JP2005516407A - ガス分配シャワーヘッド - Google Patents
ガス分配シャワーヘッド Download PDFInfo
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- JP2005516407A JP2005516407A JP2003564312A JP2003564312A JP2005516407A JP 2005516407 A JP2005516407 A JP 2005516407A JP 2003564312 A JP2003564312 A JP 2003564312A JP 2003564312 A JP2003564312 A JP 2003564312A JP 2005516407 A JP2005516407 A JP 2005516407A
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- Prior art keywords
- faceplate
- gas
- wafer
- elongated slot
- gas distribution
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
Abstract
Description
Claims (29)
- 半導体ウェハ上に材料を形成する装置において、
壁により画成されたプロセスチャンバーと、
上記プロセスチャンバー内に配置されて、半導体ウェハを受け取るように構成されたウェハ支持体と、
プロセスガス供給源と、
上記ウェハ支持体の上に横たわり且つそこから分離されたガス分配シャワーヘッドであって、該ガス分配シャワーヘッドはフェースプレートを含み、該フェースプレートの入口部分のホールが、該フェースプレートの出口部分の細長いスロットと流体連通しているガス分配シャワーヘッドと、
を備えた装置。 - 上記細長いスロットの長さは、上記フェースプレートの厚みの少なくとも半分である、請求項1に記載の装置。
- 上記ガス分配シャワーヘッドは、更に、孔を含むブロッカープレートを含み、該ブロッカープレートは、上記フェースプレートの上記入口部分の上流に配置されてそれと流体連通する、請求項1に記載の装置。
- 上記細長いスロットは連続的で且つ同心的に配向される、請求項1に記載の装置。
- 上記細長いスロットの断面巾は上記ホールの断面巾より大きい、請求項1に記載の装置。
- 上記細長いスロットの断面巾は上記ホールの断面巾より少なくとも2.25倍大きい、請求項5に記載の装置。
- ある厚みを有するフェースプレート本体と、
プロセスガスの流れを受け取るように構成された入口部分であって、ある巾のアパーチャーを含む入口部分と、
上記プロセスガスの流れを半導体ウェハへ搬送するように構成された出口部分であって、上記アパーチャーと流体連通する細長いスロットを含む出口部分と、
を備えたガス分配フェースプレート。 - 上記細長いスロットは、その長さが上記フェースプレート本体の厚みの少なくとも半分である、請求項7に記載のガス分配フェースプレート。
- 上記細長いスロットは円形で且つ連続的である、請求項7に記載のガス分配フェースプレート。
- 上記細長いスロットの巾は上記アパーチャーの巾より大きい、請求項7に記載のガス分配フェースプレート。
- 上記細長いスロットの巾は、上記アパーチャーの巾より少なくとも2.25倍大きい、請求項10に記載のガス分配フェースプレート。
- 半導体ウェハ上に材料を形成する装置において、
壁により画成されたプロセスチャンバーと、
上記プロセスチャンバー内に配置されて、半導体ウェハを受け取るように構成されたウェハ支持体と、
プロセスガス供給源と、
上記ウェハ支持体の上に横たわり且つ上記ウェハ支持体の近くにテーパー付けされたフェースプレートを含んだガス分配シャワーヘッドであって、該テーパー付けされたフェースプレートの縁が、該フェースプレートの中心の厚みに対して減少された厚みを示してテーパー角を形成し、上記ウェハ支持体に接触したウェハに堆積される材料が均一な中心対縁厚みを示すようにしたガス分配シャワーヘッドと、
を備えた装置。 - 上記テーパー角は約0.5°から5°である、請求項12に記載の装置。
- 上記テーパー付けされたフェースプレートは、
プロセスガスの流れを受け取るように構成された入口部分であって、ある巾のアパーチャーを含む入口部分と、
上記プロセスガスの流れを半導体ウェハへ搬送するように構成された出口部分であって、上記アパーチャーと流体連通する細長いスロットを含む出口部分と、
を備えた請求項12に記載の装置。 - 上記細長いスロットは、その長さが上記フェースプレートの厚みの少なくとも半分である、請求項14に記載の装置。
- 上記細長いスロットは円形で且つ連続的である、請求項14に記載の装置。
- 上記細長いスロットの巾は上記アパーチャーの巾より大きい、請求項14に記載の装置。
- 上記細長いスロットの巾は、上記アパーチャーの巾より少なくとも2.25倍大きい、請求項17に記載の装置。
- 半導体製造プロセス中にガスを分配する方法において、
ガス供給源からのガスを、ある巾のホールを特徴とするガス分配フェースプレートの入口部分へ流すステップと、
上記ホールからのガスを、上記ガス分配フェースプレートの出口部分の細長いスロットを経て半導体ウェハの表面へ流すステップと、
を備えた方法。 - 上記ガスは、長さが上記ガス分配フェースプレートの厚みの少なくとも半分である細長いスロットを経て流される、請求項19に記載の方法。
- 担体ガス及びプロセスガスの少なくとも一方が上記フェースプレートを通して流される、請求項19に記載の方法。
- 上記ガスは化学蒸気堆積(CVD)プロセス中に流される、請求項19に記載の方法。
- 上記ガスは、非ドープ珪酸ガラスの高温堆積プロセス中に上記フェースプレートとウェハとの間の間隔が300ミル以下であるようにして流される、請求項19に記載の方法。
- 上記流されるガスは、テトラエチルオーソシラン(TEOS)、燐酸トリエチル(TEPO)、硼酸トリエチル(TEB)、オゾン(O3)、酸素、ヘリウム及び窒素(N2)より成る少なくとも1つのグループから選択される、請求項19に記載の方法。
- 上記流されるガスは、硼珪酸ガラス(BSG)、燐珪酸ガラス(PSG)、又は硼燐珪酸ガラス(BPSG)より成るグループから選択された材料の堆積を生じさせる、請求項19に記載の方法。
- 上記ガスは、約0.5°から5°のフェースプレートテーパー角を形成するように縁部分が中心部に対して後退したガス分配フェースプレートから流される、請求項19に記載の方法。
- 上記ガスは乾式エッチングプロセス中に流される、請求項19に記載の方法。
- 半導体ウェハ上に材料を形成する装置において、
壁により画成されたプロセスチャンバーと、
上記プロセスチャンバー内に配置されて、半導体ウェハを受け取るように構成されたウェハ支持体と、
プロセスガス供給源と、
上記ウェハ支持体の上に横たわり且つ上記ウェハ支持体の近くにテーパー付けされたフェースプレートを含んだガス分配シャワーヘッドと、
を備え、上記テーパー付けされたフェースプレートは、
プロセスガスの流れを受け取るように構成された入口部分であって、ある巾のアパーチャーを含む入口部分と、
上記プロセスガスの流れを半導体ウェハへ搬送するように構成された出口部分であって、上記アパーチャーと流体連通する細長いスロットを含む出口部分と、
を有し、
上記テーパー付けされたフェースプレートの縁が、該フェースプレートの中心の厚みに対して減少された厚みを示してテーパー角を形成し、上記ウェハ支持体に接触したウェハに堆積される材料が均一な中心対縁厚みを示すようにした装置。 - 上記テーパー角は約0.5°から5°である、請求項28に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/057,280 US6793733B2 (en) | 2002-01-25 | 2002-01-25 | Gas distribution showerhead |
PCT/US2002/038035 WO2003064725A1 (en) | 2002-01-25 | 2002-11-27 | Gas distribution showerhead |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005516407A true JP2005516407A (ja) | 2005-06-02 |
JP4426306B2 JP4426306B2 (ja) | 2010-03-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003564312A Expired - Fee Related JP4426306B2 (ja) | 2002-01-25 | 2002-11-27 | 半導体ウェハ上に材料を形成する装置およびガスを分配する方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6793733B2 (ja) |
JP (1) | JP4426306B2 (ja) |
KR (1) | KR100993037B1 (ja) |
CN (1) | CN100342057C (ja) |
TW (1) | TWI283437B (ja) |
WO (1) | WO2003064725A1 (ja) |
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TWI283437B (en) | 2007-07-01 |
US20030140851A1 (en) | 2003-07-31 |
US6793733B2 (en) | 2004-09-21 |
JP4426306B2 (ja) | 2010-03-03 |
KR20040085164A (ko) | 2004-10-07 |
WO2003064725A1 (en) | 2003-08-07 |
KR100993037B1 (ko) | 2010-11-08 |
CN100342057C (zh) | 2007-10-10 |
TW200302510A (en) | 2003-08-01 |
CN1659308A (zh) | 2005-08-24 |
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