CN111245366B - 一种mwt太阳能电池改善稳态的psg调整和测试方法 - Google Patents
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Abstract
本发明公开一种MWT太阳能电池改善稳态的PSG调整和测试方法,包括测试方法和调整方法两个方面,第一步,取刻蚀即背面碱抛后的硅片,顺着打孔的位置将孔1/2位置平均分成2块;第二步,将孔位置放在3D显微镜下,用5倍物镜,灯光亮度26%‑30%找到打孔侧面位置;第三步,将打孔位置移至光标中心;第四步,调整物镜50倍,灯光亮度12%‑16%,测试模式Zeta 3D模式测试孔内3D图片;第五步,选择直线,拉取孔内过刻长度及硅片厚度;第六步,计算孔内过刻比,孔内过刻比=过刻长度/硅片厚度,控制孔内过刻比为硅片横截面积的0‑50%。
Description
技术领域
本发明涉及一种MWT太阳能电池改善稳态的PSG调整和测试方法,属于MWT太阳能电池组件加工技术领域。
背景技术
金属穿孔卷绕硅太阳能电池(MWT)因其效率高,遮光面积小以及更好的外观特点以及易于现有传统晶硅工艺整合受到越来越多的关注。MWT硅太阳能电池是通过激光钻孔将正面收集的能量穿过电池转移至电池背面,以减少遮光面积来达到提高转换效率的目的。
刻蚀清洗工艺至关重要,而且MWT电池制备过程中孔内PN结的留存非常重要,PN结的留存可以降低堵孔浆料的技术要求及开发难度,降低孔内漏电风险,避免组件端出现热斑风险。背面的清洗效果和孔内的PN留存,这是一个亟需解决的问题。
目前,印刷后稳态不稳定,影响组件端的可靠性,没有有效的解决和监控方法。
发明内容
发明目的:针对现有技术中存在的问题与不足,本发明提供一种可靠性强的可提前监控孔内过刻异常并有效减低稳态超标的MWT太阳能电池改善稳态的PSG调整和测试方法。
技术方案:一种MWT太阳能电池改善稳态的PSG调整和测试方法,其特征在于:包括测试步骤和调整步骤,所述测试步骤包括:
第一步,取刻蚀即背面碱抛后的硅片,顺着打孔的位置将孔1/2位置平均分成2块;
第二步,将孔位置放在3D显微镜下,用5倍物镜,灯光亮度26%-30%找到打孔侧面位置;
第三步,将打孔位置移至光标中心;
第四步,调整物镜50倍,灯光亮度12%-16%,测试模式Zeta 3D模式测试孔内3D图片;
第五步,选择直线,拉取孔内过刻长度及硅片厚度;
第六步,计算孔内过刻比,孔内过刻比=过刻长度/硅片厚度,控制孔内过刻比为硅片横截面积的0-50%。
所述调整步骤即测试孔内过刻比偏大或漏刻调整方法包括:
第一步,确认去PSG药液浓度,电导率控制在20-60ms/cm;
第二步,去PSG的HF药液浓度控制在5%-30%,过刻比大则减少HF补加,漏刻则反之;
第三步,调整正面水膜覆盖量,过刻增大水膜量,漏刻则反之;
第四步:槽体液位高度通过泵的功率来控制或调整槽体挡板高度来控制,泵功率控制在20%-60%。
有益效果:与现有技术相比,本发明所提供的链式去psg和槽式碱抛光工艺,主要是通过监控链式去PSG和槽式碱抛光后的孔内过刻比,做到孔内过刻比偏大和漏刻能够及时调整,孔内过刻比偏大漏电值会大,对稳态影响很大,本发明主要是能做到提前预防和改善稳态,避免因稳态异常导致制程批量不良,改善组件端出现热斑和可靠性问题。
附图说明
图1为Zeta 3D测试孔内过刻图。
图2为模拟孔内过刻图。
具体实施方式
下面结合附图和具体实施例,进一步阐明本发明。
如图1-2所示,本实施例提供一种MWT太阳能电池改善稳态的PSG调整和测试方法,其特征在于:包括以下两个方面:
1)测试方法:
第一步,取刻蚀即背面碱抛后的硅片,顺着打孔的位置将孔1/2位置平均分成2块;
第二步,将孔位置放在3D显微镜下,用5倍物镜,灯光亮度26%-30%找到打孔侧面位置;
第三步,将打孔位置移至光标中心;
第四步,调整物镜50倍,灯光亮度12%-16%,测试模式Zeta 3D模式测试孔内3D图片;
第五步,选择直线,拉取孔内过刻长度及硅片厚度;
第六步,计算孔内过刻比,孔内过刻比=过刻长度/硅片厚度,控制孔内过刻比为硅片横截面积的0-50%。其中:图1的①为孔内过刻长度对应图2的③;图2的②硅片厚度对应图2的④。
2)调整方法即测试孔内过刻比偏大或漏刻调整方法:
第一步,确认去PSG药液浓度,电导率一般控制在20-60ms/cm
第二步,去PSG的HF药液浓度一般控制在5%-30%,过刻比大减少HF补加,漏刻则反之;
第三步,调整正面水膜覆盖量,过刻增大水膜量,漏刻则反之;
第四步:槽体液位高度可以通过泵的功率来控制或调整槽体挡板高度,泵功率一般控制在20%-60%;
第五步,槽体滚轮水平达不到要求,需要调整去PSG槽体滚轮水平。
以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以作出若干改进,这些改进也应视为本发明的保护范围。
Claims (1)
1.一种MWT太阳能电池改善稳态的PSG调整和测试方法,其特征在于:包括测试步骤和调整步骤,所述测试步骤包括:
第一步,取刻蚀即背面碱抛后的硅片,顺着打孔的位置将孔1/2位置平均分成2块;
第二步,将孔位置放在3D显微镜下,用5倍物镜,灯光亮度26%-30%找到打孔侧面位置;
第三步,将打孔位置移至光标中心;
第四步,调整物镜50倍,灯光亮度12%-16%,测试模式Zeta 3D模式测试孔内3D图片;
第五步,选择直线,拉取孔内过刻长度及硅片厚度;
第六步,计算孔内过刻比,孔内过刻比=过刻长度/硅片厚度,控制孔内过刻比为硅片横截面积的0-50%;
所述调整步骤包括:
第一步,确认去PSG药液浓度,电导率控制在20-60ms/cm;
第二步,去PSG的HF药液浓度控制在5%-30%,若过刻比大,则减少HF补加,漏刻则反之;
第三步,调整正面水膜覆盖量,过刻则增大水膜量,漏刻则反之;
第四步:槽体液位高度通过调节泵的功率或调整槽体挡板高度来控制,泵功率控制在20%-60%。
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