DE69512155D1 - Piezoelektrischer Vibrator mit verbesserter Trägerstruktur - Google Patents

Piezoelektrischer Vibrator mit verbesserter Trägerstruktur

Info

Publication number
DE69512155D1
DE69512155D1 DE69512155T DE69512155T DE69512155D1 DE 69512155 D1 DE69512155 D1 DE 69512155D1 DE 69512155 T DE69512155 T DE 69512155T DE 69512155 T DE69512155 T DE 69512155T DE 69512155 D1 DE69512155 D1 DE 69512155D1
Authority
DE
Germany
Prior art keywords
support structure
piezoelectric vibrator
improved support
improved
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69512155T
Other languages
English (en)
Other versions
DE69512155T2 (de
Inventor
Koichi Zama
Takeshi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Application granted granted Critical
Publication of DE69512155D1 publication Critical patent/DE69512155D1/de
Publication of DE69512155T2 publication Critical patent/DE69512155T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0504—Holders; Supports for bulk acoustic wave devices
    • H03H9/0533—Holders; Supports for bulk acoustic wave devices consisting of wire
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE69512155T 1994-07-19 1995-07-17 Piezoelektrischer Vibrator mit verbesserter Trägerstruktur Expired - Fee Related DE69512155T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6166857A JP2976815B2 (ja) 1994-07-19 1994-07-19 圧電振動子

Publications (2)

Publication Number Publication Date
DE69512155D1 true DE69512155D1 (de) 1999-10-21
DE69512155T2 DE69512155T2 (de) 2000-01-05

Family

ID=15838937

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69512155T Expired - Fee Related DE69512155T2 (de) 1994-07-19 1995-07-17 Piezoelektrischer Vibrator mit verbesserter Trägerstruktur

Country Status (5)

Country Link
US (1) US5583829A (de)
EP (1) EP0693824B1 (de)
JP (1) JP2976815B2 (de)
KR (1) KR0181323B1 (de)
DE (1) DE69512155T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2885188B2 (ja) * 1996-06-19 1999-04-19 日本電気株式会社 圧電トランス
JP4630472B2 (ja) * 2001-02-08 2011-02-09 浅野金属工業株式会社 連結環
EP1267426A3 (de) * 2001-06-14 2005-06-15 Matsushita Electric Industrial Co., Ltd. Piezoelektrischer Transformator
DE10237587B4 (de) * 2002-08-16 2012-09-20 Robert Bosch Gmbh Verfahren zur Herstellung eines Piezoaktors
DE102007009230A1 (de) * 2007-02-26 2008-08-28 Epcos Ag Transformatoranordnung mit einem piezoelektrischen Transformator
KR100927029B1 (ko) * 2007-12-04 2009-11-17 세메스 주식회사 트랜스듀서 및 이를 포함하는 기판 세정 장치
JP5692580B2 (ja) * 2011-02-02 2015-04-01 横河電機株式会社 圧電トランス
KR20140081148A (ko) * 2012-12-21 2014-07-01 삼성전기주식회사 압전진동모듈

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2247627A (en) * 1938-03-09 1941-07-01 Rca Corp Piezoelectric crystal holder
US2284088A (en) * 1939-12-29 1942-05-26 Rca Corp Mounting piezoelectric elements
US3721841A (en) * 1971-06-16 1973-03-20 Motorola Inc Contact for piezoelectric crystals
US4109757A (en) * 1977-02-09 1978-08-29 Pacific West Exploration Company Self-erecting geophone unit and method and system for using same
JPS57138211A (en) 1981-02-19 1982-08-26 Murata Mfg Co Ltd Piezoelectric oscillation parts and its manufacture
JPS63185528A (ja) * 1987-01-28 1988-08-01 Kobe Steel Ltd Ｔ字管内面の電解研磨方法
JP2642417B2 (ja) * 1988-06-24 1997-08-20 株式会社トプコン 立体視眼底カメラ
JPH054339Y2 (de) * 1988-10-04 1993-02-03

Also Published As

Publication number Publication date
KR960006262A (ko) 1996-02-23
JP2976815B2 (ja) 1999-11-10
DE69512155T2 (de) 2000-01-05
KR0181323B1 (ko) 1999-04-01
US5583829A (en) 1996-12-10
EP0693824A1 (de) 1996-01-24
EP0693824B1 (de) 1999-09-15
JPH0832138A (ja) 1996-02-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee