DE60205555D1 - Fluorinierte cycloolefinpolymere und verfahren zu deren herstellung, sowie deren verwendung - Google Patents

Fluorinierte cycloolefinpolymere und verfahren zu deren herstellung, sowie deren verwendung

Info

Publication number
DE60205555D1
DE60205555D1 DE60205555T DE60205555T DE60205555D1 DE 60205555 D1 DE60205555 D1 DE 60205555D1 DE 60205555 T DE60205555 T DE 60205555T DE 60205555 T DE60205555 T DE 60205555T DE 60205555 D1 DE60205555 D1 DE 60205555D1
Authority
DE
Germany
Prior art keywords
cycloolefinpolymers
fluorinated
production
fluorinated cycloolefinpolymers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60205555T
Other languages
English (en)
Other versions
DE60205555T2 (de
Inventor
Tadahiro Sunaga
Hiroshi Kouno
Kazumori Kawamura
Takashi Ochiai
Shigeto Shigematsu
Takashi Nakano
Tomoyuki Morita
Hirofumi Io
Yoshihiro Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Publication of DE60205555D1 publication Critical patent/DE60205555D1/de
Application granted granted Critical
Publication of DE60205555T2 publication Critical patent/DE60205555T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • C08G61/04—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
    • C08G61/06—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • C08G61/04—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
    • C08G61/06—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds
    • C08G61/08—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds of carbocyclic compounds containing one or more carbon-to-carbon double bonds in the ring

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE60205555T 2001-04-27 2002-04-25 Fluorinierte cycloolefinpolymere und verfahren zu deren herstellung, sowie deren verwendung Expired - Lifetime DE60205555T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2001132434 2001-04-27
JP2001132434 2001-04-27
JP2002064653 2002-03-11
JP2002064653 2002-03-11
PCT/JP2002/004140 WO2002088216A1 (fr) 2001-04-27 2002-04-25 Polymeres cycloolefiniques fluores, procedes de preparation de monomeres cycloolefiniques fluores et polymeres associes, et leur application

Publications (2)

Publication Number Publication Date
DE60205555D1 true DE60205555D1 (de) 2005-09-22
DE60205555T2 DE60205555T2 (de) 2006-03-30

Family

ID=26614474

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60205555T Expired - Lifetime DE60205555T2 (de) 2001-04-27 2002-04-25 Fluorinierte cycloolefinpolymere und verfahren zu deren herstellung, sowie deren verwendung

Country Status (8)

Country Link
US (1) US6875819B2 (de)
EP (1) EP1298156B1 (de)
JP (2) JP4236935B2 (de)
KR (1) KR100583297B1 (de)
CN (1) CN1233685C (de)
DE (1) DE60205555T2 (de)
TW (1) TW575596B (de)
WO (1) WO2002088216A1 (de)

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EP1298156B1 (de) * 2001-04-27 2005-08-17 Mitsui Chemicals, Inc. Fluorinierte cycloolefinpolymere und verfahren zu deren herstellung, sowie deren verwendung
US7264853B2 (en) * 2003-08-26 2007-09-04 Intel Corporation Attaching a pellicle frame to a reticle
US7316869B2 (en) 2003-08-26 2008-01-08 Intel Corporation Mounting a pellicle to a frame
JP2007506828A (ja) * 2003-09-25 2007-03-22 チバ　スペシャルティ　ケミカルズ　ホールディング　インコーポレーテッド 弗素化された基を用いる開環メタセシス重合
US20050202252A1 (en) * 2004-03-12 2005-09-15 Alexander Tregub Use of alternative polymer materials for "soft" polymer pellicles
US7314667B2 (en) * 2004-03-12 2008-01-01 Intel Corporation Process to optimize properties of polymer pellicles and resist for lithography applications
US20060008730A1 (en) * 2004-07-09 2006-01-12 Puy Michael V D Monomers for photoresists bearing acid-labile groups of reduced optical density
US20060008731A1 (en) * 2004-07-09 2006-01-12 Michael Van Der Puy Novel photoresist monomers and polymers
US20100221495A1 (en) * 2005-09-12 2010-09-02 Tadahiro Ohmi Method of Manufacturing a Transparent Member and Plastic Member
WO2007055489A1 (en) 2005-11-08 2007-05-18 Lg Chem, Ltd. Colloidal photonic crystals using colloidal nanoparticles and method for preparation thereof
JP4866086B2 (ja) * 2005-12-27 2012-02-01 三井化学株式会社 組み合わせレンズ、色収差の補正方法
EP2303535B1 (de) * 2008-06-20 2014-09-24 3M Innovative Properties Company Polymerformen und daraus hergestellte artikel
US9370876B2 (en) 2008-06-20 2016-06-21 3M Innovative Properties Company Molded microstructured articles and method of making same
JP2010113315A (ja) * 2008-10-10 2010-05-20 Jsr Corp フォトマスク
WO2010098102A1 (ja) * 2009-02-27 2010-09-02 三井化学株式会社 転写体およびその製造方法
JP2010210974A (ja) * 2009-03-11 2010-09-24 Shin-Etsu Chemical Co Ltd ペリクルの製造方法及びペリクル
CN102482364B (zh) * 2009-08-26 2013-08-28 三井化学株式会社 含氟环状烯烃聚合物组合物、由该组合物获得的转印体及其制造方法
JP5366740B2 (ja) * 2009-09-28 2013-12-11 富士フイルム株式会社 含エーテル環状構造含有ポリマー、光学材料用樹脂組成物、並びにその成形体、光学部品及びレンズ
EP2555052A4 (de) * 2010-04-02 2017-12-13 Shin-Etsu Chemical Co., Ltd. Fotomaskeneinheit und herstellungsverfahren dafür
ES2526524T3 (es) * 2010-11-11 2015-01-13 Stahl International B.V. Curtido no metálico
ES2618602T3 (es) * 2010-11-11 2017-06-21 Stahl International B.V. Curtido no metálico
EP2638179B1 (de) * 2010-11-12 2014-11-26 Stahl International B.V. Gerbung ohne metallverbindungen mit gerbwirkung
US9658525B2 (en) * 2012-08-02 2017-05-23 Mitsui Chemicals Inc. Pellicle
US10035889B2 (en) 2013-04-03 2018-07-31 Mitsui Chemicals, Inc. Optical film
JP2016105131A (ja) * 2014-12-01 2016-06-09 ウシオ電機株式会社 表面が改質された基板の製造方法、パターン形成体、基板表面の改質方法、および光照射装置
JPWO2016129608A1 (ja) * 2015-02-09 2017-11-16 旭硝子株式会社 含フッ素重合体の製造方法
WO2016129606A1 (ja) * 2015-02-09 2016-08-18 旭硝子株式会社 含フッ素重合体の製造方法
JP6448768B2 (ja) * 2015-03-26 2019-01-09 三井化学株式会社 鉄道レール用軌道パッド用組成物及び鉄道レール用軌道パッド
US20200264511A1 (en) 2017-05-31 2020-08-20 Mitsui Chemicals, Inc. Material for forming underlayer film, resist underlayer film, method of producing resist underlayer film, and laminate
CN107216444B (zh) * 2017-07-20 2019-06-21 中国科学院长春应用化学研究所 一种透明、高耐热环烯烃共聚物及其制备方法
JP7253340B2 (ja) * 2018-09-04 2023-04-06 アークレイ株式会社 光学素子及び光学素子の製造方法

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JPS63238111A (ja) 1987-03-27 1988-10-04 Asahi Glass Co Ltd 環状構造を有する含フツ素重合体の製造方法
JP2526641B2 (ja) 1987-08-14 1996-08-21 旭硝子株式会社 新規含フッ素環状重合体
JP2581182B2 (ja) 1987-08-14 1997-02-12 旭硝子株式会社 環化重合方法
JPH024722A (ja) * 1988-06-23 1990-01-09 Mitsui Petrochem Ind Ltd 弗素含有環状オレフィン化合物及びその製法
JP2951337B2 (ja) 1989-04-17 1999-09-20 古河電気工業株式会社 ペリクル
JP2952962B2 (ja) 1989-05-31 1999-09-27 旭硝子株式会社 汚染防止保護器具
JPH04104155A (ja) 1990-08-23 1992-04-06 Shin Etsu Chem Co Ltd リソグラフィー用ペリクル
JPH06199997A (ja) * 1993-01-06 1994-07-19 Japan Synthetic Rubber Co Ltd 重合体の製造法
JPH06206985A (ja) * 1993-01-08 1994-07-26 Japan Synthetic Rubber Co Ltd （水添）ノルボルネン系重合体
JPH06256477A (ja) * 1993-03-02 1994-09-13 Japan Synthetic Rubber Co Ltd 重合体の製造法
EP0722468A1 (de) * 1993-09-10 1996-07-24 Ciba SC Holding AG Verfahren zu polymerisation cyclischer olefine und ein polymerisierbares gemisch
US5677405A (en) * 1995-05-24 1997-10-14 The B.F. Goodrich Company Homopolymers and copolymers of cationically polymerizable monomers and method of their preparation
ES2178017T3 (es) * 1996-11-04 2002-12-16 Goodrich Corp Composiciones dielectricas fotodefinibles.
KR20000064904A (ko) 1997-02-13 2000-11-06 나까니시 히로유끼 자외선용 펠리클 필름 및 펠리클
IL141803A0 (en) * 1998-09-23 2002-03-10 Du Pont Photoresists, polymers and processes for microlithography
AU4678100A (en) 1999-05-04 2000-11-17 E.I. Du Pont De Nemours And Company Fluorinated polymers, photoresists and processes for microlithography
JP3901401B2 (ja) 1999-07-13 2007-04-04 三井化学株式会社 ポジ型フォトレジスト組成物およびパターン形成方法
JP2001226467A (ja) * 2000-02-17 2001-08-21 Hitachi Chem Co Ltd フッ素含有ノルボルネン系重合体およびその製造方法
JP2001328964A (ja) * 2000-05-19 2001-11-27 Tokyo Ohka Kogyo Co Ltd 新規多環式不飽和炭化水素誘導体及びその製造方法
EP1298156B1 (de) * 2001-04-27 2005-08-17 Mitsui Chemicals, Inc. Fluorinierte cycloolefinpolymere und verfahren zu deren herstellung, sowie deren verwendung

Also Published As

Publication number Publication date
KR100583297B1 (ko) 2006-05-24
WO2002088216A1 (fr) 2002-11-07
TW575596B (en) 2004-02-11
EP1298156A4 (de) 2003-09-10
US6875819B2 (en) 2005-04-05
KR20040002398A (ko) 2004-01-07
US20030187168A1 (en) 2003-10-02
EP1298156A1 (de) 2003-04-02
CN1462286A (zh) 2003-12-17
CN1233685C (zh) 2005-12-28
JPWO2002088216A1 (ja) 2004-08-19
JP4236935B2 (ja) 2009-03-11
JP2008239995A (ja) 2008-10-09
DE60205555T2 (de) 2006-03-30
EP1298156B1 (de) 2005-08-17

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