TWI813430B - 用於儲存基板用之卡匣的儲存設備及備有其之處理設備 - Google Patents

用於儲存基板用之卡匣的儲存設備及備有其之處理設備 Download PDF

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Publication number
TWI813430B
TWI813430B TW111132570A TW111132570A TWI813430B TW I813430 B TWI813430 B TW I813430B TW 111132570 A TW111132570 A TW 111132570A TW 111132570 A TW111132570 A TW 111132570A TW I813430 B TWI813430 B TW I813430B
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Taiwan
Prior art keywords
cassette
storage device
movable
cassettes
bottom plate
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TW111132570A
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English (en)
Chinese (zh)
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TW202249157A (zh
Inventor
亞德里安 加爾森
艾德溫 德恩 哈托 貝瑟林克
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荷蘭商Ａｓｍ智慧財產控股公司
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Priority claimed from US15/673,110 external-priority patent/US10249524B2/en
Application filed by 荷蘭商Ａｓｍ智慧財產控股公司 filed Critical 荷蘭商Ａｓｍ智慧財產控股公司
Publication of TW202249157A publication Critical patent/TW202249157A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Automatic Tape Cassette Changers (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
TW111132570A 2017-08-09 2018-07-17 用於儲存基板用之卡匣的儲存設備及備有其之處理設備 TWI813430B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US15/673,110 US10249524B2 (en) 2017-08-09 2017-08-09 Cassette holder assembly for a substrate cassette and holding member for use in such assembly
US15/673,110 2017-08-09
US201762585283P 2017-11-13 2017-11-13
US62/585,283 2017-11-13

Publications (2)

Publication Number Publication Date
TW202249157A TW202249157A (zh) 2022-12-16
TWI813430B true TWI813430B (zh) 2023-08-21

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TW111132570A TWI813430B (zh) 2017-08-09 2018-07-17 用於儲存基板用之卡匣的儲存設備及備有其之處理設備
TW107124663A TWI778102B (zh) 2017-08-09 2018-07-17 用於儲存基板用之卡匣的儲存設備及備有其之處理設備

Family Applications After (1)

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JP (2) JP7187536B2 (ja)
KR (1) KR102621997B1 (ja)
CN (1) CN110998817B (ja)
TW (2) TWI813430B (ja)
WO (1) WO2019030565A1 (ja)

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