JP2011100723A - 発光表示装置及び当該発光表示装置を具備する電子機器 - Google Patents
発光表示装置及び当該発光表示装置を具備する電子機器 Download PDFInfo
- Publication number
- JP2011100723A JP2011100723A JP2010225633A JP2010225633A JP2011100723A JP 2011100723 A JP2011100723 A JP 2011100723A JP 2010225633 A JP2010225633 A JP 2010225633A JP 2010225633 A JP2010225633 A JP 2010225633A JP 2011100723 A JP2011100723 A JP 2011100723A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- oxide semiconductor
- semiconductor layer
- light
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/817—Bodies characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
- H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
Landscapes
- Thin Film Transistor (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010225633A JP2011100723A (ja) | 2009-10-09 | 2010-10-05 | 発光表示装置及び当該発光表示装置を具備する電子機器 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009235180 | 2009-10-09 | ||
| JP2010225633A JP2011100723A (ja) | 2009-10-09 | 2010-10-05 | 発光表示装置及び当該発光表示装置を具備する電子機器 |
Related Child Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012165507A Division JP5097869B1 (ja) | 2009-10-09 | 2012-07-26 | 表示装置 |
| JP2013000956A Division JP2013080257A (ja) | 2009-10-09 | 2013-01-08 | 表示装置 |
| JP2013102112A Division JP5499201B2 (ja) | 2009-10-09 | 2013-05-14 | 表示装置 |
| JP2015038658A Division JP5926831B2 (ja) | 2009-10-09 | 2015-02-27 | 表示装置の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011100723A true JP2011100723A (ja) | 2011-05-19 |
| JP2011100723A5 JP2011100723A5 (ja) | 2013-08-29 |
Family
ID=43854113
Family Applications (19)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010225633A Withdrawn JP2011100723A (ja) | 2009-10-09 | 2010-10-05 | 発光表示装置及び当該発光表示装置を具備する電子機器 |
| JP2012165507A Active JP5097869B1 (ja) | 2009-10-09 | 2012-07-26 | 表示装置 |
| JP2013000956A Withdrawn JP2013080257A (ja) | 2009-10-09 | 2013-01-08 | 表示装置 |
| JP2013102112A Active JP5499201B2 (ja) | 2009-10-09 | 2013-05-14 | 表示装置 |
| JP2015038658A Active JP5926831B2 (ja) | 2009-10-09 | 2015-02-27 | 表示装置の作製方法 |
| JP2016084160A Active JP6224159B2 (ja) | 2009-10-09 | 2016-04-20 | 表示装置の作製方法 |
| JP2017194518A Active JP6408102B2 (ja) | 2009-10-09 | 2017-10-04 | 表示装置の作製方法 |
| JP2018175108A Active JP6600057B2 (ja) | 2009-10-09 | 2018-09-19 | 表示装置の作製方法 |
| JP2019147645A Active JP6616042B1 (ja) | 2009-10-09 | 2019-08-09 | 発光表示装置 |
| JP2019201636A Active JP6652681B1 (ja) | 2009-10-09 | 2019-11-06 | 発光表示装置 |
| JP2020009289A Active JP6708803B2 (ja) | 2009-10-09 | 2020-01-23 | 発光表示装置 |
| JP2020088533A Expired - Fee Related JP6845363B2 (ja) | 2009-10-09 | 2020-05-21 | 表示装置 |
| JP2021028047A Active JP7106700B2 (ja) | 2009-10-09 | 2021-02-25 | 表示装置 |
| JP2022112200A Active JP7130165B1 (ja) | 2009-10-09 | 2022-07-13 | 表示装置 |
| JP2022132411A Active JP7198964B2 (ja) | 2009-10-09 | 2022-08-23 | 表示装置 |
| JP2022201810A Active JP7357754B2 (ja) | 2009-10-09 | 2022-12-19 | 表示装置 |
| JP2023162668A Withdrawn JP2023178298A (ja) | 2009-10-09 | 2023-09-26 | 発光表示装置 |
| JP2024225211A Active JP7776606B2 (ja) | 2009-10-09 | 2024-12-20 | 表示装置 |
| JP2025194407A Pending JP2026015499A (ja) | 2009-10-09 | 2025-11-13 | 発光表示装置 |
Family Applications After (18)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012165507A Active JP5097869B1 (ja) | 2009-10-09 | 2012-07-26 | 表示装置 |
| JP2013000956A Withdrawn JP2013080257A (ja) | 2009-10-09 | 2013-01-08 | 表示装置 |
| JP2013102112A Active JP5499201B2 (ja) | 2009-10-09 | 2013-05-14 | 表示装置 |
| JP2015038658A Active JP5926831B2 (ja) | 2009-10-09 | 2015-02-27 | 表示装置の作製方法 |
| JP2016084160A Active JP6224159B2 (ja) | 2009-10-09 | 2016-04-20 | 表示装置の作製方法 |
| JP2017194518A Active JP6408102B2 (ja) | 2009-10-09 | 2017-10-04 | 表示装置の作製方法 |
| JP2018175108A Active JP6600057B2 (ja) | 2009-10-09 | 2018-09-19 | 表示装置の作製方法 |
| JP2019147645A Active JP6616042B1 (ja) | 2009-10-09 | 2019-08-09 | 発光表示装置 |
| JP2019201636A Active JP6652681B1 (ja) | 2009-10-09 | 2019-11-06 | 発光表示装置 |
| JP2020009289A Active JP6708803B2 (ja) | 2009-10-09 | 2020-01-23 | 発光表示装置 |
| JP2020088533A Expired - Fee Related JP6845363B2 (ja) | 2009-10-09 | 2020-05-21 | 表示装置 |
| JP2021028047A Active JP7106700B2 (ja) | 2009-10-09 | 2021-02-25 | 表示装置 |
| JP2022112200A Active JP7130165B1 (ja) | 2009-10-09 | 2022-07-13 | 表示装置 |
| JP2022132411A Active JP7198964B2 (ja) | 2009-10-09 | 2022-08-23 | 表示装置 |
| JP2022201810A Active JP7357754B2 (ja) | 2009-10-09 | 2022-12-19 | 表示装置 |
| JP2023162668A Withdrawn JP2023178298A (ja) | 2009-10-09 | 2023-09-26 | 発光表示装置 |
| JP2024225211A Active JP7776606B2 (ja) | 2009-10-09 | 2024-12-20 | 表示装置 |
| JP2025194407A Pending JP2026015499A (ja) | 2009-10-09 | 2025-11-13 | 発光表示装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (8) | US8482004B2 (enExample) |
| JP (19) | JP2011100723A (enExample) |
| KR (4) | KR101944239B1 (enExample) |
| CN (1) | CN102549638B (enExample) |
| TW (3) | TWI607560B (enExample) |
| WO (1) | WO2011043216A1 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013008944A (ja) * | 2011-05-21 | 2013-01-10 | Futaba Corp | 薄膜半導体装置と薄膜半導体装置を用いた表示装置 |
| WO2016098317A1 (ja) * | 2014-12-18 | 2016-06-23 | 株式会社Joled | 表示装置 |
| JP2018185397A (ja) * | 2017-04-25 | 2018-11-22 | 株式会社ジャパンディスプレイ | 表示装置及びその製造方法 |
| JP2024028406A (ja) * | 2011-11-30 | 2024-03-04 | 株式会社半導体エネルギー研究所 | 半導体装置、電子機器 |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011043216A1 (en) | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device and electronic device including the same |
| WO2011043217A1 (en) * | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the same |
| US8603841B2 (en) | 2010-08-27 | 2013-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing methods of semiconductor device and light-emitting display device |
| JP5806043B2 (ja) | 2010-08-27 | 2015-11-10 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US8797487B2 (en) | 2010-09-10 | 2014-08-05 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, liquid crystal display device, and manufacturing method thereof |
| KR20120026970A (ko) | 2010-09-10 | 2012-03-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 발광 장치 |
| US8647919B2 (en) | 2010-09-13 | 2014-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device and method for manufacturing the same |
| US8546161B2 (en) | 2010-09-13 | 2013-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of thin film transistor and liquid crystal display device |
| US8558960B2 (en) | 2010-09-13 | 2013-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
| JP6076038B2 (ja) | 2011-11-11 | 2017-02-08 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| JP6122275B2 (ja) | 2011-11-11 | 2017-04-26 | 株式会社半導体エネルギー研究所 | 表示装置 |
| JP6059968B2 (ja) | 2011-11-25 | 2017-01-11 | 株式会社半導体エネルギー研究所 | 半導体装置、及び液晶表示装置 |
| US8779592B2 (en) * | 2012-05-01 | 2014-07-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Via-free interconnect structure with self-aligned metal line interconnections |
| JP2013251255A (ja) | 2012-05-04 | 2013-12-12 | Semiconductor Energy Lab Co Ltd | 発光装置の作製方法 |
| CN102809857B (zh) * | 2012-07-24 | 2015-06-10 | 深圳市华星光电技术有限公司 | 一种液晶显示面板以及液晶显示装置 |
| KR102446991B1 (ko) | 2013-09-13 | 2022-09-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치 |
| TWI696108B (zh) | 2015-02-13 | 2020-06-11 | 日商半導體能源研究所股份有限公司 | 功能面板、功能模組、發光模組、顯示模組、位置資料輸入模組、發光裝置、照明設備、顯示裝置、資料處理裝置、功能面板的製造方法 |
| WO2017064587A1 (en) * | 2015-10-12 | 2017-04-20 | Semiconductor Energy Laboratory Co., Ltd. | Display panel, input/output device, data processor, and method for manufacturing display panel |
| KR102490188B1 (ko) | 2016-11-09 | 2023-01-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치, 표시 모듈, 전자 기기, 및 표시 장치의 제작 방법 |
| CN108182872B (zh) * | 2016-12-08 | 2021-01-26 | 群创光电股份有限公司 | 具有光感测单元的显示装置 |
| JP2018110812A (ja) * | 2017-01-15 | 2018-07-19 | 株式会社三洋物産 | 遊技機 |
| KR102585158B1 (ko) * | 2018-07-04 | 2023-10-05 | 삼성디스플레이 주식회사 | 표시 장치 |
| DE202019100728U1 (de) | 2019-02-08 | 2019-02-20 | Klaus Wohlfarth | Spurverbreiterungsscheibe für Kraftfahrzeuge |
| JP7562383B2 (ja) * | 2020-11-24 | 2024-10-07 | 株式会社ジャパンディスプレイ | トランジスタ基板およびその製造方法 |
| JP2022178523A (ja) * | 2021-05-20 | 2022-12-02 | シャープディスプレイテクノロジー株式会社 | アクティブマトリクス基板および液晶表示装置 |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1082991A (ja) * | 1996-09-09 | 1998-03-31 | Toshiba Corp | 液晶表示装置 |
| JPH1124606A (ja) * | 1997-07-02 | 1999-01-29 | Seiko Epson Corp | 表示装置 |
| JP2001117115A (ja) * | 1999-10-21 | 2001-04-27 | Sanyo Electric Co Ltd | アクティブマトリクス型表示装置 |
| JP2005077822A (ja) * | 2003-09-01 | 2005-03-24 | Casio Comput Co Ltd | トランジスタアレイ基板の製造方法及びトランジスタアレイ基板 |
| JP2006242987A (ja) * | 2005-02-28 | 2006-09-14 | Casio Comput Co Ltd | 薄膜トランジスタパネル |
| JP2007334082A (ja) * | 2006-06-16 | 2007-12-27 | Casio Comput Co Ltd | 薄膜トランジスタパネルおよび液晶表示装置 |
| JP2008116502A (ja) * | 2006-10-31 | 2008-05-22 | Semiconductor Energy Lab Co Ltd | 液晶表示装置及び電子機器 |
| JP2008181109A (ja) * | 2006-12-27 | 2008-08-07 | Semiconductor Energy Lab Co Ltd | 液晶表示装置及びそれを用いた電子機器 |
| WO2009028452A1 (ja) * | 2007-08-27 | 2009-03-05 | Konica Minolta Holdings, Inc. | 金属酸化物半導体の製造方法およびこれを用い作製された酸化物半導体薄膜を用いた薄膜トランジスタ |
| JP2009065012A (ja) * | 2007-09-07 | 2009-03-26 | Konica Minolta Holdings Inc | 薄膜トランジスタ |
| JP2009224595A (ja) * | 2008-03-17 | 2009-10-01 | Fujifilm Corp | 有機電界発光表示装置及びその製造方法 |
Family Cites Families (197)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2731856A (en) * | 1956-01-24 | Spatta | ||
| US3858800A (en) | 1973-04-18 | 1975-01-07 | Standard Thomson Corp | Thermally responsive valve apparatus |
| JPS5926831A (ja) | 1982-08-04 | 1984-02-13 | Canon Inc | シ−ト給送装置 |
| JPS5926831U (ja) | 1982-08-10 | 1984-02-20 | 豊田工機株式会社 | リミツトスイツチ |
| JPS60198861A (ja) | 1984-03-23 | 1985-10-08 | Fujitsu Ltd | 薄膜トランジスタ |
| DE3640174A1 (de) | 1985-11-27 | 1987-06-04 | Sharp Kk | Duennfilm-transistor-anordnung |
| JPH0244256B2 (ja) | 1987-01-28 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn2o5deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
| JPH0244258B2 (ja) | 1987-02-24 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn3o6deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
| JPH0244260B2 (ja) | 1987-02-24 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn5o8deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
| JPS63210023A (ja) | 1987-02-24 | 1988-08-31 | Natl Inst For Res In Inorg Mater | InGaZn↓4O↓7で示される六方晶系の層状構造を有する化合物およびその製造法 |
| JPH0244262B2 (ja) | 1987-02-27 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn6o9deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
| JPH0244263B2 (ja) | 1987-04-22 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | Ingazn7o10deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho |
| US5327001A (en) | 1987-09-09 | 1994-07-05 | Casio Computer Co., Ltd. | Thin film transistor array having single light shield layer over transistors and gate and drain lines |
| US5229644A (en) | 1987-09-09 | 1993-07-20 | Casio Computer Co., Ltd. | Thin film transistor having a transparent electrode and substrate |
| JPS6482674A (en) * | 1987-09-25 | 1989-03-28 | Casio Computer Co Ltd | Thin film transistor |
| US5032883A (en) | 1987-09-09 | 1991-07-16 | Casio Computer Co., Ltd. | Thin film transistor and method of manufacturing the same |
| US5166085A (en) | 1987-09-09 | 1992-11-24 | Casio Computer Co., Ltd. | Method of manufacturing a thin film transistor |
| JP3556679B2 (ja) * | 1992-05-29 | 2004-08-18 | 株式会社半導体エネルギー研究所 | 電気光学装置 |
| US5854494A (en) | 1991-02-16 | 1998-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Electric device, matrix device, electro-optical display device, and semiconductor memory having thin-film transistors |
| US6028333A (en) | 1991-02-16 | 2000-02-22 | Semiconductor Energy Laboratory Co., Ltd. | Electric device, matrix device, electro-optical display device, and semiconductor memory having thin-film transistors |
| JPH05251705A (ja) | 1992-03-04 | 1993-09-28 | Fuji Xerox Co Ltd | 薄膜トランジスタ |
| JPH05291343A (ja) | 1992-04-10 | 1993-11-05 | Miyagi Oki Denki Kk | 半導体装置 |
| JP3373620B2 (ja) | 1993-10-21 | 2003-02-04 | 株式会社東芝 | 液晶表示装置 |
| JP3479375B2 (ja) | 1995-03-27 | 2003-12-15 | 科学技術振興事業団 | 亜酸化銅等の金属酸化物半導体による薄膜トランジスタとpn接合を形成した金属酸化物半導体装置およびそれらの製造方法 |
| WO1997006554A2 (en) | 1995-08-03 | 1997-02-20 | Philips Electronics N.V. | Semiconductor device provided with transparent switching element |
| JP3625598B2 (ja) | 1995-12-30 | 2005-03-02 | 三星電子株式会社 | 液晶表示装置の製造方法 |
| JP3634089B2 (ja) | 1996-09-04 | 2005-03-30 | 株式会社半導体エネルギー研究所 | 表示装置 |
| JP3520401B2 (ja) * | 1996-09-17 | 2004-04-19 | セイコーエプソン株式会社 | 液晶パネル用基板およびそれを用いた液晶パネル並びに投射型表示装置 |
| JPH11112002A (ja) | 1997-10-07 | 1999-04-23 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその製造方法 |
| JP4170454B2 (ja) | 1998-07-24 | 2008-10-22 | Hoya株式会社 | 透明導電性酸化物薄膜を有する物品及びその製造方法 |
| JP2000150861A (ja) | 1998-11-16 | 2000-05-30 | Tdk Corp | 酸化物薄膜 |
| JP3276930B2 (ja) | 1998-11-17 | 2002-04-22 | 科学技術振興事業団 | トランジスタ及び半導体装置 |
| TW452669B (en) | 1999-03-18 | 2001-09-01 | Sanyo Electric Co | Active matrix type display device |
| JP2000340359A (ja) | 1999-05-28 | 2000-12-08 | Tdk Corp | 有機el素子の駆動装置および有機el表示装置 |
| JP4730994B2 (ja) * | 1999-06-04 | 2011-07-20 | 株式会社半導体エネルギー研究所 | 電気光学装置及びその作製方法並びに電子装置 |
| TW527735B (en) | 1999-06-04 | 2003-04-11 | Semiconductor Energy Lab | Electro-optical device |
| JP2001036087A (ja) * | 1999-07-15 | 2001-02-09 | Seiko Epson Corp | アクティブマトリクス基板、電気光学装置及び電子機器 |
| TW460731B (en) | 1999-09-03 | 2001-10-21 | Ind Tech Res Inst | Electrode structure and production method of wide viewing angle LCD |
| TW522453B (en) * | 1999-09-17 | 2003-03-01 | Semiconductor Energy Lab | Display device |
| JP3420135B2 (ja) * | 1999-10-26 | 2003-06-23 | 日本電気株式会社 | アクティブマトリクス基板の製造方法 |
| US7023021B2 (en) | 2000-02-22 | 2006-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
| JP4089858B2 (ja) | 2000-09-01 | 2008-05-28 | 国立大学法人東北大学 | 半導体デバイス |
| KR20020038482A (ko) | 2000-11-15 | 2002-05-23 | 모리시타 요이찌 | 박막 트랜지스터 어레이, 그 제조방법 및 그것을 이용한표시패널 |
| JP2003050405A (ja) | 2000-11-15 | 2003-02-21 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタアレイ、その製造方法およびそれを用いた表示パネル |
| JP4954366B2 (ja) | 2000-11-28 | 2012-06-13 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP3914753B2 (ja) * | 2000-11-30 | 2007-05-16 | Nec液晶テクノロジー株式会社 | アクティブマトリクス型液晶表示装置およびスイッチング素子 |
| TWI221645B (en) | 2001-01-19 | 2004-10-01 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
| SG179310A1 (en) | 2001-02-28 | 2012-04-27 | Semiconductor Energy Lab | Semiconductor device and manufacturing method thereof |
| JP3997731B2 (ja) | 2001-03-19 | 2007-10-24 | 富士ゼロックス株式会社 | 基材上に結晶性半導体薄膜を形成する方法 |
| JP2002289859A (ja) | 2001-03-23 | 2002-10-04 | Minolta Co Ltd | 薄膜トランジスタ |
| JP4709442B2 (ja) | 2001-08-28 | 2011-06-22 | 株式会社 日立ディスプレイズ | 薄膜トランジスタの製造方法 |
| CN101257743B (zh) * | 2001-08-29 | 2011-05-25 | 株式会社半导体能源研究所 | 发光器件及这种发光器件的驱动方法 |
| JP4090716B2 (ja) | 2001-09-10 | 2008-05-28 | 雅司 川崎 | 薄膜トランジスタおよびマトリクス表示装置 |
| JP3925839B2 (ja) | 2001-09-10 | 2007-06-06 | シャープ株式会社 | 半導体記憶装置およびその試験方法 |
| JP3583413B2 (ja) | 2001-10-09 | 2004-11-04 | 株式会社半導体エネルギー研究所 | スイッチ素子、それを用いた表示装置及び半導体装置 |
| KR100945467B1 (ko) | 2001-10-09 | 2010-03-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 스위칭소자, 표시장치, 그 스위칭소자를 사용한 발광장치및 반도체장치 |
| EP1443130B1 (en) | 2001-11-05 | 2011-09-28 | Japan Science and Technology Agency | Natural superlattice homologous single crystal thin film, method for preparation thereof, and device using said single crystal thin film |
| JP4164562B2 (ja) | 2002-09-11 | 2008-10-15 | 独立行政法人科学技術振興機構 | ホモロガス薄膜を活性層として用いる透明薄膜電界効果型トランジスタ |
| KR100834346B1 (ko) | 2001-12-28 | 2008-06-02 | 엘지디스플레이 주식회사 | 능동행렬 유기전기발광소자 |
| JP4083486B2 (ja) | 2002-02-21 | 2008-04-30 | 独立行政法人科学技術振興機構 | LnCuO(S,Se,Te)単結晶薄膜の製造方法 |
| CN1445821A (zh) | 2002-03-15 | 2003-10-01 | 三洋电机株式会社 | ZnO膜和ZnO半导体层的形成方法、半导体元件及其制造方法 |
| JP3933591B2 (ja) | 2002-03-26 | 2007-06-20 | 淳二 城戸 | 有機エレクトロルミネッセント素子 |
| JP4018432B2 (ja) | 2002-04-12 | 2007-12-05 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US7339187B2 (en) | 2002-05-21 | 2008-03-04 | State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University | Transistor structures |
| JP2004022625A (ja) | 2002-06-13 | 2004-01-22 | Murata Mfg Co Ltd | 半導体デバイス及び該半導体デバイスの製造方法 |
| US7105868B2 (en) | 2002-06-24 | 2006-09-12 | Cermet, Inc. | High-electron mobility transistor with zinc oxide |
| US7067843B2 (en) | 2002-10-11 | 2006-06-27 | E. I. Du Pont De Nemours And Company | Transparent oxide semiconductor thin film transistors |
| JP4166105B2 (ja) | 2003-03-06 | 2008-10-15 | シャープ株式会社 | 半導体装置およびその製造方法 |
| JP2004273732A (ja) | 2003-03-07 | 2004-09-30 | Sharp Corp | アクティブマトリクス基板およびその製造方法 |
| JP4108633B2 (ja) | 2003-06-20 | 2008-06-25 | シャープ株式会社 | 薄膜トランジスタおよびその製造方法ならびに電子デバイス |
| JP2005019627A (ja) | 2003-06-25 | 2005-01-20 | Toshiba Matsushita Display Technology Co Ltd | 液晶表示装置 |
| US7262463B2 (en) | 2003-07-25 | 2007-08-28 | Hewlett-Packard Development Company, L.P. | Transistor including a deposited channel region having a doped portion |
| JP2005123571A (ja) | 2003-09-22 | 2005-05-12 | Sanyo Electric Co Ltd | トランジスタ基板、表示装置及びそれらの製造方法 |
| CN1906650B (zh) * | 2003-11-14 | 2012-05-09 | 株式会社半导体能源研究所 | 显示装置及其制造方法 |
| KR101019045B1 (ko) * | 2003-11-25 | 2011-03-04 | 엘지디스플레이 주식회사 | 액정표시장치용 어레이기판과 그 제조방법 |
| US7273773B2 (en) | 2004-01-26 | 2007-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Display device, method for manufacturing thereof, and television device |
| EP2413366B1 (en) | 2004-03-12 | 2017-01-11 | Japan Science And Technology Agency | A switching element of LCDs or organic EL displays |
| US7145174B2 (en) | 2004-03-12 | 2006-12-05 | Hewlett-Packard Development Company, Lp. | Semiconductor device |
| US7282782B2 (en) | 2004-03-12 | 2007-10-16 | Hewlett-Packard Development Company, L.P. | Combined binary oxide semiconductor device |
| US7297977B2 (en) | 2004-03-12 | 2007-11-20 | Hewlett-Packard Development Company, L.P. | Semiconductor device |
| JP3933667B2 (ja) | 2004-04-29 | 2007-06-20 | 三星エスディアイ株式会社 | 発光表示パネル及び発光表示装置 |
| US7211825B2 (en) | 2004-06-14 | 2007-05-01 | Yi-Chi Shih | Indium oxide-based thin film transistors and circuits |
| US8217396B2 (en) | 2004-07-30 | 2012-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising electrode layer contacting wiring in the connection region and extending to pixel region |
| JP2006100760A (ja) | 2004-09-02 | 2006-04-13 | Casio Comput Co Ltd | 薄膜トランジスタおよびその製造方法 |
| US7285501B2 (en) | 2004-09-17 | 2007-10-23 | Hewlett-Packard Development Company, L.P. | Method of forming a solution processed device |
| US7298084B2 (en) | 2004-11-02 | 2007-11-20 | 3M Innovative Properties Company | Methods and displays utilizing integrated zinc oxide row and column drivers in conjunction with organic light emitting diodes |
| US20060091397A1 (en) * | 2004-11-04 | 2006-05-04 | Kengo Akimoto | Display device and method for manufacturing the same |
| KR100649023B1 (ko) | 2004-11-09 | 2006-11-28 | 동부일렉트로닉스 주식회사 | 씨모스 이미지 센서의 제조방법 |
| US7863611B2 (en) | 2004-11-10 | 2011-01-04 | Canon Kabushiki Kaisha | Integrated circuits utilizing amorphous oxides |
| EP1815530B1 (en) | 2004-11-10 | 2021-02-17 | Canon Kabushiki Kaisha | Field effect transistor employing an amorphous oxide |
| US7453065B2 (en) | 2004-11-10 | 2008-11-18 | Canon Kabushiki Kaisha | Sensor and image pickup device |
| US7829444B2 (en) | 2004-11-10 | 2010-11-09 | Canon Kabushiki Kaisha | Field effect transistor manufacturing method |
| CA2585063C (en) | 2004-11-10 | 2013-01-15 | Canon Kabushiki Kaisha | Light-emitting device |
| US7791072B2 (en) | 2004-11-10 | 2010-09-07 | Canon Kabushiki Kaisha | Display |
| RU2369940C2 (ru) * | 2004-11-10 | 2009-10-10 | Кэнон Кабусики Кайся | Аморфный оксид и полевой транзистор с его использованием |
| JP5138163B2 (ja) * | 2004-11-10 | 2013-02-06 | キヤノン株式会社 | 電界効果型トランジスタ |
| US7579224B2 (en) | 2005-01-21 | 2009-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a thin film semiconductor device |
| TWI505473B (zh) | 2005-01-28 | 2015-10-21 | 半導體能源研究所股份有限公司 | 半導體裝置,電子裝置,和半導體裝置的製造方法 |
| TWI390735B (zh) | 2005-01-28 | 2013-03-21 | 半導體能源研究所股份有限公司 | 半導體裝置,電子裝置,和半導體裝置的製造方法 |
| US7858451B2 (en) | 2005-02-03 | 2010-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device, semiconductor device and manufacturing method thereof |
| US7948171B2 (en) * | 2005-02-18 | 2011-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
| US20060197092A1 (en) | 2005-03-03 | 2006-09-07 | Randy Hoffman | System and method for forming conductive material on a substrate |
| WO2006098176A1 (ja) * | 2005-03-15 | 2006-09-21 | Sharp Kabushiki Kaisha | アクティブマトリクス基板およびそれを備えた表示装置 |
| US8681077B2 (en) | 2005-03-18 | 2014-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, and display device, driving method and electronic apparatus thereof |
| WO2006105077A2 (en) | 2005-03-28 | 2006-10-05 | Massachusetts Institute Of Technology | Low voltage thin film transistor with high-k dielectric material |
| US7645478B2 (en) | 2005-03-31 | 2010-01-12 | 3M Innovative Properties Company | Methods of making displays |
| US8300031B2 (en) | 2005-04-20 | 2012-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising transistor having gate and drain connected through a current-voltage conversion element |
| JP2006344849A (ja) | 2005-06-10 | 2006-12-21 | Casio Comput Co Ltd | 薄膜トランジスタ |
| US7402506B2 (en) | 2005-06-16 | 2008-07-22 | Eastman Kodak Company | Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby |
| US7691666B2 (en) | 2005-06-16 | 2010-04-06 | Eastman Kodak Company | Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby |
| US7507618B2 (en) | 2005-06-27 | 2009-03-24 | 3M Innovative Properties Company | Method for making electronic devices using metal oxide nanoparticles |
| KR100711890B1 (ko) | 2005-07-28 | 2007-04-25 | 삼성에스디아이 주식회사 | 유기 발광표시장치 및 그의 제조방법 |
| JP2007059128A (ja) | 2005-08-23 | 2007-03-08 | Canon Inc | 有機el表示装置およびその製造方法 |
| JP5116225B2 (ja) | 2005-09-06 | 2013-01-09 | キヤノン株式会社 | 酸化物半導体デバイスの製造方法 |
| JP4280736B2 (ja) | 2005-09-06 | 2009-06-17 | キヤノン株式会社 | 半導体素子 |
| JP2007073705A (ja) | 2005-09-06 | 2007-03-22 | Canon Inc | 酸化物半導体チャネル薄膜トランジスタおよびその製造方法 |
| JP4850457B2 (ja) | 2005-09-06 | 2012-01-11 | キヤノン株式会社 | 薄膜トランジスタ及び薄膜ダイオード |
| EP3614442A3 (en) | 2005-09-29 | 2020-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having oxide semiconductor layer and manufactoring method thereof |
| JP5064747B2 (ja) | 2005-09-29 | 2012-10-31 | 株式会社半導体エネルギー研究所 | 半導体装置、電気泳動表示装置、表示モジュール、電子機器、及び半導体装置の作製方法 |
| JP5105811B2 (ja) * | 2005-10-14 | 2012-12-26 | 株式会社半導体エネルギー研究所 | 表示装置 |
| US8149346B2 (en) | 2005-10-14 | 2012-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
| KR101324756B1 (ko) * | 2005-10-18 | 2013-11-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시장치 및 그의 구동방법 |
| JP5037808B2 (ja) | 2005-10-20 | 2012-10-03 | キヤノン株式会社 | アモルファス酸化物を用いた電界効果型トランジスタ、及び該トランジスタを用いた表示装置 |
| CN101283444B (zh) | 2005-11-15 | 2011-01-26 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
| US8212953B2 (en) * | 2005-12-26 | 2012-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| TWI292281B (en) | 2005-12-29 | 2008-01-01 | Ind Tech Res Inst | Pixel structure of active organic light emitting diode and method of fabricating the same |
| KR101221184B1 (ko) * | 2005-12-29 | 2013-02-07 | 엘지디스플레이 주식회사 | 유기 전계 발광 표시 장치 및 이의 제조 방법 |
| US7867636B2 (en) | 2006-01-11 | 2011-01-11 | Murata Manufacturing Co., Ltd. | Transparent conductive film and method for manufacturing the same |
| JP4977478B2 (ja) | 2006-01-21 | 2012-07-18 | 三星電子株式会社 | ZnOフィルム及びこれを用いたTFTの製造方法 |
| US7576394B2 (en) | 2006-02-02 | 2009-08-18 | Kochi Industrial Promotion Center | Thin film transistor including low resistance conductive thin films and manufacturing method thereof |
| US7977169B2 (en) | 2006-02-15 | 2011-07-12 | Kochi Industrial Promotion Center | Semiconductor device including active layer made of zinc oxide with controlled orientations and manufacturing method thereof |
| US8008670B2 (en) * | 2006-02-21 | 2011-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device |
| US8168980B2 (en) * | 2006-02-24 | 2012-05-01 | Sharp Kabushiki Kaisha | Active matrix substrate, display device, television receiver, manufacturing method of active matrix substrate, forming method of gate insulating film |
| KR20070101595A (ko) | 2006-04-11 | 2007-10-17 | 삼성전자주식회사 | ZnO TFT |
| JP2007305960A (ja) | 2006-04-14 | 2007-11-22 | Sharp Corp | 半導体装置およびその製造方法 |
| US20070252928A1 (en) | 2006-04-28 | 2007-11-01 | Toppan Printing Co., Ltd. | Structure, transmission type liquid crystal display, reflection type display and manufacturing method thereof |
| US8106865B2 (en) * | 2006-06-02 | 2012-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method thereof |
| JP5028033B2 (ja) | 2006-06-13 | 2012-09-19 | キヤノン株式会社 | 酸化物半導体膜のドライエッチング方法 |
| JP4609797B2 (ja) | 2006-08-09 | 2011-01-12 | Nec液晶テクノロジー株式会社 | 薄膜デバイス及びその製造方法 |
| JP4999400B2 (ja) | 2006-08-09 | 2012-08-15 | キヤノン株式会社 | 酸化物半導体膜のドライエッチング方法 |
| JP2008042043A (ja) | 2006-08-09 | 2008-02-21 | Hitachi Ltd | 表示装置 |
| US7651896B2 (en) * | 2006-08-30 | 2010-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP4332545B2 (ja) | 2006-09-15 | 2009-09-16 | キヤノン株式会社 | 電界効果型トランジスタ及びその製造方法 |
| JP4274219B2 (ja) | 2006-09-27 | 2009-06-03 | セイコーエプソン株式会社 | 電子デバイス、有機エレクトロルミネッセンス装置、有機薄膜半導体装置 |
| JP5164357B2 (ja) | 2006-09-27 | 2013-03-21 | キヤノン株式会社 | 半導体装置及び半導体装置の製造方法 |
| JP5116277B2 (ja) | 2006-09-29 | 2013-01-09 | 株式会社半導体エネルギー研究所 | 半導体装置、表示装置、液晶表示装置、表示モジュール及び電子機器 |
| US7622371B2 (en) | 2006-10-10 | 2009-11-24 | Hewlett-Packard Development Company, L.P. | Fused nanocrystal thin film semiconductor and method |
| TWI442368B (zh) * | 2006-10-26 | 2014-06-21 | Semiconductor Energy Lab | 電子裝置,顯示裝置,和半導體裝置,以及其驅動方法 |
| US7772021B2 (en) | 2006-11-29 | 2010-08-10 | Samsung Electronics Co., Ltd. | Flat panel displays comprising a thin-film transistor having a semiconductive oxide in its channel and methods of fabricating the same for use in flat panel displays |
| JP2008140684A (ja) | 2006-12-04 | 2008-06-19 | Toppan Printing Co Ltd | カラーelディスプレイおよびその製造方法 |
| KR101146574B1 (ko) | 2006-12-05 | 2012-05-16 | 캐논 가부시끼가이샤 | 산화물 반도체를 이용한 박막 트랜지스터의 제조방법 및 표시장치 |
| JP5305630B2 (ja) | 2006-12-05 | 2013-10-02 | キヤノン株式会社 | ボトムゲート型薄膜トランジスタの製造方法及び表示装置の製造方法 |
| WO2008069255A1 (en) | 2006-12-05 | 2008-06-12 | Canon Kabushiki Kaisha | Method for manufacturing thin film transistor using oxide semiconductor and display apparatus |
| US8514165B2 (en) * | 2006-12-28 | 2013-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| KR101303578B1 (ko) | 2007-01-05 | 2013-09-09 | 삼성전자주식회사 | 박막 식각 방법 |
| US8207063B2 (en) | 2007-01-26 | 2012-06-26 | Eastman Kodak Company | Process for atomic layer deposition |
| JP4934599B2 (ja) | 2007-01-29 | 2012-05-16 | キヤノン株式会社 | アクティブマトリクス表示装置 |
| KR100851215B1 (ko) | 2007-03-14 | 2008-08-07 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 이를 이용한 유기 전계 발광표시장치 |
| JP5197058B2 (ja) | 2007-04-09 | 2013-05-15 | キヤノン株式会社 | 発光装置とその作製方法 |
| WO2008126879A1 (en) | 2007-04-09 | 2008-10-23 | Canon Kabushiki Kaisha | Light-emitting apparatus and production method thereof |
| US7795613B2 (en) | 2007-04-17 | 2010-09-14 | Toppan Printing Co., Ltd. | Structure with transistor |
| KR101325053B1 (ko) | 2007-04-18 | 2013-11-05 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 이의 제조 방법 |
| KR20080094300A (ko) | 2007-04-19 | 2008-10-23 | 삼성전자주식회사 | 박막 트랜지스터 및 그 제조 방법과 박막 트랜지스터를포함하는 평판 디스플레이 |
| KR101334181B1 (ko) | 2007-04-20 | 2013-11-28 | 삼성전자주식회사 | 선택적으로 결정화된 채널층을 갖는 박막 트랜지스터 및 그제조 방법 |
| WO2008133345A1 (en) | 2007-04-25 | 2008-11-06 | Canon Kabushiki Kaisha | Oxynitride semiconductor |
| US8115785B2 (en) * | 2007-04-26 | 2012-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device, liquid crystal display device, and electronic device |
| KR101345376B1 (ko) | 2007-05-29 | 2013-12-24 | 삼성전자주식회사 | ZnO 계 박막 트랜지스터 및 그 제조방법 |
| US20090001881A1 (en) | 2007-06-28 | 2009-01-01 | Masaya Nakayama | Organic el display and manufacturing method thereof |
| JP2009031750A (ja) | 2007-06-28 | 2009-02-12 | Fujifilm Corp | 有機el表示装置およびその製造方法 |
| US7633089B2 (en) * | 2007-07-26 | 2009-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device provided with the same |
| TW200907905A (en) | 2007-08-15 | 2009-02-16 | Tpo Displays Corp | System for displaying image |
| JP5354999B2 (ja) | 2007-09-26 | 2013-11-27 | キヤノン株式会社 | 電界効果型トランジスタの製造方法 |
| JP2009099887A (ja) | 2007-10-19 | 2009-05-07 | Hitachi Displays Ltd | 表示装置 |
| WO2009066943A1 (en) | 2007-11-20 | 2009-05-28 | Jae-Sang Ro | Thin film transistor and fabricating method of the same |
| KR100908472B1 (ko) | 2007-11-20 | 2009-07-21 | 주식회사 엔씰텍 | 박막트랜지스터, 그의 제조방법, 그를 포함하는평판표시장치 및 그의 제조방법 |
| KR101270174B1 (ko) | 2007-12-03 | 2013-05-31 | 삼성전자주식회사 | 산화물 반도체 박막 트랜지스터의 제조방법 |
| JP5213422B2 (ja) | 2007-12-04 | 2013-06-19 | キヤノン株式会社 | 絶縁層を有する酸化物半導体素子およびそれを用いた表示装置 |
| US8202365B2 (en) | 2007-12-17 | 2012-06-19 | Fujifilm Corporation | Process for producing oriented inorganic crystalline film, and semiconductor device using the oriented inorganic crystalline film |
| CN101221960B (zh) * | 2008-01-18 | 2010-12-08 | 友达光电股份有限公司 | 像素结构 |
| US20100295042A1 (en) | 2008-01-23 | 2010-11-25 | Idemitsu Kosan Co., Ltd. | Field-effect transistor, method for manufacturing field-effect transistor, display device using field-effect transistor, and semiconductor device |
| KR100963003B1 (ko) * | 2008-02-05 | 2010-06-10 | 삼성모바일디스플레이주식회사 | 박막 트랜지스터, 그의 제조 방법 및 박막 트랜지스터를구비하는 평판 표시 장치 |
| KR101430639B1 (ko) * | 2008-03-17 | 2014-08-18 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 이를 포함하는 표시 장치 |
| US9041202B2 (en) | 2008-05-16 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
| TWI834207B (zh) * | 2008-07-31 | 2024-03-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置及半導體裝置的製造方法 |
| KR101533391B1 (ko) * | 2008-08-06 | 2015-07-02 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판과 그 제조 방법 |
| JP4623179B2 (ja) | 2008-09-18 | 2011-02-02 | ソニー株式会社 | 薄膜トランジスタおよびその製造方法 |
| KR101408715B1 (ko) * | 2008-09-19 | 2014-06-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
| WO2010032619A1 (en) | 2008-09-19 | 2010-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| KR20160113329A (ko) * | 2008-10-03 | 2016-09-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시장치 |
| EP2172804B1 (en) * | 2008-10-03 | 2016-05-11 | Semiconductor Energy Laboratory Co, Ltd. | Display device |
| CN101714546B (zh) * | 2008-10-03 | 2014-05-14 | 株式会社半导体能源研究所 | 显示装置及其制造方法 |
| JP5451280B2 (ja) | 2008-10-09 | 2014-03-26 | キヤノン株式会社 | ウルツ鉱型結晶成長用基板およびその製造方法ならびに半導体装置 |
| CN101369590A (zh) * | 2008-10-15 | 2009-02-18 | 上海广电光电子有限公司 | 像素结构 |
| KR101785887B1 (ko) * | 2008-11-21 | 2017-10-16 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 표시 장치 |
| CN101478005B (zh) * | 2009-02-13 | 2010-06-09 | 北京大学深圳研究生院 | 一种金属氧化物薄膜晶体管及其制作方法 |
| WO2011043217A1 (en) | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the same |
| WO2011043216A1 (en) | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device and electronic device including the same |
-
2010
- 2010-09-21 WO PCT/JP2010/066744 patent/WO2011043216A1/en not_active Ceased
- 2010-09-21 KR KR1020187005532A patent/KR101944239B1/ko active Active
- 2010-09-21 KR KR1020167036062A patent/KR101778513B1/ko active Active
- 2010-09-21 CN CN201080045810.9A patent/CN102549638B/zh active Active
- 2010-09-21 KR KR1020127011625A patent/KR101759504B1/ko active Active
- 2010-09-21 KR KR1020177024898A patent/KR101835748B1/ko active Active
- 2010-10-04 US US12/897,299 patent/US8482004B2/en active Active
- 2010-10-05 JP JP2010225633A patent/JP2011100723A/ja not_active Withdrawn
- 2010-10-07 TW TW099134226A patent/TWI607560B/zh active
- 2010-10-07 TW TW106144238A patent/TWI641129B/zh active
- 2010-10-07 TW TW105142741A patent/TWI632674B/zh active
-
2012
- 2012-07-26 JP JP2012165507A patent/JP5097869B1/ja active Active
-
2013
- 2013-01-08 JP JP2013000956A patent/JP2013080257A/ja not_active Withdrawn
- 2013-05-14 JP JP2013102112A patent/JP5499201B2/ja active Active
- 2013-07-08 US US13/936,355 patent/US9318654B2/en active Active
-
2015
- 2015-02-27 JP JP2015038658A patent/JP5926831B2/ja active Active
-
2016
- 2016-04-18 US US15/131,119 patent/US10411158B2/en active Active
- 2016-04-20 JP JP2016084160A patent/JP6224159B2/ja active Active
-
2017
- 2017-10-04 JP JP2017194518A patent/JP6408102B2/ja active Active
-
2018
- 2018-09-19 JP JP2018175108A patent/JP6600057B2/ja active Active
-
2019
- 2019-08-05 US US16/531,204 patent/US10566497B2/en active Active
- 2019-08-09 JP JP2019147645A patent/JP6616042B1/ja active Active
- 2019-11-06 JP JP2019201636A patent/JP6652681B1/ja active Active
-
2020
- 2020-01-07 US US16/736,008 patent/US11355669B2/en active Active
- 2020-01-23 JP JP2020009289A patent/JP6708803B2/ja active Active
- 2020-05-21 JP JP2020088533A patent/JP6845363B2/ja not_active Expired - Fee Related
-
2021
- 2021-02-25 JP JP2021028047A patent/JP7106700B2/ja active Active
-
2022
- 2022-05-24 US US17/751,758 patent/US11901485B2/en active Active
- 2022-07-13 JP JP2022112200A patent/JP7130165B1/ja active Active
- 2022-08-23 JP JP2022132411A patent/JP7198964B2/ja active Active
- 2022-12-19 JP JP2022201810A patent/JP7357754B2/ja active Active
-
2023
- 2023-09-26 JP JP2023162668A patent/JP2023178298A/ja not_active Withdrawn
-
2024
- 2024-01-19 US US18/417,474 patent/US12224376B2/en active Active
- 2024-12-20 JP JP2024225211A patent/JP7776606B2/ja active Active
-
2025
- 2025-01-09 US US19/014,341 patent/US20250151466A1/en active Pending
- 2025-11-13 JP JP2025194407A patent/JP2026015499A/ja active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1082991A (ja) * | 1996-09-09 | 1998-03-31 | Toshiba Corp | 液晶表示装置 |
| JPH1124606A (ja) * | 1997-07-02 | 1999-01-29 | Seiko Epson Corp | 表示装置 |
| JP2001117115A (ja) * | 1999-10-21 | 2001-04-27 | Sanyo Electric Co Ltd | アクティブマトリクス型表示装置 |
| JP2005077822A (ja) * | 2003-09-01 | 2005-03-24 | Casio Comput Co Ltd | トランジスタアレイ基板の製造方法及びトランジスタアレイ基板 |
| JP2006242987A (ja) * | 2005-02-28 | 2006-09-14 | Casio Comput Co Ltd | 薄膜トランジスタパネル |
| JP2007334082A (ja) * | 2006-06-16 | 2007-12-27 | Casio Comput Co Ltd | 薄膜トランジスタパネルおよび液晶表示装置 |
| JP2008116502A (ja) * | 2006-10-31 | 2008-05-22 | Semiconductor Energy Lab Co Ltd | 液晶表示装置及び電子機器 |
| JP2008181109A (ja) * | 2006-12-27 | 2008-08-07 | Semiconductor Energy Lab Co Ltd | 液晶表示装置及びそれを用いた電子機器 |
| WO2009028452A1 (ja) * | 2007-08-27 | 2009-03-05 | Konica Minolta Holdings, Inc. | 金属酸化物半導体の製造方法およびこれを用い作製された酸化物半導体薄膜を用いた薄膜トランジスタ |
| JP2009065012A (ja) * | 2007-09-07 | 2009-03-26 | Konica Minolta Holdings Inc | 薄膜トランジスタ |
| JP2009224595A (ja) * | 2008-03-17 | 2009-10-01 | Fujifilm Corp | 有機電界発光表示装置及びその製造方法 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013008944A (ja) * | 2011-05-21 | 2013-01-10 | Futaba Corp | 薄膜半導体装置と薄膜半導体装置を用いた表示装置 |
| JP2024028406A (ja) * | 2011-11-30 | 2024-03-04 | 株式会社半導体エネルギー研究所 | 半導体装置、電子機器 |
| JP7583196B2 (ja) | 2011-11-30 | 2024-11-13 | 株式会社半導体エネルギー研究所 | 半導体装置、電子機器 |
| WO2016098317A1 (ja) * | 2014-12-18 | 2016-06-23 | 株式会社Joled | 表示装置 |
| JP2018185397A (ja) * | 2017-04-25 | 2018-11-22 | 株式会社ジャパンディスプレイ | 表示装置及びその製造方法 |
| US11114568B2 (en) | 2017-04-25 | 2021-09-07 | Japan Display Inc. | Semiconductor device |
| US11935967B2 (en) | 2017-04-25 | 2024-03-19 | Japan Display Inc. | Semiconductor device |
Also Published As
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7776606B2 (ja) | 表示装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130715 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130715 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140121 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140122 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140131 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140513 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20141028 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141104 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20150217 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20150303 |