KR100419687B1 - 반도체 기억 장치 - Google Patents
반도체 기억 장치 Download PDFInfo
- Publication number
- KR100419687B1 KR100419687B1 KR10-2001-0025724A KR20010025724A KR100419687B1 KR 100419687 B1 KR100419687 B1 KR 100419687B1 KR 20010025724 A KR20010025724 A KR 20010025724A KR 100419687 B1 KR100419687 B1 KR 100419687B1
- Authority
- KR
- South Korea
- Prior art keywords
- channel mos
- mos transistor
- wiring layer
- well
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 123
- 239000000758 substrate Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 description 223
- 239000002184 metal Substances 0.000 description 210
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 137
- 229920005591 polysilicon Polymers 0.000 description 135
- 238000010586 diagram Methods 0.000 description 35
- 230000000694 effects Effects 0.000 description 28
- 230000006870 function Effects 0.000 description 22
- 239000012535 impurity Substances 0.000 description 11
- 102000000582 Retinoblastoma-Like Protein p107 Human genes 0.000 description 9
- 108010002342 Retinoblastoma-Like Protein p107 Proteins 0.000 description 9
- 102000004642 Retinoblastoma-Like Protein p130 Human genes 0.000 description 9
- 108010003494 Retinoblastoma-Like Protein p130 Proteins 0.000 description 9
- 230000009467 reduction Effects 0.000 description 9
- 101100378758 Anemone leveillei AL21 gene Proteins 0.000 description 8
- 101500027749 Mus musculus Serpinin Proteins 0.000 description 8
- 230000010354 integration Effects 0.000 description 7
- 101710190981 50S ribosomal protein L6 Proteins 0.000 description 6
- 101000575029 Bacillus subtilis (strain 168) 50S ribosomal protein L11 Proteins 0.000 description 6
- 102100035793 CD83 antigen Human genes 0.000 description 6
- 101000946856 Homo sapiens CD83 antigen Proteins 0.000 description 6
- 230000003071 parasitic effect Effects 0.000 description 5
- 101100055224 Anemone leveillei AL10 gene Proteins 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/16—Multiple access memory array, e.g. addressing one storage element via at least two independent addressing line groups
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
- G11C7/18—Bit line organisation; Bit line lay-out
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000143861 | 2000-05-16 | ||
| JP2000-143861 | 2000-05-16 | ||
| JP2001-003500 | 2001-01-11 | ||
| JP2001003500A JP4885365B2 (ja) | 2000-05-16 | 2001-01-11 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20010106233A KR20010106233A (ko) | 2001-11-29 |
| KR100419687B1 true KR100419687B1 (ko) | 2004-02-21 |
Family
ID=26591985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2001-0025724A Expired - Lifetime KR100419687B1 (ko) | 2000-05-16 | 2001-05-11 | 반도체 기억 장치 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6347062B2 (enExample) |
| JP (1) | JP4885365B2 (enExample) |
| KR (1) | KR100419687B1 (enExample) |
| DE (1) | DE10123514B4 (enExample) |
Families Citing this family (100)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2299991A1 (en) * | 2000-03-03 | 2001-09-03 | Mosaid Technologies Incorporated | A memory cell for embedded memories |
| TW522546B (en) * | 2000-12-06 | 2003-03-01 | Mitsubishi Electric Corp | Semiconductor memory |
| JP3637299B2 (ja) * | 2001-10-05 | 2005-04-13 | 松下電器産業株式会社 | 半導体記憶装置 |
| JP2003133529A (ja) * | 2001-10-24 | 2003-05-09 | Sony Corp | 情報記憶装置およびその製造方法 |
| JP2003152111A (ja) * | 2001-11-13 | 2003-05-23 | Mitsubishi Electric Corp | 半導体記憶装置 |
| JP2003218238A (ja) * | 2001-11-14 | 2003-07-31 | Mitsubishi Electric Corp | 半導体記憶装置 |
| US6737685B2 (en) * | 2002-01-11 | 2004-05-18 | International Business Machines Corporation | Compact SRAM cell layout for implementing one-port or two-port operation |
| JP4073691B2 (ja) * | 2002-03-19 | 2008-04-09 | 株式会社ルネサステクノロジ | 半導体記憶装置 |
| JP4278338B2 (ja) | 2002-04-01 | 2009-06-10 | 株式会社ルネサステクノロジ | 半導体記憶装置 |
| KR100468780B1 (ko) * | 2002-12-18 | 2005-01-29 | 삼성전자주식회사 | 더블 포트 반도체 메모리 장치 |
| JP4418153B2 (ja) * | 2002-12-27 | 2010-02-17 | 株式会社ルネサステクノロジ | 半導体装置 |
| KR100539229B1 (ko) | 2003-01-30 | 2005-12-27 | 삼성전자주식회사 | 듀얼 포트 반도체 메모리 장치 |
| JP4416428B2 (ja) | 2003-04-30 | 2010-02-17 | 株式会社ルネサステクノロジ | 半導体記憶装置 |
| JP2005175415A (ja) * | 2003-12-05 | 2005-06-30 | Taiwan Semiconductor Manufacturing Co Ltd | 集積回路デバイスとその製造方法 |
| JP2005333084A (ja) * | 2004-05-21 | 2005-12-02 | Nec Electronics Corp | 半導体記憶装置 |
| JPWO2006016403A1 (ja) * | 2004-08-10 | 2008-05-01 | 富士通株式会社 | 半導体記憶装置 |
| US7365432B2 (en) * | 2004-08-23 | 2008-04-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory cell structure |
| JP2006127737A (ja) * | 2004-09-30 | 2006-05-18 | Nscore:Kk | 不揮発性メモリ回路 |
| JP4846721B2 (ja) | 2005-05-11 | 2011-12-28 | 富士通セミコンダクター株式会社 | 半導体装置とその製造方法 |
| JP4578329B2 (ja) | 2005-06-03 | 2010-11-10 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置 |
| CN1893084A (zh) * | 2005-07-07 | 2007-01-10 | 松下电器产业株式会社 | 半导体装置 |
| US7405994B2 (en) | 2005-07-29 | 2008-07-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Dual port cell structure |
| US9563733B2 (en) | 2009-05-06 | 2017-02-07 | Tela Innovations, Inc. | Cell circuit and layout with linear finfet structures |
| US9230910B2 (en) * | 2006-03-09 | 2016-01-05 | Tela Innovations, Inc. | Oversized contacts and vias in layout defined by linearly constrained topology |
| US7763534B2 (en) | 2007-10-26 | 2010-07-27 | Tela Innovations, Inc. | Methods, structures and designs for self-aligning local interconnects used in integrated circuits |
| US8658542B2 (en) | 2006-03-09 | 2014-02-25 | Tela Innovations, Inc. | Coarse grid design methods and structures |
| US8448102B2 (en) | 2006-03-09 | 2013-05-21 | Tela Innovations, Inc. | Optimizing layout of irregular structures in regular layout context |
| US7446352B2 (en) | 2006-03-09 | 2008-11-04 | Tela Innovations, Inc. | Dynamic array architecture |
| US8653857B2 (en) | 2006-03-09 | 2014-02-18 | Tela Innovations, Inc. | Circuitry and layouts for XOR and XNOR logic |
| US9035359B2 (en) | 2006-03-09 | 2015-05-19 | Tela Innovations, Inc. | Semiconductor chip including region including linear-shaped conductive structures forming gate electrodes and having electrical connection areas arranged relative to inner region between transistors of different types and associated methods |
| US8541879B2 (en) | 2007-12-13 | 2013-09-24 | Tela Innovations, Inc. | Super-self-aligned contacts and method for making the same |
| US9009641B2 (en) | 2006-03-09 | 2015-04-14 | Tela Innovations, Inc. | Circuits with linear finfet structures |
| US8839175B2 (en) | 2006-03-09 | 2014-09-16 | Tela Innovations, Inc. | Scalable meta-data objects |
| US7956421B2 (en) * | 2008-03-13 | 2011-06-07 | Tela Innovations, Inc. | Cross-coupled transistor layouts in restricted gate level layout architecture |
| JP5061490B2 (ja) * | 2006-04-06 | 2012-10-31 | ソニー株式会社 | 半導体装置およびその製造方法 |
| US7898894B2 (en) * | 2006-04-12 | 2011-03-01 | International Business Machines Corporation | Static random access memory (SRAM) cells |
| US7269056B1 (en) * | 2006-04-27 | 2007-09-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Power grid design for split-word line style memory cell |
| US7606057B2 (en) * | 2006-05-31 | 2009-10-20 | Arm Limited | Metal line layout in a memory cell |
| JP2008027493A (ja) * | 2006-07-19 | 2008-02-07 | Toshiba Corp | 半導体記憶装置 |
| JP2008130670A (ja) * | 2006-11-17 | 2008-06-05 | Seiko Epson Corp | 半導体装置、論理回路および電子機器 |
| US7525868B2 (en) * | 2006-11-29 | 2009-04-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Multiple-port SRAM device |
| US9424889B1 (en) * | 2015-02-04 | 2016-08-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multiple-port SRAM device |
| US9099172B2 (en) * | 2013-01-02 | 2015-08-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Dual-port SRAM connection structure |
| JP2008159669A (ja) * | 2006-12-21 | 2008-07-10 | Matsushita Electric Ind Co Ltd | 半導体記憶装置 |
| US7839697B2 (en) | 2006-12-21 | 2010-11-23 | Panasonic Corporation | Semiconductor memory device |
| US7738282B2 (en) * | 2007-02-15 | 2010-06-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Cell structure of dual port SRAM |
| US8667443B2 (en) * | 2007-03-05 | 2014-03-04 | Tela Innovations, Inc. | Integrated circuit cell library for multiple patterning |
| US7888705B2 (en) | 2007-08-02 | 2011-02-15 | Tela Innovations, Inc. | Methods for defining dynamic array section with manufacturing assurance halo and apparatus implementing the same |
| JP2009016809A (ja) * | 2007-06-07 | 2009-01-22 | Toshiba Corp | 半導体記憶装置 |
| KR100849794B1 (ko) * | 2007-07-04 | 2008-07-31 | 주식회사 하이닉스반도체 | 강유전체 소자를 적용한 반도체 메모리 장치 |
| KR100865633B1 (ko) * | 2007-07-19 | 2008-10-27 | 주식회사 동부하이텍 | 듀얼 포트 에스램 |
| US8453094B2 (en) | 2008-01-31 | 2013-05-28 | Tela Innovations, Inc. | Enforcement of semiconductor structure regularity for localized transistors and interconnect |
| US7939443B2 (en) | 2008-03-27 | 2011-05-10 | Tela Innovations, Inc. | Methods for multi-wire routing and apparatus implementing same |
| JP2009238332A (ja) | 2008-03-27 | 2009-10-15 | Renesas Technology Corp | 半導体記憶装置 |
| JP5231924B2 (ja) * | 2008-10-03 | 2013-07-10 | 株式会社東芝 | 半導体記憶装置 |
| GB2460049A (en) * | 2008-05-13 | 2009-11-18 | Silicon Basis Ltd | Reading from an SRAM cell using a read bit line |
| US7864600B2 (en) * | 2008-06-19 | 2011-01-04 | Texas Instruments Incorporated | Memory cell employing reduced voltage |
| MY152456A (en) | 2008-07-16 | 2014-09-30 | Tela Innovations Inc | Methods for cell phasing and placement in dynamic array architecture and implementation of the same |
| US9122832B2 (en) | 2008-08-01 | 2015-09-01 | Tela Innovations, Inc. | Methods for controlling microloading variation in semiconductor wafer layout and fabrication |
| US8009463B2 (en) * | 2009-07-31 | 2011-08-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Cell structure for dual port SRAM |
| US8189368B2 (en) * | 2009-07-31 | 2012-05-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Cell structure for dual port SRAM |
| US8661392B2 (en) | 2009-10-13 | 2014-02-25 | Tela Innovations, Inc. | Methods for cell boundary encroachment and layouts implementing the Same |
| JP5596335B2 (ja) | 2009-12-24 | 2014-09-24 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| WO2011077664A1 (ja) | 2009-12-25 | 2011-06-30 | パナソニック株式会社 | 半導体装置 |
| US8218354B2 (en) * | 2009-12-30 | 2012-07-10 | Taiwan Semicondcutor Manufacturing Co., Ltd. | SRAM word-line coupling noise restriction |
| US9362290B2 (en) * | 2010-02-08 | 2016-06-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory cell layout |
| US8942030B2 (en) * | 2010-06-25 | 2015-01-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for SRAM cell circuit |
| US8315084B2 (en) * | 2010-03-10 | 2012-11-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fully balanced dual-port memory cell |
| US8675397B2 (en) * | 2010-06-25 | 2014-03-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Cell structure for dual-port SRAM |
| CN102243888A (zh) * | 2010-05-13 | 2011-11-16 | 黄效华 | 负载平衡的多端口寄存器存储单元 |
| WO2012017535A1 (ja) * | 2010-08-05 | 2012-02-09 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US9159627B2 (en) | 2010-11-12 | 2015-10-13 | Tela Innovations, Inc. | Methods for linewidth modification and apparatus implementing the same |
| JP5711033B2 (ja) * | 2011-04-12 | 2015-04-30 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置 |
| US8576655B2 (en) | 2011-06-21 | 2013-11-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor memories |
| JP5705053B2 (ja) | 2011-07-26 | 2015-04-22 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| WO2013018156A1 (ja) | 2011-07-29 | 2013-02-07 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| US8406028B1 (en) * | 2011-10-31 | 2013-03-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Word line layout for semiconductor memory |
| US9099199B2 (en) * | 2012-03-15 | 2015-08-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory cell and memory array |
| US9036404B2 (en) | 2012-03-30 | 2015-05-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods and apparatus for SRAM cell structure |
| JP6151504B2 (ja) * | 2012-10-17 | 2017-06-21 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置 |
| KR20160040577A (ko) * | 2013-08-06 | 2016-04-14 | 르네사스 일렉트로닉스 가부시키가이샤 | 반도체 집적 회로 장치 |
| US9536596B2 (en) * | 2014-08-26 | 2017-01-03 | Qualcomm Incorporated | Three-port bit cell having increased width |
| US9876017B2 (en) * | 2014-12-03 | 2018-01-23 | Qualcomm Incorporated | Static random access memory (SRAM) bit cells with wordline landing pads split across boundary edges of the SRAM bit cells |
| US9806083B2 (en) * | 2014-12-03 | 2017-10-31 | Qualcomm Incorporated | Static random access memory (SRAM) bit cells with wordlines on separate metal layers for increased performance, and related methods |
| US9524972B2 (en) | 2015-02-12 | 2016-12-20 | Qualcomm Incorporated | Metal layers for a three-port bit cell |
| JP6501688B2 (ja) * | 2015-09-29 | 2019-04-17 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置およびそのテスト方法 |
| TWI726869B (zh) | 2016-02-24 | 2021-05-11 | 聯華電子股份有限公司 | 靜態隨機存取記憶體的佈局結構及其製作方法 |
| JP2016146504A (ja) * | 2016-04-06 | 2016-08-12 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体チップ |
| TWI681542B (zh) * | 2016-05-04 | 2020-01-01 | 聯華電子股份有限公司 | 靜態隨機存取記憶體的佈局圖案 |
| US10074605B2 (en) | 2016-06-30 | 2018-09-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Memory cell and array structure having a plurality of bit lines |
| US10461086B2 (en) | 2016-10-31 | 2019-10-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Memory cell structure |
| US9935112B1 (en) * | 2017-05-19 | 2018-04-03 | Globalfoundries Inc. | SRAM cell having dual pass gate transistors and method of making the same |
| JP6383073B2 (ja) * | 2017-09-27 | 2018-08-29 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US10211206B1 (en) * | 2017-11-01 | 2019-02-19 | Globalfoundries Inc. | Two-port vertical SRAM circuit structure and method for producing the same |
| US10410934B2 (en) * | 2017-12-07 | 2019-09-10 | Micron Technology, Inc. | Apparatuses having an interconnect extending from an upper conductive structure, through a hole in another conductive structure, and to an underlying structure |
| JP6586204B2 (ja) * | 2018-08-02 | 2019-10-02 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| TWI823896B (zh) * | 2019-02-12 | 2023-12-01 | 聯華電子股份有限公司 | 靜態隨機處理記憶體 |
| JP7370730B2 (ja) * | 2019-05-14 | 2023-10-30 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置 |
| CN111129005B (zh) * | 2019-12-25 | 2023-09-19 | 上海华力集成电路制造有限公司 | 一种双口静态随机存储单元版图结构 |
| US11955169B2 (en) | 2021-03-23 | 2024-04-09 | Qualcomm Incorporated | High-speed multi-port memory supporting collision |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5523598A (en) * | 1993-06-15 | 1996-06-04 | Hitachi, Ltd. | Semiconductor integrated circuit device |
| KR980012559A (ko) * | 1996-06-29 | 1998-04-30 | 윤종용 | 집적도가 향상된 스태틱 랜덤 억세스 메모리장치 |
| JPH10223777A (ja) * | 1997-02-03 | 1998-08-21 | Nec Corp | 半導体記憶装置 |
| KR19990080732A (ko) * | 1998-04-21 | 1999-11-15 | 김영환 | 풀 씨모스 에스램 셀 |
| JP2000031300A (ja) * | 1998-07-09 | 2000-01-28 | Fujitsu Ltd | スタティック型半導体記憶装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5325338A (en) * | 1991-09-04 | 1994-06-28 | Advanced Micro Devices, Inc. | Dual port memory, such as used in color lookup tables for video systems |
| US5338963A (en) | 1993-04-05 | 1994-08-16 | International Business Machines Corporation | Soft error immune CMOS static RAM cell |
| JP3771283B2 (ja) | 1993-09-29 | 2006-04-26 | 株式会社ルネサステクノロジ | 半導体集積回路装置 |
| JPH097373A (ja) * | 1995-06-20 | 1997-01-10 | Oki Electric Ind Co Ltd | 半導体記憶装置 |
| US5561638A (en) * | 1995-11-30 | 1996-10-01 | Northern Telecom Limited | Multi-port SRAM core array |
| JP3824343B2 (ja) | 1996-03-29 | 2006-09-20 | 富士通株式会社 | 半導体装置 |
| US5742557A (en) * | 1996-06-20 | 1998-04-21 | Northern Telecom Limited | Multi-port random access memory |
| JP3523762B2 (ja) * | 1996-12-19 | 2004-04-26 | 株式会社東芝 | 半導体記憶装置 |
| KR100289386B1 (ko) * | 1997-12-27 | 2001-06-01 | 김영환 | 멀티 포트 에스램 |
| JP3852729B2 (ja) * | 1998-10-27 | 2006-12-06 | 富士通株式会社 | 半導体記憶装置 |
-
2001
- 2001-01-11 JP JP2001003500A patent/JP4885365B2/ja not_active Expired - Lifetime
- 2001-04-03 US US09/824,008 patent/US6347062B2/en not_active Expired - Lifetime
- 2001-05-11 KR KR10-2001-0025724A patent/KR100419687B1/ko not_active Expired - Lifetime
- 2001-05-15 DE DE10123514A patent/DE10123514B4/de not_active Expired - Lifetime
-
2002
- 2002-01-28 US US10/056,111 patent/US6535453B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5523598A (en) * | 1993-06-15 | 1996-06-04 | Hitachi, Ltd. | Semiconductor integrated circuit device |
| KR980012559A (ko) * | 1996-06-29 | 1998-04-30 | 윤종용 | 집적도가 향상된 스태틱 랜덤 억세스 메모리장치 |
| JPH10223777A (ja) * | 1997-02-03 | 1998-08-21 | Nec Corp | 半導体記憶装置 |
| KR19990080732A (ko) * | 1998-04-21 | 1999-11-15 | 김영환 | 풀 씨모스 에스램 셀 |
| JP2000031300A (ja) * | 1998-07-09 | 2000-01-28 | Fujitsu Ltd | スタティック型半導体記憶装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20010043487A1 (en) | 2001-11-22 |
| KR20010106233A (ko) | 2001-11-29 |
| DE10123514B4 (de) | 2005-07-28 |
| US6535453B2 (en) | 2003-03-18 |
| JP4885365B2 (ja) | 2012-02-29 |
| DE10123514A1 (de) | 2001-11-22 |
| JP2002043441A (ja) | 2002-02-08 |
| US20020064080A1 (en) | 2002-05-30 |
| US6347062B2 (en) | 2002-02-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100419687B1 (ko) | 반도체 기억 장치 | |
| KR100522631B1 (ko) | 반도체 기억장치 | |
| JP6275905B2 (ja) | 半導体記憶装置 | |
| KR100438243B1 (ko) | 반도체 기억 장치 | |
| US6885609B2 (en) | Semiconductor memory device supporting two data ports | |
| KR100539229B1 (ko) | 듀얼 포트 반도체 메모리 장치 | |
| JP2004335535A (ja) | 半導体記憶装置 | |
| JP6096271B2 (ja) | 半導体装置 | |
| KR20240143947A (ko) | 백사이드 메탈을 이용한 매장된 비트라인 및 워드라인을 포함하는 에스램 메모리 장치 | |
| TW202439919A (zh) | 記憶體裝置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 20010511 |
|
| PA0201 | Request for examination | ||
| PG1501 | Laying open of application | ||
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20030224 Patent event code: PE09021S01D |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20031126 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20040209 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 20040210 End annual number: 3 Start annual number: 1 |
|
| PG1601 | Publication of registration | ||
| PR1001 | Payment of annual fee |
Payment date: 20070125 Start annual number: 4 End annual number: 4 |
|
| PR1001 | Payment of annual fee |
Payment date: 20080122 Start annual number: 5 End annual number: 5 |
|
| PR1001 | Payment of annual fee |
Payment date: 20090123 Start annual number: 6 End annual number: 6 |
|
| PR1001 | Payment of annual fee |
Payment date: 20100204 Start annual number: 7 End annual number: 7 |
|
| PR1001 | Payment of annual fee |
Payment date: 20110126 Start annual number: 8 End annual number: 8 |
|
| PR1001 | Payment of annual fee |
Payment date: 20120119 Start annual number: 9 End annual number: 9 |
|
| FPAY | Annual fee payment | ||
| PR1001 | Payment of annual fee |
Payment date: 20130118 Start annual number: 10 End annual number: 10 |
|
| FPAY | Annual fee payment | ||
| PR1001 | Payment of annual fee |
Payment date: 20140117 Start annual number: 11 End annual number: 11 |
|
| FPAY | Annual fee payment |
Payment date: 20150119 Year of fee payment: 12 |
|
| PR1001 | Payment of annual fee |
Payment date: 20150119 Start annual number: 12 End annual number: 12 |
|
| FPAY | Annual fee payment |
Payment date: 20160119 Year of fee payment: 13 |
|
| PR1001 | Payment of annual fee |
Payment date: 20160119 Start annual number: 13 End annual number: 13 |
|
| FPAY | Annual fee payment |
Payment date: 20170119 Year of fee payment: 14 |
|
| PR1001 | Payment of annual fee |
Payment date: 20170119 Start annual number: 14 End annual number: 14 |
|
| FPAY | Annual fee payment |
Payment date: 20180119 Year of fee payment: 15 |
|
| PR1001 | Payment of annual fee |
Payment date: 20180119 Start annual number: 15 End annual number: 15 |
|
| FPAY | Annual fee payment |
Payment date: 20190131 Year of fee payment: 16 |
|
| PR1001 | Payment of annual fee |
Payment date: 20190131 Start annual number: 16 End annual number: 16 |
|
| FPAY | Annual fee payment |
Payment date: 20200121 Year of fee payment: 17 |
|
| PR1001 | Payment of annual fee |
Payment date: 20200121 Start annual number: 17 End annual number: 17 |
|
| PR1001 | Payment of annual fee |
Payment date: 20210201 Start annual number: 18 End annual number: 18 |
|
| PC1801 | Expiration of term |