JP2008235403A - 半導体装置およびその製造方法 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0605—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/8252—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using III-V technology
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
Abstract
【解決手段】半導体装置は、半導体基板上に、オーミック電極を備えた能動素子と、下側電極と上側電極との間に誘電体層が介在するMIMキャパシタとが設けられた構造を有し、下側電極とオーミック電極とが同じ構造を有する。例えば、GaAs基板10上に、能動素子としてのFETと、MIMキャパシタとが設けられたMMIC100では、FETのオーミック電極たるソース・ドレイン電極16a・16bと、MIMキャパシタの下側電極16cとを同時に形成することにより、これらを同じ金属からなる構造とする。
【選択図】図1
Description
Claims (12)
- 半導体基板上に、オーミック電極を備えた能動素子と、下側電極と上側電極との間に誘電体層が介在するMIMキャパシタとが設けられた半導体装置であって、
前記下側電極は前記オーミック電極と同じ構造を有することを特徴とする半導体装置。 - 前記能動素子は電界効果トランジスタであり、前記オーミック電極はソース・ドレイン電極であることを特徴とする請求項1に記載の半導体装置。
- 前記半導体基板は半絶縁性半導体基板であり、
前記能動素子は、前記基板上に設けられたn型半導体層およびp型半導体層と、前記n型半導体層上に設けられた第1のオーミック電極と、前記p型半導体層上に設けられた第2のオーミック電極とを具備し、
前記下側電極は前記第1のオーミック電極と同じ構造を有することを特徴とする請求項1に記載の半導体装置。 - 前記半導体基板は半絶縁性半導体基板であり、
前記能動素子は、前記基板上に設けられたn型半導体層およびp型半導体層と、前記n型半導体層上に設けられた第1のオーミック電極と、前記p型半導体層上に設けられた第2のオーミック電極とを具備し、
前記下側電極は前記第2のオーミック電極と同じ構造を有することを特徴とする請求項1に記載の半導体装置。 - 前記半導体基板は半絶縁性半導体基板であり、
前記能動素子は、前記基板上に設けられたn型半導体層およびp型半導体層と、前記n型半導体層上に設けられた第1のオーミック電極と、前記p型半導体層上に設けられた第2のオーミック電極とを具備し、
前記下側電極は、前記第1のオーミック電極と前記第2のオーミック電極とが積層されてなる構造と同じ構造を有することを特徴とする請求項1に記載の半導体装置。 - 前記基板と前記下側電極との間に絶縁膜が設けられていることを特徴とする請求項1から請求項5のいずれか1項に記載の半導体装置。
- オーミック電極を備えた能動素子と、下側電極と上側電極との間に誘電体層が介在するMIMキャパシタとを半導体基板上に形成する工程を有する半導体装置の製造方法であって、
前記下側電極を前記オーミック電極と同時に形成することを特徴とする半導体装置の製造方法。 - 前記下側電極と前記オーミック電極を、複数の金属層を積み重ね、これを400℃以下で熱処理して合金化することにより形成することを特徴とする請求項7に記載の半導体装置の製造方法。
- 前記能動素子は電界効果トランジスタであり、前記オーミック電極はソース・ドレイン電極であることを特徴とする請求項7または請求項8に記載の半導体装置の製造方法。
- 前記半導体基板は半絶縁性半導体基板であり、
前記能動素子は、前記基板上に設けられたn型半導体層およびp型半導体層と、前記n型半導体層上に設けられた第1のオーミック電極と、前記p型半導体層上に設けられた第2のオーミック電極とを具備し、
前記下側電極を前記第1のオーミック電極と同時に形成することを特徴とする請求項7または請求項8に記載の半導体装置の製造方法。 - 前記半導体基板は半絶縁性半導体基板であり、
前記能動素子は、前記基板上に設けられたn型半導体層およびp型半導体層と、前記n型半導体層上に設けられた第1のオーミック電極と、前記p型半導体層上に設けられた第2のオーミック電極とを具備し、
前記下側電極を前記第2のオーミック電極と同時に形成することを特徴とする請求項7または請求項8に記載の半導体装置の製造方法。 - 前記半導体基板は半絶縁性半導体基板であり、
前記能動素子は、前記基板上に設けられたn型半導体層およびp型半導体層と、前記n型半導体層上に設けられた第1のオーミック電極と、前記p型半導体層上に設けられた第2のオーミック電極とを具備し、
前記MIMキャパシタの下側電極は上層部と下層部とからなる2層構造を有し、
前記下部電極の下層部を前記第1のオーミック電極と同時に形成し、前記下側電極の上層部を前記第2のオーミック電極と同時に形成することを特徴とする請求項7または請求項8に記載の半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007070053A JP2008235403A (ja) | 2007-03-19 | 2007-03-19 | 半導体装置およびその製造方法 |
TW097107488A TWI413234B (zh) | 2007-03-19 | 2008-03-04 | Semiconductor device and manufacturing method thereof |
US12/045,482 US20080230823A1 (en) | 2007-03-19 | 2008-03-10 | Semiconductor device and manufacturing method therefor |
EP08250871.4A EP1976009B1 (en) | 2007-03-19 | 2008-03-14 | Semiconductor device and manufacturing method therefor |
US13/115,251 US8587094B2 (en) | 2007-03-19 | 2011-05-25 | Semiconductor device using a compound semiconductor subtrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007070053A JP2008235403A (ja) | 2007-03-19 | 2007-03-19 | 半導体装置およびその製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010038547A Division JP5175880B2 (ja) | 2010-02-24 | 2010-02-24 | 半導体装置 |
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JP2008235403A true JP2008235403A (ja) | 2008-10-02 |
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ID=39643817
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Application Number | Title | Priority Date | Filing Date |
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JP2007070053A Pending JP2008235403A (ja) | 2007-03-19 | 2007-03-19 | 半導体装置およびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US20080230823A1 (ja) |
EP (1) | EP1976009B1 (ja) |
JP (1) | JP2008235403A (ja) |
TW (1) | TWI413234B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20230145240A (ko) * | 2010-02-18 | 2023-10-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
JP2013026540A (ja) * | 2011-07-25 | 2013-02-04 | Renesas Electronics Corp | 半導体集積回路装置 |
CN115579299B (zh) * | 2022-11-21 | 2023-04-14 | 常州承芯半导体有限公司 | 半导体结构及其形成方法 |
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JP3408019B2 (ja) | 1995-06-12 | 2003-05-19 | シャープ株式会社 | 半導体装置及び半導体装置の製造方法 |
JPH09102585A (ja) | 1995-10-05 | 1997-04-15 | Sony Corp | 半導体装置およびその製造方法 |
KR0167274B1 (ko) * | 1995-12-07 | 1998-12-15 | 문정환 | 씨모스 아날로그 반도체장치와 그 제조방법 |
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JP2001024155A (ja) | 1999-07-05 | 2001-01-26 | Murata Mfg Co Ltd | Mimキャパシタ、その製造方法、半導体装置、エアブリッジ金属配線、およびその製造方法 |
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-
2007
- 2007-03-19 JP JP2007070053A patent/JP2008235403A/ja active Pending
-
2008
- 2008-03-04 TW TW097107488A patent/TWI413234B/zh not_active IP Right Cessation
- 2008-03-10 US US12/045,482 patent/US20080230823A1/en not_active Abandoned
- 2008-03-14 EP EP08250871.4A patent/EP1976009B1/en not_active Expired - Fee Related
-
2011
- 2011-05-25 US US13/115,251 patent/US8587094B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20080230823A1 (en) | 2008-09-25 |
US20110221036A1 (en) | 2011-09-15 |
US8587094B2 (en) | 2013-11-19 |
TW200849554A (en) | 2008-12-16 |
TWI413234B (zh) | 2013-10-21 |
EP1976009A3 (en) | 2008-12-17 |
EP1976009A2 (en) | 2008-10-01 |
EP1976009B1 (en) | 2013-07-17 |
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