JP4236935B2 - フッ素含有環状オレフィンポリマー、その環状オレフィン系単量体、ポリマーの製造方法およびその用途 - Google Patents

フッ素含有環状オレフィンポリマー、その環状オレフィン系単量体、ポリマーの製造方法およびその用途 Download PDF

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JP4236935B2
JP4236935B2 JP2002585513A JP2002585513A JP4236935B2 JP 4236935 B2 JP4236935 B2 JP 4236935B2 JP 2002585513 A JP2002585513 A JP 2002585513A JP 2002585513 A JP2002585513 A JP 2002585513A JP 4236935 B2 JP4236935 B2 JP 4236935B2
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fluorine
group
alkyl
cyclic olefin
containing alkyl
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JPWO2002088216A1 (ja
Inventor
永 忠 弘 須
野 寛 河
村 憲 守 河
合 貴 志 落
松 茂 人 重
野 隆 志 中
田 智 行 森
尾 博 文 井
本 喜 博 山
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Mitsui Chemicals Inc
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Mitsui Chemicals Inc
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • C08G61/04—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
    • C08G61/06—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds
    • C08G61/08—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds of carbocyclic compounds containing one or more carbon-to-carbon double bonds in the ring
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • C08G61/04—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
    • C08G61/06—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Materials For Photolithography (AREA)
JP2002585513A 2001-04-27 2002-04-25 フッ素含有環状オレフィンポリマー、その環状オレフィン系単量体、ポリマーの製造方法およびその用途 Expired - Fee Related JP4236935B2 (ja)

Applications Claiming Priority (5)

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JP2001132434 2001-04-27
JP2001132434 2001-04-27
JP2002064653 2002-03-11
JP2002064653 2002-03-11
PCT/JP2002/004140 WO2002088216A1 (fr) 2001-04-27 2002-04-25 Polymeres cycloolefiniques fluores, procedes de preparation de monomeres cycloolefiniques fluores et polymeres associes, et leur application

Related Child Applications (1)

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JP2008130940A Division JP2008239995A (ja) 2001-04-27 2008-05-19 フッ素含有環状オレフィンポリマー、その環状オレフィン系単量体および該ポリマーの製造方法

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JP4236935B2 true JP4236935B2 (ja) 2009-03-11

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JP2002585513A Expired - Fee Related JP4236935B2 (ja) 2001-04-27 2002-04-25 フッ素含有環状オレフィンポリマー、その環状オレフィン系単量体、ポリマーの製造方法およびその用途
JP2008130940A Pending JP2008239995A (ja) 2001-04-27 2008-05-19 フッ素含有環状オレフィンポリマー、その環状オレフィン系単量体および該ポリマーの製造方法

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US (1) US6875819B2 (enExample)
EP (1) EP1298156B1 (enExample)
JP (2) JP4236935B2 (enExample)
KR (1) KR100583297B1 (enExample)
CN (1) CN1233685C (enExample)
DE (1) DE60205555T2 (enExample)
TW (1) TW575596B (enExample)
WO (1) WO2002088216A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008239995A (ja) * 2001-04-27 2008-10-09 Mitsui Chemicals Inc フッ素含有環状オレフィンポリマー、その環状オレフィン系単量体および該ポリマーの製造方法

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7264853B2 (en) * 2003-08-26 2007-09-04 Intel Corporation Attaching a pellicle frame to a reticle
US7316869B2 (en) * 2003-08-26 2008-01-08 Intel Corporation Mounting a pellicle to a frame
JP2007506828A (ja) * 2003-09-25 2007-03-22 チバ　スペシャルティ　ケミカルズ　ホールディング　インコーポレーテッド 弗素化された基を用いる開環メタセシス重合
US7314667B2 (en) * 2004-03-12 2008-01-01 Intel Corporation Process to optimize properties of polymer pellicles and resist for lithography applications
US20050202252A1 (en) * 2004-03-12 2005-09-15 Alexander Tregub Use of alternative polymer materials for "soft" polymer pellicles
US20060008730A1 (en) * 2004-07-09 2006-01-12 Puy Michael V D Monomers for photoresists bearing acid-labile groups of reduced optical density
US20060008731A1 (en) * 2004-07-09 2006-01-12 Michael Van Der Puy Novel photoresist monomers and polymers
WO2007032048A1 (ja) * 2005-09-12 2007-03-22 Tadahiro Ohmi 透明部材の製造方法およびプラスチック部材
WO2007055489A1 (en) 2005-11-08 2007-05-18 Lg Chem, Ltd. Colloidal photonic crystals using colloidal nanoparticles and method for preparation thereof
JP4866086B2 (ja) * 2005-12-27 2012-02-01 三井化学株式会社 組み合わせレンズ、色収差の補正方法
JP5475761B2 (ja) * 2008-06-20 2014-04-16 スリーエム イノベイティブ プロパティズ カンパニー ポリマー鋳型
JP5563567B2 (ja) * 2008-06-20 2014-07-30 スリーエム イノベイティブ プロパティズ カンパニー 成型された微細構造物品及びその製造方法
JP2010113315A (ja) * 2008-10-10 2010-05-20 Jsr Corp フォトマスク
CN102334177B (zh) * 2009-02-27 2014-01-08 三井化学株式会社 转印体及其制造方法
JP2010210974A (ja) * 2009-03-11 2010-09-24 Shin-Etsu Chemical Co Ltd ペリクルの製造方法及びペリクル
CN102482364B (zh) * 2009-08-26 2013-08-28 三井化学株式会社 含氟环状烯烃聚合物组合物、由该组合物获得的转印体及其制造方法
JP5366740B2 (ja) * 2009-09-28 2013-12-11 富士フイルム株式会社 含エーテル環状構造含有ポリマー、光学材料用樹脂組成物、並びにその成形体、光学部品及びレンズ
KR20130024878A (ko) * 2010-04-02 2013-03-08 신에쓰 가가꾸 고교 가부시끼가이샤 포토 마스크 유닛 및 그 제조 방법
AU2011328555B2 (en) * 2010-11-11 2016-10-20 Stahl International Bv Non metal tanning
WO2012062411A1 (en) * 2010-11-11 2012-05-18 Clariant International Ltd Non metal tanning
WO2012062413A1 (en) * 2010-11-12 2012-05-18 Clariant International Ltd Non metal tanning
EP2881792B1 (en) * 2012-08-02 2017-04-26 Mitsui Chemicals, Inc. Pellicle
KR101805280B1 (ko) 2013-04-03 2017-12-05 미쓰이 가가쿠 가부시키가이샤 광학 필름
JP2016105131A (ja) * 2014-12-01 2016-06-09 ウシオ電機株式会社 表面が改質された基板の製造方法、パターン形成体、基板表面の改質方法、および光照射装置
CN107207708A (zh) * 2015-02-09 2017-09-26 旭硝子株式会社 含氟聚合物的制造方法
JP6593351B2 (ja) * 2015-02-09 2019-10-23 Ａｇｃ株式会社 含フッ素重合体の製造方法
JP6448768B2 (ja) * 2015-03-26 2019-01-09 三井化学株式会社 鉄道レール用軌道パッド用組成物及び鉄道レール用軌道パッド
KR102305874B1 (ko) 2017-05-31 2021-09-27 미쓰이 가가쿠 가부시키가이샤 하층막 형성용 재료, 레지스트 하층막, 레지스트 하층막의 제조 방법 및 적층체
CN107216444B (zh) * 2017-07-20 2019-06-21 中国科学院长春应用化学研究所 一种透明、高耐热环烯烃共聚物及其制备方法
JP7253340B2 (ja) * 2018-09-04 2023-04-06 アークレイ株式会社 光学素子及び光学素子の製造方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63238111A (ja) 1987-03-27 1988-10-04 Asahi Glass Co Ltd 環状構造を有する含フツ素重合体の製造方法
JP2581182B2 (ja) 1987-08-14 1997-02-12 旭硝子株式会社 環化重合方法
JP2526641B2 (ja) 1987-08-14 1996-08-21 旭硝子株式会社 新規含フッ素環状重合体
JPH024722A (ja) * 1988-06-23 1990-01-09 Mitsui Petrochem Ind Ltd 弗素含有環状オレフィン化合物及びその製法
JP2951337B2 (ja) 1989-04-17 1999-09-20 古河電気工業株式会社 ペリクル
JP2952962B2 (ja) 1989-05-31 1999-09-27 旭硝子株式会社 汚染防止保護器具
JPH04104155A (ja) 1990-08-23 1992-04-06 Shin Etsu Chem Co Ltd リソグラフィー用ペリクル
JPH06199997A (ja) * 1993-01-06 1994-07-19 Japan Synthetic Rubber Co Ltd 重合体の製造法
JPH06206985A (ja) * 1993-01-08 1994-07-26 Japan Synthetic Rubber Co Ltd （水添）ノルボルネン系重合体
JPH06256477A (ja) * 1993-03-02 1994-09-13 Japan Synthetic Rubber Co Ltd 重合体の製造法
EP0722468A1 (en) * 1993-09-10 1996-07-24 Ciba SC Holding AG Process for the polymerization of cyclic olefins and a polymerizable composition
US5677405A (en) * 1995-05-24 1997-10-14 The B.F. Goodrich Company Homopolymers and copolymers of cationically polymerizable monomers and method of their preparation
US6121340A (en) * 1996-11-04 2000-09-19 The B. F. Goodrich Company Photodefinable dielectric compositions comprising polycyclic polymers
WO1998036324A1 (en) 1997-02-13 1998-08-20 Mitsui Chemicals, Inc. Pellicle membrane for ultraviolet rays and pellicle
WO2000017712A1 (en) * 1998-09-23 2000-03-30 E.I. Du Pont De Nemours And Company Photoresists, polymers and processes for microlithography
EP1183571B1 (en) 1999-05-04 2010-06-02 E.I. Du Pont De Nemours And Company Fluorinated photoresists and processes for microlithography
JP3901401B2 (ja) * 1999-07-13 2007-04-04 三井化学株式会社 ポジ型フォトレジスト組成物およびパターン形成方法
JP2001226467A (ja) * 2000-02-17 2001-08-21 Hitachi Chem Co Ltd フッ素含有ノルボルネン系重合体およびその製造方法
JP2001328964A (ja) * 2000-05-19 2001-11-27 Tokyo Ohka Kogyo Co Ltd 新規多環式不飽和炭化水素誘導体及びその製造方法
US6875819B2 (en) * 2001-04-27 2005-04-05 Mitsui Chemicals, Inc. Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008239995A (ja) * 2001-04-27 2008-10-09 Mitsui Chemicals Inc フッ素含有環状オレフィンポリマー、その環状オレフィン系単量体および該ポリマーの製造方法

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TW575596B (en) 2004-02-11
CN1233685C (zh) 2005-12-28
EP1298156A1 (en) 2003-04-02
WO2002088216A1 (fr) 2002-11-07
KR20040002398A (ko) 2004-01-07
US20030187168A1 (en) 2003-10-02
JP2008239995A (ja) 2008-10-09
US6875819B2 (en) 2005-04-05
EP1298156A4 (en) 2003-09-10
EP1298156B1 (en) 2005-08-17
DE60205555T2 (de) 2006-03-30
DE60205555D1 (de) 2005-09-22
JPWO2002088216A1 (ja) 2004-08-19
CN1462286A (zh) 2003-12-17
KR100583297B1 (ko) 2006-05-24

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