FR2841684B1 - Source de rayonnement, notamment ultraviolet a decharges - Google Patents

Source de rayonnement, notamment ultraviolet a decharges

Info

Publication number
FR2841684B1
FR2841684B1 FR0208149A FR0208149A FR2841684B1 FR 2841684 B1 FR2841684 B1 FR 2841684B1 FR 0208149 A FR0208149 A FR 0208149A FR 0208149 A FR0208149 A FR 0208149A FR 2841684 B1 FR2841684 B1 FR 2841684B1
Authority
FR
France
Prior art keywords
discharges
radiation source
especially ultraviolet
ultraviolet
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0208149A
Other languages
English (en)
Other versions
FR2841684A1 (fr
Inventor
Christophe Cachoncinlle
Remi Dussart
Claude Fleurier
Jean Michel Pouvesle
Eric Robert
Raymond Viladrosa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite dOrleans
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite dOrleans
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite dOrleans filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0208149A priority Critical patent/FR2841684B1/fr
Priority to EP03761657.0A priority patent/EP1535307B1/fr
Priority to PCT/FR2003/002002 priority patent/WO2004003964A2/fr
Priority to JP2004516885A priority patent/JP4485943B2/ja
Priority to US10/519,552 priority patent/US7420191B2/en
Priority to AU2003258832A priority patent/AU2003258832A1/en
Publication of FR2841684A1 publication Critical patent/FR2841684A1/fr
Application granted granted Critical
Publication of FR2841684B1 publication Critical patent/FR2841684B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/56—One or more circuit elements structurally associated with the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • H01J61/526—Heating or cooling particular parts of the lamp heating or cooling of electrodes
FR0208149A 2002-06-28 2002-06-28 Source de rayonnement, notamment ultraviolet a decharges Expired - Lifetime FR2841684B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0208149A FR2841684B1 (fr) 2002-06-28 2002-06-28 Source de rayonnement, notamment ultraviolet a decharges
EP03761657.0A EP1535307B1 (fr) 2002-06-28 2003-06-27 Source de rayonnement, notamment ultraviolet, a decharges
PCT/FR2003/002002 WO2004003964A2 (fr) 2002-06-28 2003-06-27 Source de rayonnement, notamment ultraviolet, a decharges
JP2004516885A JP4485943B2 (ja) 2002-06-28 2003-06-27 特に紫外放射線の、放電による放射源
US10/519,552 US7420191B2 (en) 2002-06-28 2003-06-27 Discharge radiation source, in particular UV radiation
AU2003258832A AU2003258832A1 (en) 2002-06-28 2003-06-27 Discharge radiation source, in particular uv radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0208149A FR2841684B1 (fr) 2002-06-28 2002-06-28 Source de rayonnement, notamment ultraviolet a decharges

Publications (2)

Publication Number Publication Date
FR2841684A1 FR2841684A1 (fr) 2004-01-02
FR2841684B1 true FR2841684B1 (fr) 2004-09-24

Family

ID=29725009

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0208149A Expired - Lifetime FR2841684B1 (fr) 2002-06-28 2002-06-28 Source de rayonnement, notamment ultraviolet a decharges

Country Status (6)

Country Link
US (1) US7420191B2 (fr)
EP (1) EP1535307B1 (fr)
JP (1) JP4485943B2 (fr)
AU (1) AU2003258832A1 (fr)
FR (1) FR2841684B1 (fr)
WO (1) WO2004003964A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080239262A1 (en) * 2007-03-29 2008-10-02 Asml Netherlands B.V. Radiation source for generating electromagnetic radiation and method for generating electromagnetic radiation

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6566668B2 (en) * 1997-05-12 2003-05-20 Cymer, Inc. Plasma focus light source with tandem ellipsoidal mirror units
JP3396399B2 (ja) * 1997-06-26 2003-04-14 シャープ株式会社 電子デバイス製造装置
US6621199B1 (en) * 2000-01-21 2003-09-16 Vortek Industries Ltd. High intensity electromagnetic radiation apparatus and method
US6972421B2 (en) * 2000-06-09 2005-12-06 Cymer, Inc. Extreme ultraviolet light source
TW518913B (en) * 2000-07-03 2003-01-21 Asml Netherlands Bv Radiation source, lithographic apparatus, and semiconductor device manufacturing method
WO2002007484A2 (fr) * 2000-07-04 2002-01-24 Lambda Physik Ag Procede de production de rayonnement a ondes courtes a partir d'un plasma a decharge de gaz et son dispositif de mise en oeuvre
JP4724930B2 (ja) * 2001-03-01 2011-07-13 ソニー株式会社 炭素質材料の製造方法及び製造装置
DE10151080C1 (de) * 2001-10-10 2002-12-05 Xtreme Tech Gmbh Einrichtung und Verfahren zum Erzeugen von extrem ultravioletter (EUV-)Strahlung auf Basis einer Gasentladung

Also Published As

Publication number Publication date
US20050285048A1 (en) 2005-12-29
WO2004003964A3 (fr) 2005-03-10
JP2005531923A (ja) 2005-10-20
AU2003258832A1 (en) 2004-01-19
EP1535307B1 (fr) 2013-06-19
US7420191B2 (en) 2008-09-02
JP4485943B2 (ja) 2010-06-23
AU2003258832A8 (en) 2004-01-19
WO2004003964A2 (fr) 2004-01-08
FR2841684A1 (fr) 2004-01-02
EP1535307A2 (fr) 2005-06-01

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