USD818447S1 - Plasma feedthrough flange - Google Patents
Plasma feedthrough flange Download PDFInfo
- Publication number
- USD818447S1 USD818447S1 US29/602,206 US201729602206F USD818447S US D818447 S1 USD818447 S1 US D818447S1 US 201729602206 F US201729602206 F US 201729602206F US D818447 S USD818447 S US D818447S
- Authority
- US
- United States
- Prior art keywords
- plasma
- feedthrough flange
- feedthrough
- flange
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
Claims (1)
- The ornamental design for a plasma feedthrough flange, as shown and described.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/602,206 USD818447S1 (en) | 2017-04-28 | 2017-04-28 | Plasma feedthrough flange |
TW106306299F TWD191653S (en) | 2017-04-28 | 2017-10-27 | Plasma feedthrough flange |
JPD2017-24102F JP1612649S (en) | 2017-04-28 | 2017-10-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/602,206 USD818447S1 (en) | 2017-04-28 | 2017-04-28 | Plasma feedthrough flange |
Publications (1)
Publication Number | Publication Date |
---|---|
USD818447S1 true USD818447S1 (en) | 2018-05-22 |
Family
ID=62118263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/602,206 Active USD818447S1 (en) | 2017-04-28 | 2017-04-28 | Plasma feedthrough flange |
Country Status (3)
Country | Link |
---|---|
US (1) | USD818447S1 (en) |
JP (1) | JP1612649S (en) |
TW (1) | TWD191653S (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD875053S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875054S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875055S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD882536S1 (en) * | 2017-04-28 | 2020-04-28 | Applied Materials, Inc. | Plasma source liner |
Citations (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1462698A (en) * | 1922-09-25 | 1923-07-24 | Rodger F Haughey | Pipe coupling |
US2282552A (en) * | 1940-11-15 | 1942-05-12 | B & H Mfg Co Inc | Nongasket flange |
US2513178A (en) * | 1945-02-22 | 1950-06-27 | Pittsburgh Des Moines Company | Bolted flange connection |
US2532891A (en) * | 1948-09-23 | 1950-12-05 | Warren W Chupp | Flanged joint sealing gasket |
US3302953A (en) * | 1963-02-25 | 1967-02-07 | Clarence O Glasgow | Gasket ring and conduit coupling |
US3368818A (en) * | 1964-02-02 | 1968-02-13 | Nippon Electric Co | Vacuum flange |
US3747963A (en) * | 1972-05-17 | 1973-07-24 | Cajon Co | High vacuum flange assembly with o-ring gasket |
US3988698A (en) | 1975-02-07 | 1976-10-26 | Spectra-Physics, Inc. | Plasma tube and method of manufacture |
US4988130A (en) * | 1988-07-19 | 1991-01-29 | Japan Atomic Energy Research Institute | Metal seal flange assembly |
US5119395A (en) * | 1990-11-09 | 1992-06-02 | Gas Research Institute | Interlock feed-through and insulator arrangement for plasma arc industrial heat treat furnaces |
US5228587A (en) * | 1992-11-23 | 1993-07-20 | Worthington James N | Flange cap for high vacuum system |
US5593123A (en) * | 1995-03-07 | 1997-01-14 | Kimball Physics, Inc. | Vacuum system components |
US5814818A (en) * | 1996-06-11 | 1998-09-29 | Ngk Insulators, Ltd. | Gas tube for passing plasma generating gases |
US5961916A (en) | 1997-03-27 | 1999-10-05 | Ngk Insulators, Ltd. | Method of manufacturing a passage tube for passing plasma producing gas |
US6325390B1 (en) * | 1997-08-08 | 2001-12-04 | Itt Manufacturing Enterprises, Inc. | Vacuum flange O-ring center ring |
US6326574B1 (en) | 1999-09-21 | 2001-12-04 | Mosel Vitelic Inc. | Sleeve for an adapter flange of the gasonics L3510 etcher |
US20020050689A1 (en) * | 2000-10-26 | 2002-05-02 | Kimball Physics, Inc. | Minimal thickness, double-sided flanges for ultra-high vacuum components |
US20080308230A1 (en) * | 2007-03-30 | 2008-12-18 | Tokyo Electron Limited | Plasma processing apparatus |
USD606952S1 (en) * | 2009-01-16 | 2009-12-29 | Asm Genitech Korea Ltd. | Plasma inducing plate for semiconductor deposition apparatus |
US8191901B2 (en) * | 2000-10-26 | 2012-06-05 | Kimball Physics, Inc. | Minimal thickness, double-sided flanges for ultra-high vacuum components |
USD702654S1 (en) * | 2012-05-29 | 2014-04-15 | Asm Ip Holding B.V. | Plasma power transfer rod for a semiconductor deposition apparatus |
USD812578S1 (en) * | 2016-02-26 | 2018-03-13 | Hitachi High-Technologies Corporation | Upper chamber for a plasma processing apparatus |
-
2017
- 2017-04-28 US US29/602,206 patent/USD818447S1/en active Active
- 2017-10-27 TW TW106306299F patent/TWD191653S/en unknown
- 2017-10-30 JP JPD2017-24102F patent/JP1612649S/ja active Active
Patent Citations (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1462698A (en) * | 1922-09-25 | 1923-07-24 | Rodger F Haughey | Pipe coupling |
US2282552A (en) * | 1940-11-15 | 1942-05-12 | B & H Mfg Co Inc | Nongasket flange |
US2513178A (en) * | 1945-02-22 | 1950-06-27 | Pittsburgh Des Moines Company | Bolted flange connection |
US2532891A (en) * | 1948-09-23 | 1950-12-05 | Warren W Chupp | Flanged joint sealing gasket |
US3302953A (en) * | 1963-02-25 | 1967-02-07 | Clarence O Glasgow | Gasket ring and conduit coupling |
US3368818A (en) * | 1964-02-02 | 1968-02-13 | Nippon Electric Co | Vacuum flange |
US3747963A (en) * | 1972-05-17 | 1973-07-24 | Cajon Co | High vacuum flange assembly with o-ring gasket |
US3988698A (en) | 1975-02-07 | 1976-10-26 | Spectra-Physics, Inc. | Plasma tube and method of manufacture |
US4988130A (en) * | 1988-07-19 | 1991-01-29 | Japan Atomic Energy Research Institute | Metal seal flange assembly |
US5119395A (en) * | 1990-11-09 | 1992-06-02 | Gas Research Institute | Interlock feed-through and insulator arrangement for plasma arc industrial heat treat furnaces |
US5228587A (en) * | 1992-11-23 | 1993-07-20 | Worthington James N | Flange cap for high vacuum system |
US5593123A (en) * | 1995-03-07 | 1997-01-14 | Kimball Physics, Inc. | Vacuum system components |
US5814818A (en) * | 1996-06-11 | 1998-09-29 | Ngk Insulators, Ltd. | Gas tube for passing plasma generating gases |
US5961916A (en) | 1997-03-27 | 1999-10-05 | Ngk Insulators, Ltd. | Method of manufacturing a passage tube for passing plasma producing gas |
US6325390B1 (en) * | 1997-08-08 | 2001-12-04 | Itt Manufacturing Enterprises, Inc. | Vacuum flange O-ring center ring |
US6326574B1 (en) | 1999-09-21 | 2001-12-04 | Mosel Vitelic Inc. | Sleeve for an adapter flange of the gasonics L3510 etcher |
US20020050689A1 (en) * | 2000-10-26 | 2002-05-02 | Kimball Physics, Inc. | Minimal thickness, double-sided flanges for ultra-high vacuum components |
US8191901B2 (en) * | 2000-10-26 | 2012-06-05 | Kimball Physics, Inc. | Minimal thickness, double-sided flanges for ultra-high vacuum components |
US20080308230A1 (en) * | 2007-03-30 | 2008-12-18 | Tokyo Electron Limited | Plasma processing apparatus |
USD606952S1 (en) * | 2009-01-16 | 2009-12-29 | Asm Genitech Korea Ltd. | Plasma inducing plate for semiconductor deposition apparatus |
USD702654S1 (en) * | 2012-05-29 | 2014-04-15 | Asm Ip Holding B.V. | Plasma power transfer rod for a semiconductor deposition apparatus |
USD812578S1 (en) * | 2016-02-26 | 2018-03-13 | Hitachi High-Technologies Corporation | Upper chamber for a plasma processing apparatus |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD875053S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875054S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD875055S1 (en) * | 2017-04-28 | 2020-02-11 | Applied Materials, Inc. | Plasma connector liner |
USD882536S1 (en) * | 2017-04-28 | 2020-04-28 | Applied Materials, Inc. | Plasma source liner |
Also Published As
Publication number | Publication date |
---|---|
TWD191653S (en) | 2018-07-11 |
JP1612649S (en) | 2018-09-03 |
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