JP2006216755A - 多層配線基板とその製造方法、および多層配線基板を用いた半導体装置と電子機器 - Google Patents
多層配線基板とその製造方法、および多層配線基板を用いた半導体装置と電子機器 Download PDFInfo
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Abstract
【解決手段】少なくとも2層の配線層を含む多層配線板と、前記多層配線板の層間に、箔状の金属基体の片面あるいは両面に絶縁性酸化皮膜層、電解質層、及び導電体層を順次生成して固体電解質コンデンサを形成し、前記導電体層が前記多層配線板の接地層電極に接続され、前記箔状の金属基体が前記多層配線基板の電源層電極と接続されており、前記多層基板の厚さ方向に貫通する導電性部材とから構成された基板を提供する。
【選択図】図1
Description
以下、本発明の実施の形態1について、本発明の特に請求項1、3〜13の発明について図面を参照しながら説明する。
以下、本発明の実施の形態2について、本発明の特に請求項2の発明について、図面を参照しながら説明する。
100 コンポジットシート
101 固体電解質コンデンサ
102 金属基体
103 導電体層
104 ガラスエポキシ基板
105 ガラスエポキシ基板
106 電源層電極
107 接地層電極
108 スルーホールめっき
109 半導体素子
110 ワイヤー
Claims (13)
- 少なくとも2層の配線層を含む複数の配線板と、箔状の金属基体の片面あるいは両面に絶縁性酸化皮膜層、電解質層、及び導電体層を順次形成した固体電解質コンデンサを有し、前記配線板の厚さ方向に貫通する導電性部材を備えた多層配線基板において、前記固体電解質コンデンサは、前記複数の配線板の間に挟み込まれるように配置され、前記導電体層は前記配線板の接地層電極に接続し、前記箔状の金属基体が前記多層配線板の電源層電極と接続することを特徴とする多層配線基板。
- 少なくとも2層の配線層を含む複数の配線板と、箔状の金属基体の一方の面に絶縁性酸化皮膜層、電解質層、及び導電体層を順次形成し、他方の面に電極層を形成した固体電解質コンデンサを有し、前記配線板の厚さ方向に貫通する導電性部材を備えた多層配線基板において、前記固体電解質コンデンサは、前記複数の配線板の間に挟み込まれるように配置され、前記導電体層は前記配線板の接地層電極に接続し、前記電極層が前記多層配線板の電源層電極と接続することを特徴とする多層配線基板。
- 電源層の一部に設置パターンを設けて導電体層を形成する請求項1記載の多層配線基板。
- 複数の固体電解質コンデンサが配線板間に内蔵される請求項1に記載の多層配線基板。
- 固体電解質コンデンサを埋設している層間を、樹脂と無機フィラーとを含む材料から構成したコンポジット材料で形成している請求項1〜3に記載の多層配線基板。
- 固体電解質コンデンサと配線板の内層配線部との接続に、導電性ビアペーストが充填されたコンポジットシートを介して接続している請求項4に記載の多層配線基板。
- 少なくとも2層の配線層を積層して配線板を形成し、前記複数の配線板の層間に、箔状の金属基体の片面あるいは両面に絶縁性酸化皮膜層、電解質層、及び導電体層を順次生成することにより固体電解質コンデンサを形成し、次に所定の箇所に導電性ビアペーストが充填された無機フィラーと熱硬化性樹脂とにより構成したコンポジットシートを、前記固体電解質コンデンサの上面および下面に配置し、その後前記コンポジットシートに併せて、内蔵用コンポジットシートを用意、配置した後、加熱溶融を行い、前記固体電解質コンデンサを前記コンポジットシート内部に埋設した後前記コンポジットシートを硬化する工程によって、前記配線板と電気的に接続された固体電解質コンデンサを内蔵したコンポジットシートとによる積層体を構成し、その後に全層を貫通するスルーホールめっき工程を行い、層間接続のみならず、前記固体電解質コンデンサの箔状の金属基体が前記多層配線板の電源層電極と接続することを特徴とする多層配線基板の製造方法。
- 少なくとも2層の配線層を積層して配線板を形成し、前記複数の配線板の層間に、箔状の金属基体の片面あるいは両面に絶縁性酸化皮膜層、電解質層、及び導電体層を順次生成することにより固体電解質コンデンサを形成し、次に前記固体電解質コンデンサの電極上に導電性樹脂ペーストを塗布した後、前記配線板の所定の箇所に絶縁性の樹脂を形成し、内蔵用コンポジットシートを用意、配置した後、加熱溶融を行い、前記固体電解質コンデンサを前記コンポジットシート内部に埋設した後前記コンポジットシートを硬化する工程によって、前記配線板と電気的に接続された固体電解質コンデンサを内蔵したコンポジットシートとによる積層体を構成し、その後に全層を貫通するスルーホールめっき工程を行い、層間接続のみならず、前記固体電解質コンデンサの箔状の金属基体が前記多層配線板の電源層電極と接続される多層配線基板の製造方法。
- 請求項1〜6に記載の多層配線基板を用いた半導体パッケージ。
- 電源層に設置パターンを一部設けて導電体層と導通する請求項9に記載の半導体パッケージ。
- 半導体がワイヤーボンディング法で実装された請求項9に記載の半導体パッケージ。
- 多層配線基板の厚さ方向に貫通する信号ラインが、固体電解質コンデンサが形成される領域の外側である請求項7に記載の半導体パッケージ。
- 請求項9〜12に記載の半導体パッケージを用いた電子機器。
Priority Applications (5)
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JP2005027569A JP4736451B2 (ja) | 2005-02-03 | 2005-02-03 | 多層配線基板とその製造方法、および多層配線基板を用いた半導体パッケージと電子機器 |
GB0714966A GB2437465B (en) | 2005-02-03 | 2006-02-01 | Multilayer wiring board, method for manufacturing such multilayer wiring board, and semiconductor device, and electronic device using multilayer wiring board |
US11/578,039 US7821795B2 (en) | 2005-02-03 | 2006-02-01 | Multilayer wiring board |
CN2006800003696A CN1977574B (zh) | 2005-02-03 | 2006-02-01 | 多层布线基板及其制造方法,以及使用多层布线基板的半导体装置与电子设备 |
PCT/JP2006/301640 WO2006082838A1 (ja) | 2005-02-03 | 2006-02-01 | 多層配線基板とその製造方法、および多層配線基板を用いた半導体装置と電子機器 |
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JP (1) | JP4736451B2 (ja) |
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WO (1) | WO2006082838A1 (ja) |
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KR20150137824A (ko) * | 2014-05-30 | 2015-12-09 | 삼성전기주식회사 | 패키지 기판, 패키지, 적층 패키지 및 패키지 기판 제조 방법 |
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JP2019117957A (ja) * | 2019-04-24 | 2019-07-18 | 国立研究開発法人産業技術総合研究所 | 部品内蔵基板 |
Also Published As
Publication number | Publication date |
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JP4736451B2 (ja) | 2011-07-27 |
CN1977574B (zh) | 2011-08-17 |
WO2006082838A1 (ja) | 2006-08-10 |
CN1977574A (zh) | 2007-06-06 |
GB2437465A (en) | 2007-10-24 |
US20070242440A1 (en) | 2007-10-18 |
GB2437465B (en) | 2010-11-17 |
US7821795B2 (en) | 2010-10-26 |
GB0714966D0 (en) | 2007-09-12 |
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