CN100555588C - 薄膜晶体管、薄膜晶体管基板、电子设备及多晶半导体薄膜的制造方法 - Google Patents
薄膜晶体管、薄膜晶体管基板、电子设备及多晶半导体薄膜的制造方法 Download PDFInfo
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- CN100555588C CN100555588C CNB2004800182019A CN200480018201A CN100555588C CN 100555588 C CN100555588 C CN 100555588C CN B2004800182019 A CNB2004800182019 A CN B2004800182019A CN 200480018201 A CN200480018201 A CN 200480018201A CN 100555588 C CN100555588 C CN 100555588C
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Abstract
Description
Claims (26)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2003184595 | 2003-06-27 | ||
JP184595/2003 | 2003-06-27 |
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CN2009101404355A Division CN101562197B (zh) | 2003-06-27 | 2004-03-15 | 薄膜晶体管、薄膜晶体管基板及电子设备 |
CN2008101791438A Division CN101431016B (zh) | 2003-06-27 | 2004-03-15 | 多晶半导体薄膜的制造方法 |
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CN1813344A CN1813344A (zh) | 2006-08-02 |
CN100555588C true CN100555588C (zh) | 2009-10-28 |
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CN2009101404355A Expired - Lifetime CN101562197B (zh) | 2003-06-27 | 2004-03-15 | 薄膜晶体管、薄膜晶体管基板及电子设备 |
CNB2004800182019A Expired - Lifetime CN100555588C (zh) | 2003-06-27 | 2004-03-15 | 薄膜晶体管、薄膜晶体管基板、电子设备及多晶半导体薄膜的制造方法 |
CN2008101791438A Expired - Lifetime CN101431016B (zh) | 2003-06-27 | 2004-03-15 | 多晶半导体薄膜的制造方法 |
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US (2) | US7745822B2 (zh) |
JP (1) | JP4501859B2 (zh) |
CN (3) | CN101562197B (zh) |
WO (1) | WO2005001921A1 (zh) |
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JP2007287945A (ja) * | 2006-04-18 | 2007-11-01 | Mitsubishi Electric Corp | 薄膜トランジスタ |
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CN103681776B (zh) * | 2013-12-24 | 2017-11-07 | 京东方科技集团股份有限公司 | 低温多晶硅薄膜及其制备方法、薄膜晶体管和显示装置 |
CN103745916B (zh) * | 2013-12-30 | 2017-07-28 | 深圳市华星光电技术有限公司 | 定义多晶硅生长方向的方法 |
CN105870135A (zh) * | 2016-05-19 | 2016-08-17 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示面板、显示装置 |
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CN109742154B (zh) * | 2019-01-08 | 2023-10-31 | 京东方科技集团股份有限公司 | 薄膜晶体管及其制作方法、显示基板及其制作方法和应用 |
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2004
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- 2004-03-15 CN CN2009101404355A patent/CN101562197B/zh not_active Expired - Lifetime
- 2004-03-15 CN CNB2004800182019A patent/CN100555588C/zh not_active Expired - Lifetime
- 2004-03-15 WO PCT/JP2004/003385 patent/WO2005001921A1/ja active Application Filing
- 2004-03-15 CN CN2008101791438A patent/CN101431016B/zh not_active Expired - Lifetime
- 2004-03-15 JP JP2005510976A patent/JP4501859B2/ja not_active Expired - Fee Related
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Also Published As
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CN101431016B (zh) | 2013-02-13 |
US7745822B2 (en) | 2010-06-29 |
CN1813344A (zh) | 2006-08-02 |
CN101562197B (zh) | 2011-08-10 |
US8017507B2 (en) | 2011-09-13 |
US20060246632A1 (en) | 2006-11-02 |
CN101431016A (zh) | 2009-05-13 |
CN101562197A (zh) | 2009-10-21 |
JPWO2005001921A1 (ja) | 2006-08-10 |
US20100221899A1 (en) | 2010-09-02 |
JP4501859B2 (ja) | 2010-07-14 |
WO2005001921A1 (ja) | 2005-01-06 |
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