI) regions and the resulting IC structure |
CN107768306A (zh) * | 2017-10-12 | 2018-03-06 | 惠科股份有限公司 | 显示面板及其制造方法 |
KR102525989B1 (ko) * | 2017-11-27 | 2023-04-27 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
CN109037037B (zh) * | 2018-09-27 | 2023-09-01 | 武汉华星光电技术有限公司 | 低温多晶硅层、薄膜晶体管及其制作方法 |
CN109637932B (zh) * | 2018-11-30 | 2020-11-10 | 武汉华星光电技术有限公司 | 薄膜晶体管及其制备方法 |
JP7303006B2 (ja) * | 2019-03-29 | 2023-07-04 | ラピスセミコンダクタ株式会社 | 半導体装置及び半導体装置の製造方法 |
CN109994426B (zh) * | 2019-04-08 | 2021-02-09 | 合肥鑫晟光电科技有限公司 | 阵列基板及其制备方法 |
CN110148600A (zh) * | 2019-05-05 | 2019-08-20 | 深圳市华星光电半导体显示技术有限公司 | 阵列基板及制备方法 |
CN110620120B (zh) * | 2019-09-25 | 2022-07-29 | 福州京东方光电科技有限公司 | 阵列基板及其制作方法、显示装置 |
US11798809B2 (en) * | 2021-06-17 | 2023-10-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and method of manufacturing |
CN115274861A (zh) * | 2022-07-27 | 2022-11-01 | 武汉华星光电技术有限公司 | 半导体器件及电子器件 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0575114A (ja) * | 1991-09-17 | 1993-03-26 | Nippon Telegr & Teleph Corp <Ntt> | Soi型半導体装置およびその製造方法 |
JPH11261037A (ja) * | 1998-03-10 | 1999-09-24 | Nippon Steel Corp | 半導体装置及びその製造方法並びに記憶媒体 |
JP2000332245A (ja) * | 1999-05-25 | 2000-11-30 | Sony Corp | 半導体装置の製造方法及びp形半導体素子の製造方法 |
JP2001267576A (ja) * | 2000-03-15 | 2001-09-28 | Hitachi Ltd | 半導体集積回路装置 |
JP2001351995A (ja) * | 2000-06-08 | 2001-12-21 | Mitsubishi Electric Corp | 不揮発性半導体記憶装置及び半導体集積回路 |
JP2002261097A (ja) * | 2000-12-28 | 2002-09-13 | Tadahiro Omi | 誘電体膜およびその形成方法、半導体装置、不揮発性半導体メモリ装置、および半導体装置の製造方法 |
JP2005167068A (ja) * | 2003-12-04 | 2005-06-23 | Seiko Epson Corp | 半導体装置およびその製造方法 |
JP2006236556A (ja) * | 2005-01-28 | 2006-09-07 | Semiconductor Energy Lab Co Ltd | 記憶装置、半導体装置、およびそれらの駆動方法 |
Family Cites Families (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6294796B1 (en) * | 1982-04-13 | 2001-09-25 | Seiko Epson Corporation | Thin film transistors and active matrices including same |
JPS59150469A (ja) | 1983-02-03 | 1984-08-28 | Toshiba Corp | 半導体装置の製造方法 |
JPS6148975A (ja) | 1984-08-16 | 1986-03-10 | Seiko Epson Corp | 薄膜トランジスタ |
JP2717237B2 (ja) | 1991-05-16 | 1998-02-18 | 株式会社 半導体エネルギー研究所 | 絶縁ゲイト型半導体装置およびその作製方法 |
EP0532314B1 (en) | 1991-09-10 | 1999-06-02 | Sharp Kabushiki Kaisha | A semiconductor device and a process for fabricating same |
KR0130040B1 (ko) * | 1993-11-09 | 1998-10-01 | 김광호 | 반도체 집적회로의 전압 승압회로 |
JPH07176753A (ja) | 1993-12-17 | 1995-07-14 | Semiconductor Energy Lab Co Ltd | 薄膜半導体装置およびその作製方法 |
US6433361B1 (en) | 1994-04-29 | 2002-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor integrated circuit and method for forming the same |
US6337232B1 (en) * | 1995-06-07 | 2002-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabrication of a crystalline silicon thin film semiconductor with a thin channel region |
US6906383B1 (en) * | 1994-07-14 | 2005-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacture thereof |
JP3497627B2 (ja) | 1994-12-08 | 2004-02-16 | 株式会社東芝 | 半導体装置およびその製造方法 |
JP3315293B2 (ja) * | 1995-01-05 | 2002-08-19 | 株式会社東芝 | 半導体記憶装置 |
JP3504025B2 (ja) | 1995-06-06 | 2004-03-08 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
KR0164079B1 (ko) | 1995-06-30 | 1998-12-01 | 김주용 | 반도체 소자 및 그 제조방법 |
JP3108331B2 (ja) | 1995-07-12 | 2000-11-13 | 三洋電機株式会社 | 薄膜トランジスタの製造方法 |
TW334581B (en) | 1996-06-04 | 1998-06-21 | Handotai Energy Kenkyusho Kk | Semiconductor integrated circuit and fabrication method thereof |
US6118148A (en) * | 1996-11-04 | 2000-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
TW423162B (en) * | 1997-02-27 | 2001-02-21 | Toshiba Corp | Power voltage supplying circuit and semiconductor memory including the same |
JP3943245B2 (ja) * | 1997-09-20 | 2007-07-11 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JPH11258636A (ja) | 1998-03-16 | 1999-09-24 | Toshiba Corp | 薄膜トランジスタおよびその製造方法 |
JP3265569B2 (ja) * | 1998-04-15 | 2002-03-11 | 日本電気株式会社 | 半導体装置及びその製造方法 |
JP3908415B2 (ja) * | 1998-07-30 | 2007-04-25 | 株式会社東芝 | ポンプ回路を有する半導体装置 |
EP1020920B1 (en) | 1999-01-11 | 2010-06-02 | Sel Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a driver TFT and a pixel TFT on a common substrate |
US6593592B1 (en) | 1999-01-29 | 2003-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having thin film transistors |
US6576924B1 (en) | 1999-02-12 | 2003-06-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having at least a pixel unit and a driver circuit unit over a same substrate |
EP1058310A3 (en) * | 1999-06-02 | 2009-11-18 | Sel Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US20020113268A1 (en) | 2000-02-01 | 2002-08-22 | Jun Koyama | Nonvolatile memory, semiconductor device and method of manufacturing the same |
JP4700160B2 (ja) | 2000-03-13 | 2011-06-15 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP4713752B2 (ja) | 2000-12-28 | 2011-06-29 | 財団法人国際科学振興財団 | 半導体装置およびその製造方法 |
JP2003124345A (ja) * | 2001-10-11 | 2003-04-25 | Oki Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2003188183A (ja) * | 2001-12-20 | 2003-07-04 | Fujitsu Display Technologies Corp | 薄膜トランジスタ装置、その製造方法及び液晶表示装置 |
JP4104888B2 (ja) | 2002-03-28 | 2008-06-18 | シャープ株式会社 | 薄膜トランジスタ装置の製造方法 |
JP3918741B2 (ja) * | 2002-03-28 | 2007-05-23 | セイコーエプソン株式会社 | 電気光学装置の製造方法、及び半導体装置の製造方法 |
JP3634320B2 (ja) * | 2002-03-29 | 2005-03-30 | 株式会社東芝 | 半導体装置及び半導体装置の製造方法 |
JP4406540B2 (ja) * | 2003-03-28 | 2010-01-27 | シャープ株式会社 | 薄膜トランジスタ基板およびその製造方法 |
US7385223B2 (en) * | 2003-04-24 | 2008-06-10 | Samsung Sdi Co., Ltd. | Flat panel display with thin film transistor |
CN100555588C (zh) * | 2003-06-27 | 2009-10-28 | 日本电气株式会社 | 薄膜晶体管、薄膜晶体管基板、电子设备及多晶半导体薄膜的制造方法 |
JP3779286B2 (ja) | 2003-06-27 | 2006-05-24 | 沖電気工業株式会社 | Soi構造を用いたしきい値電圧可変相補型mosfet |
KR20050052029A (ko) | 2003-11-28 | 2005-06-02 | 삼성에스디아이 주식회사 | 박막트랜지스터 |
JP2005227529A (ja) * | 2004-02-13 | 2005-08-25 | Nec Corp | アクティブマトリクス型半導体装置 |
US7652321B2 (en) | 2004-03-08 | 2010-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
JP4896416B2 (ja) | 2004-03-08 | 2012-03-14 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US7256642B2 (en) * | 2004-03-19 | 2007-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Booster circuit, semiconductor device, and electronic apparatus |
US7606066B2 (en) * | 2005-09-07 | 2009-10-20 | Innovative Silicon Isi Sa | Memory cell and memory cell array having an electrically floating body transistor, and methods of operating same |
US7750345B2 (en) * | 2007-05-18 | 2010-07-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
-
2008
- 2008-02-07 US US12/027,815 patent/US8581260B2/en active Active
- 2008-02-19 JP JP2008036771A patent/JP5216360B2/ja not_active Expired - Fee Related
- 2008-02-22 CN CN200810080855.4A patent/CN101252134B/zh not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0575114A (ja) * | 1991-09-17 | 1993-03-26 | Nippon Telegr & Teleph Corp <Ntt> | Soi型半導体装置およびその製造方法 |
JPH11261037A (ja) * | 1998-03-10 | 1999-09-24 | Nippon Steel Corp | 半導体装置及びその製造方法並びに記憶媒体 |
JP2000332245A (ja) * | 1999-05-25 | 2000-11-30 | Sony Corp | 半導体装置の製造方法及びp形半導体素子の製造方法 |
JP2001267576A (ja) * | 2000-03-15 | 2001-09-28 | Hitachi Ltd | 半導体集積回路装置 |
JP2001351995A (ja) * | 2000-06-08 | 2001-12-21 | Mitsubishi Electric Corp | 不揮発性半導体記憶装置及び半導体集積回路 |
JP2002261097A (ja) * | 2000-12-28 | 2002-09-13 | Tadahiro Omi | 誘電体膜およびその形成方法、半導体装置、不揮発性半導体メモリ装置、および半導体装置の製造方法 |
JP2005167068A (ja) * | 2003-12-04 | 2005-06-23 | Seiko Epson Corp | 半導体装置およびその製造方法 |
JP2006236556A (ja) * | 2005-01-28 | 2006-09-07 | Semiconductor Energy Lab Co Ltd | 記憶装置、半導体装置、およびそれらの駆動方法 |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9601603B2 (en) | 2008-10-24 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11563124B2 (en) | 2008-10-24 | 2023-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including flip-flop circuit which includes transistors |
US10170632B2 (en) | 2008-10-24 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer |
US10763372B2 (en) | 2008-10-24 | 2020-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with dual and single gate structure transistors |
US9318512B2 (en) | 2008-10-24 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP2014158029A (ja) * | 2008-10-24 | 2014-08-28 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
US10153380B2 (en) | 2008-10-24 | 2018-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9029851B2 (en) | 2008-10-24 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor layer |
US8878282B2 (en) | 2008-11-06 | 2014-11-04 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor storage device and method of manufacture thereof |
JP2010114260A (ja) * | 2008-11-06 | 2010-05-20 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
US8569828B2 (en) | 2008-11-06 | 2013-10-29 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor storage device and method of manufacture thereof |
US10797065B2 (en) | 2008-11-06 | 2020-10-06 | Toshiba Memory Corporation | Nonvolatile semiconductor storage device and method of manufacture thereof |
US9691779B2 (en) | 2008-11-06 | 2017-06-27 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor storage device and method of manufacture thereof |
JP2011071491A (ja) * | 2009-08-25 | 2011-04-07 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP2019004180A (ja) * | 2011-01-12 | 2019-01-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2013021317A (ja) * | 2011-06-17 | 2013-01-31 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP2014030009A (ja) * | 2012-07-06 | 2014-02-13 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
US10511300B2 (en) | 2014-04-18 | 2019-12-17 | Sony Corporation | Semiconductor device for radio frequency switch, radio frequency switch, and radio frequency module |
US10673430B2 (en) | 2014-04-18 | 2020-06-02 | Sony Corporation | Semiconductor device for radio frequency switch, radio frequency switch, and radio frequency module |
US10374596B2 (en) | 2014-04-18 | 2019-08-06 | Sony Corporation | Semiconductor device for radio frequency switch, radio frequency switch, and radio frequency module |
WO2015159669A1 (ja) * | 2014-04-18 | 2015-10-22 | ソニー株式会社 | 高周波スイッチ用半導体装置、高周波スイッチおよび高周波モジュール |
JP2019531589A (ja) * | 2016-09-26 | 2019-10-31 | 京東方科技集團股▲ふん▼有限公司Boe Technology Group Co.,Ltd. | アレイ基板及びその製作方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101252134B (zh) | 2014-05-28 |
US8581260B2 (en) | 2013-11-12 |
US20080203477A1 (en) | 2008-08-28 |
CN101252134A (zh) | 2008-08-27 |
JP5216360B2 (ja) | 2013-06-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5216360B2 (ja) | 半導体装置 | |
JP5142550B2 (ja) | 半導体装置の作製方法 | |
JP5947935B2 (ja) | 半導体装置の作製方法 | |
JP5285235B2 (ja) | 半導体装置 | |
US20070252233A1 (en) | Semiconductor device and method for manufacturing the semiconductor device | |
US7875931B2 (en) | Semiconductor device with isolation using impurity | |
KR101349879B1 (ko) | 불휘발성 반도체 기억장치 | |
JP5337373B2 (ja) | 半導体装置の作製方法 | |
US7696562B2 (en) | Semiconductor device | |
JP5235333B2 (ja) | 半導体装置の作製方法 | |
KR20090029738A (ko) | 반도체 장치 및 그 제작방법 | |
JP5110888B2 (ja) | 半導体装置の作製方法 | |
JP5271504B2 (ja) | 半導体装置の作製方法 | |
US8895388B2 (en) | Method of manufacturing a semiconductor device and a non-volatile semiconductor storage device including the formation of an insulating layer using a plasma treatment | |
JP5188095B2 (ja) | 半導体装置 | |
JP5271505B2 (ja) | 半導体装置 | |
JP5094179B2 (ja) | 不揮発性半導体記憶装置 | |
JP5121217B2 (ja) | 半導体装置の作製方法 | |
JP2008047884A (ja) | 半導体装置の作製方法及び不揮発性半導体記憶装置の作製方法 | |
JP2007294935A (ja) | 不揮発性半導体記憶装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110216 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110216 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130129 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130131 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130208 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130226 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130304 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5216360 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160308 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160308 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |