JPH09319067A5 - - Google Patents

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Publication number
JPH09319067A5
JPH09319067A5 JP1996339636A JP33963696A JPH09319067A5 JP H09319067 A5 JPH09319067 A5 JP H09319067A5 JP 1996339636 A JP1996339636 A JP 1996339636A JP 33963696 A JP33963696 A JP 33963696A JP H09319067 A5 JPH09319067 A5 JP H09319067A5
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JP
Japan
Prior art keywords
correction
pattern
optical proximity
proximity effect
verification
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JP1996339636A
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English (en)
Japanese (ja)
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JP3934719B2 (ja
JPH09319067A (ja
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Priority to JP33963696A priority Critical patent/JP3934719B2/ja
Priority claimed from JP33963696A external-priority patent/JP3934719B2/ja
Priority to US08/771,252 priority patent/US5879844A/en
Publication of JPH09319067A publication Critical patent/JPH09319067A/ja
Priority to US09/239,770 priority patent/US6077310A/en
Publication of JPH09319067A5 publication Critical patent/JPH09319067A5/ja
Application granted granted Critical
Publication of JP3934719B2 publication Critical patent/JP3934719B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP33963696A 1995-12-22 1996-12-19 光近接効果補正方法 Expired - Fee Related JP3934719B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP33963696A JP3934719B2 (ja) 1995-12-22 1996-12-19 光近接効果補正方法
US08/771,252 US5879844A (en) 1995-12-22 1996-12-20 Optical proximity correction method
US09/239,770 US6077310A (en) 1995-12-22 1999-01-29 Optical proximity correction system

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP33545095 1995-12-22
JP7-335450 1995-12-22
JP8-68829 1996-03-25
JP6882996 1996-03-25
JP33963696A JP3934719B2 (ja) 1995-12-22 1996-12-19 光近接効果補正方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005302095A Division JP4006013B2 (ja) 1995-12-22 2005-10-17 光近接効果補正方法

Publications (3)

Publication Number Publication Date
JPH09319067A JPH09319067A (ja) 1997-12-12
JPH09319067A5 true JPH09319067A5 (https=) 2004-11-18
JP3934719B2 JP3934719B2 (ja) 2007-06-20

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ID=27299867

Family Applications (1)

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JP33963696A Expired - Fee Related JP3934719B2 (ja) 1995-12-22 1996-12-19 光近接効果補正方法

Country Status (2)

Country Link
US (2) US5879844A (https=)
JP (1) JP3934719B2 (https=)

Families Citing this family (296)

* Cited by examiner, † Cited by third party
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