KR910007067A - 다중몰드형 반도체장치 및 그 제조방법 - Google Patents

다중몰드형 반도체장치 및 그 제조방법 Download PDF

Info

Publication number
KR910007067A
KR910007067A KR1019900014437A KR900014437A KR910007067A KR 910007067 A KR910007067 A KR 910007067A KR 1019900014437 A KR1019900014437 A KR 1019900014437A KR 900014437 A KR900014437 A KR 900014437A KR 910007067 A KR910007067 A KR 910007067A
Authority
KR
South Korea
Prior art keywords
internal resin
resin
fatty acid
internal
semiconductor device
Prior art date
Application number
KR1019900014437A
Other languages
English (en)
Other versions
KR940008334B1 (ko
Inventor
쇼우이치 미야하라
게이지 가마사키
미치야 히가시
Original Assignee
아오이 죠이치
가부시키가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17017394&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR910007067(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 아오이 죠이치, 가부시키가이샤 도시바 filed Critical 아오이 죠이치
Publication of KR910007067A publication Critical patent/KR910007067A/ko
Application granted granted Critical
Publication of KR940008334B1 publication Critical patent/KR940008334B1/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3135Double encapsulation or coating and encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0652Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next and on each other, i.e. mixed assemblies
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/85909Post-treatment of the connector or wire bonding area
    • H01L2224/8592Applying permanent coating, e.g. protective coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

내용 없음

Description

다중몰드형 반도체장치 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 다중몰드형 반도체장치의 제조방법을 나타낸 플로우 챠트.

Claims (2)

  1. 리드프레임(3)에 마운트되어 와이어 본딩된 반도체칩(4,5)과, 이 반도체칩(4,5)을 밀봉하도록 형성된 내부 수지(1), 이 내부 수지(1)를 에워싸도록 형성된 외부 수지(2)를 구비하여 구성되고, 상기 내부 수지(1)에 첨가된 왁스의 주성분이 에스테르류와 지방산계, 지방산 금속염계, 지방알콜, 다가의 알콜, 및 지방산 아미드로 이루어진 군으로부터 선택된 적어도 한 종류의 화합물인 것을 특징으로 하는 다중 몰드형 반도체 장치.
  2. 리드프레임(3)상에 마운트되어 와이어 본딩된 반도체칩(4,5)을 내부 수지용 금형의 캐비티에 탑재하는 공정과, 상기 내부 수지용 금형의 내부에 용융된 내부 수지(1)를 주입해서 경화 시킨 후에 꺼내는 공정, 끄집어낸 상기 내부 수지(1)에 밀봉된 상기 반도체칩(4,5)을 외부 수지용 금형의 캐비티에 탑재하는 공정, 상기 외부 수지용 금형의 내부에 용융된 외부 수지(2)를 주입해서 경화 시킨 후에 꺼내는 공정을 구비하여 이루어지고, 상기 내부의 수지(1)에 첨가시키는 왁스의 주성분이 에스테르류와 지방산계, 지방산 금속염계, 지방알콜, 다가의 알콜, 및 지방산 아미드로 이루어진 군으로부터 선택된 적어도 한 종류의 화합물인 것을 특징으로 하는 다중몰드형 반도체 장치의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900014437A 1989-09-13 1990-09-13 다중몰드형 반도체장치 및 그 제조방법 KR940008334B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1237578A JP2656356B2 (ja) 1989-09-13 1989-09-13 多重モールド型半導体装置及びその製造方法
JP1-237578 1989-09-13

Publications (2)

Publication Number Publication Date
KR910007067A true KR910007067A (ko) 1991-04-30
KR940008334B1 KR940008334B1 (ko) 1994-09-12

Family

ID=17017394

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900014437A KR940008334B1 (ko) 1989-09-13 1990-09-13 다중몰드형 반도체장치 및 그 제조방법

Country Status (5)

Country Link
US (1) US5057457A (ko)
EP (1) EP0417787B1 (ko)
JP (1) JP2656356B2 (ko)
KR (1) KR940008334B1 (ko)
DE (1) DE69029630T2 (ko)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5302553A (en) * 1991-10-04 1994-04-12 Texas Instruments Incorporated Method of forming a coated plastic package
US5310702A (en) * 1992-03-20 1994-05-10 Kulicke And Soffa Industries, Inc. Method of preventing short-circuiting of bonding wires
US5479051A (en) * 1992-10-09 1995-12-26 Fujitsu Limited Semiconductor device having a plurality of semiconductor chips
US5389578A (en) * 1994-01-04 1995-02-14 Texas Instruments Incorporated Optical coupler
NL9400766A (nl) * 1994-05-09 1995-12-01 Euratec Bv Werkwijze voor het inkapselen van een geintegreerde halfgeleiderschakeling.
JP3970377B2 (ja) 1997-04-25 2007-09-05 沖電気工業株式会社 光半導体装置およびその製造方法
US5973337A (en) * 1997-08-25 1999-10-26 Motorola, Inc. Ball grid device with optically transmissive coating
US6008074A (en) * 1998-10-01 1999-12-28 Micron Technology, Inc. Method of forming a synchronous-link dynamic random access memory edge-mounted device
US6700210B1 (en) 1999-12-06 2004-03-02 Micron Technology, Inc. Electronic assemblies containing bow resistant semiconductor packages
US6384487B1 (en) * 1999-12-06 2002-05-07 Micron Technology, Inc. Bow resistant plastic semiconductor package and method of fabrication
JP2003133484A (ja) * 2001-10-30 2003-05-09 Tokai Rika Co Ltd 半導体装置及びその製造方法
JP3537417B2 (ja) * 2001-12-25 2004-06-14 株式会社東芝 半導体装置およびその製造方法
US7067905B2 (en) * 2002-08-08 2006-06-27 Micron Technology, Inc. Packaged microelectronic devices including first and second casings
TW586203B (en) * 2002-11-04 2004-05-01 Siliconware Precision Industries Co Ltd Semiconductor package with lead frame as chip carrier and method for fabricating the same
JP2004273570A (ja) * 2003-03-05 2004-09-30 Sanyo Electric Co Ltd 樹脂封止型半導体装置およびその製造方法
US20090097222A1 (en) * 2004-06-25 2009-04-16 Wilfried Babutzka Electrical Subassembly Comprising a Protective Sheathing
US7435625B2 (en) * 2005-10-24 2008-10-14 Freescale Semiconductor, Inc. Semiconductor device with reduced package cross-talk and loss
US20080122122A1 (en) * 2006-11-08 2008-05-29 Weng Fei Wong Semiconductor package with encapsulant delamination-reducing structure and method of making the package
DE102007008464B4 (de) * 2007-02-19 2012-01-05 Hottinger Baldwin Messtechnik Gmbh Optischer Dehnungsmessstreifen
US20120313272A1 (en) * 2011-06-10 2012-12-13 Aliphcom, Inc. Component protective overmolding
US20120313296A1 (en) * 2011-06-10 2012-12-13 Aliphcom Component protective overmolding
US9069380B2 (en) 2011-06-10 2015-06-30 Aliphcom Media device, application, and content management using sensory input
JP5624091B2 (ja) * 2012-08-06 2014-11-12 パナソニック株式会社 フォトカプラ装置の製造方法
CN103972181A (zh) * 2013-02-01 2014-08-06 意法半导体制造(深圳)有限公司 内含表面包覆玻璃层的硅晶片的封装器件及其封装方法
JP2015054965A (ja) * 2013-09-13 2015-03-23 株式会社東芝 封止用樹脂、半導体装置、および光結合装置
JP2015108558A (ja) * 2013-12-05 2015-06-11 日立オートモティブシステムズ株式会社 樹脂封止型センサ装置
JP6710208B2 (ja) * 2015-07-02 2020-06-17 株式会社カネカ 熱伝導性樹脂組成物、tim及び半導体モジュール用tim
US11139268B2 (en) * 2019-08-06 2021-10-05 Advanced Semiconductor Engineering, Inc. Semiconductor package structure and method of manufacturing the same
CN112152871B (zh) * 2020-08-14 2021-09-24 上海纽盾科技股份有限公司 网络安全设备的人工智能测试方法、装置及系统

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3762039A (en) * 1971-09-10 1973-10-02 Mos Technology Inc Plastic encapsulation of microcircuits
NL189379C (nl) * 1977-05-05 1993-03-16 Richardus Henricus Johannes Fi Werkwijze voor inkapselen van micro-elektronische elementen.
JPS55154755A (en) * 1979-05-23 1980-12-02 Toshiba Corp Resin composition for sealing semiconductor
JPS6076529A (ja) * 1983-10-03 1985-05-01 Toyota Central Res & Dev Lab Inc エポキシ樹脂組成物
JPS6065020A (ja) * 1983-09-21 1985-04-13 Hitachi Ltd 半導体封止用樹脂組成物
JPS60210855A (ja) * 1984-04-03 1985-10-23 Hitachi Chem Co Ltd 半導体装置の製造方法
JPS6129544A (ja) * 1984-07-20 1986-02-10 Toppan Printing Co Ltd グラビア印刷法
JPS6184041A (ja) * 1984-10-02 1986-04-28 Fujitsu Ltd 半導体装置
JPS6276747A (ja) * 1985-09-30 1987-04-08 Shindengen Electric Mfg Co Ltd 樹脂封止型半導体装置
JPS6279654A (ja) * 1985-10-02 1987-04-13 Hitachi Ltd 半導体装置
JPS6286747A (ja) * 1985-10-14 1987-04-21 Hitachi Ltd 高密度実装部品
JPS62207355A (ja) * 1986-03-07 1987-09-11 Rishiyou Kogyo Kk エポキシ樹脂組成物
JPS6372719A (ja) * 1986-09-13 1988-04-02 Fujitsu Ltd 半導体封止用エポキシ樹脂組成物
JPS6377927A (ja) * 1986-09-19 1988-04-08 Fujitsu Ltd 半導体封止用成形材料
JPS63110661A (ja) * 1986-10-27 1988-05-16 Mitsubishi Electric Corp 半導体集積回路用樹脂封止形パツケ−ジ
JPS63151054A (ja) * 1986-12-16 1988-06-23 Matsushita Electronics Corp 半導体装置
JPS63230729A (ja) * 1987-03-20 1988-09-27 Sumitomo Chem Co Ltd 半導体封止用樹脂組成物
JPS6444052A (en) * 1987-08-11 1989-02-16 Nec Corp Hybrid integrated circuit
JPS6475556A (en) * 1987-09-18 1989-03-22 Fujitsu Ltd Epoxy resin composition for sealing semiconductor
JPH01216545A (ja) * 1988-02-24 1989-08-30 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
EP0417787A3 (en) 1992-03-18
JP2656356B2 (ja) 1997-09-24
DE69029630D1 (de) 1997-02-20
JPH03101154A (ja) 1991-04-25
EP0417787A2 (en) 1991-03-20
US5057457A (en) 1991-10-15
DE69029630T2 (de) 1997-05-28
KR940008334B1 (ko) 1994-09-12
EP0417787B1 (en) 1997-01-08

Similar Documents

Publication Publication Date Title
KR910007067A (ko) 다중몰드형 반도체장치 및 그 제조방법
KR970024040A (ko) 반도체장치를 제조하기 위한 수지봉지용 금형(resin encapsulating mold die for manufacturing a semiconductor device)
DE69226397D1 (de) Druckgussverfahren zur Herstellung von Teilen mit hoher mechanischer Leistungsfähigkeit aus thixotropem Metall
JPS5827326A (ja) Icチツプの樹脂封止方法
JPS57159032A (en) Forming method for package of electronic timepiece
KR0137325B1 (ko) 반도체 패키지의 제조방법
KR960005903A (ko) 반도체패키지의 몰드금형 및 그 반도체패키지 제품
JPH0653399A (ja) 樹脂封止型半導体装置
JPH08222676A (ja) リードフレーム及びこれを用いた樹脂封止型半導体装置の製造方法
KR980006203A (ko) 반도체 소자 패키지 베이스의 제조방법
JPH06224244A (ja) 電子部品の封止成形方法及び金型
JPH02205043A (ja) 樹脂封止型半導体装置の製造方法
JPH05335442A (ja) 半導体装置の樹脂モールド方法
JPS5978537A (ja) 樹脂封止型半導体装置の製造方法
JPS5720437A (en) Resin sealing metal mold for semiconductor device
JPS55157235A (en) Manufacture of semiconductor integrated circuit
JPS5710955A (en) Manufacture of semiconductor device
KR950015670A (ko) 반도체 패키지의 몰드장치
JPS6430237A (en) Manufacture of resin-sealed semiconductor device
JPS6090725A (ja) 樹脂モ−ルド金型装置
KR890006841A (ko) 금속 매트릭스 조성물의 제조방법
JPH0521647A (ja) 樹脂封止型半導体装置およびその製造方法
JPS6453567A (en) Manufacture of resin-molded type electronic component
JPH02216838A (ja) 樹脂封止型半導体装置の製造方法
KR970024117A (ko) 반도체 패키지 및 그 제조방법

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20030901

Year of fee payment: 10

LAPS Lapse due to unpaid annual fee