JP2004530288A5 - - Google Patents
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- Publication number
- JP2004530288A5 JP2004530288A5 JP2002566524A JP2002566524A JP2004530288A5 JP 2004530288 A5 JP2004530288 A5 JP 2004530288A5 JP 2002566524 A JP2002566524 A JP 2002566524A JP 2002566524 A JP2002566524 A JP 2002566524A JP 2004530288 A5 JP2004530288 A5 JP 2004530288A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- sio
- component
- complex
- platinum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/789,083 US6617674B2 (en) | 2001-02-20 | 2001-02-20 | Semiconductor package and method of preparing same |
| PCT/US2002/001263 WO2002067292A2 (en) | 2001-02-20 | 2002-01-17 | Semiconductor package and method of preparing same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004530288A JP2004530288A (ja) | 2004-09-30 |
| JP2004530288A5 true JP2004530288A5 (enExample) | 2008-06-05 |
| JP4226905B2 JP4226905B2 (ja) | 2009-02-18 |
Family
ID=25146536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002566524A Expired - Lifetime JP4226905B2 (ja) | 2001-02-20 | 2002-01-17 | 半導体パッケージおよびその調製方法 |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US6617674B2 (enExample) |
| EP (1) | EP1362364B1 (enExample) |
| JP (1) | JP4226905B2 (enExample) |
| KR (1) | KR100813821B1 (enExample) |
| CN (3) | CN1514954A (enExample) |
| AT (1) | ATE494629T1 (enExample) |
| AU (1) | AU2002248357A1 (enExample) |
| CA (1) | CA2438126A1 (enExample) |
| DE (1) | DE60238823D1 (enExample) |
| TW (1) | TW563210B (enExample) |
| WO (2) | WO2002067292A2 (enExample) |
Families Citing this family (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6617674B2 (en) * | 2001-02-20 | 2003-09-09 | Dow Corning Corporation | Semiconductor package and method of preparing same |
| DE10144467B4 (de) * | 2001-09-10 | 2006-07-27 | Infineon Technologies Ag | Elektronisches Sensorbauteil und Verfahren zu seiner Herstellung |
| US6836023B2 (en) * | 2002-04-17 | 2004-12-28 | Fairchild Semiconductor Corporation | Structure of integrated trace of chip package |
| US6905904B2 (en) * | 2002-06-24 | 2005-06-14 | Dow Corning Corporation | Planar optical waveguide assembly and method of preparing same |
| US6907176B2 (en) | 2002-06-24 | 2005-06-14 | Dow Corning Corporation | Planar optical waveguide assembly and method of preparing same |
| JP3910908B2 (ja) * | 2002-10-29 | 2007-04-25 | 新光電気工業株式会社 | 半導体装置用基板及びこの製造方法、並びに半導体装置 |
| JP3910907B2 (ja) * | 2002-10-29 | 2007-04-25 | 新光電気工業株式会社 | キャパシタ素子及びこの製造方法、半導体装置用基板、並びに半導体装置 |
| US7145229B2 (en) * | 2002-11-14 | 2006-12-05 | The Regents Of The University Of California | Silicone metalization |
| US20040102022A1 (en) * | 2002-11-22 | 2004-05-27 | Tongbi Jiang | Methods of fabricating integrated circuitry |
| WO2005001573A2 (en) * | 2003-06-23 | 2005-01-06 | Dow Corning Corporation | Adhesion method using gray-scale photolithography |
| JP4308821B2 (ja) * | 2003-07-28 | 2009-08-05 | ダウ・コーニング・コーポレイション | パターン形成されたシリコーン層をエッチングする方法 |
| KR101154209B1 (ko) * | 2003-11-17 | 2012-06-18 | 다우 코닝 코포레이션 | 경화된 실리콘 수지 기판의 엠보싱방법 |
| DE102004005562A1 (de) * | 2004-02-03 | 2005-08-25 | Kettenbach Gmbh & Co. Kg | Über Hydrosilylierungs-Reaktion additionsvernetzende Zweikomponenten-Dentalmaterial mit starren und/oder voluminösen Gruppen sowie mit hoher Biegefestigkeit und E-Modul |
| US7208344B2 (en) * | 2004-03-31 | 2007-04-24 | Aptos Corporation | Wafer level mounting frame for ball grid array packaging, and method of making and using the same |
| DE102004036573A1 (de) * | 2004-07-28 | 2006-03-23 | Ge Bayer Silicones Gmbh & Co. Kg | Verwendung lichtaktivierbarer, härtbarer Silikonzusammensetzungen zur Herstellung von dickwandigen Formartikeln oder dickwandigen Beschichtungen |
| WO2006023037A2 (en) | 2004-08-11 | 2006-03-02 | Dow Corning Corporation | Photopolymerizable silicone materials forming semipermeable membranes for sensor applications |
| DE602005009971D1 (de) * | 2004-11-19 | 2008-11-06 | Dow Corning | Zusammensetzung aus organohydrogenpolysiloxanharz und silizium |
| US8092910B2 (en) * | 2005-02-16 | 2012-01-10 | Dow Corning Toray Co., Ltd. | Reinforced silicone resin film and method of preparing same |
| ATE551398T1 (de) * | 2005-02-16 | 2012-04-15 | Dow Corning | Verstärkte silikonharzfolie und herstellungsverfahren dafür |
| KR101278460B1 (ko) | 2005-03-01 | 2013-07-02 | 다우 코닝 코포레이션 | 반도체 가공을 위한 임시 웨이퍼 접착방법 |
| JP2006303452A (ja) * | 2005-03-25 | 2006-11-02 | Sanyo Electric Co Ltd | 半導体装置及びその製造方法 |
| JP4055015B2 (ja) * | 2005-04-04 | 2008-03-05 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
| US8691389B2 (en) * | 2005-06-02 | 2014-04-08 | Dow Corning Corporation | Method of nanopatterning, a cured resist film use therein, and an article including the resist film |
| JP5542331B2 (ja) * | 2005-06-14 | 2014-07-09 | ダウ・コーニング・コーポレイション | 強化シリコーン樹脂フィルム及びそれらを調製する方法 |
| WO2007018756A1 (en) | 2005-08-04 | 2007-02-15 | Dow Corning Corporation | Reinforced silicone resin film and method of preparing same |
| KR100647483B1 (ko) * | 2005-08-19 | 2006-11-23 | 삼성전자주식회사 | 반도체 패키지의 배선 구조물 및 이의 제조 방법, 이를이용한 웨이퍼 레벨 패키지 및 이의 제조 방법 |
| ATE517947T1 (de) | 2005-12-21 | 2011-08-15 | Dow Corning | Silikonharzfilm, herstellungsverfahren dafür und nanomaterialgefüllte silikonzusammensetzung |
| KR101426316B1 (ko) | 2006-01-19 | 2014-08-06 | 다우 코닝 코포레이션 | 실리콘 수지 필름, 이의 제조방법, 및 나노물질로 충전된실리콘 조성물 |
| CN101379153B (zh) * | 2006-02-02 | 2011-12-28 | 陶氏康宁公司 | 有机硅树脂膜,其制备方法和纳米材料填充的有机硅组合物 |
| US7449785B2 (en) * | 2006-02-06 | 2008-11-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Solder bump on a semiconductor substrate |
| US8084097B2 (en) * | 2006-02-20 | 2011-12-27 | Dow Corning Corporation | Silicone resin film, method of preparing same, and nanomaterial-filled silicone composition |
| JP2007258317A (ja) * | 2006-03-22 | 2007-10-04 | Shin Etsu Chem Co Ltd | 半導体装置の製造方法 |
| JP2007266191A (ja) * | 2006-03-28 | 2007-10-11 | Nec Electronics Corp | ウェハ処理方法 |
| JP5520044B2 (ja) * | 2006-04-11 | 2014-06-11 | ダウ コーニング コーポレーション | 低熱変形シリコーン複合体モールド |
| KR20090018199A (ko) * | 2006-06-05 | 2009-02-19 | 다우 코닝 코포레이션 | 전자 패키지 및 이의 제조방법 |
| WO2008021125A2 (en) * | 2006-08-14 | 2008-02-21 | Dow Corning Corporation | Method of preparing a patterned film with a developing solvent |
| US7538021B2 (en) * | 2006-09-20 | 2009-05-26 | Intel Corporation | Removing dry film resist residues using hydrolyzable membranes |
| US20100056410A1 (en) * | 2006-09-25 | 2010-03-04 | Advanced Technology Materials, Inc. | Compositions and methods for the removal of photoresist for a wafer rework application |
| CN101636270B (zh) | 2007-02-22 | 2012-07-04 | 道康宁公司 | 增强硅树脂膜 |
| WO2008103228A1 (en) | 2007-02-22 | 2008-08-28 | Dow Corning Corporation | Reinforced silicone resin films |
| US7834449B2 (en) * | 2007-04-30 | 2010-11-16 | Broadcom Corporation | Highly reliable low cost structure for wafer-level ball grid array packaging |
| US20100143686A1 (en) * | 2007-05-01 | 2010-06-10 | Bizhong Zhu | Nanomaterial-Filled Silicone Composition and Reinforced Silicone Resin Film |
| US7872347B2 (en) * | 2007-08-09 | 2011-01-18 | Broadcom Corporation | Larger than die size wafer-level redistribution packaging process |
| US8017246B2 (en) * | 2007-11-08 | 2011-09-13 | Philips Lumileds Lighting Company, Llc | Silicone resin for protecting a light transmitting surface of an optoelectronic device |
| US20100264522A1 (en) * | 2009-04-20 | 2010-10-21 | Chien-Pin Chen | Semiconductor device having at least one bump without overlapping specific pad or directly contacting specific pad |
| US8643164B2 (en) * | 2009-06-11 | 2014-02-04 | Broadcom Corporation | Package-on-package technology for fan-out wafer-level packaging |
| CN102753636B (zh) | 2010-02-12 | 2014-02-12 | 道康宁公司 | 用于半导体加工的暂时晶片粘结方法 |
| DE102010043149A1 (de) * | 2010-10-29 | 2012-05-03 | Wacker Chemie Ag | Hochtransparente durch Licht vernetzbare Siliconmischungen |
| PL2695745T3 (pl) | 2012-08-06 | 2016-03-31 | Unilin Bvba | Sposób wytwarzania paneli o powierzchni dekoracyjnej |
| ES2762235T3 (es) | 2014-02-06 | 2020-05-22 | Unilin Bvba | Procedimiento de fabricación de paneles de piso que tienen una superficie decorativa |
| TW201601358A (zh) * | 2014-06-19 | 2016-01-01 | 道康寧公司 | 用於晶圓級z軸熱中介層的可光圖案化聚矽氧 |
| JP2018507290A (ja) * | 2015-02-03 | 2018-03-15 | ダウ コーニング コーポレーションDow Corning Corporation | 硬化性シリコーン配合物及び関連する硬化生成物、方法、物品、並びにデバイス |
| TWI678551B (zh) | 2015-07-28 | 2019-12-01 | 美商道康寧公司 | 智慧型光學材料、配方、方法、用途、物品、及裝置 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1369989A (en) | 1970-11-27 | 1974-10-09 | Dow Corning Ltd | Organopolysiloxane elastomers |
| US3723497A (en) | 1971-11-19 | 1973-03-27 | Dow Corning | Silicone compositions catalyzed with platinum ii diacetylacetonate |
| US4064027A (en) | 1973-09-28 | 1977-12-20 | Dow Corning Corporation | UV curable composition |
| DE2736499C2 (de) | 1977-08-12 | 1990-03-29 | Wacker-Chemie GmbH, 8000 München | Verfahren zum Herstellen von klebrige Stoffe abweisenden Überzügen |
| JPS5987840A (ja) | 1982-11-10 | 1984-05-21 | Toray Silicone Co Ltd | 半導体装置 |
| FR2597110A1 (fr) * | 1986-04-14 | 1987-10-16 | Rhone Poulenc Multi Tech | Composition organopolysiloxane, potentiellement reticulable et utilisable notamment en microlithographie, et son procede d'application |
| US5171716A (en) | 1986-12-19 | 1992-12-15 | North American Philips Corp. | Method of manufacturing semiconductor device with reduced packaging stress |
| US5045918A (en) | 1986-12-19 | 1991-09-03 | North American Philips Corp. | Semiconductor device with reduced packaging stress |
| US5145886A (en) | 1988-05-19 | 1992-09-08 | Minnesota Mining And Manufacturing Company | Radiation activated hydrosilation reaction |
| US5091103A (en) * | 1990-05-01 | 1992-02-25 | Alicia Dean | Photoresist stripper |
| EP0464614B1 (en) | 1990-06-25 | 1999-09-29 | Matsushita Electronics Corporation | A composition having sensitivity to light or radiation |
| US5679977A (en) * | 1990-09-24 | 1997-10-21 | Tessera, Inc. | Semiconductor chip assemblies, methods of making same and components for same |
| US5678301A (en) * | 1991-06-04 | 1997-10-21 | Micron Technology, Inc. | Method for forming an interconnect for testing unpackaged semiconductor dice |
| US5290397A (en) * | 1992-08-21 | 1994-03-01 | Cornell Research Foundation, Inc. | Bilayer resist and process for preparing same |
| US5854302A (en) * | 1993-04-29 | 1998-12-29 | The Dow Chemical Company | Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins and methods for making said resins |
| US5834339A (en) * | 1996-03-07 | 1998-11-10 | Tessera, Inc. | Methods for providing void-free layers for semiconductor assemblies |
| US6211572B1 (en) * | 1995-10-31 | 2001-04-03 | Tessera, Inc. | Semiconductor chip package with fan-in leads |
| US6284563B1 (en) | 1995-10-31 | 2001-09-04 | Tessera, Inc. | Method of making compliant microelectronic assemblies |
| CN1178230A (zh) * | 1996-07-30 | 1998-04-08 | 日本化药株式会社 | 半导体封装用环氧树脂液体组合物 |
| JP3639088B2 (ja) * | 1997-06-06 | 2005-04-13 | 株式会社ルネサステクノロジ | 半導体装置及び配線テープ |
| CN1244038A (zh) * | 1998-08-04 | 2000-02-09 | 长兴化学工业股份有限公司 | 半导体封装用树脂组合物 |
| US6103552A (en) | 1998-08-10 | 2000-08-15 | Lin; Mou-Shiung | Wafer scale packaging scheme |
| JP4174174B2 (ja) * | 2000-09-19 | 2008-10-29 | 株式会社ルネサステクノロジ | 半導体装置およびその製造方法並びに半導体装置実装構造体 |
| US6617674B2 (en) * | 2001-02-20 | 2003-09-09 | Dow Corning Corporation | Semiconductor package and method of preparing same |
-
2001
- 2001-02-20 US US09/789,083 patent/US6617674B2/en not_active Expired - Lifetime
-
2002
- 2002-01-17 WO PCT/US2002/001263 patent/WO2002067292A2/en not_active Ceased
- 2002-01-17 KR KR1020037010941A patent/KR100813821B1/ko not_active Expired - Lifetime
- 2002-01-17 AU AU2002248357A patent/AU2002248357A1/en not_active Abandoned
- 2002-01-17 DE DE60238823T patent/DE60238823D1/de not_active Expired - Lifetime
- 2002-01-17 JP JP2002566524A patent/JP4226905B2/ja not_active Expired - Lifetime
- 2002-01-17 CN CNA028052404A patent/CN1514954A/zh active Pending
- 2002-01-17 CA CA002438126A patent/CA2438126A1/en not_active Abandoned
- 2002-01-17 CN CN2009101456222A patent/CN101581880B/zh not_active Expired - Lifetime
- 2002-01-17 AT AT02717346T patent/ATE494629T1/de not_active IP Right Cessation
- 2002-01-17 EP EP02717346A patent/EP1362364B1/en not_active Expired - Lifetime
- 2002-01-25 TW TW091101261A patent/TW563210B/zh not_active IP Right Cessation
-
2003
- 2003-07-28 WO PCT/US2003/023601 patent/WO2005017627A1/en not_active Ceased
- 2003-07-28 CN CNA038269651A patent/CN1820230A/zh active Pending
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