JP2006019717A5 - - Google Patents
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- JP2006019717A5 JP2006019717A5 JP2005162434A JP2005162434A JP2006019717A5 JP 2006019717 A5 JP2006019717 A5 JP 2006019717A5 JP 2005162434 A JP2005162434 A JP 2005162434A JP 2005162434 A JP2005162434 A JP 2005162434A JP 2006019717 A5 JP2006019717 A5 JP 2006019717A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- thin film
- integrated circuit
- film integrated
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005162434A JP4579057B2 (ja) | 2004-06-02 | 2005-06-02 | Ｉｃチップの作製方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004165104 | 2004-06-02 | ||
| JP2005162434A JP4579057B2 (ja) | 2004-06-02 | 2005-06-02 | Ｉｃチップの作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006019717A JP2006019717A (ja) | 2006-01-19 |
| JP2006019717A5 true JP2006019717A5 (enExample) | 2008-05-15 |
| JP4579057B2 JP4579057B2 (ja) | 2010-11-10 |
Family
ID=35463135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005162434A Expired - Fee Related JP4579057B2 (ja) | 2004-06-02 | 2005-06-02 | Ｉｃチップの作製方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US8123896B2 (enExample) |
| EP (1) | EP1774595A4 (enExample) |
| JP (1) | JP4579057B2 (enExample) |
| KR (5) | KR100970194B1 (enExample) |
| CN (3) | CN1993829B (enExample) |
| WO (1) | WO2005119781A1 (enExample) |
Families Citing this family (86)
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2005
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- 2005-05-31 KR KR1020097000399A patent/KR100970194B1/ko not_active Expired - Lifetime
- 2005-05-31 CN CN2005800262291A patent/CN1993829B/zh not_active Expired - Fee Related
- 2005-05-31 CN CN2009101180509A patent/CN101527270B/zh not_active Expired - Fee Related
- 2005-05-31 WO PCT/JP2005/010313 patent/WO2005119781A1/en not_active Ceased
- 2005-05-31 CN CN2009100028576A patent/CN101789378B/zh not_active Expired - Fee Related
- 2005-05-31 KR KR1020097002823A patent/KR101020661B1/ko not_active Expired - Lifetime
- 2005-05-31 KR KR1020127002467A patent/KR101226260B1/ko not_active Expired - Fee Related
- 2005-05-31 EP EP05745905A patent/EP1774595A4/en not_active Withdrawn
- 2005-05-31 KR KR1020117022507A patent/KR101187403B1/ko not_active Expired - Fee Related
- 2005-06-02 JP JP2005162434A patent/JP4579057B2/ja not_active Expired - Fee Related
-
2006
- 2006-12-29 KR KR1020067027881A patent/KR101175277B1/ko not_active Expired - Fee Related
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2009
- 2009-03-13 US US12/403,988 patent/US8698156B2/en not_active Expired - Fee Related
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2014
- 2014-03-18 US US14/217,519 patent/US9536755B2/en not_active Expired - Fee Related
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