DE69702724D1 - Vibrator - Google Patents

Vibrator

Info

Publication number
DE69702724D1
DE69702724D1 DE69702724T DE69702724T DE69702724D1 DE 69702724 D1 DE69702724 D1 DE 69702724D1 DE 69702724 T DE69702724 T DE 69702724T DE 69702724 T DE69702724 T DE 69702724T DE 69702724 D1 DE69702724 D1 DE 69702724D1
Authority
DE
Germany
Prior art keywords
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69702724T
Other languages
English (en)
Other versions
DE69702724T2 (de
Inventor
Yoshiaki Heinouchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69702724D1 publication Critical patent/DE69702724D1/de
Publication of DE69702724T2 publication Critical patent/DE69702724T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE69702724T 1996-02-22 1997-02-19 Vibrator Expired - Fee Related DE69702724T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8061947A JPH09229960A (ja) 1996-02-22 1996-02-22 振動子

Publications (2)

Publication Number Publication Date
DE69702724D1 true DE69702724D1 (de) 2000-09-14
DE69702724T2 DE69702724T2 (de) 2001-01-11

Family

ID=13185907

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69702724T Expired - Fee Related DE69702724T2 (de) 1996-02-22 1997-02-19 Vibrator

Country Status (4)

Country Link
US (1) US5913244A (de)
EP (1) EP0791832B1 (de)
JP (1) JPH09229960A (de)
DE (1) DE69702724T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000097707A (ja) * 1998-09-18 2000-04-07 Fujitsu Ltd 加速度センサ
US20020074897A1 (en) * 2000-12-15 2002-06-20 Qing Ma Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
FR2944102B1 (fr) * 2009-04-03 2011-06-10 Onera (Off Nat Aerospatiale) Element vibrant sur deux modes decouples et application a un gyrometre vibrant.
US8661899B2 (en) 2010-03-01 2014-03-04 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
US8833161B2 (en) 2010-04-20 2014-09-16 Sand 9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
US9075077B2 (en) 2010-09-20 2015-07-07 Analog Devices, Inc. Resonant sensing using extensional modes of a plate
JP5748867B2 (ja) * 2011-10-06 2015-07-15 ハイソニック.カンパニー, リミテッドHysonic.Co., Ltd. 圧電素子が装着されたバイブレータ
US9383208B2 (en) 2011-10-13 2016-07-05 Analog Devices, Inc. Electromechanical magnetometer and applications thereof
TWI522307B (zh) * 2013-03-25 2016-02-21 財團法人工業技術研究院 複合材料的微機電裝置與其製作方法
JP2014212409A (ja) * 2013-04-18 2014-11-13 セイコーエプソン株式会社 Ｍｅｍｓ振動子、電子機器、及び移動体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4628734A (en) * 1982-01-21 1986-12-16 Watson Industries, Inc. Angular rate sensor apparatus
US4525081A (en) * 1983-09-09 1985-06-25 Rosemount Inc. Vibration dampened beam
US5053671A (en) * 1987-11-16 1991-10-01 Nissan Motor Company, Limited Piezoelectric sensor for monitoring kinetic momentum
EP0614087B1 (de) * 1993-03-01 2000-03-29 Murata Manufacturing Co., Ltd. Piezoelektrischer Vibrator und diesen verwendenden Beschleunigungssensor
KR100204457B1 (ko) * 1993-05-28 1999-06-15 모리시타 요이찌 압전진동자구체 및 그 제조방법
JP3387199B2 (ja) * 1994-04-21 2003-03-17 松下電器産業株式会社 角速度センサ装置
EP0707212A3 (de) * 1994-09-14 1996-06-12 Murata Manufacturing Co Beschleunigungsmessaufnehmer

Also Published As

Publication number Publication date
JPH09229960A (ja) 1997-09-05
US5913244A (en) 1999-06-15
EP0791832A1 (de) 1997-08-27
DE69702724T2 (de) 2001-01-11
EP0791832B1 (de) 2000-08-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee