JP2003197521A5 - - Google Patents

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Publication number
JP2003197521A5
JP2003197521A5 JP2001390714A JP2001390714A JP2003197521A5 JP 2003197521 A5 JP2003197521 A5 JP 2003197521A5 JP 2001390714 A JP2001390714 A JP 2001390714A JP 2001390714 A JP2001390714 A JP 2001390714A JP 2003197521 A5 JP2003197521 A5 JP 2003197521A5
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JP
Japan
Prior art keywords
semiconductor layer
island
shaped semiconductor
shaped
patterning
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JP2001390714A
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English (en)
Japanese (ja)
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JP3992976B2 (ja
JP2003197521A (ja
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Priority claimed from JP2001390714A external-priority patent/JP3992976B2/ja
Priority to JP2001390714A priority Critical patent/JP3992976B2/ja
Priority to TW091136549A priority patent/TWI272722B/zh
Priority to US10/321,839 priority patent/US6797550B2/en
Priority to KR1020020081621A priority patent/KR100963811B1/ko
Priority to CNB021569533A priority patent/CN1331189C/zh
Publication of JP2003197521A publication Critical patent/JP2003197521A/ja
Priority to US10/941,848 priority patent/US7319055B2/en
Publication of JP2003197521A5 publication Critical patent/JP2003197521A5/ja
Publication of JP3992976B2 publication Critical patent/JP3992976B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001390714A 2001-12-21 2001-12-21 半導体装置の作製方法 Expired - Fee Related JP3992976B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2001390714A JP3992976B2 (ja) 2001-12-21 2001-12-21 半導体装置の作製方法
TW091136549A TWI272722B (en) 2001-12-21 2002-12-18 Semiconductor device and manufacturing method therefor
US10/321,839 US6797550B2 (en) 2001-12-21 2002-12-18 Semiconductor device and manufacturing method therefor
CNB021569533A CN1331189C (zh) 2001-12-21 2002-12-20 半导体器件及其制造方法
KR1020020081621A KR100963811B1 (ko) 2001-12-21 2002-12-20 반도체 디바이스 제조 방법
US10/941,848 US7319055B2 (en) 2001-12-21 2004-09-16 Method of fabricating a semiconductor device utilizing crystallization of semiconductor region with laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001390714A JP3992976B2 (ja) 2001-12-21 2001-12-21 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2003197521A JP2003197521A (ja) 2003-07-11
JP2003197521A5 true JP2003197521A5 (enExample) 2005-08-04
JP3992976B2 JP3992976B2 (ja) 2007-10-17

Family

ID=19188439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001390714A Expired - Fee Related JP3992976B2 (ja) 2001-12-21 2001-12-21 半導体装置の作製方法

Country Status (5)

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US (2) US6797550B2 (enExample)
JP (1) JP3992976B2 (enExample)
KR (1) KR100963811B1 (enExample)
CN (1) CN1331189C (enExample)
TW (1) TWI272722B (enExample)

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