CN101562197A - 薄膜晶体管、薄膜晶体管基板及电子设备 - Google Patents
薄膜晶体管、薄膜晶体管基板及电子设备 Download PDFInfo
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- CN101562197A CN101562197A CNA2009101404355A CN200910140435A CN101562197A CN 101562197 A CN101562197 A CN 101562197A CN A2009101404355 A CNA2009101404355 A CN A2009101404355A CN 200910140435 A CN200910140435 A CN 200910140435A CN 101562197 A CN101562197 A CN 101562197A
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- Crystallography & Structural Chemistry (AREA)
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Abstract
Description
Claims (24)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003184595 | 2003-06-27 | ||
JP2003184595 | 2003-06-27 | ||
JP2003-184595 | 2003-06-27 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2004800182019A Division CN100555588C (zh) | 2003-06-27 | 2004-03-15 | 薄膜晶体管、薄膜晶体管基板、电子设备及多晶半导体薄膜的制造方法 |
Publications (2)
Publication Number | Publication Date |
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CN101562197A true CN101562197A (zh) | 2009-10-21 |
CN101562197B CN101562197B (zh) | 2011-08-10 |
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ID=33549615
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
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CN2008101791438A Expired - Lifetime CN101431016B (zh) | 2003-06-27 | 2004-03-15 | 多晶半导体薄膜的制造方法 |
CN2009101404355A Expired - Lifetime CN101562197B (zh) | 2003-06-27 | 2004-03-15 | 薄膜晶体管、薄膜晶体管基板及电子设备 |
CNB2004800182019A Expired - Lifetime CN100555588C (zh) | 2003-06-27 | 2004-03-15 | 薄膜晶体管、薄膜晶体管基板、电子设备及多晶半导体薄膜的制造方法 |
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CN2008101791438A Expired - Lifetime CN101431016B (zh) | 2003-06-27 | 2004-03-15 | 多晶半导体薄膜的制造方法 |
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CNB2004800182019A Expired - Lifetime CN100555588C (zh) | 2003-06-27 | 2004-03-15 | 薄膜晶体管、薄膜晶体管基板、电子设备及多晶半导体薄膜的制造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7745822B2 (zh) |
JP (1) | JP4501859B2 (zh) |
CN (3) | CN101431016B (zh) |
WO (1) | WO2005001921A1 (zh) |
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2004
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- 2004-03-15 US US10/558,073 patent/US7745822B2/en active Active
- 2004-03-15 CN CNB2004800182019A patent/CN100555588C/zh not_active Expired - Lifetime
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103325688A (zh) * | 2013-06-17 | 2013-09-25 | 深圳市华星光电技术有限公司 | 薄膜晶体管的沟道形成方法及补偿电路 |
WO2014201716A1 (zh) * | 2013-06-17 | 2014-12-24 | 深圳市华星光电技术有限公司 | 薄膜晶体管的沟道形成方法及补偿电路 |
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Publication number | Publication date |
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CN101431016B (zh) | 2013-02-13 |
JPWO2005001921A1 (ja) | 2006-08-10 |
JP4501859B2 (ja) | 2010-07-14 |
US20100221899A1 (en) | 2010-09-02 |
CN1813344A (zh) | 2006-08-02 |
US7745822B2 (en) | 2010-06-29 |
US20060246632A1 (en) | 2006-11-02 |
CN101431016A (zh) | 2009-05-13 |
CN100555588C (zh) | 2009-10-28 |
US8017507B2 (en) | 2011-09-13 |
CN101562197B (zh) | 2011-08-10 |
WO2005001921A1 (ja) | 2005-01-06 |
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