JP6681509B1 - 光検出装置 - Google Patents
光検出装置 Download PDFInfo
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- JP6681509B1 JP6681509B1 JP2019175948A JP2019175948A JP6681509B1 JP 6681509 B1 JP6681509 B1 JP 6681509B1 JP 2019175948 A JP2019175948 A JP 2019175948A JP 2019175948 A JP2019175948 A JP 2019175948A JP 6681509 B1 JP6681509 B1 JP 6681509B1
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- 238000001514 detection method Methods 0.000 claims abstract description 150
- 230000015556 catabolic process Effects 0.000 claims description 131
- 238000010586 diagram Methods 0.000 abstract description 5
- 238000000098 azimuthal photoelectron diffraction Methods 0.000 description 273
- 239000004065 semiconductor Substances 0.000 description 170
- 239000012535 impurity Substances 0.000 description 44
- 230000004048 modification Effects 0.000 description 44
- 238000012986 modification Methods 0.000 description 44
- 239000000758 substrate Substances 0.000 description 39
- 230000007613 environmental effect Effects 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 238000005468 ion implantation Methods 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 6
- 238000002161 passivation Methods 0.000 description 6
- 230000000087 stabilizing effect Effects 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 4
- 239000003381 stabilizer Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 101100077717 Mus musculus Morn2 gene Proteins 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052795 boron group element Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052696 pnictogen Inorganic materials 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1443—Devices controlled by radiation with at least one potential jump or surface barrier
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0214—Constructional arrangements for removing stray light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4228—Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1446—Devices controlled by radiation in a repetitive configuration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/02002—Arrangements for conducting electric current to or from the device in operations
- H01L31/02005—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/02016—Circuit arrangements of general character for the devices
- H01L31/02019—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02027—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier for devices working in avalanche mode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J2001/444—Compensating; Calibrating, e.g. dark current, temperature drift, noise reduction or baseline correction; Adjusting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J2001/4446—Type of detector
- G01J2001/446—Photodiode
- G01J2001/4466—Avalanche
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
Claims (4)
- 少なくとも1つのアバランシェフォトダイオードと、前記少なくとも1つのアバランシェフォトダイオードのゲインの温度補償を行う複数の温度補償用ダイオードと、前記少なくとも1つのアバランシェフォトダイオードと前記複数の温度補償用ダイオードとを電気的に並列に接続する端子と、を有する光検出部を備え、
前記光検出部は、前記少なくとも1つのアバランシェフォトダイオードが設けられた光検出領域と、前記光検出領域の周囲に位置すると共に前記複数の温度補償用ダイオードのうち少なくとも1つが設けられた第一温度検出領域と、前記光検出領域の周囲に位置すると共に前記複数の温度補償用ダイオードのうち前記少なくとも1つの残りが設けられた第二温度検出領域と、を有し、
前記光検出領域は、前記第一温度検出領域と前記第二温度検出領域とに挟まれている、光検出装置。 - 前記複数の温度補償用ダイオードは、互いに同一のブレークダウン電圧を有する第一及び第二温度補償用ダイオードを含み、
前記第一温度補償用ダイオードは、前記第一温度検出領域に設けられ、
前記第二温度補償用ダイオードは、前記第二温度検出領域に設けられている、請求項1に記載の光検出装置。 - 前記複数の温度補償用ダイオードは、前記第一及び前記第二温度補償用ダイオードと異なるブレークダウン電圧を有する第三及び第四温度補償用ダイオードを含み、
前記第三及び第四温度補償用ダイオードは、互いに同一のブレークダウン電圧を有し、
前記第三温度補償用ダイオードは、前記第一温度検出領域に設けられ、
前記第四温度補償用ダイオードは、前記第二温度検出領域に設けられる、請求項2に記載の光検出装置。 - 前記光検出部は、前記少なくとも1つのアバランシェフォトダイオードとして、複数のアバランシェフォトダイオードを有し、
前記光検出領域には、前記複数のアバランシェフォトダイオードが設けられている、請求項1〜3のいずれか一項に記載の光検出装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2019/046909 WO2020121859A1 (ja) | 2018-12-12 | 2019-11-29 | 光検出装置 |
EP19895340.8A EP3988907B1 (en) | 2018-12-12 | 2019-11-29 | Light detection device |
CN201980057018.6A CN113167641B (zh) | 2018-12-12 | 2019-11-29 | 光检测装置 |
US17/311,763 US11927478B2 (en) | 2018-12-12 | 2019-11-29 | Light detection device |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018232895 | 2018-12-12 | ||
JP2018232895 | 2018-12-12 | ||
JP2018232892 | 2018-12-12 | ||
JP2018232892 | 2018-12-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6681509B1 true JP6681509B1 (ja) | 2020-04-15 |
JP2020095016A JP2020095016A (ja) | 2020-06-18 |
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ID=70166526
Family Applications (5)
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JP2019111529A Active JP7455520B2 (ja) | 2018-12-12 | 2019-06-14 | 光検出装置 |
JP2019111528A Active JP7454917B2 (ja) | 2018-12-12 | 2019-06-14 | 光検出装置 |
JP2019175948A Active JP6681509B1 (ja) | 2018-12-12 | 2019-09-26 | 光検出装置 |
JP2019175945A Active JP7475123B2 (ja) | 2018-12-12 | 2019-09-26 | 光検出装置 |
JP2019175941A Active JP6681508B1 (ja) | 2018-12-12 | 2019-09-26 | 決定方法、及び光検出装置 |
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JP2019111529A Active JP7455520B2 (ja) | 2018-12-12 | 2019-06-14 | 光検出装置 |
JP2019111528A Active JP7454917B2 (ja) | 2018-12-12 | 2019-06-14 | 光検出装置 |
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JP2019175945A Active JP7475123B2 (ja) | 2018-12-12 | 2019-09-26 | 光検出装置 |
JP2019175941A Active JP6681508B1 (ja) | 2018-12-12 | 2019-09-26 | 決定方法、及び光検出装置 |
Country Status (8)
Country | Link |
---|---|
US (2) | US11927478B2 (ja) |
EP (3) | EP3896412A4 (ja) |
JP (5) | JP7455520B2 (ja) |
KR (2) | KR20210098523A (ja) |
CN (5) | CN113167641B (ja) |
DE (2) | DE112019006173T5 (ja) |
TW (1) | TW202044569A (ja) |
WO (2) | WO2020121855A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11901379B2 (en) * | 2018-12-12 | 2024-02-13 | Hamamatsu Photonics K.K. | Photodetector |
JP7455520B2 (ja) | 2018-12-12 | 2024-03-26 | 浜松ホトニクス株式会社 | 光検出装置 |
EP4361670A1 (en) * | 2021-06-21 | 2024-05-01 | Sony Semiconductor Solutions Corporation | Light-receiving element |
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