JP2022531103A - 複数のアライナを含む装置フロントエンドモジュール、アセンブリ、及び方法 - Google Patents
複数のアライナを含む装置フロントエンドモジュール、アセンブリ、及び方法 Download PDFInfo
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Abstract
Description
Claims (15)
- 装置フロントエンドモジュールチャンバを形成する装置フロントエンドモジュール本体であって、複数の壁を含む装置フロントエンドモジュール本体、
1以上の第1の壁に結合された1以上のロードロック又はプロセスチャンバ、
1以上の第2の壁に設けられた1以上のロードポートであって、前記1以上のロードポートの各々が基板キャリアとドッキングするように構成された、1以上のロードポート、
前記装置フロントエンドモジュールチャンバ内に収容された複数のアラインメントペデスタル、及び
前記装置フロントエンドモジュールチャンバ内に少なくとも部分的に収容されたロード/アンロードロボットであって、複数のブレードを含むロード/アンロードロボットを備える、装置フロントエンドモジュール。 - 壁に結合された側部貯蔵ポッド装置を備え、前記側部貯蔵ポッド装置へのポッド開口部が、前記複数のアラインメントペデスタルよりも高い位置に配置されている、請求項1に記載の装置フロントエンドモジュール。
- 前記ロード/アンロードロボットは、2つのブレードを含む、請求項1に記載の装置フロントエンドモジュール。
- 前記ロード/アンロードロボットは、前記1以上のロードポートと前記複数のアラインメントペデスタルとの間で複数の基板を同時に移送するように構成され、動作可能である、請求項1に記載の装置フロントエンドモジュール。
- 前記複数のアラインメントペデスタルのうちの少なくとも2つが、互いに対して垂直方向にオフセットされている、請求項1に記載の装置フロントエンドモジュール。
- 前記基板キャリアは、複数の支持部材を備え、前記複数の支持部材のうちの少なくとも2つが、前記複数のアラインメントペデスタルのうちの少なくとも2つが互いに対して垂直方向にオフセットされる距離に実質的に等しい距離だけ、互いから垂直方向に間隔を空けられる、請求項5に記載の装置フロントエンドモジュール。
- 側部貯蔵ポッド装置を備え、前記側部貯蔵ポッド装置は、前記複数のアラインメントペデスタルのうちの少なくとも2つが互いに対して垂直方向にオフセットされる距離に実質的に等しい間隔だけ、互いから垂直方向に間隔を空けられるポッド支持部材を含む、請求項5に記載の装置フロントエンドモジュール。
- 前記複数のアラインメントペデスタルのうちの少なくとも2つが互いに対して垂直方向にオフセットされる距離は7mmから40mmの範囲である、請求項5に記載の装置フロントエンドモジュール。
- 前記複数のアラインメントペデスタルのうちの少なくとも2つが少なくとも部分的に互いに重なり合い、前記複数のアラインメントペデスタルのうちの少なくとも2つが互いに重なり合う距離が120mmから300mmの範囲である、請求項5に記載の装置フロントエンドモジュール。
- 前記ロード/アンロードロボットは、前記1以上のロードポートにアクセスしながら、前記複数のブレードを互いに対して垂直方向に整列させるように構成される、請求項1に記載の装置フロントエンドモジュール。
- 前記ロード/アンロードロボットは、前記複数のアラインメントペデスタルにアクセスしながら、前記複数のブレードの互いに対して垂直方向に整列した位置からのずれを提供するように構成され、前記複数のブレードの間の前記垂直方向に整列した位置からのずれは、前記複数のアラインメントペデスタルの間の間隔に比例する、請求項1に記載の装置フロントエンドモジュール。
- 装置フロントエンドモジュールチャンバを形成する装置フロントエンドモジュール本体、
前記装置フロントエンドモジュール本体の1以上の第1の壁に結合された1以上のロードロックであって、移送チャンバ又はプロセスチャンバの中へ及び外へと基板をやりとりするように構成された1以上のロードロック、
前記装置フロントエンドモジュール本体の1以上の第2の壁に設けられた1以上のロードポートであって、前記1以上のロードポートの各々が基板キャリアとドッキングするように構成された、1以上のロードポート、
前記装置フロントエンドモジュールチャンバ内に収容された複数のアラインメントペデスタル、並びに
前記装置フロントエンドモジュールチャンバ内に少なくとも部分的に収容されたロード/アンロードロボットであって、前記1以上のロードポートと前記複数のアラインメントペデスタルとの間で複数の基板を同時に移送するように構成された複数のブレードを含むロード/アンロードロボットを備える、電子デバイス処理アセンブリ。 - 前記複数のアラインメントペデスタルのうちの少なくとも2つが、互いに対して垂直方向にオフセットされ、前記複数のブレードのうちの少なくとも2つが、前記複数のアラインメントペデスタルのうちの少なくとも2つが互いに対して垂直方向にオフセットされる距離だけ、互いから垂直方向に間隔を空けられる、請求項12に記載の電子デバイス処理アセンブリ。
- 前記複数のアラインメントペデスタルのうちの少なくとも2つが、互いから水平方向に間隔を空けられ、前記複数のブレードのうちの少なくとも2つが、前記複数のアラインメントペデスタルのうちの少なくとも2つが互いから水平方向に間隔を空けられる距離だけ、互いに垂直方向に整列した位置からずれるように移動可能である、請求項12に記載の電子デバイス処理アセンブリ。
- 装置フロントエンドモジュールを動作させる方法であって、
垂直積み重ね基板貯蔵装置にアクセスするために、ロード/アンロードロボットのブレードを垂直方向に整列した位置に移動させること、及び
複数のアラインメントペデスタルに同時にアクセスするために、前記ロード/アンロードロボットの前記ブレードを垂直方向に整列していない位置に移動させることを含む、方法。
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