JP4553376B2 - 浮上式基板搬送処理装置及び浮上式基板搬送処理方法 - Google Patents

浮上式基板搬送処理装置及び浮上式基板搬送処理方法 Download PDF

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Publication number
JP4553376B2
JP4553376B2 JP2005208851A JP2005208851A JP4553376B2 JP 4553376 B2 JP4553376 B2 JP 4553376B2 JP 2005208851 A JP2005208851 A JP 2005208851A JP 2005208851 A JP2005208851 A JP 2005208851A JP 4553376 B2 JP4553376 B2 JP 4553376B2
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substrate
floating
processed
suction
stage
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Japanese (ja)
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JP2007027495A (ja
JP2007027495A5 (enExample
Inventor
剛 山崎
寿史 稲益
賢哉 篠崎
公男 元田
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2005208851A priority Critical patent/JP4553376B2/ja
Priority to US11/486,005 priority patent/US7905195B2/en
Priority to TW095126266A priority patent/TWI336113B/zh
Priority to TW099107296A priority patent/TWI438857B/zh
Priority to KR1020060067297A priority patent/KR101100486B1/ko
Publication of JP2007027495A publication Critical patent/JP2007027495A/ja
Publication of JP2007027495A5 publication Critical patent/JP2007027495A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H10P72/0448—
    • H10P72/3314—
    • H10P72/36—
    • H10P72/78—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Liquid Crystal (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
JP2005208851A 2005-07-19 2005-07-19 浮上式基板搬送処理装置及び浮上式基板搬送処理方法 Expired - Fee Related JP4553376B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005208851A JP4553376B2 (ja) 2005-07-19 2005-07-19 浮上式基板搬送処理装置及び浮上式基板搬送処理方法
US11/486,005 US7905195B2 (en) 2005-07-19 2006-07-14 Floating-type substrate conveying and processing apparatus
TW095126266A TWI336113B (en) 2005-07-19 2006-07-18 Surfacing type substrate transportation processing apparatus and surfacing type substrate transportation processing method
TW099107296A TWI438857B (zh) 2005-07-19 2006-07-18 浮上式基板搬送處理裝置及浮上式基板搬送處理方法
KR1020060067297A KR101100486B1 (ko) 2005-07-19 2006-07-19 부상식 기판 반송 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005208851A JP4553376B2 (ja) 2005-07-19 2005-07-19 浮上式基板搬送処理装置及び浮上式基板搬送処理方法

Publications (3)

Publication Number Publication Date
JP2007027495A JP2007027495A (ja) 2007-02-01
JP2007027495A5 JP2007027495A5 (enExample) 2007-07-05
JP4553376B2 true JP4553376B2 (ja) 2010-09-29

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JP2005208851A Expired - Fee Related JP4553376B2 (ja) 2005-07-19 2005-07-19 浮上式基板搬送処理装置及び浮上式基板搬送処理方法

Country Status (4)

Country Link
US (1) US7905195B2 (enExample)
JP (1) JP4553376B2 (enExample)
KR (1) KR101100486B1 (enExample)
TW (2) TWI438857B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110404717A (zh) * 2019-06-14 2019-11-05 上海维誉自动化设备有限公司 一种自动喷涂线

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Also Published As

Publication number Publication date
KR20070011153A (ko) 2007-01-24
TWI336113B (en) 2011-01-11
US7905195B2 (en) 2011-03-15
US20070017442A1 (en) 2007-01-25
KR101100486B1 (ko) 2011-12-29
JP2007027495A (ja) 2007-02-01
TW200731449A (en) 2007-08-16
TW201025488A (en) 2010-07-01
TWI438857B (zh) 2014-05-21

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