JP2005522839A5 - - Google Patents

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Publication number
JP2005522839A5
JP2005522839A5 JP2003584754A JP2003584754A JP2005522839A5 JP 2005522839 A5 JP2005522839 A5 JP 2005522839A5 JP 2003584754 A JP2003584754 A JP 2003584754A JP 2003584754 A JP2003584754 A JP 2003584754A JP 2005522839 A5 JP2005522839 A5 JP 2005522839A5
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JP
Japan
Prior art keywords
source
plasma
active material
pinch
radiation
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JP2003584754A
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Japanese (ja)
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JP2005522839A (ja
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Priority claimed from US10/120,655 external-priority patent/US6744060B2/en
Priority claimed from US10/189,824 external-priority patent/US6815700B2/en
Priority claimed from US10/384,967 external-priority patent/US6904073B2/en
Priority claimed from US10/409,254 external-priority patent/US6972421B2/en
Application filed filed Critical
Publication of JP2005522839A publication Critical patent/JP2005522839A/ja
Publication of JP2005522839A5 publication Critical patent/JP2005522839A5/ja
Pending legal-status Critical Current

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JP2003584754A 2002-04-10 2003-04-09 極紫外線光源 Pending JP2005522839A (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US10/120,655 US6744060B2 (en) 1997-05-12 2002-04-10 Pulse power system for extreme ultraviolet and x-ray sources
US10/189,824 US6815700B2 (en) 1997-05-12 2002-07-03 Plasma focus light source with improved pulse power system
US41980502P 2002-10-18 2002-10-18
US42280802P 2002-10-31 2002-10-31
US10/384,967 US6904073B2 (en) 2001-01-29 2003-03-08 High power deep ultraviolet laser with long life optics
US10/409,254 US6972421B2 (en) 2000-06-09 2003-04-08 Extreme ultraviolet light source
PCT/US2003/011139 WO2003087867A2 (en) 2002-04-10 2003-04-09 Extreme ultraviolet light source

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010110262A Division JP2010182698A (ja) 2002-04-10 2010-05-12 極紫外線光源

Publications (2)

Publication Number Publication Date
JP2005522839A JP2005522839A (ja) 2005-07-28
JP2005522839A5 true JP2005522839A5 (enExample) 2006-06-08

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ID=29741190

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JP2003584754A Pending JP2005522839A (ja) 2002-04-10 2003-04-09 極紫外線光源
JP2013097975A Pending JP2013179073A (ja) 2002-04-10 2013-05-07 極紫外線光源

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2013097975A Pending JP2013179073A (ja) 2002-04-10 2013-05-07 極紫外線光源

Country Status (6)

Country Link
US (4) US6972421B2 (enExample)
EP (1) EP1493039A4 (enExample)
JP (2) JP2005522839A (enExample)
KR (1) KR101038479B1 (enExample)
AU (1) AU2003230870A1 (enExample)
WO (1) WO2003087867A2 (enExample)

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