JP2023014191A - 基材用のカセットを保管するための保管装置、およびそれを備える処理装置 - Google Patents
基材用のカセットを保管するための保管装置、およびそれを備える処理装置 Download PDFInfo
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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Abstract
Description
本開示は、2017年8月9日に出願された「CASSETTE HOLDER ASSEMBLY FOR A SUBSTRATE CASSETTE AND HOLDING MEMBER FOR USE IN SUCH ASSEMBLY」と題する米国特許出願第15/673,110号、および2017年11月13日に出願された「STORAGE APPARATUS FOR STORING CASSETTES FOR SUBSTRATES AND PROCESSING APPARATUS EQUIPPED THEREWITH」と題する米国仮特許出願第62/585,283号の優先権を主張し、これらは参照により本明細書に組み込まれる。
カセットを保持するように構築および配置される可動ベースプレートと;
ベースプレートからカセットを収容するおよび取り外すための開口部を備える外壁と;
開口部に対してベースプレートを移動させるように構築および配置される移動デバイスと;を備える。ベースプレート上に、少なくとも一つの半導体材料基材を保管するための複数のカセットは、外壁の開口部を通って保管されることができる。保持部材は、ベースプレート上に配置されおよびベースプレートによって支持され、カセットをベースプレート上の正しい位置に配置することができる。
カセットを保持するように構築および配置される可動ベースプレートと;
ベースプレートからカセットを収容するおよび取り外すための開口部を備える外壁と;
開口部に対してベースプレートを移動するように構築および配置される移動デバイスと;を備え、保管装置には、開口部の近傍に固定センサーが設けられ、開口部のベースプレート上のカセットの存在および正しい方向のうちの少なくとも一つを検出する、保管装置が提供される。
カセットを収容するためのベースプレートと;
カセットを正面から見て右および左それぞれに位置決めするために、ベースプレートに支持される右および左の保持部材であって、右および左の保持部材は互いに実質的に同一である、右および左の保持部材と;を備える、カセットホルダーアセンブリ。
少なくとも二つの実質的に平行な側面であって、正面から見て、一つの側面は保持部材の右側に位置する右側面であり、別の側面は保持部材の左側に位置する左側面である、側面と;を備える、項目17に記載の保持部材。
2 保管装置
4 回転テーブル
5、6 入出ポート
8 基材ハンドラー
9 カセット
10、11、12 処理ステーション
13 基材
14 回転テーブル
15 区画
16 ウェーハキャリア
17 昇降デバイス
21 保管装置
22 基材ハンドラー
23 処理ステーション
24、26 通路開口部
27 ウェーハキャリア
28 ロータリーテーブル
29 ハッチ
30 ガイド
31 空気圧シリンダー
32 処理ステーション
35 保管装置
36 回転テーブル
37 駆動デバイス
38 通路開口部
39 円筒形フィルター
40 シャフト
41 出口
61 カセットホルダーアセンブリ
63 可動ベースプレート
65a、65b 保持部材
66 バー
67LB、67LF、67RB、67RF 端面
68 ホール
69 カセット
70、72 壁
71LF、71LB、71RF、71RB 側面
75 ボルト
77 スロットホール
79、81 バー
83 ガイドスロット
85 位置決めスロット
87 ガイド面
91 固定センサー
93 移動可能な要素
95 インジケータ
97 旋回可能なアーム
98 カウンターウェイト
Claims (20)
- 基材用のカセットを保管するための保管装置であって、
カセットを保持するように構築および配置される可動ベースプレートと;
前記ベースプレートからカセットを収容するおよび取り外すための開口部を備える外壁と;
前記開口部に対して前記ベースプレートを移動するように構築および配置される移動デバイスと;を備え、前記保管装置には、前記開口部の近傍に固定センサーが設けられ、前記開口部の前記ベースプレート上の前記カセットの存在および正しい方向のうちの少なくとも一つを検出する、保管装置。 - 前記センサーは、前記ベースプレート上の前記カセットの前記存在および前記正しい方向を光学的に検出する光学センサーである、請求項1に記載の保管装置。
- 前記ベースプレートは、
カセットが前記ベースプレート上で前記正しい向きに存在する場合、前記カセットと接触して移動可能であるように配置される可動要素と;前記可動要素によって移動可能であり、前記カセットが前記正しい方向に存在することを示すインジケータと;を備え、前記インジケータは、前記光学センサーの視野角内にあり、前記ベースプレート上の前記カセットの前記存在および前記正しい方向を前記光学センサーに示す、請求項2に記載の保管装置。 - 前記可動要素は、旋回可能なアームを備え、前記ベースプレートは、前記旋回可能なアームを旋回可能に前記ベースプレートに取り付けるための旋回軸が設けられる、請求項3に記載の保管装置。
- 前記旋回可能なアームはインジケータを備え、前記インジケータは、前記アームが旋回時に移動可能であり、前記カセットが前記正しい方向にあることを示す、請求項4に記載の保管装置。
- 前記旋回可能なアームは、前記可動要素を前記カセットに押し付けるカウンターウェイトを備える、請求項5に記載の保管装置。
- 前記ベースプレートはそこにホールを備え、前記可動要素は前記カセットと協働し前記ホール内で移動可能に構成されるピンを備える、請求項3に記載の保管装置。
- 前記可動要素は止め具を備え、前記止め具は前記可動要素の動きを制限する、請求項3に記載の保管装置。
- 前記可動要素は前記ベースプレートの下側に設けられる、請求項3に記載の保管装置。
- 前記インジケータはリフレクタを備え、前記光学センサーは、放射ビームを前記リフレクタに向ける放射源と、前記放射ビームの反射を検出するセンサーとを備える、請求項3に記載の保管装置。
- 前記ベースプレートは、前記ベースプレート上の前記カセットを配置するための保持部材が設けられる、請求項1に記載の保管装置。
- 前記ベースプレートから上方に延在する前記ベースプレートに壁を設け、前記ベースプレートにアクセスするために一方の側を開いたままにする、請求項1に記載の保管装置。
- 前記開放側の反対側の壁は、前記カセットをパージするためのホールが設けられる、請求項12に記載の保管装置。
- 前記壁は、前記ベースプレート上で等脚台形を画定する、請求項12に記載の保管装置。
- 前記ベースプレートは、前記カセットを保持するための複数の領域を備える、請求項1に記載の保管装置。
- 前記ベースプレートは、前記カセットを収容するための水平面を有し、前記装置は、前記ベースプレートが水平方向に移動可能に構築および配置される、請求項1に記載の保管装置。
- 前記光学センサーは、前記ベースプレート上の前記カセットの前記存在および前記正しい方向のうちの少なくとも一つを検出するために、カメラの視野角内に前記開口部近傍の前記ベースプレート上に前記カセットを有するように構築および配置される前記カメラである、請求項1に記載の保管装置。
- 前記装置は、前記カメラと接続されて操作可能であり、プロセッサおよびメモリを備えるコンピュータを備え、前記メモリは、前記ベースプレート上の前記カセットの前記存在および前記正しい方向のうちの少なくとも一つを検出するためのマシンビジョンソフトウェアを備える、請求項17に記載の保管装置。
- 基材を処理するための処理装置であって、
請求項1に記載のカセットを保管するための保管装置と;
基材を処理するための処理デバイスと;
基材を前記カセットから前記処理デバイスに移動させる、および処理後に前記基材を前記処理デバイスから前記カセットへ移動させるように構築および配置される基材ハンドラーと;を備える、処理装置。 - 請求項19に記載の基材を処理するための処理装置であって、複数の基材を処理するための反応チャンバーを有する反応器を備える、処理装置。
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
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US15/673,110 US10249524B2 (en) | 2017-08-09 | 2017-08-09 | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
US15/673,110 | 2017-08-09 | ||
US201762585283P | 2017-11-13 | 2017-11-13 | |
US62/585,283 | 2017-11-13 | ||
JP2020506161A JP7187536B2 (ja) | 2017-08-09 | 2018-08-07 | 基材用のカセットを保管するための保管装置、およびそれを備える処理装置 |
PCT/IB2018/001003 WO2019030565A1 (en) | 2017-08-09 | 2018-08-07 | STORAGE APPARATUS FOR STORING CASSETTES FOR SUBSTRATES AND PROCESSING APPARATUS EQUIPPED THEREWITH |
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JP2020506161A Division JP7187536B2 (ja) | 2017-08-09 | 2018-08-07 | 基材用のカセットを保管するための保管装置、およびそれを備える処理装置 |
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JP7457088B2 JP7457088B2 (ja) | 2024-03-27 |
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JP2022190295A Active JP7457088B2 (ja) | 2017-08-09 | 2022-11-29 | 基材用のカセットを保管するための保管装置、およびそれを備える処理装置 |
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KR (1) | KR102621997B1 (ja) |
CN (1) | CN110998817B (ja) |
TW (2) | TWI778102B (ja) |
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WO2019030565A1 (en) | 2019-02-14 |
TW202249157A (zh) | 2022-12-16 |
JP2020529740A (ja) | 2020-10-08 |
KR20200033870A (ko) | 2020-03-30 |
JP7457088B2 (ja) | 2024-03-27 |
JP7187536B2 (ja) | 2022-12-12 |
TWI813430B (zh) | 2023-08-21 |
TWI778102B (zh) | 2022-09-21 |
CN110998817B (zh) | 2023-11-10 |
TW201923942A (zh) | 2019-06-16 |
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