KR101229843B1 - 플라즈마 처리 장치 - Google Patents

플라즈마 처리 장치 Download PDF

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Publication number
KR101229843B1
KR101229843B1 KR1020107022951A KR20107022951A KR101229843B1 KR 101229843 B1 KR101229843 B1 KR 101229843B1 KR 1020107022951 A KR1020107022951 A KR 1020107022951A KR 20107022951 A KR20107022951 A KR 20107022951A KR 101229843 B1 KR101229843 B1 KR 101229843B1
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coaxial tube
inner conductor
coaxial
conductor
dielectric
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KR20100123765A (ko
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마사키 히라야마
타다히로 오오미
Original Assignee
고쿠리츠다이가쿠호진 도호쿠다이가쿠
도쿄엘렉트론가부시키가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
KR1020107022951A 2008-06-11 2009-06-03 플라즈마 처리 장치 Active KR101229843B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2008-153423 2008-06-11
JP2008153423A JP5421551B2 (ja) 2008-06-11 2008-06-11 プラズマ処理装置及びプラズマ処理方法
PCT/JP2009/060158 WO2009150978A1 (ja) 2008-06-11 2009-06-03 プラズマ処理装置及びプラズマ処理方法

Related Child Applications (1)

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KR1020127026247A Division KR20120117949A (ko) 2008-06-11 2009-06-03 플라즈마 처리 장치 및 플라즈마 처리 방법

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KR20100123765A KR20100123765A (ko) 2010-11-24
KR101229843B1 true KR101229843B1 (ko) 2013-02-05

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KR1020127026247A Ceased KR20120117949A (ko) 2008-06-11 2009-06-03 플라즈마 처리 장치 및 플라즈마 처리 방법
KR1020107022951A Active KR101229843B1 (ko) 2008-06-11 2009-06-03 플라즈마 처리 장치

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US (1) US8327796B2 (enExample)
JP (1) JP5421551B2 (enExample)
KR (2) KR20120117949A (enExample)
CN (1) CN102057760A (enExample)
TW (1) TW201012315A (enExample)
WO (1) WO2009150978A1 (enExample)

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