DE69837905T2 - Vibratoren und Vibrationskreisel - Google Patents
Vibratoren und Vibrationskreisel Download PDFInfo
- Publication number
- DE69837905T2 DE69837905T2 DE69837905T DE69837905T DE69837905T2 DE 69837905 T2 DE69837905 T2 DE 69837905T2 DE 69837905 T DE69837905 T DE 69837905T DE 69837905 T DE69837905 T DE 69837905T DE 69837905 T2 DE69837905 T2 DE 69837905T2
- Authority
- DE
- Germany
- Prior art keywords
- vibration
- vibrator
- systems
- detection
- piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 153
- 238000005452 bending Methods 0.000 claims description 113
- 230000010355 oscillation Effects 0.000 claims description 83
- 230000005484 gravity Effects 0.000 claims description 81
- 239000013078 crystal Substances 0.000 claims description 39
- 230000005284 excitation Effects 0.000 claims 4
- 230000004936 stimulating effect Effects 0.000 claims 1
- 230000000638 stimulation Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 description 32
- 238000010586 diagram Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 230000008859 change Effects 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 11
- 238000005530 etching Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 206010067482 No adverse event Diseases 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31663497 | 1997-11-04 | ||
| JP31663497 | 1997-11-04 | ||
| JP3229798 | 1998-01-30 | ||
| JP3229798 | 1998-01-30 | ||
| JP30643498 | 1998-10-14 | ||
| JP30643498A JP3999377B2 (ja) | 1997-11-04 | 1998-10-14 | 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69837905D1 DE69837905D1 (de) | 2007-07-26 |
| DE69837905T2 true DE69837905T2 (de) | 2008-02-21 |
Family
ID=27287651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69837905T Expired - Lifetime DE69837905T2 (de) | 1997-11-04 | 1998-11-02 | Vibratoren und Vibrationskreisel |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6227048B1 (enExample) |
| EP (1) | EP0915322B1 (enExample) |
| JP (1) | JP3999377B2 (enExample) |
| CN (2) | CN1293364C (enExample) |
| CA (1) | CA2252655C (enExample) |
| DE (1) | DE69837905T2 (enExample) |
Families Citing this family (79)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4529203B2 (ja) * | 1999-08-05 | 2010-08-25 | パナソニック株式会社 | 角速度センサ |
| JP4626002B2 (ja) * | 2000-01-12 | 2011-02-02 | セイコーエプソン株式会社 | 振動型ジャイロスコープ |
| JP2002031533A (ja) * | 2000-07-13 | 2002-01-31 | Microstone Corp | ジャイロセンサ |
| KR20030004387A (ko) * | 2001-03-06 | 2003-01-14 | 마이크로스톤 가부시키가이샤 | 신체 동작 검출 장치 |
| US6862934B2 (en) * | 2001-10-05 | 2005-03-08 | The Charles Stark Draper Laboratory, Inc. | Tuning fork gyroscope |
| JP4852216B2 (ja) * | 2002-01-30 | 2012-01-11 | セイコーエプソン株式会社 | 振動型ジャイロスコープ |
| JP3601822B2 (ja) | 2002-09-11 | 2004-12-15 | 東洋通信機株式会社 | 双音さ型振動ジャイロセンサ |
| DE10254163A1 (de) * | 2002-11-21 | 2004-06-03 | Eads Deutschland Gmbh | Mikromechanischer Drehratensensor |
| JP4336946B2 (ja) | 2003-03-20 | 2009-09-30 | セイコーエプソン株式会社 | 回転角速度の測定方法および装置 |
| JP4389480B2 (ja) | 2003-05-28 | 2009-12-24 | セイコーエプソン株式会社 | 振動子の支持機構及び振動子ユニット |
| JP4163067B2 (ja) * | 2003-07-14 | 2008-10-08 | 日本碍子株式会社 | 物理量測定方法および装置 |
| US20050062362A1 (en) * | 2003-08-28 | 2005-03-24 | Hongyuan Yang | Oscillatory gyroscope |
| JP4608435B2 (ja) | 2004-01-20 | 2011-01-12 | セイコーエプソン株式会社 | 物理量測定装置 |
| KR20060129930A (ko) | 2004-01-20 | 2006-12-18 | 니뽄 가이시 가부시키가이샤 | 검파 회로, 검파 방법 및 물리량 측정 장치 |
| JP4859347B2 (ja) * | 2004-02-18 | 2012-01-25 | セイコーエプソン株式会社 | 振動型ジャイロスコープ |
| US7106189B2 (en) * | 2004-04-29 | 2006-09-12 | Tracetech Incorporated | Tracking system and methods thereof |
| US7140251B2 (en) * | 2004-05-19 | 2006-11-28 | Ngk Insulators, Ltd. | Devices for measuring physical values and vibrators |
| JP2006058101A (ja) * | 2004-08-19 | 2006-03-02 | Seiko Epson Corp | 振動片、振動子および応用機器 |
| JP2006162314A (ja) * | 2004-12-03 | 2006-06-22 | Matsushita Electric Ind Co Ltd | 複合センサ |
| JP4774733B2 (ja) * | 2004-12-03 | 2011-09-14 | パナソニック株式会社 | 複合センサ |
| US7300814B2 (en) | 2004-12-16 | 2007-11-27 | The Charles Stark Draper Laboratory, Inc. | Method for fabricating micro-mechanical devices |
| JP4415382B2 (ja) * | 2005-01-20 | 2010-02-17 | セイコーエプソン株式会社 | 振動ジャイロ素子、振動ジャイロ素子の支持構造およびジャイロセンサ |
| JP2006201053A (ja) * | 2005-01-21 | 2006-08-03 | Seiko Epson Corp | 圧電振動ジャイロ素子、圧電振動ジャイロ素子の支持構造およびジャイロセンサ |
| JP4415383B2 (ja) * | 2005-01-24 | 2010-02-17 | セイコーエプソン株式会社 | 振動ジャイロ素子、振動ジャイロ素子の支持構造およびジャイロセンサ |
| JP2006201118A (ja) * | 2005-01-24 | 2006-08-03 | Seiko Epson Corp | 圧電振動ジャイロ素子およびジャイロセンサ |
| US7302848B2 (en) | 2005-03-10 | 2007-12-04 | The Charles Stark Draper Laboratory, Inc. | Force compensated comb drive |
| JP2007017224A (ja) * | 2005-07-06 | 2007-01-25 | Sharp Corp | ジャイロセンサ |
| JP4702942B2 (ja) * | 2005-10-14 | 2011-06-15 | Ｎｅｃトーキン株式会社 | 振動ジャイロ用素子及び振動ジャイロ |
| WO2007080908A1 (ja) * | 2006-01-13 | 2007-07-19 | Citizen Holdings Co., Ltd. | 角速度センサー用振動体 |
| US20070163346A1 (en) * | 2006-01-18 | 2007-07-19 | Honeywell International Inc. | Frequency shifting of rotational harmonics in mems devices |
| EP2899502B1 (en) | 2006-01-24 | 2017-04-05 | Panasonic Corporation | Inertial force sensor |
| JP2007322200A (ja) * | 2006-05-31 | 2007-12-13 | Kyocera Kinseki Corp | 慣性センサ素子 |
| US20100011859A1 (en) * | 2006-09-21 | 2010-01-21 | Panasonic Corporation | Angular velocity sensor |
| JP5023708B2 (ja) * | 2007-01-17 | 2012-09-12 | Ｔｄｋ株式会社 | 角速度センサ素子および角速度センサ装置 |
| US7975545B2 (en) * | 2006-12-08 | 2011-07-12 | Tdk Corporation | Angular velocity sensor and angular velocity sensor device |
| JP2008145256A (ja) * | 2006-12-08 | 2008-06-26 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
| JP2008157810A (ja) * | 2006-12-25 | 2008-07-10 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
| JP2008249490A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
| JP2008249489A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
| KR101149266B1 (ko) * | 2007-12-19 | 2012-07-20 | 가부시키가이샤 무라타 세이사쿠쇼 | 각속도 센서 |
| JP5184142B2 (ja) * | 2008-02-26 | 2013-04-17 | セイコーインスツル株式会社 | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法 |
| JP5327579B2 (ja) * | 2008-03-28 | 2013-10-30 | Ｔｄｋ株式会社 | 角速度センサ素子 |
| JP5012621B2 (ja) * | 2008-03-31 | 2012-08-29 | アイシン・エィ・ダブリュ株式会社 | 動力伝達装置 |
| JP2009250859A (ja) * | 2008-04-09 | 2009-10-29 | Epson Toyocom Corp | 加速度検知装置 |
| JP5160974B2 (ja) * | 2008-06-23 | 2013-03-13 | 北陸電気工業株式会社 | 二軸型角速度センサ |
| US8187902B2 (en) * | 2008-07-09 | 2012-05-29 | The Charles Stark Draper Laboratory, Inc. | High performance sensors and methods for forming the same |
| JP5454134B2 (ja) * | 2008-12-27 | 2014-03-26 | セイコーエプソン株式会社 | 振動片、振動子、センサー及び電子部品 |
| JP2010190706A (ja) * | 2009-02-18 | 2010-09-02 | Panasonic Corp | 慣性力センサ |
| JP2009294218A (ja) * | 2009-07-31 | 2009-12-17 | Seiko Epson Corp | 直線加速度計 |
| JP4905518B2 (ja) * | 2009-08-25 | 2012-03-28 | セイコーエプソン株式会社 | 振動型ジャイロスコープ、および振動型ジャイロスコープの製造方法 |
| JP2011145278A (ja) | 2009-12-16 | 2011-07-28 | Seiko Epson Corp | 振動片、振動子、物理量センサー、および電子機器 |
| EP2392897B1 (en) * | 2010-01-12 | 2014-06-11 | Sony Corporation | Angular velocity sensor, electronic device, and method for detecting angular velocity |
| JP4670992B2 (ja) * | 2010-02-05 | 2011-04-13 | セイコーエプソン株式会社 | 振動型ジャイロスコープ |
| EP2876411A1 (en) * | 2010-02-18 | 2015-05-27 | Panasonic Corporation | Angular speed sensor and composite sensor for detecting angular speed |
| JP5560806B2 (ja) * | 2010-03-19 | 2014-07-30 | セイコーエプソン株式会社 | ジャイロ素子、ジャイロセンサー、および電子機器 |
| JP2011220997A (ja) * | 2010-03-26 | 2011-11-04 | Seiko Epson Corp | 物理量検出素子、物理量検出装置、および電子機器 |
| JP5655863B2 (ja) | 2010-12-15 | 2015-01-21 | 株式会社村田製作所 | 振動ジャイロ |
| US8573057B2 (en) * | 2011-04-28 | 2013-11-05 | Custom Sensors & Technologies, Inc. | Sensor mount vibration reduction |
| JP4905601B2 (ja) * | 2011-05-27 | 2012-03-28 | セイコーエプソン株式会社 | 振動型ジャイロスコープの製造方法 |
| CN102278983B (zh) * | 2011-07-22 | 2014-03-26 | 上海交通大学 | 具有三角形振子的硅微陀螺仪及其制作方法 |
| JP5682495B2 (ja) * | 2011-07-28 | 2015-03-11 | セイコーエプソン株式会社 | 物理量検出素子、物理量検出装置、および電子機器 |
| JP5870532B2 (ja) * | 2011-08-09 | 2016-03-01 | セイコーエプソン株式会社 | 物理量検出素子、物理量検出装置および電子機器 |
| EP2607849A1 (en) * | 2011-12-22 | 2013-06-26 | Tronics Microsystems S.A. | Multiaxial micro-electronic inertial sensor |
| JP5982896B2 (ja) | 2012-03-13 | 2016-08-31 | セイコーエプソン株式会社 | センサー素子、センサーデバイスおよび電子機器 |
| JP5970699B2 (ja) * | 2012-03-29 | 2016-08-17 | セイコーエプソン株式会社 | センサーユニット、電子機器 |
| JP2013213728A (ja) * | 2012-04-02 | 2013-10-17 | Seiko Epson Corp | ジャイロセンサーおよび電子機器 |
| JP2013250220A (ja) * | 2012-06-04 | 2013-12-12 | Seiko Epson Corp | 振動片、電子デバイス、及び電子機器 |
| JPWO2014061247A1 (ja) * | 2012-10-19 | 2016-09-05 | パナソニックＩｐマネジメント株式会社 | 角速度センサ |
| CN103197098B (zh) * | 2013-03-01 | 2014-08-20 | 中国科学院长春光学精密机械与物理研究所 | 一种高精度有限转角轴系角加速度的测量装置 |
| JP6329001B2 (ja) * | 2014-05-28 | 2018-05-23 | 京セラ株式会社 | 角速度センサ及びセンサ素子 |
| JP6471467B2 (ja) * | 2014-11-13 | 2019-02-20 | 株式会社デンソー | 力学量センサ |
| US10352960B1 (en) * | 2015-10-30 | 2019-07-16 | Garmin International, Inc. | Free mass MEMS accelerometer |
| US11112247B2 (en) * | 2016-07-26 | 2021-09-07 | Kyocera Corporation | Angular velocity sensor, sensor element, and multi-axis angular velocity sensor |
| CN110177996B (zh) * | 2017-01-24 | 2023-08-22 | 京瓷株式会社 | 传感器元件、角速度传感器及多轴角速度传感器 |
| WO2019044696A1 (ja) * | 2017-08-29 | 2019-03-07 | 京セラ株式会社 | 角速度センサおよびセンサ素子 |
| CN107702704B (zh) * | 2017-09-28 | 2021-02-02 | 中国电子科技集团公司第二十六研究所 | 一种石英微振动陀螺 |
| TWI738388B (zh) * | 2019-06-21 | 2021-09-01 | 全新光電科技股份有限公司 | 具有複數電流侷限層的垂直共振腔表面放射雷射二極體 |
| CN113341710B (zh) * | 2021-05-21 | 2023-06-13 | 北京理工大学 | 一种飞行器敏捷转弯复合控制方法和应用 |
| WO2023090349A1 (ja) * | 2021-11-16 | 2023-05-25 | 京セラ株式会社 | ジャイロセンサ素子 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02218914A (ja) | 1989-02-18 | 1990-08-31 | Nec Home Electron Ltd | 振動ジャイロ |
| ES2056580T3 (es) * | 1990-05-18 | 1994-10-01 | British Aerospace | Sensores inerciales. |
| WO1993005400A1 (en) * | 1991-08-29 | 1993-03-18 | Bei Electronics, Inc. | Rotation sensor |
| US5349855A (en) * | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
| US5428995A (en) * | 1993-03-08 | 1995-07-04 | Litton Systems, Inc. | Counterbalanced vibratory triaxial angular rate sensor with open loop output |
| WO1995034798A1 (de) * | 1994-06-16 | 1995-12-21 | Robert Bosch Gmbh | Beschleunigungssensor |
| US5476008A (en) * | 1994-07-25 | 1995-12-19 | Rockwell International Corporation | Rate-sensing tuning fork design |
| JPH08128833A (ja) | 1994-10-28 | 1996-05-21 | Yoshiro Tomikawa | 振動型ジャイロスコープ |
| DE19617666B4 (de) * | 1996-05-03 | 2006-04-20 | Robert Bosch Gmbh | Mikromechanischer Drehratensensor |
| US6018212A (en) | 1996-11-26 | 2000-01-25 | Ngk Insulators, Ltd. | Vibrator, vibratory gyroscope, and vibration adjusting method |
| US5998911A (en) | 1996-11-26 | 1999-12-07 | Ngk Insulators, Ltd. | Vibrator, vibratory gyroscope, and vibration adjusting method |
| JPH10246639A (ja) * | 1997-03-05 | 1998-09-14 | Mitsubishi Electric Corp | 角速度検出装置 |
-
1998
- 1998-10-14 JP JP30643498A patent/JP3999377B2/ja not_active Expired - Lifetime
- 1998-10-29 US US09/181,554 patent/US6227048B1/en not_active Expired - Lifetime
- 1998-11-02 DE DE69837905T patent/DE69837905T2/de not_active Expired - Lifetime
- 1998-11-02 EP EP98308936A patent/EP0915322B1/en not_active Expired - Lifetime
- 1998-11-03 CA CA002252655A patent/CA2252655C/en not_active Expired - Lifetime
- 1998-11-04 CN CNB031492827A patent/CN1293364C/zh not_active Expired - Lifetime
- 1998-11-04 CN CN98123744A patent/CN1119624C/zh not_active Expired - Lifetime
-
2001
- 2001-01-02 US US09/753,098 patent/US6439051B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CA2252655C (en) | 2002-02-12 |
| CN1293364C (zh) | 2007-01-03 |
| US20010001928A1 (en) | 2001-05-31 |
| CN1224149A (zh) | 1999-07-28 |
| CN1515874A (zh) | 2004-07-28 |
| EP0915322A3 (en) | 2002-01-09 |
| CA2252655A1 (en) | 1999-05-04 |
| US6227048B1 (en) | 2001-05-08 |
| US6439051B2 (en) | 2002-08-27 |
| DE69837905D1 (de) | 2007-07-26 |
| EP0915322A2 (en) | 1999-05-12 |
| JP3999377B2 (ja) | 2007-10-31 |
| CN1119624C (zh) | 2003-08-27 |
| EP0915322B1 (en) | 2007-06-13 |
| JPH11281372A (ja) | 1999-10-15 |
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Owner name: SEIKO EPSON CORP., TOKYO, JP |