JP4553376B2 - 浮上式基板搬送処理装置及び浮上式基板搬送処理方法 - Google Patents
浮上式基板搬送処理装置及び浮上式基板搬送処理方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 188
- 238000012545 processing Methods 0.000 title claims description 108
- 238000007667 floating Methods 0.000 title claims description 70
- 238000012546 transfer Methods 0.000 title claims description 41
- 238000003672 processing method Methods 0.000 title claims description 9
- 238000005339 levitation Methods 0.000 claims description 23
- 239000007788 liquid Substances 0.000 claims description 20
- 238000000576 coating method Methods 0.000 description 26
- 239000011248 coating agent Substances 0.000 description 25
- 230000032258 transport Effects 0.000 description 21
- 238000002347 injection Methods 0.000 description 15
- 239000007924 injection Substances 0.000 description 15
- 230000007723 transport mechanism Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 239000000243 solution Substances 0.000 description 8
- 230000010349 pulsation Effects 0.000 description 7
- 238000011161 development Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 241000255777 Lepidoptera Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
Description
図2は、上記レジスト塗布処理装置20の第1実施形態の要部を示す概略斜視図、図3は、レジスト塗布処理装置20における気体の供給及び吸引状態を示す概略構成図、図4及び図5は、気体の供給及び吸引状態を示す要部断面図である。
図8は、この発明に係る浮上式基板搬送処理装置の第2実施形態の要部を示す概略断面図、図9は、第2実施形態における気体(空気)の供給及び吸引部を示す要部分解斜視図(a)、(a)のII部を示す拡大斜視図(b)及びII部を示す別の拡大斜視図(c)である。
図11は、この発明に係る浮上式基板搬送処理装置の第3実施形態の要部を示す概略断面図、図12は、第3実施形態における気体(空気)の供給及び吸引部を示す要部分解斜視図である。
なお、上記実施形態では、この発明に係る浮上式基板搬送処理装置をレジスト塗布処理装置に適用した場合について説明したが、レジスト塗布処理装置以外の装置、例えば現像処理装置にも適用できることは勿論である。
22,22A,22B 浮上ステージ
23 レジスト供給ノズル(処理液供給手段)
24 基板保持部材
28 リニアモータ(移動手段)
50 多孔質部材
51 多孔質部(気体供給孔)
52 吸引孔
55 コンプレッサ(気体供給手段)
56 迂回流路
57 真空ポンプ(吸引手段)
70 多孔板
71 小孔
72 気体供給流路溝
72a 直状主溝
72b 枝溝
73 気体吸引流路溝
73a 直状主溝
73b 枝溝
80 表面板
81 大径孔
82 中間板
83 小径孔
84 下部板
85 ステージ本体
86 多孔体
86a 大径頭部
86b 脚部
88 Oリング(シール部材)
91 第1の空間
92 第2の空間
Claims (4)
- 表面から気体を噴射及び吸引して被処理基板を浮上する浮上ステージと、
上記浮上ステージの上方に配置され、上記被処理基板の表面に処理液を供給する処理液供給手段と、
上記被処理基板の両側端をそれぞれ着脱可能に保持すると共に、被処理基板を上記浮上ステージ上で移動する移動手段と、を具備する浮上式基板搬送処理装置において、
上記浮上ステージを多孔質部材にて形成すると共に、該多孔質部材に気密に区画される複数の吸引孔を設け、
上記多孔質部材の多孔質部に気体供給手段を接続し、
上記吸引孔に迂回流路を介して吸引手段を接続し、
上記複数の吸引孔を被処理基板の搬送方向及び該搬送方向と直交する方向の直線上に一致しないよう傾斜状に配列する、ことを特徴とする浮上式基板搬送処理装置。 - 表面から気体を噴射及び吸引して被処理基板を浮上する浮上ステージと、
上記浮上ステージの上方に配置され、上記被処理基板の表面に処理液を供給する処理液供給手段と、
上記被処理基板の両側端をそれぞれ着脱可能に保持すると共に、被処理基板を上記浮上ステージ上で移動する移動手段と、を具備する浮上式基板搬送処理装置において、
上記浮上ステージは、複数の大径孔を設けた表面板と、該表面板の下面との間に第1の空間をおいて配設されると共に、上記大径孔の直下に位置する小径孔を設けた中間板と、該中間板の下面との間に第2の空間をおいて配設される下部板とからなるステージ本体と、
整列された多数の小孔を有し、上記大径孔に嵌合する大径頭部の下部に上記小径孔に気密に嵌合する脚部を有する多孔体と、を具備し、
上記第1又は第2の空間のいずれか一方に気体供給手段を接続すると共に、他方の空間に吸引手段を接続してなる、ことを特徴とする浮上式基板搬送処理装置。 - 請求項1記載の浮上式基板搬送処理装置を用いた浮上式基板搬送処理方法であって、
浮上ステージを形成する多孔質部材の多孔質部により圧力損失を受けて分散される気体を供給すると共に、多孔質部材に気密に区画される複数の吸引孔から圧力損失を与える迂回流路を介して吸引して、浮上ステージ上に被処理基板を浮上し、上記被処理基板の表面に処理液供給手段から処理液を帯状に供給すると共に、移動手段によって被処理基板を移動する、ことを特徴とする浮上式基板搬送処理方法。 - 請求項2記載の浮上式基板搬送処理装置を用いた浮上式基板搬送処理方法であって、
浮上ステージを形成する第1の空間又は第2の空間を介して多孔板の多数の小孔により圧力損失を受けて分散される気体を供給すると共に、多孔板の多数の小孔から上記第2の空間又は第1の空間を介して吸引して、浮上ステージ上に被処理基板を浮上し、上記被処理基板の表面に処理液供給手段から処理液を帯状に供給すると共に、移動手段によって被処理基板を移動する、ことを特徴とする浮上式基板搬送処理方法。
Priority Applications (5)
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JP2005208851A JP4553376B2 (ja) | 2005-07-19 | 2005-07-19 | 浮上式基板搬送処理装置及び浮上式基板搬送処理方法 |
US11/486,005 US7905195B2 (en) | 2005-07-19 | 2006-07-14 | Floating-type substrate conveying and processing apparatus |
TW095126266A TWI336113B (en) | 2005-07-19 | 2006-07-18 | Surfacing type substrate transportation processing apparatus and surfacing type substrate transportation processing method |
TW099107296A TWI438857B (zh) | 2005-07-19 | 2006-07-18 | 浮上式基板搬送處理裝置及浮上式基板搬送處理方法 |
KR1020060067297A KR101100486B1 (ko) | 2005-07-19 | 2006-07-19 | 부상식 기판 반송 처리 장치 |
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JP2007027495A JP2007027495A (ja) | 2007-02-01 |
JP2007027495A5 JP2007027495A5 (ja) | 2007-07-05 |
JP4553376B2 true JP4553376B2 (ja) | 2010-09-29 |
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TW (2) | TWI336113B (ja) |
Cited By (1)
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US7905195B2 (en) | 2011-03-15 |
JP2007027495A (ja) | 2007-02-01 |
KR101100486B1 (ko) | 2011-12-29 |
TWI336113B (en) | 2011-01-11 |
TW201025488A (en) | 2010-07-01 |
TW200731449A (en) | 2007-08-16 |
US20070017442A1 (en) | 2007-01-25 |
TWI438857B (zh) | 2014-05-21 |
KR20070011153A (ko) | 2007-01-24 |
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