ES2005496A6 - Un metodo para formar sobre un sustrato un revestimiento ceramico o semejante a ceramico, en multicapa. - Google Patents
Un metodo para formar sobre un sustrato un revestimiento ceramico o semejante a ceramico, en multicapa.Info
- Publication number
- ES2005496A6 ES2005496A6 ES8703757A ES8703757A ES2005496A6 ES 2005496 A6 ES2005496 A6 ES 2005496A6 ES 8703757 A ES8703757 A ES 8703757A ES 8703757 A ES8703757 A ES 8703757A ES 2005496 A6 ES2005496 A6 ES 2005496A6
- Authority
- ES
- Spain
- Prior art keywords
- ceramic coatings
- metal oxides
- multilayer ceramic
- coating
- ceramified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005524 ceramic coating Methods 0.000 title abstract 2
- 229910044991 metal oxide Inorganic materials 0.000 title abstract 2
- 150000004706 metal oxides Chemical class 0.000 title abstract 2
- 150000004760 silicates Chemical class 0.000 title 1
- -1 silicate ester Chemical class 0.000 abstract 4
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 239000002904 solvent Substances 0.000 abstract 2
- DZPJVKXUWVWEAD-UHFFFAOYSA-N [C].[N].[Si] Chemical compound [C].[N].[Si] DZPJVKXUWVWEAD-UHFFFAOYSA-N 0.000 abstract 1
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 abstract 1
- UMVBXBACMIOFDO-UHFFFAOYSA-N [N].[Si] Chemical compound [N].[Si] UMVBXBACMIOFDO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000007865 diluting Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000012702 metal oxide precursor Substances 0.000 abstract 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
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- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Engineering (AREA)
- Plasma & Fusion (AREA)
- Formation Of Insulating Films (AREA)
- Chemically Coating (AREA)
- Chemical Vapour Deposition (AREA)
- Paints Or Removers (AREA)
- Physical Vapour Deposition (AREA)
Abstract
ESTA INVENCION SE REFIERE A MATERIALES PRODUCIDOS DILUYENDO EN UN DISOLVENTE UNA MEZCLA PRECERAMICA DE UN ESTER DE SILICATO PARCIALMENTE HIDROLIZADO Y UN PRECURSOR DE UN OXIDO METALICO ELEGIDO ENTRE UN ALCOXIDO DE ALUMINIO, UN ALCOXIDO DE TITANIO Y UN ALCOXIDO DE CIRCONIO. LA SOLUCION DE LA MEZCLA PRECERAMICA EN EL DISOLVENTE SE APLICA A UN SUSTRATO Y SE CERAMIFICA POR APLICACION DE CALOR. SOBRE EL REVESTIMIENTO DE SIO2/OXIDO METALICO CERAMIFICADO, SE PUEDEN APLICAR UNO O MAS REVESTIMIENTOS QUE CONTIENEN SILICIO Y CARBONO, SILICIO Y NITROGENO O SILICIO, CARBONO Y NITROGENO. PARA UNA MEJOR PROTECCION, SE PUEDE APLICAR UN ULTIMO REVESTIMIENTO POR CVD O PECVD. LA INVENCION ES PARTICULARMENTE UTIL PARA REVESTIR DISPOSITIVOS ELECTRONICOS.
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US07/000,217 US4753856A (en) | 1987-01-02 | 1987-01-02 | Multilayer ceramic coatings from silicate esters and metal oxides |
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Publication Number | Publication Date |
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ES2005496A6 true ES2005496A6 (es) | 1989-03-01 |
Family
ID=21690450
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ES8703757A Expired ES2005496A6 (es) | 1987-01-02 | 1987-12-30 | Un metodo para formar sobre un sustrato un revestimiento ceramico o semejante a ceramico, en multicapa. |
Country Status (7)
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US (1) | US4753856A (es) |
EP (1) | EP0274274B1 (es) |
JP (1) | JPH0642479B2 (es) |
CN (1) | CN1012494B (es) |
CA (1) | CA1329739C (es) |
DE (1) | DE3789438T2 (es) |
ES (1) | ES2005496A6 (es) |
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- 1987-12-29 EP EP87311481A patent/EP0274274B1/en not_active Expired - Lifetime
- 1987-12-29 CN CN87107417A patent/CN1012494B/zh not_active Expired
- 1987-12-30 ES ES8703757A patent/ES2005496A6/es not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE3789438D1 (de) | 1994-04-28 |
EP0274274A3 (en) | 1988-12-07 |
EP0274274A2 (en) | 1988-07-13 |
JPH0642479B2 (ja) | 1994-06-01 |
CN1012494B (zh) | 1991-05-01 |
CA1329739C (en) | 1994-05-24 |
CN87107417A (zh) | 1988-08-17 |
US4753856A (en) | 1988-06-28 |
EP0274274B1 (en) | 1994-03-23 |
DE3789438T2 (de) | 1994-10-06 |
JPS63178532A (ja) | 1988-07-22 |
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