JP7326472B2 - 複数のアライナを含む装置フロントエンドモジュール、アセンブリ、及び方法 - Google Patents
複数のアライナを含む装置フロントエンドモジュール、アセンブリ、及び方法 Download PDFInfo
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Description
Claims (14)
- 装置フロントエンドモジュールチャンバを形成する装置フロントエンドモジュール本体であって、複数の壁を含む装置フロントエンドモジュール本体、
前記複数の壁のうち1以上の第1の壁に結合されたロードロック装置、
前記装置フロントエンドモジュールチャンバ内に収容された複数のアラインメントペデスタルであって、前記複数のアラインメントペデスタルは、第1の支持面を有する上側アラインメントペデスタルと、第2の支持面を有する下側アラインメントペデスタルとを備え、前記第1の支持面は、前記第2の支持面に対して、垂直方向のオフセット、少なくとも部分的な重なりを有する重なり領域及び水平方向の間隔を有する、複数のアラインメントペデスタル、並びに
前記装置フロントエンドモジュールチャンバ内に少なくとも部分的に収容されたロード/アンロードロボットであって、前記ロード/アンロードロボットは、アームと、前記アームに取り付けられるとともに、垂直方向に配置された複数のブレードとを備え、
複数の基板を、垂直方向に整列された状態で同時に取り出し、
前記複数の基板をそれぞれ、前記複数のアラインメントペデスタルのいずれかに、垂直方向に整列した位置からずれた状態で同時に移送し、
整列された基板を、前記複数のアラインメントペデスタルのそれぞれから、前記ロードロック装置へと、同時に移送する
ように構成されている、ロード/アンロードロボット
を備える、装置フロントエンドモジュール。 - 前記複数の壁の第2の壁に結合された側部貯蔵ポッド装置をさらに備え、前記側部貯蔵ポッド装置へのポッド開口部が、前記複数のアラインメントペデスタルよりも高い位置に配置されている、請求項1に記載の装置フロントエンドモジュール。
- 前記複数のブレードは、上側ブレード及び下側ブレードを含む、請求項1に記載の装置フロントエンドモジュール。
- 前記複数の壁のうち1以上の第2の壁に結合される複数のロードポートをさらに備え、前記複数のロードポートはそれぞれ、複数の支持部材を備える基板キャリアとドッキングするように構成され、前記複数の支持部材のうち少なくとも2つは、前記垂直方向のオフセットの距離に実質的に等しい距離だけ、互いから垂直方向に間隔を空けられる、請求項1に記載の装置フロントエンドモジュール。
- 側部貯蔵ポッド装置が、前記垂直方向のオフセットの距離に実質的に等しい間隔だけ、互いから垂直方向に間隔を空けられるポッド支持部材を含む、請求項2に記載の装置フロントエンドモジュール。
- 前記複数のアラインメントペデスタルのうちの少なくとも2つが互いに対して垂直方向にオフセットされる距離は7mmから40mmの範囲である、請求項1に記載の装置フロントエンドモジュール。
- 前記重なり領域の距離が120mmから300mmの範囲である、請求項1に記載の装置フロントエンドモジュール。
- 前記ロード/アンロードロボットは、前記複数のロードポートにアクセスしながら、垂直方向に配置された前記複数のブレードを互いに対して垂直方向に整列させるように構成される、請求項4に記載の装置フロントエンドモジュール。
- 前記ロード/アンロードロボットは、前記複数のアラインメントペデスタルにアクセスしながら、前記複数のブレードの互いに対して垂直方向に整列した位置からのずれを提供するように構成され、前記複数のブレードの間の前記垂直方向に整列した位置からのずれは、前記水平方向の間隔に比例する、請求項1に記載の装置フロントエンドモジュール。
- 装置フロントエンドモジュールチャンバを形成する装置フロントエンドモジュール本体、
前記装置フロントエンドモジュール本体の1以上の第1の壁に結合された1以上のロードロックを備えるロードロック装置であって、前記1以上のロードロックが、移送チャンバ又はプロセスチャンバの中へ及び外へと基板をやりとりするように構成された、ロードロック装置、
前記装置フロントエンドモジュール本体の1以上の第2の壁に設けられた複数のロードポートであって、前記複数のロードポートの各々が複数の基板キャリアのいずれかとドッキングするように構成された、複数のロードポート、
前記装置フロントエンドモジュールチャンバ内に収容される、第1の支持面を有する上側アラインメントペデスタル及び第2の支持面を有する下側アラインメントペデスタルであって、前記第1の支持面が、前記第2の支持面に対して、垂直方向のオフセット、重なり領域及び水平方向の間隔を備える、第1の支持面を有する上側アラインメントペデスタル及び第2の支持面を有する下側アラインメントペデスタル、並びに
前記装置フロントエンドモジュールチャンバ内に少なくとも部分的に収容されたロード/アンロードロボットであって、前記ロード/アンロードロボットは、アームと、前記アームに取り付けられた前腕部と、前記前腕部にそれぞれ取り付けられた上側ブレード及び下側ブレードと、を備え、前記上側ブレードは、前記垂直方向のオフセットの距離だけ、前記下側ブレードと垂直方向に間隔が空けられ、前記上側ブレード及び前記下側ブレードは、
第1の基板及び第2の基板を含む複数の基板を、前記複数の基板キャリアから、垂直方向に整列された状態で同時に取り出し、
前記第1の基板及び前記第2の基板をそれぞれ、前記上側アラインメントペデスタル及び前記下側アラインメントペデスタルのいずれかに、垂直方向に整列した位置からずれた状態で同時に移送することによって、前記水平方向の間隔の距離に比例する、前記上側ブレードの前記下側ブレードに対する垂直方向のずれを提供し、
整列された基板を、前記上側アラインメントペデスタル及び前記下側アラインメントペデスタルのそれぞれから、前記ロードロック装置内へと同時に移送する
ように構成されている、ロード/アンロードロボット
を備える、電子デバイス処理アセンブリ。 - 装置フロントエンドモジュールを動作させる方法であって、
垂直積み重ね基板貯蔵装置にアクセスするために、ロード/アンロードロボットの複数の垂直に配置されたブレードを、垂直方向に整列した位置に移動させることによって、複数の基板を同時に取り出すこと、ここで、前記複数の垂直に配置されたブレードは1つのアームに取り付けられ、
複数のアラインメントペデスタルに同時にアクセスするために、前記垂直に配置された複数のブレードを垂直に整列した位置からずれた位置に移動させることによって、前記複数の基板をそれぞれ、前記複数のアラインメントペデスタルのうち対応するアラインメントペデスタルに同時に移送すること、ここで、前記複数のアラインメントペデスタルは、第1の支持面を有する上側アラインメントペデスタルと、第2の支持面を有する下側アラインメントペデスタルとを備え、前記第2の支持面は、前記第1の支持面に対して、垂直方向のオフセット、重なり領域及び水平方向の間隔を備え、並びに
前記ロード/アンロードロボットの複数のブレードを移動させることによって、整列された基板を、前記複数のアラインメントペデスタルのそれぞれから、ロードロック装置へと同時に移送すること、
を含む、方法。 - 前記装置フロントエンドモジュール本体の1以上の第3の壁に結合された側部貯蔵ポッド装置をさらに備え、前記側部貯蔵ポッド装置は、前記垂直方向のオフセットの距離に実質的に等しい距離だけ、互いから垂直方向に間隔を空けられるポッド支持部材を備え、前記側部貯蔵ポッド装置へのポッド開口部は、前記上側アラインメントペデスタル及び前記下側アラインメントペデスタルよりも高い位置に配置されている、請求項10に記載の電子デバイス処理アセンブリ。
- 前記複数の基板キャリアがそれぞれ、複数の支持部材を備え、前記複数の支持部材のうち少なくとも2つが、前記垂直方向のオフセットの距離に実質的に等しい距離だけ、互いから垂直方向に間隔を空けられる、請求項10に記載の電子デバイス処理アセンブリ。
- 前記垂直方向のオフセットの距離が、7mm~40mmの範囲にある、請求項10に記載の電子デバイス処理アセンブリ。
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