JP2017125017A5 - - Google Patents

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JP2017125017A5
JP2017125017A5 JP2017013290A JP2017013290A JP2017125017A5 JP 2017125017 A5 JP2017125017 A5 JP 2017125017A5 JP 2017013290 A JP2017013290 A JP 2017013290A JP 2017013290 A JP2017013290 A JP 2017013290A JP 2017125017 A5 JP2017125017 A5 JP 2017125017A5
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disilapropane
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JP2017125017A (ja
JP6588480B2 (ja
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JP2017013290A 2013-09-20 2017-01-27 有機アミノシラン前駆体およびこれを含む膜の堆積方法 Active JP6588480B2 (ja)

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US201361880261P 2013-09-20 2013-09-20
US61/880,261 2013-09-20
US14/483,751 2014-09-11
US14/483,751 US10453675B2 (en) 2013-09-20 2014-09-11 Organoaminosilane precursors and methods for depositing films comprising same

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JP2014190075A Division JP2015096489A (ja) 2013-09-20 2014-09-18 有機アミノシラン前駆体およびこれを含む膜の堆積方法

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JP2018081224A Division JP6777680B2 (ja) 2013-09-20 2018-04-20 有機アミノシラン前駆体およびこれを含む膜の堆積方法

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JP2017125017A JP2017125017A (ja) 2017-07-20
JP2017125017A5 true JP2017125017A5 (enExample) 2018-06-07
JP6588480B2 JP6588480B2 (ja) 2019-10-09

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JP2014190075A Withdrawn JP2015096489A (ja) 2013-09-20 2014-09-18 有機アミノシラン前駆体およびこれを含む膜の堆積方法
JP2017013290A Active JP6588480B2 (ja) 2013-09-20 2017-01-27 有機アミノシラン前駆体およびこれを含む膜の堆積方法
JP2018081224A Active JP6777680B2 (ja) 2013-09-20 2018-04-20 有機アミノシラン前駆体およびこれを含む膜の堆積方法
JP2019120928A Active JP6928035B2 (ja) 2013-09-20 2019-06-28 有機アミノシラン前駆体およびこれを含む膜の堆積方法
JP2021129199A Pending JP2021185150A (ja) 2013-09-20 2021-08-05 有機アミノシラン前駆体およびこれを含む膜の堆積方法
JP2023115894A Active JP7609935B2 (ja) 2013-09-20 2023-07-14 有機アミノシラン前駆体およびこれを含む膜の堆積方法

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JP2019120928A Active JP6928035B2 (ja) 2013-09-20 2019-06-28 有機アミノシラン前駆体およびこれを含む膜の堆積方法
JP2021129199A Pending JP2021185150A (ja) 2013-09-20 2021-08-05 有機アミノシラン前駆体およびこれを含む膜の堆積方法
JP2023115894A Active JP7609935B2 (ja) 2013-09-20 2023-07-14 有機アミノシラン前駆体およびこれを含む膜の堆積方法

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US (5) US10453675B2 (enExample)
EP (4) EP3594219B1 (enExample)
JP (6) JP2015096489A (enExample)
KR (3) KR101749705B1 (enExample)
CN (1) CN104672265B (enExample)
TW (4) TWI636988B (enExample)

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