KR101083204B1 - 백 컨택 태양전지 및 그 제조방법 - Google Patents

백 컨택 태양전지 및 그 제조방법 Download PDF

Info

Publication number
KR101083204B1
KR101083204B1 KR1020067017707A KR20067017707A KR101083204B1 KR 101083204 B1 KR101083204 B1 KR 101083204B1 KR 1020067017707 A KR1020067017707 A KR 1020067017707A KR 20067017707 A KR20067017707 A KR 20067017707A KR 101083204 B1 KR101083204 B1 KR 101083204B1
Authority
KR
South Korea
Prior art keywords
dopant
wafer
applying
solar cell
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020067017707A
Other languages
English (en)
Korean (ko)
Other versions
KR20070004672A (ko
Inventor
피터 해케
제임스 엠. 귀
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20070004672A publication Critical patent/KR20070004672A/ko
Application granted granted Critical
Publication of KR101083204B1 publication Critical patent/KR101083204B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/121The active layers comprising only Group IV materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/146Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/14Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
    • H10F77/148Shapes of potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • H10F77/219Arrangements for electrodes of back-contact photovoltaic cells
    • H10F77/227Arrangements for electrodes of back-contact photovoltaic cells for emitter wrap-through [EWT] photovoltaic cells, e.g. interdigitated emitter-base back-contacts
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/928Front and rear surface processing

Landscapes

  • Photovoltaic Devices (AREA)
  • Glass Compositions (AREA)
KR1020067017707A 2004-02-05 2006-08-31 백 컨택 태양전지 및 그 제조방법 Expired - Fee Related KR101083204B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US54245404P 2004-02-05 2004-02-05
US54239004P 2004-02-05 2004-02-05
US60/542,390 2004-02-05
US60/542,454 2004-02-05
US11/050,185 US7144751B2 (en) 2004-02-05 2005-02-03 Back-contact solar cells and methods for fabrication
US11/050,185 2005-02-03
PCT/US2005/003705 WO2005076960A2 (en) 2004-02-05 2005-02-04 Back-contact solar cells and methods for fabrication

Publications (2)

Publication Number Publication Date
KR20070004672A KR20070004672A (ko) 2007-01-09
KR101083204B1 true KR101083204B1 (ko) 2011-11-11

Family

ID=34831071

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067017707A Expired - Fee Related KR101083204B1 (ko) 2004-02-05 2006-08-31 백 컨택 태양전지 및 그 제조방법

Country Status (8)

Country Link
US (1) US7144751B2 (enExample)
EP (1) EP1714308A4 (enExample)
JP (1) JP2007521668A (enExample)
KR (1) KR101083204B1 (enExample)
CN (1) CN100452289C (enExample)
AU (2) AU2005213444C1 (enExample)
CA (1) CA2596831A1 (enExample)
WO (1) WO2005076960A2 (enExample)

Families Citing this family (179)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0652434A (ja) * 1992-07-28 1994-02-25 Murata Mfg Co Ltd カップベンダー吐出ノズル
US8222513B2 (en) 2006-04-13 2012-07-17 Daniel Luch Collector grid, electrode structures and interconnect structures for photovoltaic arrays and methods of manufacture
US20090111206A1 (en) 1999-03-30 2009-04-30 Daniel Luch Collector grid, electrode structures and interrconnect structures for photovoltaic arrays and methods of manufacture
US8076568B2 (en) 2006-04-13 2011-12-13 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8138413B2 (en) 2006-04-13 2012-03-20 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US7507903B2 (en) 1999-03-30 2009-03-24 Daniel Luch Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US8664030B2 (en) 1999-03-30 2014-03-04 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US7898053B2 (en) 2000-02-04 2011-03-01 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US7898054B2 (en) 2000-02-04 2011-03-01 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US8198696B2 (en) 2000-02-04 2012-06-12 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US20050172996A1 (en) * 2004-02-05 2005-08-11 Advent Solar, Inc. Contact fabrication of emitter wrap-through back contact silicon solar cells
US20060060238A1 (en) * 2004-02-05 2006-03-23 Advent Solar, Inc. Process and fabrication methods for emitter wrap through back contact solar cells
US7838868B2 (en) 2005-01-20 2010-11-23 Nanosolar, Inc. Optoelectronic architecture having compound conducting substrate
US7732229B2 (en) * 2004-09-18 2010-06-08 Nanosolar, Inc. Formation of solar cells with conductive barrier layers and foil substrates
US7276724B2 (en) * 2005-01-20 2007-10-02 Nanosolar, Inc. Series interconnected optoelectronic device module assembly
US8399331B2 (en) 2007-10-06 2013-03-19 Solexel Laser processing for high-efficiency thin crystalline silicon solar cell fabrication
US9508886B2 (en) 2007-10-06 2016-11-29 Solexel, Inc. Method for making a crystalline silicon solar cell substrate utilizing flat top laser beam
US8420435B2 (en) 2009-05-05 2013-04-16 Solexel, Inc. Ion implantation fabrication process for thin-film crystalline silicon solar cells
US7790574B2 (en) 2004-12-20 2010-09-07 Georgia Tech Research Corporation Boron diffusion in silicon devices
JP3962086B2 (ja) * 2004-12-27 2007-08-22 直江津電子工業株式会社 裏面接合型太陽電池及びその製造方法
US8927315B1 (en) 2005-01-20 2015-01-06 Aeris Capital Sustainable Ip Ltd. High-throughput assembly of series interconnected solar cells
JP4657068B2 (ja) * 2005-09-22 2011-03-23 シャープ株式会社 裏面接合型太陽電池の製造方法
US7560791B2 (en) * 2005-10-28 2009-07-14 Icemos Technology Ltd. Front lit PIN/NIP diode having a continuous anode/cathode
DE102006003464A1 (de) * 2006-01-25 2007-07-26 Degussa Gmbh Verfahren zur Erzeugung einer Siliciumschicht auf einer Substratoberfläche durch Gasphasenabscheidung
US8076570B2 (en) * 2006-03-20 2011-12-13 Ferro Corporation Aluminum-boron solar cell contacts
US8575474B2 (en) * 2006-03-20 2013-11-05 Heracus Precious Metals North America Conshohocken LLC Solar cell contacts containing aluminum and at least one of boron, titanium, nickel, tin, silver, gallium, zinc, indium and copper
KR101212198B1 (ko) * 2006-04-06 2012-12-13 삼성에스디아이 주식회사 태양 전지
US9006563B2 (en) 2006-04-13 2015-04-14 Solannex, Inc. Collector grid and interconnect structures for photovoltaic arrays and modules
US8822810B2 (en) 2006-04-13 2014-09-02 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8729385B2 (en) 2006-04-13 2014-05-20 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US9865758B2 (en) 2006-04-13 2018-01-09 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8884155B2 (en) 2006-04-13 2014-11-11 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US9236512B2 (en) 2006-04-13 2016-01-12 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8008575B2 (en) 2006-07-24 2011-08-30 Sunpower Corporation Solar cell with reduced base diffusion area
US8686282B2 (en) 2006-08-07 2014-04-01 Emcore Solar Power, Inc. Solar power system for space vehicles or satellites using inverted metamorphic multijunction solar cells
US8035028B2 (en) * 2006-10-09 2011-10-11 Solexel, Inc. Pyramidal three-dimensional thin-film solar cells
US8293558B2 (en) * 2006-10-09 2012-10-23 Solexel, Inc. Method for releasing a thin-film substrate
US8512581B2 (en) * 2006-10-09 2013-08-20 Solexel, Inc. Methods for liquid transfer coating of three-dimensional substrates
US20100304521A1 (en) * 2006-10-09 2010-12-02 Solexel, Inc. Shadow Mask Methods For Manufacturing Three-Dimensional Thin-Film Solar Cells
US8193076B2 (en) 2006-10-09 2012-06-05 Solexel, Inc. Method for releasing a thin semiconductor substrate from a reusable template
US7999174B2 (en) * 2006-10-09 2011-08-16 Solexel, Inc. Solar module structures and assembly methods for three-dimensional thin-film solar cells
US8035027B2 (en) 2006-10-09 2011-10-11 Solexel, Inc. Solar module structures and assembly methods for pyramidal three-dimensional thin-film solar cells
US20080264477A1 (en) * 2006-10-09 2008-10-30 Soltaix, Inc. Methods for manufacturing three-dimensional thin-film solar cells
US20080128020A1 (en) * 2006-11-30 2008-06-05 First Solar, Inc. Photovoltaic devices including a metal stack
EP2095404A1 (en) * 2006-12-01 2009-09-02 Advent Solar, Inc. Phosphorus-stabilized transition metal oxide diffusion barrier
DE102006058267A1 (de) 2006-12-08 2008-06-12 Q-Cells Ag Emitter Wrap-Through-Solarzelle und Verfahren zur Herstellung einer Emitter Wrap-Through-Solarzelle
US7851696B2 (en) * 2006-12-08 2010-12-14 Q-Cells Se Solar cell
WO2008080160A1 (en) * 2006-12-22 2008-07-03 Advent Solar, Inc. Interconnect technologies for back contact solar cells and modules
DE602008003218D1 (de) * 2007-05-07 2010-12-09 Georgia Tech Res Inst Herstellung eines hochwertigen rückseitigen kontakts mit lokaler rückseitiger siebdruckfläche
EP1993142A1 (de) * 2007-05-14 2008-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Reflektiv beschichtetes Halbleiterbauelement, Verfahren zu dessen Herstellung sowie dessen Verwendung
JP5226255B2 (ja) * 2007-07-13 2013-07-03 シャープ株式会社 太陽電池の製造方法
JP5285880B2 (ja) 2007-08-31 2013-09-11 シャープ株式会社 光電変換素子、光電変換素子接続体および光電変換モジュール
JP5629210B2 (ja) * 2007-08-31 2014-11-19 ヘレウス プレシャス メタルズ ノース アメリカ コンショホーケン エルエルシー 太陽電池用層状コンタクト構造
JP2009088203A (ja) * 2007-09-28 2009-04-23 Sanyo Electric Co Ltd 太陽電池、太陽電池モジュール及び太陽電池の製造方法
JP5111063B2 (ja) * 2007-11-12 2012-12-26 シャープ株式会社 光電変換素子及びその製造方法
WO2009064870A2 (en) * 2007-11-13 2009-05-22 Advent Solar, Inc. Selective emitter and texture processes for back contact solar cells
ES2402779T3 (es) * 2007-12-14 2013-05-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Célula solar de película delgada y procedimiento para su fabricación
JP2009158575A (ja) * 2007-12-25 2009-07-16 Sharp Corp 光電変換装置および光電変換装置の製造方法
KR100953618B1 (ko) * 2008-01-11 2010-04-20 삼성에스디아이 주식회사 태양 전지
KR100927725B1 (ko) * 2008-01-25 2009-11-18 삼성에스디아이 주식회사 태양 전지 및 이의 제조 방법
JPWO2009118861A1 (ja) * 2008-03-27 2011-07-21 三菱電機株式会社 光起電力装置およびその製造方法
WO2009123149A1 (ja) * 2008-03-31 2009-10-08 京セラ株式会社 太陽電池素子及び太陽電池モジュール
US20090314341A1 (en) * 2008-04-09 2009-12-24 Borden Peter G Simplified back contact for polysilicon emitter solar cells
US20100012172A1 (en) * 2008-04-29 2010-01-21 Advent Solar, Inc. Photovoltaic Modules Manufactured Using Monolithic Module Assembly Techniques
US20090286349A1 (en) * 2008-05-13 2009-11-19 Georgia Tech Research Corporation Solar cell spin-on based process for simultaneous diffusion and passivation
US20090301559A1 (en) * 2008-05-13 2009-12-10 Georgia Tech Research Corporation Solar cell having a high quality rear surface spin-on dielectric layer
US20100144080A1 (en) * 2008-06-02 2010-06-10 Solexel, Inc. Method and apparatus to transfer coat uneven surface
KR100997113B1 (ko) * 2008-08-01 2010-11-30 엘지전자 주식회사 태양전지 및 그의 제조방법
US20100035422A1 (en) * 2008-08-06 2010-02-11 Honeywell International, Inc. Methods for forming doped regions in a semiconductor material
US20100037943A1 (en) * 2008-08-14 2010-02-18 Sater Bernard L Vertical multijunction cell with textured surface
US8293079B2 (en) * 2008-08-28 2012-10-23 Mh Solar Co., Ltd. Electrolysis via vertical multi-junction photovoltaic cell
US8106293B2 (en) * 2008-08-14 2012-01-31 Mh Solar Co., Ltd. Photovoltaic cell with buffer zone
US20100037937A1 (en) * 2008-08-15 2010-02-18 Sater Bernard L Photovoltaic cell with patterned contacts
US8053867B2 (en) 2008-08-20 2011-11-08 Honeywell International Inc. Phosphorous-comprising dopants and methods for forming phosphorous-doped regions in semiconductor substrates using phosphorous-comprising dopants
EP2329530A4 (en) * 2008-08-27 2013-03-20 Applied Materials Inc BACK CONTACT SOLAR CELL MODULE
US7951637B2 (en) 2008-08-27 2011-05-31 Applied Materials, Inc. Back contact solar cells using printed dielectric barrier
NL2001958C (en) * 2008-09-05 2010-03-15 Stichting Energie Method of monolithic photo-voltaic module assembly.
US7999175B2 (en) * 2008-09-09 2011-08-16 Palo Alto Research Center Incorporated Interdigitated back contact silicon solar cells with laser ablated grooves
US7951696B2 (en) * 2008-09-30 2011-05-31 Honeywell International Inc. Methods for simultaneously forming N-type and P-type doped regions using non-contact printing processes
KR101525590B1 (ko) 2008-10-08 2015-06-04 삼성디스플레이 주식회사 표시 기판 및 이의 제조 방법
CN101383386B (zh) * 2008-10-24 2010-12-01 中国科学院电工研究所 一种发射极环绕型太阳电池及其制备方法
DE102009031151A1 (de) * 2008-10-31 2010-05-12 Bosch Solar Energy Ag Solarzelle und Verfahren zu deren Herstellung
US8288195B2 (en) * 2008-11-13 2012-10-16 Solexel, Inc. Method for fabricating a three-dimensional thin-film semiconductor substrate from a template
EP2356675B1 (en) 2008-11-13 2016-06-01 Solexel, Inc. Three dimensional thin film solar cell and manufacturing method thereof
US9150966B2 (en) 2008-11-14 2015-10-06 Palo Alto Research Center Incorporated Solar cell metallization using inline electroless plating
EP2371006A4 (en) * 2008-11-26 2013-05-01 Solexel Inc TRUNKED PYRAMID STRUCTURES FOR TRANSPARENT SOLAR CELLS
US8633374B2 (en) * 2008-12-18 2014-01-21 Gtat Corporation Photovoltaic cell comprising contact regions doped through a lamina
US8518170B2 (en) 2008-12-29 2013-08-27 Honeywell International Inc. Boron-comprising inks for forming boron-doped regions in semiconductor substrates using non-contact printing processes and methods for fabricating such boron-comprising inks
US9076642B2 (en) 2009-01-15 2015-07-07 Solexel, Inc. High-Throughput batch porous silicon manufacturing equipment design and processing methods
US8906218B2 (en) 2010-05-05 2014-12-09 Solexel, Inc. Apparatus and methods for uniformly forming porous semiconductor on a substrate
EP2387458B1 (en) * 2009-01-15 2014-03-05 Solexel, Inc. Porous silicon electro-etching system and method
MY162405A (en) * 2009-02-06 2017-06-15 Solexel Inc Trench Formation Method For Releasing A Thin-Film Substrate From A Reusable Semiconductor Template
US8828517B2 (en) 2009-03-23 2014-09-09 Solexel, Inc. Structure and method for improving solar cell efficiency and mechanical strength
KR101627217B1 (ko) * 2009-03-25 2016-06-03 엘지전자 주식회사 태양전지 및 그 제조방법
JP2012521662A (ja) * 2009-03-26 2012-09-13 ビーピー・コーポレーション・ノース・アメリカ・インコーポレーテッド 熱拡散ドープ領域中にレーザー焼成コンタクトを有する太陽電池セルのための装置及び方法
CN102427971B (zh) * 2009-04-14 2015-01-07 速力斯公司 高效外延化学气相沉积(cvd)反应器
US9099584B2 (en) * 2009-04-24 2015-08-04 Solexel, Inc. Integrated three-dimensional and planar metallization structure for thin film solar cells
KR101072543B1 (ko) * 2009-04-28 2011-10-11 현대중공업 주식회사 태양 전지의 제조 방법
US8262894B2 (en) 2009-04-30 2012-09-11 Moses Lake Industries, Inc. High speed copper plating bath
JP2010283339A (ja) * 2009-05-02 2010-12-16 Semiconductor Energy Lab Co Ltd 光電変換装置及びその作製方法
US9318644B2 (en) 2009-05-05 2016-04-19 Solexel, Inc. Ion implantation and annealing for thin film crystalline solar cells
MY165969A (en) 2009-05-05 2018-05-18 Solexel Inc High-productivity porous semiconductor manufacturing equipment
KR101108474B1 (ko) * 2009-05-14 2012-01-31 엘지전자 주식회사 태양 전지
US8247243B2 (en) 2009-05-22 2012-08-21 Nanosolar, Inc. Solar cell interconnection
US8445314B2 (en) * 2009-05-22 2013-05-21 Solexel, Inc. Method of creating reusable template for detachable thin film substrate
EP2436028B1 (en) * 2009-05-29 2016-08-10 Solexel, Inc. See-through three-dimensional thin-film solar cell semiconductor substrate and methods of manufacturing
KR101032624B1 (ko) * 2009-06-22 2011-05-06 엘지전자 주식회사 태양 전지 및 그 제조 방법
US20110183504A1 (en) * 2010-01-25 2011-07-28 Innovalight, Inc. Methods of forming a dual-doped emitter on a substrate with an inline diffusion apparatus
US8420517B2 (en) * 2009-07-02 2013-04-16 Innovalight, Inc. Methods of forming a multi-doped junction with silicon-containing particles
US8163587B2 (en) 2009-07-02 2012-04-24 Innovalight, Inc. Methods of using a silicon nanoparticle fluid to control in situ a set of dopant diffusion profiles
US20110003466A1 (en) * 2009-07-02 2011-01-06 Innovalight, Inc. Methods of forming a multi-doped junction with porous silicon
US8513104B2 (en) * 2009-07-02 2013-08-20 Innovalight, Inc. Methods of forming a floating junction on a solar cell with a particle masking layer
US8138070B2 (en) * 2009-07-02 2012-03-20 Innovalight, Inc. Methods of using a set of silicon nanoparticle fluids to control in situ a set of dopant diffusion profiles
US8324089B2 (en) 2009-07-23 2012-12-04 Honeywell International Inc. Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions
US8466447B2 (en) 2009-08-06 2013-06-18 Alliance For Sustainable Energy, Llc Back contact to film silicon on metal for photovoltaic cells
US20110030773A1 (en) * 2009-08-06 2011-02-10 Alliance For Sustainable Energy, Llc Photovoltaic cell with back-surface reflectivity scattering
DE102009037217A1 (de) * 2009-08-12 2011-02-17 Solarworld Innovations Gmbh Verfahren zur Herstellung eines Halbleiter-Bauelements
US20110041910A1 (en) * 2009-08-18 2011-02-24 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and manufacturing method thereof
KR100990110B1 (ko) * 2009-08-18 2010-10-29 엘지전자 주식회사 태양 전지
KR20120067361A (ko) * 2009-09-18 2012-06-25 어플라이드 머티어리얼스, 인코포레이티드 태양 전지에서 표면 재결합을 감소시키기 위한 한계치 조절 주입
US8603900B2 (en) * 2009-10-27 2013-12-10 Varian Semiconductor Equipment Associates, Inc. Reducing surface recombination and enhancing light trapping in solar cells
US8962380B2 (en) 2009-12-09 2015-02-24 Solexel, Inc. High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using thin planar semiconductor absorbers
KR101383395B1 (ko) 2009-12-28 2014-04-09 현대중공업 주식회사 후면전극형 태양전지의 제조방법
JP4868079B1 (ja) * 2010-01-25 2012-02-01 日立化成工業株式会社 n型拡散層形成組成物、n型拡散層の製造方法、及び太陽電池セルの製造方法
CN102770963B (zh) * 2010-02-08 2016-02-03 E·I·内穆尔杜邦公司 用于制备mwt硅太阳能电池的方法
CN102844883B (zh) 2010-02-12 2016-01-20 速力斯公司 用于制造光电池和微电子器件的半导体衬底的双面可重复使用的模板
NL2004310C2 (en) 2010-02-26 2011-08-30 Stichting Energie Method of fabrication of a back-contacted photovoltaic cell, and back-contacted photovoltaic cell made by such a method.
US20110277833A1 (en) * 2010-05-11 2011-11-17 Molecular Imprints, Inc. Backside contact solar cell
KR101369282B1 (ko) 2010-06-09 2014-03-04 솔렉셀, 인크. 고생산성 박막 증착 방법 및 시스템
DE102010026960A1 (de) 2010-07-12 2012-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photovoltaische Solarzelle und Verfahren zur Herstellung einer photovoltaischen Solarzelle
MY158500A (en) 2010-08-05 2016-10-14 Solexel Inc Backplane reinforcement and interconnects for solar cells
WO2012031371A1 (zh) * 2010-09-06 2012-03-15 无锡尚德太阳能电力有限公司 金属绕穿型背接触太阳电池、制备方法及其组件
DE102010060303A1 (de) * 2010-11-02 2012-05-03 Solarworld Innovations Gmbh Verfahren zum Herstellen einer Solarzelle
KR20130129919A (ko) * 2010-11-17 2013-11-29 히타치가세이가부시끼가이샤 태양 전지의 제조 방법
EP2642528A1 (en) * 2010-11-17 2013-09-25 Hitachi Chemical Co., Ltd. Method for producing solar cell
IT1403828B1 (it) * 2010-12-02 2013-10-31 Applied Materials Italia Srl Procedimento per la stampa di un substrato
US8858843B2 (en) * 2010-12-14 2014-10-14 Innovalight, Inc. High fidelity doping paste and methods thereof
WO2012085943A2 (en) * 2010-12-21 2012-06-28 Indian Institute Of Technology, Bombay A solar cell having three dimensional junctions and a method of forming the same
KR20120084104A (ko) * 2011-01-19 2012-07-27 엘지전자 주식회사 태양전지
US8962424B2 (en) 2011-03-03 2015-02-24 Palo Alto Research Center Incorporated N-type silicon solar cell with contact/protection structures
DE102011018374A1 (de) * 2011-04-20 2012-10-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung einer metallischen Kontaktstruktur einer Halbleiterstruktur mit Durchkontaktierung und photovoltaische Solarzelle
US9748414B2 (en) 2011-05-20 2017-08-29 Arthur R. Zingher Self-activated front surface bias for a solar cell
WO2013000026A1 (en) * 2011-06-30 2013-01-03 Newsouth Innovations Pty Limited Dielectric structures in solar cells
US8629294B2 (en) 2011-08-25 2014-01-14 Honeywell International Inc. Borate esters, boron-comprising dopants, and methods of fabricating boron-comprising dopants
EP2757591B1 (en) * 2011-09-13 2017-08-23 Kyocera Corporation Solar cell module
WO2013062727A1 (en) * 2011-10-24 2013-05-02 Applied Materials, Inc. Method and apparatus of removing a passivation film and improving contact resistance in rear point contact solar cells
US8975170B2 (en) 2011-10-24 2015-03-10 Honeywell International Inc. Dopant ink compositions for forming doped regions in semiconductor substrates, and methods for fabricating dopant ink compositions
TWI504279B (zh) 2011-12-01 2015-10-11 財團法人工業技術研究院 Mems音波感測器及其製造方法
WO2013095010A1 (en) * 2011-12-23 2013-06-27 Hanwha Chemical Corporation Manufacturing method of back contact solar cell
KR101335082B1 (ko) * 2012-02-01 2013-12-03 현대중공업 주식회사 양면수광형 태양전지의 제조방법
CN102593257A (zh) * 2012-03-06 2012-07-18 英利能源(中国)有限公司 双面发电mwt太阳能电池的制备方法
KR101315407B1 (ko) 2012-06-04 2013-10-07 한화케미칼 주식회사 에미터 랩 스루 태양 전지 및 이의 제조 방법
KR101363103B1 (ko) * 2012-06-29 2014-02-18 주식회사 신성솔라에너지 태양전지 및 그 제조방법
CN104488088B (zh) * 2012-07-19 2017-08-01 日立化成株式会社 太阳能电池元件及其制造方法、以及太阳能电池模块
WO2014014113A1 (ja) * 2012-07-19 2014-01-23 日立化成株式会社 太陽電池素子及びその製造方法、並びに太陽電池モジュール
WO2014059056A1 (en) 2012-10-09 2014-04-17 Avery Dennison Corporation Adhesives and related methods
CN103208562B (zh) * 2013-03-26 2015-06-03 中国科学院半导体研究所 一种制作发射极环绕型太阳电池的方法
CN103165755B (zh) * 2013-03-26 2015-05-06 中国科学院半导体研究所 一种制作金属环绕型太阳电池的方法
US9093598B2 (en) * 2013-04-12 2015-07-28 Btu International, Inc. Method of in-line diffusion for solar cells
US9147779B2 (en) * 2013-05-01 2015-09-29 The Boeing Company Solar cell by-pass diode with improved metal contacts
JP2015023281A (ja) 2013-07-19 2015-02-02 エムコア ソーラー パワー インコーポレイテッド 反転型メタモルフィック多接合型ソーラーセルを用いた航空機、船舶又は陸上用車両用の太陽発電システム
EP2827380A1 (en) 2013-07-19 2015-01-21 Emcore Solar Power, Inc. Solar power system for space vehicles or satellites using inverted metamorphic multijunction solar cells
DE102013218351A1 (de) * 2013-09-13 2015-03-19 Robert Bosch Gmbh Verfahren zur Herstellung einer Solarzelle
JP6114170B2 (ja) * 2013-12-05 2017-04-12 信越化学工業株式会社 太陽電池の製造方法
TWI496305B (zh) * 2014-01-10 2015-08-11 Motech Ind Inc 太陽能電池及其製作方法
US9947812B2 (en) * 2014-03-28 2018-04-17 Sunpower Corporation Metallization of solar cells
US9716192B2 (en) * 2014-03-28 2017-07-25 International Business Machines Corporation Method for fabricating a photovoltaic device by uniform plating on emitter-lined through-wafer vias and interconnects
US9627558B2 (en) 2014-04-09 2017-04-18 Arizona Board Of Regents On Behalf Of Arizona State University Methods and apparatuses for manufacturing self-aligned integrated back contact heterojunction solar cells
CN105428452A (zh) * 2014-09-18 2016-03-23 上海神舟新能源发展有限公司 基于掺杂浆料的全背接触高效晶体硅电池制备工艺
MX2017010047A (es) 2015-02-05 2017-12-18 Avery Dennison Corp Conjuntos de etiquetas para entornos adversos.
KR102526398B1 (ko) * 2016-01-12 2023-04-27 상라오 징코 솔라 테크놀러지 디벨롭먼트 컴퍼니, 리미티드 태양 전지 및 이의 제조 방법
DE102016105045A1 (de) * 2016-03-18 2017-09-21 Osram Opto Semiconductors Gmbh Strahlungsdetektor
KR101890222B1 (ko) * 2016-04-29 2018-08-22 한양대학교 에리카산학협력단 Ewt 태양전지 기판용 실리콘 박막 제조방법
US10526511B2 (en) 2016-12-22 2020-01-07 Avery Dennison Corporation Convertible pressure sensitive adhesives comprising urethane (meth)acrylate oligomers
CN106653881B (zh) * 2017-02-24 2018-12-25 泰州中来光电科技有限公司 一种背接触太阳能电池串及其制备方法和组件、系统
US20200279968A1 (en) * 2017-09-22 2020-09-03 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Interdigitated back-contacted solar cell with p-type conductivity
CN111245366B (zh) * 2020-01-09 2021-05-18 徐州谷阳新能源科技有限公司 一种mwt太阳能电池改善稳态的psg调整和测试方法
CN114566554B (zh) * 2020-11-27 2024-08-16 嘉兴阿特斯技术研究院有限公司 激光掺杂选择性发射极太阳能电池的制作方法
CN115763630B (zh) * 2022-11-29 2025-10-28 江苏润阳光伏科技有限公司 一种电池片的制备工艺及其过程接触点位测量工具

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5468652A (en) 1993-07-14 1995-11-21 Sandia Corporation Method of making a back contacted solar cell
US6441297B1 (en) 1998-03-13 2002-08-27 Steffen Keller Solar cell arrangement

Family Cites Families (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3936319A (en) 1973-10-30 1976-02-03 General Electric Company Solar cell
US3903427A (en) 1973-12-28 1975-09-02 Hughes Aircraft Co Solar cell connections
US3903428A (en) 1973-12-28 1975-09-02 Hughes Aircraft Co Solar cell contact design
US3990097A (en) 1975-09-18 1976-11-02 Solarex Corporation Silicon solar energy cell having improved back contact and method forming same
US4011782A (en) * 1975-09-25 1977-03-15 The Black And Decker Manufacturing Company Power miter saw
JPS60783B2 (ja) 1977-11-14 1985-01-10 ソニー株式会社 トランジスタ
US4165558A (en) 1977-11-21 1979-08-28 Armitage William F Jr Fabrication of photovoltaic devices by solid phase epitaxy
US4152824A (en) 1977-12-30 1979-05-08 Mobil Tyco Solar Energy Corporation Manufacture of solar cells
US4173496A (en) 1978-05-30 1979-11-06 Texas Instruments Incorporated Integrated solar cell array
US4234352A (en) 1978-07-26 1980-11-18 Electric Power Research Institute, Inc. Thermophotovoltaic converter and cell for use therein
US4190852A (en) 1978-09-14 1980-02-26 Warner Raymond M Jr Photovoltaic semiconductor device and method of making same
US4297391A (en) 1979-01-16 1981-10-27 Solarex Corporation Method of applying electrical contacts to a photovoltaic cell
US4227942A (en) 1979-04-23 1980-10-14 General Electric Company Photovoltaic semiconductor devices and methods of making same
US4427839A (en) 1981-11-09 1984-01-24 General Electric Company Faceted low absorptance solar cell
US4403255A (en) 1981-11-24 1983-09-06 Rca Corporation FM/TV Automatic gain control system
JPS59100197A (ja) * 1982-12-01 1984-06-09 Japan Atom Energy Res Inst 耐放射線性油
US4478879A (en) 1983-02-10 1984-10-23 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Screen printed interdigitated back contact solar cell
US4626613A (en) 1983-12-23 1986-12-02 Unisearch Limited Laser grooved solar cell
US4536607A (en) 1984-03-01 1985-08-20 Wiesmann Harold J Photovoltaic tandem cell
AU570309B2 (en) 1984-03-26 1988-03-10 Unisearch Limited Buried contact solar cell
US4595790A (en) 1984-12-28 1986-06-17 Sohio Commercial Development Co. Method of making current collector grid and materials therefor
US4667060A (en) 1985-05-28 1987-05-19 Spire Corporation Back junction photovoltaic solar cell
US4667058A (en) 1985-07-01 1987-05-19 Solarex Corporation Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby
US4663828A (en) 1985-10-11 1987-05-12 Energy Conversion Devices, Inc. Process and apparatus for continuous production of lightweight arrays of photovoltaic cells
US4663829A (en) 1985-10-11 1987-05-12 Energy Conversion Devices, Inc. Process and apparatus for continuous production of lightweight arrays of photovoltaic cells
US4865999A (en) 1987-07-08 1989-09-12 Glasstech Solar, Inc. Solar cell fabrication method
US4751191A (en) 1987-07-08 1988-06-14 Mobil Solar Energy Corporation Method of fabricating solar cells with silicon nitride coating
US4838952A (en) 1988-04-29 1989-06-13 Spectrolab, Inc. Controlled reflectance solar cell
US4927770A (en) 1988-11-14 1990-05-22 Electric Power Research Inst. Corp. Of District Of Columbia Method of fabricating back surface point contact solar cells
DE3901042A1 (de) 1989-01-14 1990-07-26 Nukem Gmbh Verfahren und vorrichtung zur herstellung eines halbleiter-schichtsystems
US5103268A (en) 1989-03-30 1992-04-07 Siemens Solar Industries, L.P. Semiconductor device with interfacial electrode layer
US5011782A (en) 1989-03-31 1991-04-30 Electric Power Research Institute Method of making passivated antireflective coating for photovoltaic cell
US5053083A (en) 1989-05-08 1991-10-01 The Board Of Trustees Of The Leland Stanford Junior University Bilevel contact solar cells
CA2024662A1 (en) 1989-09-08 1991-03-09 Robert Oswald Monolithic series and parallel connected photovoltaic module
US5011565A (en) 1989-12-06 1991-04-30 Mobil Solar Energy Corporation Dotted contact solar cell and method of making same
DE4008675A1 (de) * 1990-03-17 1991-09-19 Bosch Gmbh Robert Elektromagnetisch betaetigbares ventil
JPH0831617B2 (ja) 1990-04-18 1996-03-27 三菱電機株式会社 太陽電池及びその製造方法
US5067985A (en) 1990-06-08 1991-11-26 The United States Of America As Represented By The Secretary Of The Air Force Back-contact vertical-junction solar cell and method
US5118362A (en) 1990-09-24 1992-06-02 Mobil Solar Energy Corporation Electrical contacts and methods of manufacturing same
US5178685A (en) 1991-06-11 1993-01-12 Mobil Solar Energy Corporation Method for forming solar cell contacts and interconnecting solar cells
US5425816A (en) 1991-08-19 1995-06-20 Spectrolab, Inc. Electrical feedthrough structure and fabrication method
US5646397A (en) 1991-10-08 1997-07-08 Unisearch Limited Optical design for photo-cell
JPH05145094A (ja) 1991-11-22 1993-06-11 Mitsubishi Electric Corp 半導体装置およびその製造方法
AU663350B2 (en) 1991-12-09 1995-10-05 Csg Solar Ag Buried contact, interconnected thin film and bulk photovoltaic cells
WO1993024960A1 (en) 1992-05-27 1993-12-09 Mobil Solar Energy Corporation Solar cells with thick aluminum contacts
DE4310206C2 (de) 1993-03-29 1995-03-09 Siemens Ag Verfahren zur Herstellung einer Solarzelle aus einer Substratscheibe
AUPM483494A0 (en) 1994-03-31 1994-04-28 Pacific Solar Pty Limited Multiple layer thin film solar cells
AUPM982294A0 (en) 1994-12-02 1995-01-05 Pacific Solar Pty Limited Method of manufacturing a multilayer solar cell
JPH08162659A (ja) * 1994-12-06 1996-06-21 Japan Energy Corp 太陽電池
AUPM996094A0 (en) 1994-12-08 1995-01-05 Pacific Solar Pty Limited Multilayer solar cells with bypass diode protection
DE19508712C2 (de) 1995-03-10 1997-08-07 Siemens Solar Gmbh Solarzelle mit Back-Surface-Field und Verfahren zur Herstellung
US5547516A (en) 1995-05-15 1996-08-20 Luch; Daniel Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
KR19990063990A (ko) 1995-10-05 1999-07-26 로시 리차드 부분적으로 깊게 확산된 에미터가 있는 자가조정식(salde) 태양 전지 및 그 제조 방법
EP0858669B1 (en) 1995-10-31 1999-11-03 Ecole Polytechnique Féderale de Lausanne (EPFL) A battery of photovoltaic cells and process for manufacturing the same
US5641362A (en) 1995-11-22 1997-06-24 Ebara Solar, Inc. Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell
DE19549228A1 (de) 1995-12-21 1997-06-26 Heidenhain Gmbh Dr Johannes Optoelektronisches Sensor-Bauelement
JP2001501035A (ja) 1996-09-26 2001-01-23 アクゾ ノーベル ナムローゼ フェンノートシャップ 光起電箔の製造法
US6162658A (en) 1996-10-14 2000-12-19 Unisearch Limited Metallization of buried contact solar cells
JP3249408B2 (ja) 1996-10-25 2002-01-21 昭和シェル石油株式会社 薄膜太陽電池の薄膜光吸収層の製造方法及び製造装置
JP3249407B2 (ja) 1996-10-25 2002-01-21 昭和シェル石油株式会社 カルコパイライト系多元化合物半導体薄膜光吸収層からなる薄膜太陽電池
US5871591A (en) 1996-11-01 1999-02-16 Sandia Corporation Silicon solar cells made by a self-aligned, selective-emitter, plasma-etchback process
US6091021A (en) 1996-11-01 2000-07-18 Sandia Corporation Silicon cells made by self-aligned selective-emitter plasma-etchback process
DE19650111B4 (de) * 1996-12-03 2004-07-01 Siemens Solar Gmbh Solarzelle mit geringer Abschattung und Verfahren zur Herstellung
US6552414B1 (en) * 1996-12-24 2003-04-22 Imec Vzw Semiconductor device with selectively diffused regions
AUPO638997A0 (en) 1997-04-23 1997-05-22 Unisearch Limited Metal contact scheme using selective silicon growth
US6180869B1 (en) 1997-05-06 2001-01-30 Ebara Solar, Inc. Method and apparatus for self-doping negative and positive electrodes for silicon solar cells and other devices
US6339013B1 (en) 1997-05-13 2002-01-15 The Board Of Trustees Of The University Of Arkansas Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells
EP0881694A1 (en) 1997-05-30 1998-12-02 Interuniversitair Micro-Elektronica Centrum Vzw Solar cell and process of manufacturing the same
US5951786A (en) 1997-12-19 1999-09-14 Sandia Corporation Laminated photovoltaic modules using back-contact solar cells
US5972732A (en) 1997-12-19 1999-10-26 Sandia Corporation Method of monolithic module assembly
JP3672436B2 (ja) 1998-05-19 2005-07-20 シャープ株式会社 太陽電池セルの製造方法
US6081017A (en) 1998-05-28 2000-06-27 Samsung Electronics Co., Ltd. Self-biased solar cell and module adopting the same
AUPP437598A0 (en) 1998-06-29 1998-07-23 Unisearch Limited A self aligning method for forming a selective emitter and metallization in a solar cell
AUPP699798A0 (en) 1998-11-06 1998-12-03 Pacific Solar Pty Limited Thin films with light trapping
DE19854269B4 (de) 1998-11-25 2004-07-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dünnschichtsolarzellenanordnung sowie Verfahren zur Herstellung derselben
US6262359B1 (en) 1999-03-17 2001-07-17 Ebara Solar, Inc. Aluminum alloy back junction solar cell and a process for fabrication thereof
US6184047B1 (en) * 1999-05-27 2001-02-06 St Assembly Test Services Pte Ltd Contactor sleeve assembly for a pick and place semiconductor device handler
JP2001077382A (ja) 1999-09-08 2001-03-23 Sanyo Electric Co Ltd 光起電力装置
CA2387510A1 (en) 1999-10-13 2001-04-19 Universitat Konstanz Method and device for producing solar cells
US6632730B1 (en) 1999-11-23 2003-10-14 Ebara Solar, Inc. Method for self-doping contacts to a semiconductor
JP2001291881A (ja) * 2000-01-31 2001-10-19 Sanyo Electric Co Ltd 太陽電池モジュール
DE10020541A1 (de) 2000-04-27 2001-11-08 Univ Konstanz Verfahren zur Herstellung einer Solarzelle und Solarzelle
DE10021440A1 (de) 2000-05-03 2001-11-15 Univ Konstanz Verfahren zur Herstellung einer Solarzelle und nach diesem Verfahren hergestellte Solarzelle
JP2003533053A (ja) 2000-05-05 2003-11-05 ユニサーチ リミテツド 光起電力素子のための低領域金属接点
AU7684001A (en) 2000-07-06 2002-01-21 Bp Corp North America Inc Partially transparent photovoltaic modules
US20040219801A1 (en) 2002-04-25 2004-11-04 Oswald Robert S Partially transparent photovoltaic modules
DE10047556A1 (de) 2000-09-22 2002-04-11 Univ Konstanz Verfahren zur Herstellung einer Solarzelle und nach diesem Verfahren hergestellte Solarzelle
US20030044539A1 (en) 2001-02-06 2003-03-06 Oswald Robert S. Process for producing photovoltaic devices
US20020117199A1 (en) 2001-02-06 2002-08-29 Oswald Robert S. Process for producing photovoltaic devices
KR100786855B1 (ko) 2001-08-24 2007-12-20 삼성에스디아이 주식회사 강유전체를 이용한 태양전지
DE10142481A1 (de) 2001-08-31 2003-03-27 Rudolf Hezel Solarzelle sowie Verfahren zur Herstellung einer solchen
US6559497B2 (en) 2001-09-06 2003-05-06 Taiwan Semiconductor Manufacturing Co., Ltd. Microelectronic capacitor with barrier layer
US20030116185A1 (en) 2001-11-05 2003-06-26 Oswald Robert S. Sealed thin film photovoltaic modules
US7259321B2 (en) 2002-01-07 2007-08-21 Bp Corporation North America Inc. Method of manufacturing thin film photovoltaic modules
US6777729B1 (en) 2002-09-25 2004-08-17 International Radiation Detectors, Inc. Semiconductor photodiode with back contacts
US7388147B2 (en) 2003-04-10 2008-06-17 Sunpower Corporation Metal contact structure for solar cell and method of manufacture
DE10320212A1 (de) 2003-05-07 2004-12-02 Universität Konstanz Verfahren zum Texturieren von Oberflächen von Silizium-Scheiben
US7170001B2 (en) 2003-06-26 2007-01-30 Advent Solar, Inc. Fabrication of back-contacted silicon solar cells using thermomigration to create conductive vias
US7649141B2 (en) 2003-06-30 2010-01-19 Advent Solar, Inc. Emitter wrap-through back contact solar cells on thin silicon wafers

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5468652A (en) 1993-07-14 1995-11-21 Sandia Corporation Method of making a back contacted solar cell
US6441297B1 (en) 1998-03-13 2002-08-27 Steffen Keller Solar cell arrangement

Also Published As

Publication number Publication date
WO2005076960A2 (en) 2005-08-25
AU2005213444C1 (en) 2010-04-15
AU2005213444B2 (en) 2009-08-20
WO2005076960A3 (en) 2006-02-02
CN100452289C (zh) 2009-01-14
KR20070004672A (ko) 2007-01-09
US20050176164A1 (en) 2005-08-11
US7144751B2 (en) 2006-12-05
AU2005213444A1 (en) 2005-08-25
CA2596831A1 (en) 2005-08-25
JP2007521668A (ja) 2007-08-02
AU2009238329A1 (en) 2009-12-10
CN1938819A (zh) 2007-03-28
EP1714308A4 (en) 2010-03-10
EP1714308A2 (en) 2006-10-25

Similar Documents

Publication Publication Date Title
KR101083204B1 (ko) 백 컨택 태양전지 및 그 제조방법
CN102132421B (zh) 太阳能电池及其制造方法
US5468652A (en) Method of making a back contacted solar cell
KR101110951B1 (ko) 에미터 랩 쓰루 백 컨택 실리콘 태양전지의 컨택 제작
AU751678B2 (en) Solar cell and process of manufacturing the same
JP2007184580A (ja) 太陽電池及びその製造方法
KR20090091562A (ko) 태양전지 및 그 제조방법
KR20100136462A (ko) 단결정 n 실리콘 태양 전지를 제조하는 방법 및 상기 방법으로 제조된 태양 전지
EP2071632B1 (en) Thin-film solar cell and process for its manufacture
KR101072543B1 (ko) 태양 전지의 제조 방법
JP2013516081A (ja) 裏面電極型の太陽電池の製造方法
JP2015518286A (ja) エミッタラップスルー太陽電池およびその製造方法
WO2011074909A2 (ko) 태양전지의 선택적 에미터 형성방법
KR101482130B1 (ko) 후면전극 태양전지의 제조방법 및 이를 이용한 후면전극 태양전지
JP2010080576A (ja) 光電変換素子およびその製造方法
CN102569500A (zh) 制造太阳能电池的方法
US20130284248A1 (en) Solar cell having three dimensional junctions and a method of forming the same
TW200531298A (en) Back-contact solar cells and methods for fabrication
HK1101936A (en) Back-contact solar cells and methods for fabrication
TWI481060B (zh) 太陽能電池的製作方法
TW201316541A (zh) 金屬貫穿式太陽能電池之製造方法
KR101649372B1 (ko) 태양 전지 및 태양 전지의 제조 방법
JPH11214723A (ja) 太陽電池素子の製造方法
KR20110084611A (ko) 후면전극형 태양전지의 제조방법
WO2012077897A2 (ko) 태양전지 및 그 제조방법

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

N231 Notification of change of applicant
PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20141108

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20141108

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000