ES2511765T3 - Estructura de bus conductor para matriz de moduladores interferométricos - Google Patents

Estructura de bus conductor para matriz de moduladores interferométricos Download PDF

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Publication number
ES2511765T3
ES2511765T3 ES05255648.7T ES05255648T ES2511765T3 ES 2511765 T3 ES2511765 T3 ES 2511765T3 ES 05255648 T ES05255648 T ES 05255648T ES 2511765 T3 ES2511765 T3 ES 2511765T3
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ES
Spain
Prior art keywords
electrode layer
matrix
interferometric modulators
layer
substrate
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Active
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ES05255648.7T
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English (en)
Inventor
Jeffrey B. Sampsell
Clarence Chui
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Qualcomm MEMS Technologies Inc
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Qualcomm MEMS Technologies Inc
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Micromachines (AREA)

Abstract

Un dispositivo que comprende: un sustrato (1106); una matriz de moduladores interferométricos formada sobre el sustrato (1106) y dispuestos en filas y columnas, comprendiendo cada modulador interferométrico: una primera capa de electrodo (902) sobre el sustrato (1106); una segunda capa de electrodo (1302) sobre el sustrato (1106); una superficie reflectante (901) sustancialmente paralela a la primera capa de electrodo (902) y que está acoplada a la segunda capa de electrodo (1302), siendo amovible la superficie reflectante (901) a lo largo de una dirección sustancialmente perpendicular a la superficie reflectante (901) y siendo amovible entre una primera posición y una segunda posición, estando la primera posición a una primera distancia de la primera capa de electrodo (902), estando la segunda posición a una segunda distancia de la primera capa de electrodo (902); y montantes de soporte (202) que proporcionan un soporte estructural a la capa reflectante amovible (901) y a la segunda capa de electrodo (1302); en el que la primera capa de electrodo (902) conecta eléctricamente los moduladores interferométricos de la matriz en una fila, y la segunda capa de electrodo (1302) conecta eléctricamente los moduladores interferométricos de la matriz en una columna; y una capa de bus conductor (600, 800) acoplada eléctricamente a la primera capa de electrodo (902) o a la segunda capa de electrodo (1302) por una porción conductora de uno o más de los montantes de soporte (202); en el que la combinación de la capa de bus conductor (600, 800) y la capa de electrodo a la que está acoplada proporciona una trayectoria eléctrica entre la electrónica del excitador de filas de la matriz y la primera capa de electrodo (902) o entre la electrónica del excitador de columnas de la matriz y la segunda capa de electrodo (1302), teniendo la trayectoria eléctrica una resistencia eléctrica menor que la que tendría si los moduladores interferométricos en una fila o los moduladores interferométricos en una columna estuviesen conectados solamente a través de las capas de electrodo primera o segunda, en el que la superficie reflectante (901) de cada modulador interferométrico se mueve entre la primera posición y la segunda posición en respuesta a una tensión aplicada a través de la primera capa de electrodo correspondiente (902) y de la segunda capa de electrodo correspondiente (1302).

Description

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Claims (1)

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ES05255648.7T 2004-09-27 2005-09-14 Estructura de bus conductor para matriz de moduladores interferométricos Active ES2511765T3 (es)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US57045 1979-07-12
US61337204P 2004-09-27 2004-09-27
US613372P 2004-09-27
US11/057,045 US7289259B2 (en) 2004-09-27 2005-02-11 Conductive bus structure for interferometric modulator array

Publications (1)

Publication Number Publication Date
ES2511765T3 true ES2511765T3 (es) 2014-10-23

Family

ID=35478369

Family Applications (1)

Application Number Title Priority Date Filing Date
ES05255648.7T Active ES2511765T3 (es) 2004-09-27 2005-09-14 Estructura de bus conductor para matriz de moduladores interferométricos

Country Status (14)

Country Link
US (4) US7289259B2 (es)
EP (2) EP1640765B1 (es)
JP (1) JP4501004B2 (es)
KR (3) KR101170706B1 (es)
CN (2) CN102426405B (es)
AU (1) AU2005203376A1 (es)
BR (1) BRPI0503899A (es)
CA (1) CA2517048A1 (es)
ES (1) ES2511765T3 (es)
HK (1) HK1087192A1 (es)
MX (1) MXPA05009546A (es)
RU (1) RU2005129915A (es)
SG (1) SG121058A1 (es)
TW (1) TWI440889B (es)

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US20060077507A1 (en) 2006-04-13
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US8390547B2 (en) 2013-03-05
KR20060091042A (ko) 2006-08-17
US9086564B2 (en) 2015-07-21
KR101236288B1 (ko) 2013-03-04
EP2642329A2 (en) 2013-09-25
US7289259B2 (en) 2007-10-30
EP1640765B1 (en) 2014-08-06
CA2517048A1 (en) 2006-03-27
TWI440889B (zh) 2014-06-11
US20080080043A1 (en) 2008-04-03
SG121058A1 (en) 2006-04-26
CN1755478B (zh) 2011-12-14
HK1087192A1 (en) 2006-10-06
CN1755478A (zh) 2006-04-05
EP2642329A3 (en) 2013-11-13
JP2006099067A (ja) 2006-04-13

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