CN113025992B - 组合物和使用所述组合物沉积含硅膜的方法 - Google Patents

组合物和使用所述组合物沉积含硅膜的方法 Download PDF

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CN113025992B
CN113025992B CN202110244436.5A CN202110244436A CN113025992B CN 113025992 B CN113025992 B CN 113025992B CN 202110244436 A CN202110244436 A CN 202110244436A CN 113025992 B CN113025992 B CN 113025992B
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silicon
plasma
nitrogen
branched
reactor
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CN113025992A (zh
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雷新建
金武性
M·R·麦克唐纳
萧满超
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Versum Materials US LLC
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