CN100505303C - 致密双平面器件 - Google Patents
致密双平面器件 Download PDFInfo
- Publication number
- CN100505303C CN100505303C CNB2003801062984A CN200380106298A CN100505303C CN 100505303 C CN100505303 C CN 100505303C CN B2003801062984 A CNB2003801062984 A CN B2003801062984A CN 200380106298 A CN200380106298 A CN 200380106298A CN 100505303 C CN100505303 C CN 100505303C
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- China
- Prior art keywords
- channel region
- semiconductor body
- independent semiconductor
- independent
- crystalline plane
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- Expired - Lifetime
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823821—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0922—Combination of complementary transistors having a different structure, e.g. stacked CMOS, high-voltage and low-voltage CMOS
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
- H01L27/1211—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI combined with field-effect transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
Claims (42)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/248,123 | 2002-12-19 | ||
US10/248,123 US6794718B2 (en) | 2002-12-19 | 2002-12-19 | High mobility crystalline planes in double-gate CMOS technology |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1726595A CN1726595A (zh) | 2006-01-25 |
CN100505303C true CN100505303C (zh) | 2009-06-24 |
Family
ID=32592757
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2003801062984A Expired - Lifetime CN100505303C (zh) | 2002-12-19 | 2003-12-05 | 致密双平面器件 |
Country Status (9)
Country | Link |
---|---|
US (1) | US6794718B2 (zh) |
EP (1) | EP1573823B1 (zh) |
JP (1) | JP4947902B2 (zh) |
KR (1) | KR100734822B1 (zh) |
CN (1) | CN100505303C (zh) |
AU (1) | AU2003293380A1 (zh) |
IL (1) | IL169140A0 (zh) |
TW (1) | TWI239630B (zh) |
WO (1) | WO2004061972A1 (zh) |
Families Citing this family (139)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI288443B (en) | 2002-05-17 | 2007-10-11 | Semiconductor Energy Lab | SiN film, semiconductor device, and the manufacturing method thereof |
US7358121B2 (en) * | 2002-08-23 | 2008-04-15 | Intel Corporation | Tri-gate devices and methods of fabrication |
US6709982B1 (en) | 2002-11-26 | 2004-03-23 | Advanced Micro Devices, Inc. | Double spacer FinFET formation |
US6855606B2 (en) * | 2003-02-20 | 2005-02-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor nano-rod devices |
US6762448B1 (en) * | 2003-04-03 | 2004-07-13 | Advanced Micro Devices, Inc. | FinFET device with multiple fin structures |
US7074656B2 (en) * | 2003-04-29 | 2006-07-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Doping of semiconductor fin devices |
US6909186B2 (en) * | 2003-05-01 | 2005-06-21 | International Business Machines Corporation | High performance FET devices and methods therefor |
US7456476B2 (en) * | 2003-06-27 | 2008-11-25 | Intel Corporation | Nonplanar semiconductor device with partially or fully wrapped around gate electrode and methods of fabrication |
US6909151B2 (en) | 2003-06-27 | 2005-06-21 | Intel Corporation | Nonplanar device with stress incorporation layer and method of fabrication |
US7005330B2 (en) * | 2003-06-27 | 2006-02-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for forming the gate electrode in a multiple-gate transistor |
US6716686B1 (en) | 2003-07-08 | 2004-04-06 | Advanced Micro Devices, Inc. | Method for forming channels in a finfet device |
US7355253B2 (en) * | 2003-08-22 | 2008-04-08 | International Business Machines Corporation | Strained-channel Fin field effect transistor (FET) with a uniform channel thickness and separate gates |
US20050062088A1 (en) * | 2003-09-22 | 2005-03-24 | Texas Instruments Incorporated | Multi-gate one-transistor dynamic random access memory |
US6970373B2 (en) * | 2003-10-02 | 2005-11-29 | Intel Corporation | Method and apparatus for improving stability of a 6T CMOS SRAM cell |
US7498225B1 (en) | 2003-12-04 | 2009-03-03 | Advanced Micro Devices, Inc. | Systems and methods for forming multiple fin structures using metal-induced-crystallization |
US6924178B2 (en) * | 2003-12-08 | 2005-08-02 | International Business Machines Corporation | Oxide/nitride stacked in FinFET spacer process |
US6924561B1 (en) * | 2003-12-08 | 2005-08-02 | Advanced Micro Devices, Inc. | SRAM formation using shadow implantation |
KR100601911B1 (ko) * | 2003-12-30 | 2006-07-14 | 동부일렉트로닉스 주식회사 | 핀 펫 소자 제조 방법 |
US7105390B2 (en) * | 2003-12-30 | 2006-09-12 | Intel Corporation | Nonplanar transistors with metal gate electrodes |
US7268058B2 (en) * | 2004-01-16 | 2007-09-11 | Intel Corporation | Tri-gate transistors and methods to fabricate same |
KR100585131B1 (ko) | 2004-02-20 | 2006-06-01 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
JP2005236305A (ja) * | 2004-02-20 | 2005-09-02 | Samsung Electronics Co Ltd | トリプルゲートトランジスタを有する半導体素子及びその製造方法 |
US20050189598A1 (en) * | 2004-02-27 | 2005-09-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Logic embedded-memory integrated circuits |
US6998684B2 (en) * | 2004-03-31 | 2006-02-14 | International Business Machines Corporation | High mobility plane CMOS SOI |
US7154118B2 (en) * | 2004-03-31 | 2006-12-26 | Intel Corporation | Bulk non-planar transistor having strained enhanced mobility and methods of fabrication |
US7115920B2 (en) * | 2004-04-12 | 2006-10-03 | International Business Machines Corporation | FinFET transistor and circuit |
US7176092B2 (en) * | 2004-04-16 | 2007-02-13 | Taiwan Semiconductor Manufacturing Company | Gate electrode for a semiconductor fin device |
US7208815B2 (en) * | 2004-05-28 | 2007-04-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | CMOS logic gate fabricated on hybrid crystal orientations and method of forming thereof |
US7452778B2 (en) * | 2004-06-10 | 2008-11-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor nano-wire devices and methods of fabrication |
US7042009B2 (en) * | 2004-06-30 | 2006-05-09 | Intel Corporation | High mobility tri-gate devices and methods of fabrication |
US7348284B2 (en) | 2004-08-10 | 2008-03-25 | Intel Corporation | Non-planar pMOS structure with a strained channel region and an integrated strained CMOS flow |
US7354806B2 (en) * | 2004-09-17 | 2008-04-08 | International Business Machines Corporation | Semiconductor device structure with active regions having different surface directions and methods |
US6949796B1 (en) * | 2004-09-21 | 2005-09-27 | International Business Machines Corporation | Halo implant in semiconductor structures |
US7332439B2 (en) | 2004-09-29 | 2008-02-19 | Intel Corporation | Metal gate transistors with epitaxial source and drain regions |
US7422946B2 (en) | 2004-09-29 | 2008-09-09 | Intel Corporation | Independently accessed double-gate and tri-gate transistors in same process flow |
US7361958B2 (en) | 2004-09-30 | 2008-04-22 | Intel Corporation | Nonplanar transistors with metal gate electrodes |
US20060086977A1 (en) | 2004-10-25 | 2006-04-27 | Uday Shah | Nonplanar device with thinned lower body portion and method of fabrication |
US7393733B2 (en) | 2004-12-01 | 2008-07-01 | Amberwave Systems Corporation | Methods of forming hybrid fin field-effect transistor structures |
US20060113603A1 (en) * | 2004-12-01 | 2006-06-01 | Amberwave Systems Corporation | Hybrid semiconductor-on-insulator structures and related methods |
US7274084B2 (en) * | 2005-01-12 | 2007-09-25 | International Business Machines Corporation | Enhanced PFET using shear stress |
US7183142B2 (en) * | 2005-01-13 | 2007-02-27 | International Business Machines Corporation | FinFETs with long gate length at high density |
US7193279B2 (en) * | 2005-01-18 | 2007-03-20 | Intel Corporation | Non-planar MOS structure with a strained channel region |
US7518196B2 (en) | 2005-02-23 | 2009-04-14 | Intel Corporation | Field effect transistor with narrow bandgap source and drain regions and method of fabrication |
US7205639B2 (en) * | 2005-03-09 | 2007-04-17 | Infineon Technologies Ag | Semiconductor devices with rotated substrates and methods of manufacture thereof |
US20060202266A1 (en) | 2005-03-14 | 2006-09-14 | Marko Radosavljevic | Field effect transistor with metal source/drain regions |
US7521993B1 (en) * | 2005-05-13 | 2009-04-21 | Sun Microsystems, Inc. | Substrate stress signal amplifier |
US8324660B2 (en) | 2005-05-17 | 2012-12-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
US9153645B2 (en) | 2005-05-17 | 2015-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
US7858481B2 (en) | 2005-06-15 | 2010-12-28 | Intel Corporation | Method for fabricating transistor with thinned channel |
EP2816588B1 (en) | 2005-06-20 | 2016-09-21 | Nippon Telegraph And Telephone Corporation | Process for producing a diamond semiconductor element |
US7547637B2 (en) | 2005-06-21 | 2009-06-16 | Intel Corporation | Methods for patterning a semiconductor film |
US7279375B2 (en) * | 2005-06-30 | 2007-10-09 | Intel Corporation | Block contact architectures for nanoscale channel transistors |
JP2007035957A (ja) * | 2005-07-27 | 2007-02-08 | Toshiba Corp | 半導体装置とその製造方法 |
US7382029B2 (en) * | 2005-07-29 | 2008-06-03 | International Business Machines Corporation | Method and apparatus for improving integrated circuit device performance using hybrid crystal orientations |
KR100655437B1 (ko) * | 2005-08-09 | 2006-12-08 | 삼성전자주식회사 | 반도체 웨이퍼 및 그 제조방법 |
US7230287B2 (en) * | 2005-08-10 | 2007-06-12 | International Business Machines Corporation | Chevron CMOS trigate structure |
US7402875B2 (en) | 2005-08-17 | 2008-07-22 | Intel Corporation | Lateral undercut of metal gate in SOI device |
US20070048980A1 (en) * | 2005-08-24 | 2007-03-01 | International Business Machines Corporation | Method for post-rie passivation of semiconductor surfaces for epitaxial growth |
US7462903B1 (en) * | 2005-09-14 | 2008-12-09 | Spansion Llc | Methods for fabricating semiconductor devices and contacts to semiconductor devices |
US7323374B2 (en) * | 2005-09-19 | 2008-01-29 | International Business Machines Corporation | Dense chevron finFET and method of manufacturing same |
US20070063306A1 (en) * | 2005-09-22 | 2007-03-22 | Intel Corporation | Multiple crystal orientations on the same substrate |
US7479421B2 (en) | 2005-09-28 | 2009-01-20 | Intel Corporation | Process for integrating planar and non-planar CMOS transistors on a bulk substrate and article made thereby |
US20070090416A1 (en) | 2005-09-28 | 2007-04-26 | Doyle Brian S | CMOS devices with a single work function gate electrode and method of fabrication |
US7485503B2 (en) | 2005-11-30 | 2009-02-03 | Intel Corporation | Dielectric interface for group III-V semiconductor device |
US7402856B2 (en) * | 2005-12-09 | 2008-07-22 | Intel Corporation | Non-planar microelectronic device having isolation element to mitigate fringe effects and method to fabricate same |
US7439588B2 (en) * | 2005-12-13 | 2008-10-21 | Intel Corporation | Tri-gate integration with embedded floating body memory cell using a high-K dual metal gate |
US7512017B2 (en) * | 2005-12-21 | 2009-03-31 | Intel Corporation | Integration of planar and tri-gate devices on the same substrate |
US7863713B2 (en) * | 2005-12-22 | 2011-01-04 | Tohoku University | Semiconductor device |
US7396711B2 (en) | 2005-12-27 | 2008-07-08 | Intel Corporation | Method of fabricating a multi-cornered film |
US7525160B2 (en) | 2005-12-27 | 2009-04-28 | Intel Corporation | Multigate device with recessed strain regions |
US20070148926A1 (en) * | 2005-12-28 | 2007-06-28 | Intel Corporation | Dual halo implant for improving short channel effect in three-dimensional tri-gate transistors |
US20070152266A1 (en) * | 2005-12-29 | 2007-07-05 | Intel Corporation | Method and structure for reducing the external resistance of a three-dimensional transistor through use of epitaxial layers |
US7414877B2 (en) * | 2006-01-23 | 2008-08-19 | Freescale Semiconductor, Inc. | Electronic device including a static-random-access memory cell and a process of forming the electronic device |
US7777250B2 (en) | 2006-03-24 | 2010-08-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures and related methods for device fabrication |
US20070235763A1 (en) * | 2006-03-29 | 2007-10-11 | Doyle Brian S | Substrate band gap engineered multi-gate pMOS devices |
US7407847B2 (en) * | 2006-03-31 | 2008-08-05 | Intel Corporation | Stacked multi-gate transistor design and method of fabrication |
US7449373B2 (en) * | 2006-03-31 | 2008-11-11 | Intel Corporation | Method of ion implanting for tri-gate devices |
US7425500B2 (en) | 2006-03-31 | 2008-09-16 | Intel Corporation | Uniform silicide metal on epitaxially grown source and drain regions of three-dimensional transistors |
US8734583B2 (en) | 2006-04-04 | 2014-05-27 | Micron Technology, Inc. | Grown nanofin transistors |
JP5234439B2 (ja) * | 2006-04-04 | 2013-07-10 | マイクロン テクノロジー, インク. | エッチングで作成したナノFinトランジスタ |
US7491995B2 (en) | 2006-04-04 | 2009-02-17 | Micron Technology, Inc. | DRAM with nanofin transistors |
US8354311B2 (en) | 2006-04-04 | 2013-01-15 | Micron Technology, Inc. | Method for forming nanofin transistors |
US7670928B2 (en) * | 2006-06-14 | 2010-03-02 | Intel Corporation | Ultra-thin oxide bonding for S1 to S1 dual orientation bonding |
US8143646B2 (en) | 2006-08-02 | 2012-03-27 | Intel Corporation | Stacking fault and twin blocking barrier for integrating III-V on Si |
JP4487266B2 (ja) * | 2006-08-30 | 2010-06-23 | エルピーダメモリ株式会社 | 半導体装置 |
WO2008030574A1 (en) | 2006-09-07 | 2008-03-13 | Amberwave Systems Corporation | Defect reduction using aspect ratio trapping |
US7435683B2 (en) * | 2006-09-15 | 2008-10-14 | Intel Corporation | Apparatus and method for selectively recessing spacers on multi-gate devices |
US7456471B2 (en) * | 2006-09-15 | 2008-11-25 | International Business Machines Corporation | Field effect transistor with raised source/drain fin straps |
US7700470B2 (en) | 2006-09-22 | 2010-04-20 | Intel Corporation | Selective anisotropic wet etching of workfunction metal for semiconductor devices |
WO2008039495A1 (en) | 2006-09-27 | 2008-04-03 | Amberwave Systems Corporation | Tri-gate field-effect transistors formed by aspect ratio trapping |
US7875958B2 (en) | 2006-09-27 | 2011-01-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures |
US20080187018A1 (en) | 2006-10-19 | 2008-08-07 | Amberwave Systems Corporation | Distributed feedback lasers formed via aspect ratio trapping |
US7538391B2 (en) * | 2007-01-09 | 2009-05-26 | International Business Machines Corporation | Curved FINFETs |
US7772048B2 (en) * | 2007-02-23 | 2010-08-10 | Freescale Semiconductor, Inc. | Forming semiconductor fins using a sacrificial fin |
US7699996B2 (en) | 2007-02-28 | 2010-04-20 | International Business Machines Corporation | Sidewall image transfer processes for forming multiple line-widths |
US7777306B2 (en) * | 2007-03-06 | 2010-08-17 | International Business Machines Corporation | Defect-free hybrid orientation technology for semiconductor devices |
WO2008124154A2 (en) | 2007-04-09 | 2008-10-16 | Amberwave Systems Corporation | Photovoltaics on silicon |
US7825328B2 (en) | 2007-04-09 | 2010-11-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Nitride-based multi-junction solar cell modules and methods for making the same |
US8237151B2 (en) | 2009-01-09 | 2012-08-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Diode-based devices and methods for making the same |
US8304805B2 (en) | 2009-01-09 | 2012-11-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor diodes fabricated by aspect ratio trapping with coalesced films |
US8286114B2 (en) * | 2007-04-18 | 2012-10-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | 3-dimensional device design layout |
US8237201B2 (en) * | 2007-05-30 | 2012-08-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Layout methods of integrated circuits having unit MOS devices |
US8329541B2 (en) | 2007-06-15 | 2012-12-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | InP-based transistor fabrication |
US20090001470A1 (en) * | 2007-06-26 | 2009-01-01 | Anderson Brent A | Method for forming acute-angle spacer for non-orthogonal finfet and the resulting structure |
JP2009054705A (ja) * | 2007-08-24 | 2009-03-12 | Toshiba Corp | 半導体基板、半導体装置およびその製造方法 |
WO2009035746A2 (en) | 2007-09-07 | 2009-03-19 | Amberwave Systems Corporation | Multi-junction solar cells |
US7847320B2 (en) * | 2007-11-14 | 2010-12-07 | International Business Machines Corporation | Dense chevron non-planar field effect transistors and method |
WO2009082706A1 (en) | 2007-12-21 | 2009-07-02 | The Trustees Of Columbia University In The City Of New York | Active cmos sensor array for electrochemical biomolecular detection |
US7759179B2 (en) * | 2008-01-31 | 2010-07-20 | International Business Machines Corporation | Multi-gated, high-mobility, density improved devices |
JP2009188223A (ja) * | 2008-02-07 | 2009-08-20 | Seiko Instruments Inc | 半導体装置 |
US7982269B2 (en) * | 2008-04-17 | 2011-07-19 | International Business Machines Corporation | Transistors having asymmetric strained source/drain portions |
US8183667B2 (en) | 2008-06-03 | 2012-05-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Epitaxial growth of crystalline material |
US8362566B2 (en) | 2008-06-23 | 2013-01-29 | Intel Corporation | Stress in trigate devices using complimentary gate fill materials |
US8274097B2 (en) | 2008-07-01 | 2012-09-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reduction of edge effects from aspect ratio trapping |
US8981427B2 (en) | 2008-07-15 | 2015-03-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Polishing of small composite semiconductor materials |
FR2935539B1 (fr) * | 2008-08-26 | 2010-12-10 | Commissariat Energie Atomique | Circuit cmos tridimensionnel sur deux substrats desalignes et procede de realisation |
US8034697B2 (en) | 2008-09-19 | 2011-10-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Formation of devices by epitaxial layer overgrowth |
US20100072515A1 (en) | 2008-09-19 | 2010-03-25 | Amberwave Systems Corporation | Fabrication and structures of crystalline material |
US8253211B2 (en) | 2008-09-24 | 2012-08-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor sensor structures with reduced dislocation defect densities |
JP5478199B2 (ja) * | 2008-11-13 | 2014-04-23 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US20100155801A1 (en) * | 2008-12-22 | 2010-06-24 | Doyle Brian S | Integrated circuit, 1T-1C embedded memory cell containing same, and method of manufacturing 1T-1C memory cell for embedded memory application |
US7999298B2 (en) * | 2008-12-30 | 2011-08-16 | Intel Corporation | Embedded memory cell and method of manufacturing same |
US7906802B2 (en) * | 2009-01-28 | 2011-03-15 | Infineon Technologies Ag | Semiconductor element and a method for producing the same |
US8629446B2 (en) | 2009-04-02 | 2014-01-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Devices formed from a non-polar plane of a crystalline material and method of making the same |
US8053318B2 (en) * | 2009-06-25 | 2011-11-08 | International Business Machines Corporation | FET with replacement gate structure and method of fabricating the same |
US20140339646A1 (en) | 2011-09-30 | 2014-11-20 | Subhash M. Joshi | Non-planar transitor fin fabrication |
US8466012B1 (en) * | 2012-02-01 | 2013-06-18 | International Business Machines Corporation | Bulk FinFET and SOI FinFET hybrid technology |
JP2013197342A (ja) * | 2012-03-21 | 2013-09-30 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
US9142400B1 (en) | 2012-07-17 | 2015-09-22 | Stc.Unm | Method of making a heteroepitaxial layer on a seed area |
WO2014062936A1 (en) | 2012-10-17 | 2014-04-24 | The Trustees Of Columbia University In The City Of New York | Cmos-integrated jfet for dense low-noise bioelectronic platforms |
US8841178B1 (en) | 2013-03-13 | 2014-09-23 | International Business Machines Corporation | Strained silicon nFET and silicon germanium pFET on same wafer |
US8951870B2 (en) | 2013-03-14 | 2015-02-10 | International Business Machines Corporation | Forming strained and relaxed silicon and silicon germanium fins on the same wafer |
US8859355B1 (en) | 2013-05-06 | 2014-10-14 | International Business Machines Corporation | Method to make dual material finFET on same substrate |
US9412664B2 (en) | 2013-05-06 | 2016-08-09 | International Business Machines Corporation | Dual material finFET on single substrate |
US20150187915A1 (en) * | 2013-12-26 | 2015-07-02 | Samsung Electronics Co., Ltd. | Method for fabricating fin type transistor |
US9496399B2 (en) * | 2015-04-02 | 2016-11-15 | International Business Machines Corporation | FinFET devices with multiple channel lengths |
US9935106B2 (en) | 2016-04-01 | 2018-04-03 | Globalfoundries Inc. | Multi-finger devices in mutliple-gate-contacted-pitch, integrated structures |
US10672889B2 (en) * | 2017-11-30 | 2020-06-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
WO2023191808A1 (en) * | 2022-04-01 | 2023-10-05 | Intel Corporation | Integrated circuit devices with angled transistors |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3476991A (en) * | 1967-11-08 | 1969-11-04 | Texas Instruments Inc | Inversion layer field effect device with azimuthally dependent carrier mobility |
US4933298A (en) * | 1987-12-18 | 1990-06-12 | Fujitsu Limited | Method of making high speed semiconductor device having a silicon-on-insulator structure |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3603848A (en) * | 1969-02-27 | 1971-09-07 | Tokyo Shibaura Electric Co | Complementary field-effect-type semiconductor device |
JPS6170748A (ja) * | 1984-09-14 | 1986-04-11 | Hitachi Ltd | 半導体装置 |
US4768076A (en) * | 1984-09-14 | 1988-08-30 | Hitachi, Ltd. | Recrystallized CMOS with different crystal planes |
JPS6292361A (ja) * | 1985-10-17 | 1987-04-27 | Toshiba Corp | 相補型半導体装置 |
JPH01264254A (ja) * | 1988-04-15 | 1989-10-20 | Agency Of Ind Science & Technol | 積層型半導体装置の製造方法 |
JPH03285351A (ja) * | 1990-04-02 | 1991-12-16 | Oki Electric Ind Co Ltd | Cmis型半導体装置およびその製造方法 |
JP3038939B2 (ja) * | 1991-02-08 | 2000-05-08 | 日産自動車株式会社 | 半導体装置 |
JPH0555493A (ja) * | 1991-08-26 | 1993-03-05 | Toshiba Corp | 半導体集積回路装置 |
JP3219307B2 (ja) * | 1991-08-28 | 2001-10-15 | シャープ株式会社 | 半導体装置の構造および製造方法 |
US5293052A (en) * | 1992-03-23 | 1994-03-08 | Harris Corporation | SOT CMOS device having differentially doped body extension for providing improved backside leakage channel stop |
JP2568796B2 (ja) * | 1992-11-26 | 1997-01-08 | 松下電送株式会社 | 画像通信装置 |
JP3431198B2 (ja) * | 1993-02-26 | 2003-07-28 | 株式会社東芝 | 半導体記憶装置およびその製造方法 |
US5762706A (en) * | 1993-11-09 | 1998-06-09 | Fujitsu Limited | Method of forming compound semiconductor device |
US5497019A (en) * | 1994-09-22 | 1996-03-05 | The Aerospace Corporation | Silicon-on-insulator gate-all-around MOSFET devices and fabrication methods |
US5698893A (en) * | 1995-01-03 | 1997-12-16 | Motorola, Inc. | Static-random-access memory cell with trench transistor and enhanced stability |
JP3472401B2 (ja) * | 1996-01-17 | 2003-12-02 | 三菱電機株式会社 | 半導体装置の製造方法 |
US5729045A (en) * | 1996-04-02 | 1998-03-17 | Advanced Micro Devices, Inc. | Field effect transistor with higher mobility |
US6190949B1 (en) * | 1996-05-22 | 2001-02-20 | Sony Corporation | Silicon thin film, group of silicon single crystal grains and formation process thereof, and semiconductor device, flash memory cell and fabrication process thereof |
KR100200485B1 (ko) * | 1996-08-08 | 1999-06-15 | 윤종용 | 모스 트랜지스터 및 그 제조방법 |
US5808340A (en) * | 1996-09-18 | 1998-09-15 | Advanced Micro Devices, Inc. | Short channel self aligned VMOS field effect transistor |
TW319904B (en) * | 1997-01-20 | 1997-11-11 | United Microelectronics Corp | Three dimensional read only memory and manufacturing method thereof |
JPH11274485A (ja) * | 1998-03-25 | 1999-10-08 | Nec Kansai Ltd | 絶縁ゲート型半導体装置およびその製造方法 |
US6121651A (en) * | 1998-07-30 | 2000-09-19 | International Business Machines Corporation | Dram cell with three-sided-gate transfer device |
US6261886B1 (en) * | 1998-08-04 | 2001-07-17 | Texas Instruments Incorporated | Increased gate to body coupling and application to DRAM and dynamic circuits |
US6164781A (en) * | 1998-11-13 | 2000-12-26 | Alliedsignal Inc. | High temperature transistor with reduced risk of electromigration and differently shaped electrodes |
JP4058751B2 (ja) * | 2000-06-20 | 2008-03-12 | 日本電気株式会社 | 電界効果型トランジスタの製造方法 |
US6413802B1 (en) * | 2000-10-23 | 2002-07-02 | The Regents Of The University Of California | Finfet transistor structures having a double gate channel extending vertically from a substrate and methods of manufacture |
US6300182B1 (en) * | 2000-12-11 | 2001-10-09 | Advanced Micro Devices, Inc. | Field effect transistor having dual gates with asymmetrical doping for reduced threshold voltage |
US6967351B2 (en) * | 2001-12-04 | 2005-11-22 | International Business Machines Corporation | Finfet SRAM cell using low mobility plane for cell stability and method for forming |
JP4265882B2 (ja) * | 2001-12-13 | 2009-05-20 | 忠弘 大見 | 相補型mis装置 |
JP3782021B2 (ja) * | 2002-02-22 | 2006-06-07 | 株式会社東芝 | 半導体装置、半導体装置の製造方法、半導体基板の製造方法 |
JP3605086B2 (ja) * | 2002-03-29 | 2004-12-22 | 株式会社東芝 | 電界効果トランジスタ |
-
2002
- 2002-12-19 US US10/248,123 patent/US6794718B2/en not_active Expired - Lifetime
-
2003
- 2003-11-28 TW TW092133496A patent/TWI239630B/zh not_active IP Right Cessation
- 2003-12-05 AU AU2003293380A patent/AU2003293380A1/en not_active Abandoned
- 2003-12-05 EP EP03790326.7A patent/EP1573823B1/en not_active Expired - Lifetime
- 2003-12-05 JP JP2004565197A patent/JP4947902B2/ja not_active Expired - Fee Related
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- 2003-12-05 CN CNB2003801062984A patent/CN100505303C/zh not_active Expired - Lifetime
- 2003-12-05 KR KR1020057009001A patent/KR100734822B1/ko active IP Right Grant
-
2005
- 2005-06-14 IL IL169140A patent/IL169140A0/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3476991A (en) * | 1967-11-08 | 1969-11-04 | Texas Instruments Inc | Inversion layer field effect device with azimuthally dependent carrier mobility |
US4933298A (en) * | 1987-12-18 | 1990-06-12 | Fujitsu Limited | Method of making high speed semiconductor device having a silicon-on-insulator structure |
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WO2004061972A1 (en) | 2004-07-22 |
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CN1726595A (zh) | 2006-01-25 |
EP1573823A4 (en) | 2009-03-25 |
KR20050085052A (ko) | 2005-08-29 |
JP2006511962A (ja) | 2006-04-06 |
US6794718B2 (en) | 2004-09-21 |
EP1573823B1 (en) | 2016-11-16 |
US20040119100A1 (en) | 2004-06-24 |
TWI239630B (en) | 2005-09-11 |
IL169140A0 (en) | 2007-07-04 |
KR100734822B1 (ko) | 2007-07-06 |
JP4947902B2 (ja) | 2012-06-06 |
EP1573823A1 (en) | 2005-09-14 |
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