USD969980S1 - Deposition chamber showerhead - Google Patents

Deposition chamber showerhead Download PDF

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Publication number
USD969980S1
USD969980S1 US29/755,418 US202029755418F USD969980S US D969980 S1 USD969980 S1 US D969980S1 US 202029755418 F US202029755418 F US 202029755418F US D969980 S USD969980 S US D969980S
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United States
Prior art keywords
deposition chamber
view
chamber showerhead
showerhead
taken along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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US29/755,418
Inventor
Alexander N. Lerner
Graeme Jamieson Scott
Prashanth Kothnur
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Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to US29/755,418 priority Critical patent/USD969980S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KOTHNUR, PRASHANTH, LERNER, ALEXANDER N., SCOTT, Graeme Jamieson
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Description

FIG. 1 is an isometric top side view of a deposition chamber showerhead for a substrate processing system.
FIG. 2 is an isometric bottom side view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a first side view thereof taken along line 5-5 of FIG. 3.
FIG. 6 is a second side view thereof taken along line 6-6 of FIG. 3.
FIG. 7 is a third side view thereof taken along line 7-7 of FIG. 3.
FIG. 8 is a fourth side view thereof taken along line 8-8 of FIG. 3.
FIG. 9 is a fifth side view thereof taken along line 9-9 of FIG. 1.
FIG. 10 is another front isometric top view thereof assembled with three additional deposition chamber showerheads.
FIG. 11 is another top plan view thereof assembled with the three additional deposition chamber showerheads.
FIG. 12 is another side isometric bottom view thereof assembled with three additional deposition chamber showerheads; and,
FIG. 13 is another bottom plan view thereof assembled with the three additional deposition chamber showerheads.
The broken lines shown in FIGS. 10-13 show an environment in which the deposition chamber showerhead can be positioned that forms no part of the claimed design. All other broken lines shown in FIGS. 1-13 illustrate portions of the deposition chamber showerhead that form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a deposition chamber showerhead, as shown and described.
US29/755,418 2020-10-20 2020-10-20 Deposition chamber showerhead Active USD969980S1 (en)

Priority Applications (1)

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US29/755,418 USD969980S1 (en) 2020-10-20 2020-10-20 Deposition chamber showerhead

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Application Number Priority Date Filing Date Title
US29/755,418 USD969980S1 (en) 2020-10-20 2020-10-20 Deposition chamber showerhead

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USD969980S1 true USD969980S1 (en) 2022-11-15

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US29/755,418 Active USD969980S1 (en) 2020-10-20 2020-10-20 Deposition chamber showerhead

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Citations (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD309241S (en) * 1988-06-06 1990-07-17 Luay Ayyoubi Reclosable funnel fixture
US5813058A (en) * 1997-01-27 1998-09-29 The Tranzonic Companies Dissolvable urinal screen
USD410281S (en) * 1998-05-15 1999-05-25 Walker Gary L Urinal insert
USD464122S1 (en) * 2001-11-27 2002-10-08 Green Supply Company, Llc Urinal screen
US20030140851A1 (en) 2002-01-25 2003-07-31 Applied Materials, Inc. Gas distribution showerhead
US6983892B2 (en) 2004-02-05 2006-01-10 Applied Materials, Inc. Gas distribution showerhead for semiconductor processing
USD520610S1 (en) * 2004-11-22 2006-05-09 Wrate Leonard A Anti-splash urinal screen
US7658800B2 (en) 2006-10-18 2010-02-09 Advanced Micro-Fabrication Equipment, Inc. Asia Gas distribution assembly for use in a semiconductor work piece processing reactor
US20120100307A1 (en) * 2010-10-22 2012-04-26 Asm Japan K.K. Shower Plate Having Different Aperture Dimensions and/or Distributions
US20140007336A1 (en) * 2012-07-09 2014-01-09 John Andrew Mills Anti-splash urinal mat
USD706303S1 (en) * 2012-08-29 2014-06-03 Samsung Electronics Co., Ltd. AV player
US8856977B2 (en) * 2006-05-22 2014-10-14 Ed Ramirez Urinal splash guard employing flexible bristles
US9243394B2 (en) * 2011-09-20 2016-01-26 Fresh Products, Inc. Replaceable restroom urinal assemblies, including urinal screens
USD754487S1 (en) * 2014-08-26 2016-04-26 Source Designs Ltd Powder dispenser
US9464353B2 (en) 2013-11-21 2016-10-11 Wonik Ips Co., Ltd. Substrate processing apparatus
USD771024S1 (en) * 2014-11-25 2016-11-08 Comcast Cable Communications, Llc Electronic housing with corner illumination
USD785131S1 (en) * 2016-01-22 2017-04-25 John Arthur Cimino Spout
USD790039S1 (en) 2016-04-08 2017-06-20 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD793526S1 (en) 2016-04-08 2017-08-01 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
US9934979B2 (en) 2011-05-31 2018-04-03 Lam Research Corporation Gas distribution showerhead for inductively coupled plasma etch reactor
US20180258532A1 (en) * 2017-03-08 2018-09-13 Kabushiki Kaisha Toshiba Shower plate, processing apparatus, and ejection method
US20190211450A1 (en) * 2018-01-10 2019-07-11 Asm Ip Holding B.V. Shower plate structure for supplying carrier and dry gas
USD889599S1 (en) * 2019-06-28 2020-07-07 T & S Brass And Bronze Works, Inc. Spray valve face plate
USD896928S1 (en) * 2019-05-22 2020-09-22 Mark Day Urinal or toilet mat
USD900981S1 (en) * 2018-09-18 2020-11-03 Dugan Tafoya Urinal cake
US20200385851A1 (en) 2019-06-10 2020-12-10 Applied Materials, Inc. Processing system for forming layers
USD910260S1 (en) * 2020-07-23 2021-02-09 Xin Xie Drain basket
US10973942B2 (en) * 2015-07-06 2021-04-13 Microlin, Llc Urinal air freshener
USD922540S1 (en) * 2019-05-30 2021-06-15 Ebbe America, Lc Drain cover
USD923154S1 (en) * 2019-06-04 2021-06-22 Hydropool Inc. Spa filter cover
USD942594S1 (en) * 2019-11-13 2022-02-01 Everhard Industries Pty Ltd Drain grate
USD952804S1 (en) * 2019-08-14 2022-05-24 Turret IP Pty Ltd Liquid intake

Patent Citations (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD309241S (en) * 1988-06-06 1990-07-17 Luay Ayyoubi Reclosable funnel fixture
US5813058A (en) * 1997-01-27 1998-09-29 The Tranzonic Companies Dissolvable urinal screen
USD410281S (en) * 1998-05-15 1999-05-25 Walker Gary L Urinal insert
USD464122S1 (en) * 2001-11-27 2002-10-08 Green Supply Company, Llc Urinal screen
US20030140851A1 (en) 2002-01-25 2003-07-31 Applied Materials, Inc. Gas distribution showerhead
US6983892B2 (en) 2004-02-05 2006-01-10 Applied Materials, Inc. Gas distribution showerhead for semiconductor processing
USD520610S1 (en) * 2004-11-22 2006-05-09 Wrate Leonard A Anti-splash urinal screen
US8856977B2 (en) * 2006-05-22 2014-10-14 Ed Ramirez Urinal splash guard employing flexible bristles
US7658800B2 (en) 2006-10-18 2010-02-09 Advanced Micro-Fabrication Equipment, Inc. Asia Gas distribution assembly for use in a semiconductor work piece processing reactor
US20120100307A1 (en) * 2010-10-22 2012-04-26 Asm Japan K.K. Shower Plate Having Different Aperture Dimensions and/or Distributions
US9934979B2 (en) 2011-05-31 2018-04-03 Lam Research Corporation Gas distribution showerhead for inductively coupled plasma etch reactor
US9243394B2 (en) * 2011-09-20 2016-01-26 Fresh Products, Inc. Replaceable restroom urinal assemblies, including urinal screens
US20140007336A1 (en) * 2012-07-09 2014-01-09 John Andrew Mills Anti-splash urinal mat
USD706303S1 (en) * 2012-08-29 2014-06-03 Samsung Electronics Co., Ltd. AV player
US9464353B2 (en) 2013-11-21 2016-10-11 Wonik Ips Co., Ltd. Substrate processing apparatus
USD754487S1 (en) * 2014-08-26 2016-04-26 Source Designs Ltd Powder dispenser
USD771024S1 (en) * 2014-11-25 2016-11-08 Comcast Cable Communications, Llc Electronic housing with corner illumination
US10973942B2 (en) * 2015-07-06 2021-04-13 Microlin, Llc Urinal air freshener
USD785131S1 (en) * 2016-01-22 2017-04-25 John Arthur Cimino Spout
USD790039S1 (en) 2016-04-08 2017-06-20 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD793526S1 (en) 2016-04-08 2017-08-01 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
US20180258532A1 (en) * 2017-03-08 2018-09-13 Kabushiki Kaisha Toshiba Shower plate, processing apparatus, and ejection method
US20190211450A1 (en) * 2018-01-10 2019-07-11 Asm Ip Holding B.V. Shower plate structure for supplying carrier and dry gas
USD900981S1 (en) * 2018-09-18 2020-11-03 Dugan Tafoya Urinal cake
USD896928S1 (en) * 2019-05-22 2020-09-22 Mark Day Urinal or toilet mat
USD922540S1 (en) * 2019-05-30 2021-06-15 Ebbe America, Lc Drain cover
USD923154S1 (en) * 2019-06-04 2021-06-22 Hydropool Inc. Spa filter cover
US20200385851A1 (en) 2019-06-10 2020-12-10 Applied Materials, Inc. Processing system for forming layers
USD889599S1 (en) * 2019-06-28 2020-07-07 T & S Brass And Bronze Works, Inc. Spray valve face plate
USD952804S1 (en) * 2019-08-14 2022-05-24 Turret IP Pty Ltd Liquid intake
USD942594S1 (en) * 2019-11-13 2022-02-01 Everhard Industries Pty Ltd Drain grate
USD910260S1 (en) * 2020-07-23 2021-02-09 Xin Xie Drain basket

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
VivaSpring FF-15 Filtered Shower Head Replacement Cartridge, Aug. 5, 2017, amazon.ca, Jun. 4, 2022, URL: https://www.amazon.ca/VivaSpring-FF-15-Replacement-Cartridge-Filtration/dp/B073WP1KPK/ (Year: 2017). *
Xuanmuque Shower Non-Slip Silicone Triangle Bath Mat, Mar. 20, 2020, amazon.ca, Jun. 4, 2022, URL: https://www.amazon.ca/Xuanmuque-Non-Slip-Silicone-Triangle-Bathroom/dp/B0865RWSQJ/ (Year: 2020). *

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