KR102621997B1 - 기판용 카세트 저장을 위한 저장 장치 및 이를 구비한 처리 장치 - Google Patents

기판용 카세트 저장을 위한 저장 장치 및 이를 구비한 처리 장치 Download PDF

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Publication number
KR102621997B1
KR102621997B1 KR1020207003399A KR20207003399A KR102621997B1 KR 102621997 B1 KR102621997 B1 KR 102621997B1 KR 1020207003399 A KR1020207003399 A KR 1020207003399A KR 20207003399 A KR20207003399 A KR 20207003399A KR 102621997 B1 KR102621997 B1 KR 102621997B1
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KR
South Korea
Prior art keywords
cassette
base plate
storage device
substrate
processing
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KR1020207003399A
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English (en)
Korean (ko)
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KR20200033870A (ko
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아드리안 하르선
하르토흐-베셀링크 에드빈 덴
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에이에스엠 아이피 홀딩 비.브이.
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Priority claimed from US15/673,110 external-priority patent/US10249524B2/en
Application filed by 에이에스엠 아이피 홀딩 비.브이. filed Critical 에이에스엠 아이피 홀딩 비.브이.
Publication of KR20200033870A publication Critical patent/KR20200033870A/ko
Application granted granted Critical
Publication of KR102621997B1 publication Critical patent/KR102621997B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Automatic Tape Cassette Changers (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
KR1020207003399A 2017-08-09 2018-08-07 기판용 카세트 저장을 위한 저장 장치 및 이를 구비한 처리 장치 KR102621997B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US15/673,110 2017-08-09
US15/673,110 US10249524B2 (en) 2017-08-09 2017-08-09 Cassette holder assembly for a substrate cassette and holding member for use in such assembly
US201762585283P 2017-11-13 2017-11-13
US62/585,283 2017-11-13
PCT/IB2018/001003 WO2019030565A1 (en) 2017-08-09 2018-08-07 STORAGE APPARATUS FOR STORING CASSETTES FOR SUBSTRATES AND PROCESSING APPARATUS EQUIPPED THEREWITH

Publications (2)

Publication Number Publication Date
KR20200033870A KR20200033870A (ko) 2020-03-30
KR102621997B1 true KR102621997B1 (ko) 2024-01-08

Family

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Application Number Title Priority Date Filing Date
KR1020207003399A KR102621997B1 (ko) 2017-08-09 2018-08-07 기판용 카세트 저장을 위한 저장 장치 및 이를 구비한 처리 장치

Country Status (5)

Country Link
JP (2) JP7187536B2 (ja)
KR (1) KR102621997B1 (ja)
CN (1) CN110998817B (ja)
TW (2) TWI813430B (ja)
WO (1) WO2019030565A1 (ja)

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