DE69522134T2 - Piezoelektrischer Vibrator - Google Patents

Piezoelektrischer Vibrator

Info

Publication number
DE69522134T2
DE69522134T2 DE69522134T DE69522134T DE69522134T2 DE 69522134 T2 DE69522134 T2 DE 69522134T2 DE 69522134 T DE69522134 T DE 69522134T DE 69522134 T DE69522134 T DE 69522134T DE 69522134 T2 DE69522134 T2 DE 69522134T2
Authority
DE
Germany
Prior art keywords
piezoelectric vibrator
vibrator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69522134T
Other languages
English (en)
Other versions
DE69522134D1 (de
Inventor
Yoshiaki Heinouchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69522134D1 publication Critical patent/DE69522134D1/de
Publication of DE69522134T2 publication Critical patent/DE69522134T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
DE69522134T 1994-05-12 1995-05-05 Piezoelektrischer Vibrator Expired - Lifetime DE69522134T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12444494A JP3211562B2 (ja) 1994-05-12 1994-05-12 圧電振動子

Publications (2)

Publication Number Publication Date
DE69522134D1 DE69522134D1 (de) 2001-09-20
DE69522134T2 true DE69522134T2 (de) 2002-05-02

Family

ID=14885664

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69522134T Expired - Lifetime DE69522134T2 (de) 1994-05-12 1995-05-05 Piezoelektrischer Vibrator

Country Status (4)

Country Link
US (1) US5635647A (de)
EP (1) EP0682407B1 (de)
JP (1) JP3211562B2 (de)
DE (1) DE69522134T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09105639A (ja) * 1995-08-08 1997-04-22 Murata Mfg Co Ltd 振動ジャイロおよびその製造方法
JP3045053B2 (ja) * 1995-10-11 2000-05-22 株式会社村田製作所 振動ジャイロ
JPH1194557A (ja) * 1997-09-12 1999-04-09 Murata Mfg Co Ltd 振動ジャイロ
JP3674440B2 (ja) * 2000-02-15 2005-07-20 株式会社村田製作所 振動ジャイロ
JP2002250630A (ja) * 2001-02-26 2002-09-06 Murata Mfg Co Ltd 振動子支持構造およびそれを用いた振動ジャイロおよびそれを用いた電子装置
JP3741041B2 (ja) * 2001-05-09 2006-02-01 株式会社村田製作所 振動ジャイロおよびそれを用いた電子装置
US6655215B2 (en) * 2001-06-15 2003-12-02 Honeywell International Inc. Inverse corner cube for non-intrusive three axis vibration measurement
JP3698094B2 (ja) * 2001-11-29 2005-09-21 株式会社村田製作所 振動ジャイロおよびそれを用いた電子装置
US7322238B2 (en) * 2004-03-03 2008-01-29 Northrop Grumman Corporation Support of vibrating beam near nodal point
CA2498178A1 (en) * 2004-03-03 2005-09-03 Northrop Grumman Corporation Support of vibrating beam near nodal point
JP4595779B2 (ja) * 2005-10-12 2010-12-08 株式会社デンソー 角速度センサ
JP5838749B2 (ja) 2011-11-16 2016-01-06 セイコーエプソン株式会社 振動子、振動デバイスおよび電子機器
CN103516252A (zh) * 2012-06-27 2014-01-15 森泉(上海)光电科技有限公司 一种高速率、高分辨率、高驱动力的双模超声波线性马达
CN104022682B (zh) * 2014-06-25 2016-05-25 哈尔滨工业大学 弯振复合模态足式压电驱动器的跨尺度驱动方法
CN104022684B (zh) * 2014-06-25 2016-03-09 哈尔滨工业大学 纵振复合模态足式压电驱动器的跨尺度驱动方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR990214A (fr) * 1944-03-18 1951-09-19 Perfectionnement au maintien de cristaux piézo-électriques
FR992545A (fr) * 1944-06-22 1951-10-19 Perfectionnements au maintien de cristaux piézo-électriques
US5493166A (en) * 1988-08-12 1996-02-20 Murata Manufacturing Co., Ltd. Vibrator and vibrating gyroscope using the same
JPH02209339A (ja) * 1989-02-08 1990-08-20 Matsushita Electric Ind Co Ltd 紙送り装置
EP0477540B1 (de) * 1990-08-27 1995-08-09 Murata Manufacturing Co., Ltd. Signaldetektorschaltung für Schwingkreisel
US5345822A (en) * 1991-06-28 1994-09-13 Murata Manufacturing Co., Ltd. Vibratory gyroscope having a support member
JP2589896B2 (ja) * 1991-08-01 1997-03-12 赤井電機株式会社 振動ジャイロ
JP3178137B2 (ja) * 1993-01-08 2001-06-18 株式会社村田製作所 振動子の支持構造
JPH07139952A (ja) * 1993-11-16 1995-06-02 Murata Mfg Co Ltd 振動ジャイロ

Also Published As

Publication number Publication date
JP3211562B2 (ja) 2001-09-25
US5635647A (en) 1997-06-03
EP0682407A1 (de) 1995-11-15
JPH07306048A (ja) 1995-11-21
EP0682407B1 (de) 2001-08-16
DE69522134D1 (de) 2001-09-20

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Legal Events

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