CN1755478A - 用于干涉式调制器阵列的导电总线结构 - Google Patents
用于干涉式调制器阵列的导电总线结构 Download PDFInfo
- Publication number
- CN1755478A CN1755478A CNA2005101034453A CN200510103445A CN1755478A CN 1755478 A CN1755478 A CN 1755478A CN A2005101034453 A CNA2005101034453 A CN A2005101034453A CN 200510103445 A CN200510103445 A CN 200510103445A CN 1755478 A CN1755478 A CN 1755478A
- Authority
- CN
- China
- Prior art keywords
- layer
- conductive bus
- electrode
- reflective surface
- electrode layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
- G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (37)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61337204P | 2004-09-27 | 2004-09-27 | |
US60/613,372 | 2004-09-27 | ||
US11/057,045 US7289259B2 (en) | 2004-09-27 | 2005-02-11 | Conductive bus structure for interferometric modulator array |
US11/057,045 | 2005-02-11 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110316908.XA Division CN102426405B (zh) | 2004-09-27 | 2005-09-15 | 用于干涉式调制器阵列的导电总线结构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1755478A true CN1755478A (zh) | 2006-04-05 |
CN1755478B CN1755478B (zh) | 2011-12-14 |
Family
ID=35478369
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005101034453A Expired - Fee Related CN1755478B (zh) | 2004-09-27 | 2005-09-15 | 用于干涉式调制器阵列的导电总线结构 |
CN201110316908.XA Expired - Fee Related CN102426405B (zh) | 2004-09-27 | 2005-09-15 | 用于干涉式调制器阵列的导电总线结构 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110316908.XA Expired - Fee Related CN102426405B (zh) | 2004-09-27 | 2005-09-15 | 用于干涉式调制器阵列的导电总线结构 |
Country Status (14)
Country | Link |
---|---|
US (4) | US7289259B2 (zh) |
EP (2) | EP1640765B1 (zh) |
JP (1) | JP4501004B2 (zh) |
KR (3) | KR101170706B1 (zh) |
CN (2) | CN1755478B (zh) |
AU (1) | AU2005203376A1 (zh) |
BR (1) | BRPI0503899A (zh) |
CA (1) | CA2517048A1 (zh) |
ES (1) | ES2511765T3 (zh) |
HK (1) | HK1087192A1 (zh) |
MX (1) | MXPA05009546A (zh) |
RU (1) | RU2005129915A (zh) |
SG (1) | SG121058A1 (zh) |
TW (1) | TWI440889B (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101688974B (zh) * | 2007-07-05 | 2011-10-19 | 高通Mems科技公司 | 衬底上的集成干涉式调制器与太阳能电池 |
CN102809813A (zh) * | 2011-06-03 | 2012-12-05 | 株式会社日立显示器 | 显示装置 |
CN102859574A (zh) * | 2010-04-22 | 2013-01-02 | 高通Mems科技公司 | 具有集成式处理器及存储器单元的有源矩阵像素 |
CN104718152A (zh) * | 2012-10-11 | 2015-06-17 | 高通Mems科技公司 | 背板电极传感器 |
CN110521143A (zh) * | 2017-05-23 | 2019-11-29 | 洛克利光子有限公司 | 用于光调制器的驱动器 |
CN112470271A (zh) * | 2018-07-23 | 2021-03-09 | 高通股份有限公司 | 沿第一方向延伸的第一功率总线和第二功率总线 |
Families Citing this family (99)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US7532377B2 (en) * | 1998-04-08 | 2009-05-12 | Idc, Llc | Movable micro-electromechanical device |
WO1999052006A2 (en) | 1998-04-08 | 1999-10-14 | Etalon, Inc. | Interferometric modulation of radiation |
WO2003007049A1 (en) | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
US6574033B1 (en) | 2002-02-27 | 2003-06-03 | Iridigm Display Corporation | Microelectromechanical systems device and method for fabricating same |
US7719500B2 (en) | 2004-09-27 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | Reflective display pixels arranged in non-rectangular arrays |
US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
US7327510B2 (en) * | 2004-09-27 | 2008-02-05 | Idc, Llc | Process for modifying offset voltage characteristics of an interferometric modulator |
US8310441B2 (en) | 2004-09-27 | 2012-11-13 | Qualcomm Mems Technologies, Inc. | Method and system for writing data to MEMS display elements |
US8008736B2 (en) | 2004-09-27 | 2011-08-30 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device |
US7583429B2 (en) | 2004-09-27 | 2009-09-01 | Idc, Llc | Ornamental display device |
US7612932B2 (en) * | 2004-09-27 | 2009-11-03 | Idc, Llc | Microelectromechanical device with optical function separated from mechanical and electrical function |
US7936497B2 (en) | 2004-09-27 | 2011-05-03 | Qualcomm Mems Technologies, Inc. | MEMS device having deformable membrane characterized by mechanical persistence |
US7944599B2 (en) | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US7289259B2 (en) * | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
TW200628877A (en) * | 2005-02-04 | 2006-08-16 | Prime View Int Co Ltd | Method of manufacturing optical interference type color display |
US7884989B2 (en) | 2005-05-27 | 2011-02-08 | Qualcomm Mems Technologies, Inc. | White interferometric modulators and methods for forming the same |
US7460292B2 (en) * | 2005-06-03 | 2008-12-02 | Qualcomm Mems Technologies, Inc. | Interferometric modulator with internal polarization and drive method |
EP2495212A3 (en) * | 2005-07-22 | 2012-10-31 | QUALCOMM MEMS Technologies, Inc. | Mems devices having support structures and methods of fabricating the same |
KR100827317B1 (ko) * | 2005-09-07 | 2008-05-06 | 삼성전기주식회사 | 연성 기판을 이용한 초소형 광 변조기 모듈 |
US7630114B2 (en) | 2005-10-28 | 2009-12-08 | Idc, Llc | Diffusion barrier layer for MEMS devices |
US7916980B2 (en) | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US7382515B2 (en) | 2006-01-18 | 2008-06-03 | Qualcomm Mems Technologies, Inc. | Silicon-rich silicon nitrides as etch stops in MEMS manufacture |
US7711239B2 (en) * | 2006-04-19 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing nanoparticles |
US20070268201A1 (en) * | 2006-05-22 | 2007-11-22 | Sampsell Jeffrey B | Back-to-back displays |
US7649671B2 (en) | 2006-06-01 | 2010-01-19 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device with electrostatic actuation and release |
US7471442B2 (en) | 2006-06-15 | 2008-12-30 | Qualcomm Mems Technologies, Inc. | Method and apparatus for low range bit depth enhancements for MEMS display architectures |
US7835061B2 (en) | 2006-06-28 | 2010-11-16 | Qualcomm Mems Technologies, Inc. | Support structures for free-standing electromechanical devices |
US7527998B2 (en) | 2006-06-30 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
US7629197B2 (en) | 2006-10-18 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Spatial light modulator |
US20080111834A1 (en) * | 2006-11-09 | 2008-05-15 | Mignard Marc M | Two primary color display |
US7706042B2 (en) | 2006-12-20 | 2010-04-27 | Qualcomm Mems Technologies, Inc. | MEMS device and interconnects for same |
US8115987B2 (en) | 2007-02-01 | 2012-02-14 | Qualcomm Mems Technologies, Inc. | Modulating the intensity of light from an interferometric reflector |
US7742220B2 (en) | 2007-03-28 | 2010-06-22 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing conducting layers separated by stops |
US7643202B2 (en) | 2007-05-09 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | Microelectromechanical system having a dielectric movable membrane and a mirror |
US7715085B2 (en) * | 2007-05-09 | 2010-05-11 | Qualcomm Mems Technologies, Inc. | Electromechanical system having a dielectric movable membrane and a mirror |
US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
US8111262B2 (en) * | 2007-05-18 | 2012-02-07 | Qualcomm Mems Technologies, Inc. | Interferometric modulator displays with reduced color sensitivity |
US7643199B2 (en) * | 2007-06-19 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | High aperture-ratio top-reflective AM-iMod displays |
US7782517B2 (en) | 2007-06-21 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Infrared and dual mode displays |
US7630121B2 (en) | 2007-07-02 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US8068268B2 (en) | 2007-07-03 | 2011-11-29 | Qualcomm Mems Technologies, Inc. | MEMS devices having improved uniformity and methods for making them |
EP2183623A1 (en) | 2007-07-31 | 2010-05-12 | Qualcomm Mems Technologies, Inc. | Devices for enhancing colour shift of interferometric modulators |
US8072402B2 (en) | 2007-08-29 | 2011-12-06 | Qualcomm Mems Technologies, Inc. | Interferometric optical modulator with broadband reflection characteristics |
US7847999B2 (en) | 2007-09-14 | 2010-12-07 | Qualcomm Mems Technologies, Inc. | Interferometric modulator display devices |
US7773286B2 (en) * | 2007-09-14 | 2010-08-10 | Qualcomm Mems Technologies, Inc. | Periodic dimple array |
US8058549B2 (en) * | 2007-10-19 | 2011-11-15 | Qualcomm Mems Technologies, Inc. | Photovoltaic devices with integrated color interferometric film stacks |
JP5302322B2 (ja) | 2007-10-19 | 2013-10-02 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | 一体型光起電力を有するディスプレイ |
WO2009055393A1 (en) | 2007-10-23 | 2009-04-30 | Qualcomm Mems Technologies, Inc. | Adjustably transmissive mems-based devices |
US20090293955A1 (en) * | 2007-11-07 | 2009-12-03 | Qualcomm Incorporated | Photovoltaics with interferometric masks |
US8941631B2 (en) | 2007-11-16 | 2015-01-27 | Qualcomm Mems Technologies, Inc. | Simultaneous light collection and illumination on an active display |
US7715079B2 (en) | 2007-12-07 | 2010-05-11 | Qualcomm Mems Technologies, Inc. | MEMS devices requiring no mechanical support |
US7863079B2 (en) | 2008-02-05 | 2011-01-04 | Qualcomm Mems Technologies, Inc. | Methods of reducing CD loss in a microelectromechanical device |
US8164821B2 (en) | 2008-02-22 | 2012-04-24 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with thermal expansion balancing layer or stiffening layer |
US7944604B2 (en) | 2008-03-07 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
US7612933B2 (en) | 2008-03-27 | 2009-11-03 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with spacing layer |
US7898723B2 (en) | 2008-04-02 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical systems display element with photovoltaic structure |
US7969638B2 (en) | 2008-04-10 | 2011-06-28 | Qualcomm Mems Technologies, Inc. | Device having thin black mask and method of fabricating the same |
US7746539B2 (en) | 2008-06-25 | 2010-06-29 | Qualcomm Mems Technologies, Inc. | Method for packing a display device and the device obtained thereof |
US7768690B2 (en) | 2008-06-25 | 2010-08-03 | Qualcomm Mems Technologies, Inc. | Backlight displays |
US8023167B2 (en) | 2008-06-25 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | Backlight displays |
US7859740B2 (en) | 2008-07-11 | 2010-12-28 | Qualcomm Mems Technologies, Inc. | Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control |
US7855826B2 (en) | 2008-08-12 | 2010-12-21 | Qualcomm Mems Technologies, Inc. | Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices |
US8358266B2 (en) | 2008-09-02 | 2013-01-22 | Qualcomm Mems Technologies, Inc. | Light turning device with prismatic light turning features |
US8270056B2 (en) * | 2009-03-23 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with openings between sub-pixels and method of making same |
US8405649B2 (en) | 2009-03-27 | 2013-03-26 | Qualcomm Mems Technologies, Inc. | Low voltage driver scheme for interferometric modulators |
US8736590B2 (en) | 2009-03-27 | 2014-05-27 | Qualcomm Mems Technologies, Inc. | Low voltage driver scheme for interferometric modulators |
US9121979B2 (en) | 2009-05-29 | 2015-09-01 | Qualcomm Mems Technologies, Inc. | Illumination devices and methods of fabrication thereof |
TWI400510B (zh) * | 2009-07-08 | 2013-07-01 | Prime View Int Co Ltd | 顯示裝置及其微機電陣列基板 |
US8270062B2 (en) | 2009-09-17 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with at least one movable stop element |
US8488228B2 (en) | 2009-09-28 | 2013-07-16 | Qualcomm Mems Technologies, Inc. | Interferometric display with interferometric reflector |
US8310421B2 (en) * | 2010-01-06 | 2012-11-13 | Qualcomm Mems Technologies, Inc. | Display drive switch configuration |
WO2011126953A1 (en) | 2010-04-09 | 2011-10-13 | Qualcomm Mems Technologies, Inc. | Mechanical layer of an electromechanical device and methods of forming the same |
BR112012026325A2 (pt) | 2010-04-16 | 2019-09-24 | Flex Lighting Ii Llc | dispositivo de iluminação compreendendo um guia de luz baseado em película |
CA2796515C (en) | 2010-04-16 | 2020-05-12 | Flex Lighting Ii, Llc | Front illumination device comprising a film-based lightguide |
WO2012024238A1 (en) | 2010-08-17 | 2012-02-23 | Qualcomm Mems Technologies, Inc. | Actuation and calibration of a charge neutral electrode in an interferometric display device |
US9057872B2 (en) | 2010-08-31 | 2015-06-16 | Qualcomm Mems Technologies, Inc. | Dielectric enhanced mirror for IMOD display |
DE102011006596B4 (de) | 2011-03-31 | 2019-02-28 | Robert Bosch Gmbh | Mikromechanische Anordnung und entsprechendes Herstellungsverfahren |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US8659816B2 (en) | 2011-04-25 | 2014-02-25 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of making the same |
US9809445B2 (en) | 2011-08-26 | 2017-11-07 | Qualcomm Incorporated | Electromechanical system structures with ribs having gaps |
US8736939B2 (en) | 2011-11-04 | 2014-05-27 | Qualcomm Mems Technologies, Inc. | Matching layer thin-films for an electromechanical systems reflective display device |
JP5987573B2 (ja) * | 2012-09-12 | 2016-09-07 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び駆動方法 |
US9181086B1 (en) | 2012-10-01 | 2015-11-10 | The Research Foundation For The State University Of New York | Hinged MEMS diaphragm and method of manufacture therof |
US9190013B2 (en) * | 2013-02-05 | 2015-11-17 | Qualcomm Mems Technologies, Inc. | Image-dependent temporal slot determination for multi-state IMODs |
JP2014178456A (ja) * | 2013-03-14 | 2014-09-25 | Pixtronix Inc | 表示装置及びその製造方法 |
US9412799B2 (en) | 2013-08-26 | 2016-08-09 | Apple Inc. | Display driver circuitry for liquid crystal displays with semiconducting-oxide thin-film transistors |
US9818765B2 (en) | 2013-08-26 | 2017-11-14 | Apple Inc. | Displays with silicon and semiconducting oxide thin-film transistors |
US9543370B2 (en) | 2014-09-24 | 2017-01-10 | Apple Inc. | Silicon and semiconducting oxide thin-film transistor displays |
US9818344B2 (en) | 2015-12-04 | 2017-11-14 | Apple Inc. | Display with light-emitting diodes |
US10248251B2 (en) * | 2016-08-16 | 2019-04-02 | Guangdong Oppo Mobile Telecommunications Corp. | Method for manufacturing input assembly, input assembly and terminal |
US10051435B2 (en) | 2016-12-12 | 2018-08-14 | Denso International America, Inc. | Mobile device location system |
CN111630434B (zh) | 2018-02-01 | 2022-06-24 | 罗伯特·博世有限公司 | 微机械反射镜装置、反射镜系统和用于制造微机械反射镜装置的方法 |
DE102018201965A1 (de) * | 2018-02-08 | 2019-08-08 | Robert Bosch Gmbh | Mikromechanische Spiegelvorrichtung, Spiegelsystem und Verfahren zum Herstellen einer mikromechanischen Spiegelvorrichtung |
CN108962015B (zh) * | 2018-07-25 | 2021-04-23 | 京东方科技集团股份有限公司 | 一种器件转移装置和器件转移方法 |
US11779796B2 (en) * | 2020-05-02 | 2023-10-10 | 2-B-Fit LLC | Portable exercise device |
CN114950925B (zh) * | 2022-06-06 | 2023-05-23 | 清华大学 | 柔性可延展微机电系统超声阵列及医用超声诊断设备 |
Family Cites Families (629)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US138669A (en) * | 1873-05-06 | Improvement in safety-platforms for cars | ||
US2534846A (en) | 1946-06-20 | 1950-12-19 | Emi Ltd | Color filter |
US2590906A (en) | 1946-11-22 | 1952-04-01 | Farrand Optical Co Inc | Reflection interference filter |
US2677714A (en) * | 1951-09-21 | 1954-05-04 | Alois Vogt Dr | Optical-electrical conversion device comprising a light-permeable metal electrode |
US3037189A (en) | 1958-04-23 | 1962-05-29 | Sylvania Electric Prod | Visual display system |
US3247392A (en) * | 1961-05-17 | 1966-04-19 | Optical Coating Laboratory Inc | Optical coating and assembly used as a band pass interference filter reflecting in the ultraviolet and infrared |
US3210757A (en) | 1962-01-29 | 1965-10-05 | Carlyle W Jacob | Matrix controlled light valve display apparatus |
US3296530A (en) | 1962-09-28 | 1967-01-03 | Lockheed Aircraft Corp | Voltage controlled electroluminescent meter display |
DE1288651B (de) | 1963-06-28 | 1969-02-06 | Siemens Ag | Anordnung elektrischer Dipole fuer Wellenlaengen unterhalb 1 mm und Verfahren zur Herstellung einer derartigen Anordnung |
FR1603131A (zh) | 1968-07-05 | 1971-03-22 | ||
US3653741A (en) | 1970-02-16 | 1972-04-04 | Alvin M Marks | Electro-optical dipolar material |
US3813265A (en) | 1970-02-16 | 1974-05-28 | A Marks | Electro-optical dipolar material |
US3728030A (en) * | 1970-06-22 | 1973-04-17 | Cary Instruments | Polarization interferometer |
US3725868A (en) | 1970-10-19 | 1973-04-03 | Burroughs Corp | Small reconfigurable processor for a variety of data processing applications |
US3679313A (en) | 1970-10-23 | 1972-07-25 | Bell Telephone Labor Inc | Dispersive element for optical pulse compression |
US3701586A (en) | 1971-04-21 | 1972-10-31 | George G Goetz | Light modulating deflectable membrane |
JPS4946974A (zh) * | 1972-09-11 | 1974-05-07 | ||
DE2336930A1 (de) | 1973-07-20 | 1975-02-06 | Battelle Institut E V | Infrarot-modulator (ii.) |
US3886310A (en) * | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
US4048039A (en) | 1975-03-07 | 1977-09-13 | Balzers Patent Und Beteiligungs-Ag | Method of producing a light transmitting absorbing coating on substrates |
US4099854A (en) | 1976-10-12 | 1978-07-11 | The Unites States Of America As Represented By The Secretary Of The Navy | Optical notch filter utilizing electric dipole resonance absorption |
US4196396A (en) | 1976-10-15 | 1980-04-01 | Bell Telephone Laboratories, Incorporated | Interferometer apparatus using electro-optic material with feedback |
US4389096A (en) | 1977-12-27 | 1983-06-21 | Matsushita Electric Industrial Co., Ltd. | Image display apparatus of liquid crystal valve projection type |
US4287449A (en) | 1978-02-03 | 1981-09-01 | Sharp Kabushiki Kaisha | Light-absorption film for rear electrodes of electroluminescent display panel |
US4445050A (en) | 1981-12-15 | 1984-04-24 | Marks Alvin M | Device for conversion of light power to electric power |
US4663083A (en) | 1978-05-26 | 1987-05-05 | Marks Alvin M | Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics |
US4228437A (en) | 1979-06-26 | 1980-10-14 | The United States Of America As Represented By The Secretary Of The Navy | Wideband polarization-transforming electromagnetic mirror |
JPS5688111A (en) | 1979-12-19 | 1981-07-17 | Citizen Watch Co Ltd | Liquid crystal display device with solar battery |
NL8001281A (nl) | 1980-03-04 | 1981-10-01 | Philips Nv | Weergeefinrichting. |
DE3012253A1 (de) | 1980-03-28 | 1981-10-15 | Hoechst Ag, 6000 Frankfurt | Verfahren zum sichtbarmaschen von ladungsbildern und eine hierfuer geeignete vorichtung |
DE3109653A1 (de) * | 1980-03-31 | 1982-01-28 | Jenoptik Jena Gmbh, Ddr 6900 Jena | "resonanzabsorber" |
US4421381A (en) | 1980-04-04 | 1983-12-20 | Yokogawa Hokushin Electric Corp. | Mechanical vibrating element |
US4377324A (en) | 1980-08-04 | 1983-03-22 | Honeywell Inc. | Graded index Fabry-Perot optical filter device |
US4441791A (en) | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
FR2506026A1 (fr) | 1981-05-18 | 1982-11-19 | Radant Etudes | Procede et dispositif pour l'analyse d'un faisceau de rayonnement d'ondes electromagnetiques hyperfrequence |
NL8103377A (nl) | 1981-07-16 | 1983-02-16 | Philips Nv | Weergeefinrichting. |
US4571603A (en) | 1981-11-03 | 1986-02-18 | Texas Instruments Incorporated | Deformable mirror electrostatic printer |
NL8200354A (nl) | 1982-02-01 | 1983-09-01 | Philips Nv | Passieve weergeefinrichting. |
US4518959A (en) | 1982-05-13 | 1985-05-21 | Mitsubishi Denki Kabushiki Kaisha | Electronic analog display device |
US4500171A (en) | 1982-06-02 | 1985-02-19 | Texas Instruments Incorporated | Process for plastic LCD fill hole sealing |
EP0109160A3 (en) | 1982-10-14 | 1986-04-09 | The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and | Electronic displays |
US4497974A (en) * | 1982-11-22 | 1985-02-05 | Exxon Research & Engineering Co. | Realization of a thin film solar cell with a detached reflector |
US4482213A (en) | 1982-11-23 | 1984-11-13 | Texas Instruments Incorporated | Perimeter seal reinforcement holes for plastic LCDs |
US4506955A (en) * | 1983-05-06 | 1985-03-26 | At&T Bell Laboratories | Interconnection and addressing scheme for LCDs |
US4498953A (en) * | 1983-07-27 | 1985-02-12 | At&T Bell Laboratories | Etching techniques |
JPS60159731A (ja) | 1984-01-30 | 1985-08-21 | Sharp Corp | 液晶表示体 |
US5633652A (en) | 1984-02-17 | 1997-05-27 | Canon Kabushiki Kaisha | Method for driving optical modulation device |
US4710732A (en) | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
US4566935A (en) | 1984-07-31 | 1986-01-28 | Texas Instruments Incorporated | Spatial light modulator and method |
US5061049A (en) | 1984-08-31 | 1991-10-29 | Texas Instruments Incorporated | Spatial light modulator and method |
US5096279A (en) | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
US4596992A (en) | 1984-08-31 | 1986-06-24 | Texas Instruments Incorporated | Linear spatial light modulator and printer |
US4662746A (en) | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
US4560435A (en) | 1984-10-01 | 1985-12-24 | International Business Machines Corporation | Composite back-etch/lift-off stencil for proximity effect minimization |
US4615595A (en) | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
US4655554A (en) * | 1985-03-06 | 1987-04-07 | The United States Of America As Represented By The Secretary Of The Air Force | Spatial light modulator having a capacitively coupled photoconductor |
JPS6282454A (ja) | 1985-10-08 | 1987-04-15 | Canon Inc | 電子機器 |
US5172262A (en) | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
GB2186708B (en) | 1985-11-26 | 1990-07-11 | Sharp Kk | A variable interferometric device and a process for the production of the same |
US4705361A (en) | 1985-11-27 | 1987-11-10 | Texas Instruments Incorporated | Spatial light modulator |
US5835255A (en) * | 1986-04-23 | 1998-11-10 | Etalon, Inc. | Visible spectrum modulator arrays |
GB8610129D0 (en) | 1986-04-25 | 1986-05-29 | Secr Defence | Electro-optical device |
US4748366A (en) | 1986-09-02 | 1988-05-31 | Taylor George W | Novel uses of piezoelectric materials for creating optical effects |
GB8621438D0 (en) | 1986-09-05 | 1986-10-15 | Secr Defence | Electro-optic device |
GB8623240D0 (en) | 1986-09-26 | 1986-10-29 | Emi Plc Thorn | Display device |
US4786128A (en) | 1986-12-02 | 1988-11-22 | Quantum Diagnostics, Ltd. | Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction |
JPS63194285A (ja) | 1987-02-06 | 1988-08-11 | シャープ株式会社 | カラ−表示装置 |
US4822993A (en) | 1987-02-17 | 1989-04-18 | Optron Systems, Inc. | Low-cost, substantially cross-talk free high spatial resolution 2-D bistable light modulator |
NL8701138A (nl) | 1987-05-13 | 1988-12-01 | Philips Nv | Electroscopische beeldweergeefinrichting. |
DE3716485C1 (de) | 1987-05-16 | 1988-11-24 | Heraeus Gmbh W C | Xenon-Kurzbogen-Entladungslampe |
WO1988009917A1 (fr) * | 1987-06-04 | 1988-12-15 | Walter Lukosz | Procede de modulation optique et de mesure |
US4900136A (en) | 1987-08-11 | 1990-02-13 | North American Philips Corporation | Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel |
US4857978A (en) | 1987-08-11 | 1989-08-15 | North American Philips Corporation | Solid state light modulator incorporating metallized gel and method of metallization |
GB2210540A (en) | 1987-09-30 | 1989-06-07 | Philips Electronic Associated | Method of and arrangement for modifying stored data,and method of and arrangement for generating two-dimensional images |
US4956619A (en) | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
US4856863A (en) | 1988-06-22 | 1989-08-15 | Texas Instruments Incorporated | Optical fiber interconnection network including spatial light modulator |
US4980775A (en) | 1988-07-21 | 1990-12-25 | Magnascreen Corporation | Modular flat-screen television displays and modules and circuit drives therefor |
US5028939A (en) | 1988-08-23 | 1991-07-02 | Texas Instruments Incorporated | Spatial light modulator system |
US4925259A (en) * | 1988-10-20 | 1990-05-15 | The United States Of America As Represented By The United States Department Of Energy | Multilayer optical dielectric coating |
JP2700903B2 (ja) * | 1988-09-30 | 1998-01-21 | シャープ株式会社 | 液晶表示装置 |
US4982184A (en) | 1989-01-03 | 1991-01-01 | General Electric Company | Electrocrystallochromic display and element |
US4973131A (en) | 1989-02-03 | 1990-11-27 | Mcdonnell Douglas Corporation | Modulator mirror |
US5170156A (en) | 1989-02-27 | 1992-12-08 | Texas Instruments Incorporated | Multi-frequency two dimensional display system |
US5192946A (en) | 1989-02-27 | 1993-03-09 | Texas Instruments Incorporated | Digitized color video display system |
US5214420A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Spatial light modulator projection system with random polarity light |
US5206629A (en) | 1989-02-27 | 1993-04-27 | Texas Instruments Incorporated | Spatial light modulator and memory for digitized video display |
US5272473A (en) | 1989-02-27 | 1993-12-21 | Texas Instruments Incorporated | Reduced-speckle display system |
US5214419A (en) | 1989-02-27 | 1993-05-25 | Texas Instruments Incorporated | Planarized true three dimensional display |
US5079544A (en) | 1989-02-27 | 1992-01-07 | Texas Instruments Incorporated | Standard independent digitized video system |
US5287096A (en) | 1989-02-27 | 1994-02-15 | Texas Instruments Incorporated | Variable luminosity display system |
US5162787A (en) | 1989-02-27 | 1992-11-10 | Texas Instruments Incorporated | Apparatus and method for digitized video system utilizing a moving display surface |
US5446479A (en) | 1989-02-27 | 1995-08-29 | Texas Instruments Incorporated | Multi-dimensional array video processor system |
KR100202246B1 (ko) | 1989-02-27 | 1999-06-15 | 윌리엄 비. 켐플러 | 디지탈화 비디오 시스템을 위한 장치 및 방법 |
US4900395A (en) | 1989-04-07 | 1990-02-13 | Fsi International, Inc. | HF gas etching of wafers in an acid processor |
US5022745A (en) | 1989-09-07 | 1991-06-11 | Massachusetts Institute Of Technology | Electrostatically deformable single crystal dielectrically coated mirror |
DE3930259A1 (de) | 1989-09-11 | 1991-03-21 | Thomson Brandt Gmbh | Ansteuerschaltung fuer eine fluessigkristallanzeige |
US4954789A (en) | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
US5381253A (en) * | 1991-11-14 | 1995-01-10 | Board Of Regents Of University Of Colorado | Chiral smectic liquid crystal optical modulators having variable retardation |
US5124834A (en) | 1989-11-16 | 1992-06-23 | General Electric Company | Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same |
US5037173A (en) | 1989-11-22 | 1991-08-06 | Texas Instruments Incorporated | Optical interconnection network |
JP2923656B2 (ja) | 1989-12-11 | 1999-07-26 | 富士通株式会社 | マトリクス型表示装置のデータドライバ |
JP2910114B2 (ja) | 1990-01-20 | 1999-06-23 | ソニー株式会社 | 電子機器 |
US5500635A (en) * | 1990-02-20 | 1996-03-19 | Mott; Jonathan C. | Products incorporating piezoelectric material |
US5164858A (en) | 1990-03-07 | 1992-11-17 | Deposition Sciences, Inc. | Multi-spectral filter |
CH682523A5 (fr) | 1990-04-20 | 1993-09-30 | Suisse Electronique Microtech | Dispositif de modulation de lumière à adressage matriciel. |
GB9012099D0 (en) | 1990-05-31 | 1990-07-18 | Kodak Ltd | Optical article for multicolour imaging |
DE69113150T2 (de) | 1990-06-29 | 1996-04-04 | Texas Instruments Inc | Deformierbare Spiegelvorrichtung mit aktualisiertem Raster. |
US5099353A (en) | 1990-06-29 | 1992-03-24 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5216537A (en) | 1990-06-29 | 1993-06-01 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5083857A (en) | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
US5018256A (en) | 1990-06-29 | 1991-05-28 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
US5142405A (en) | 1990-06-29 | 1992-08-25 | Texas Instruments Incorporated | Bistable dmd addressing circuit and method |
US5153771A (en) | 1990-07-18 | 1992-10-06 | Northrop Corporation | Coherent light modulation and detector |
US5062689A (en) | 1990-08-21 | 1991-11-05 | Koehler Dale R | Electrostatically actuatable light modulating device |
US5192395A (en) | 1990-10-12 | 1993-03-09 | Texas Instruments Incorporated | Method of making a digital flexure beam accelerometer |
US5526688A (en) | 1990-10-12 | 1996-06-18 | Texas Instruments Incorporated | Digital flexure beam accelerometer and method |
US5044736A (en) | 1990-11-06 | 1991-09-03 | Motorola, Inc. | Configurable optical filter or display |
US5331454A (en) | 1990-11-13 | 1994-07-19 | Texas Instruments Incorporated | Low reset voltage process for DMD |
US5602671A (en) * | 1990-11-13 | 1997-02-11 | Texas Instruments Incorporated | Low surface energy passivation layer for micromechanical devices |
JPH04276721A (ja) | 1991-03-04 | 1992-10-01 | Fuji Photo Film Co Ltd | 液晶表示素子 |
US5233459A (en) | 1991-03-06 | 1993-08-03 | Massachusetts Institute Of Technology | Electric display device |
US5136669A (en) | 1991-03-15 | 1992-08-04 | Sperry Marine Inc. | Variable ratio fiber optic coupler optical signal processing element |
DE4108966C2 (de) | 1991-03-19 | 1994-03-10 | Iot Entwicklungsgesellschaft F | Elektro-optischer interferometrischer Lichtmodulator |
CA2063744C (en) | 1991-04-01 | 2002-10-08 | Paul M. Urbanus | Digital micromirror device architecture and timing for use in a pulse-width modulated display system |
JPH04309925A (ja) | 1991-04-08 | 1992-11-02 | Nec Corp | アクティブマトリックスカラー液晶表示素子 |
US5142414A (en) | 1991-04-22 | 1992-08-25 | Koehler Dale R | Electrically actuatable temporal tristimulus-color device |
US5226099A (en) | 1991-04-26 | 1993-07-06 | Texas Instruments Incorporated | Digital micromirror shutter device |
US5179274A (en) | 1991-07-12 | 1993-01-12 | Texas Instruments Incorporated | Method for controlling operation of optical systems and devices |
US5287215A (en) | 1991-07-17 | 1994-02-15 | Optron Systems, Inc. | Membrane light modulation systems |
US5170283A (en) | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
US5240818A (en) | 1991-07-31 | 1993-08-31 | Texas Instruments Incorporated | Method for manufacturing a color filter for deformable mirror device |
US5168406A (en) | 1991-07-31 | 1992-12-01 | Texas Instruments Incorporated | Color deformable mirror device and method for manufacture |
US5254980A (en) | 1991-09-06 | 1993-10-19 | Texas Instruments Incorporated | DMD display system controller |
US5358601A (en) | 1991-09-24 | 1994-10-25 | Micron Technology, Inc. | Process for isotropically etching semiconductor devices |
US5315370A (en) * | 1991-10-23 | 1994-05-24 | Bulow Jeffrey A | Interferometric modulator for optical signal processing |
US5563398A (en) | 1991-10-31 | 1996-10-08 | Texas Instruments Incorporated | Spatial light modulator scanning system |
US5326426A (en) | 1991-11-14 | 1994-07-05 | Tam Andrew C | Undercut membrane mask for high energy photon patterning |
CA2081753C (en) | 1991-11-22 | 2002-08-06 | Jeffrey B. Sampsell | Dmd scanner |
US5233385A (en) | 1991-12-18 | 1993-08-03 | Texas Instruments Incorporated | White light enhanced color field sequential projection |
US5233456A (en) | 1991-12-20 | 1993-08-03 | Texas Instruments Incorporated | Resonant mirror and method of manufacture |
US5228013A (en) | 1992-01-10 | 1993-07-13 | Bik Russell J | Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays |
US6381022B1 (en) | 1992-01-22 | 2002-04-30 | Northeastern University | Light modulating device |
CA2087625C (en) | 1992-01-23 | 2006-12-12 | William E. Nelson | Non-systolic time delay and integration printing |
US5296950A (en) | 1992-01-31 | 1994-03-22 | Texas Instruments Incorporated | Optical signal free-space conversion board |
US5231532A (en) | 1992-02-05 | 1993-07-27 | Texas Instruments Incorporated | Switchable resonant filter for optical radiation |
US5212582A (en) | 1992-03-04 | 1993-05-18 | Texas Instruments Incorporated | Electrostatically controlled beam steering device and method |
EP0562424B1 (en) | 1992-03-25 | 1997-05-28 | Texas Instruments Incorporated | Embedded optical calibration system |
JPH05281479A (ja) | 1992-03-31 | 1993-10-29 | Nippon Steel Corp | 表示装置 |
US5312513A (en) * | 1992-04-03 | 1994-05-17 | Texas Instruments Incorporated | Methods of forming multiple phase light modulators |
WO1993021663A1 (en) * | 1992-04-08 | 1993-10-28 | Georgia Tech Research Corporation | Process for lift-off of thin film materials from a growth substrate |
US5311360A (en) | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
TW245772B (zh) * | 1992-05-19 | 1995-04-21 | Akzo Nv | |
JPH0651250A (ja) | 1992-05-20 | 1994-02-25 | Texas Instr Inc <Ti> | モノリシックな空間的光変調器およびメモリのパッケージ |
US5638084A (en) | 1992-05-22 | 1997-06-10 | Dielectric Systems International, Inc. | Lighting-independent color video display |
JPH06214169A (ja) | 1992-06-08 | 1994-08-05 | Texas Instr Inc <Ti> | 制御可能な光学的周期的表面フィルタ |
US5818095A (en) | 1992-08-11 | 1998-10-06 | Texas Instruments Incorporated | High-yield spatial light modulator with light blocking layer |
US5345328A (en) | 1992-08-12 | 1994-09-06 | Sandia Corporation | Tandem resonator reflectance modulator |
US5293272A (en) | 1992-08-24 | 1994-03-08 | Physical Optics Corporation | High finesse holographic fabry-perot etalon and method of fabricating |
US5327286A (en) | 1992-08-31 | 1994-07-05 | Texas Instruments Incorporated | Real time optical correlation system |
US5325116A (en) | 1992-09-18 | 1994-06-28 | Texas Instruments Incorporated | Device for writing to and reading from optical storage media |
US5296775A (en) | 1992-09-24 | 1994-03-22 | International Business Machines Corporation | Cooling microfan arrangements and process |
US5285196A (en) | 1992-10-15 | 1994-02-08 | Texas Instruments Incorporated | Bistable DMD addressing method |
US5659374A (en) | 1992-10-23 | 1997-08-19 | Texas Instruments Incorporated | Method of repairing defective pixels |
KR960001941B1 (ko) | 1992-11-10 | 1996-02-08 | 재단법인한국전자통신연구소 | 평면 디스플레이 장치 |
CA2113213C (en) | 1993-01-11 | 2004-04-27 | Kevin L. Kornher | Pixel control circuitry for spatial light modulator |
FI96450C (fi) | 1993-01-13 | 1996-06-25 | Vaisala Oy | Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto |
US6674562B1 (en) | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
US7830587B2 (en) | 1993-03-17 | 2010-11-09 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light with semiconductor substrate |
US5461411A (en) | 1993-03-29 | 1995-10-24 | Texas Instruments Incorporated | Process and architecture for digital micromirror printer |
JP3413238B2 (ja) | 1993-03-31 | 2003-06-03 | オリンパス光学工業株式会社 | 位相制御膜構造体 |
JP3524122B2 (ja) | 1993-05-25 | 2004-05-10 | キヤノン株式会社 | 表示制御装置 |
DE4317274A1 (de) | 1993-05-25 | 1994-12-01 | Bosch Gmbh Robert | Verfahren zur Herstellung oberflächen-mikromechanischer Strukturen |
US5559358A (en) | 1993-05-25 | 1996-09-24 | Honeywell Inc. | Opto-electro-mechanical device or filter, process for making, and sensors made therefrom |
US5324683A (en) | 1993-06-02 | 1994-06-28 | Motorola, Inc. | Method of forming a semiconductor structure having an air region |
US5489952A (en) * | 1993-07-14 | 1996-02-06 | Texas Instruments Incorporated | Method and device for multi-format television |
US5673139A (en) | 1993-07-19 | 1997-09-30 | Medcom, Inc. | Microelectromechanical television scanning device and method for making the same |
US5365283A (en) | 1993-07-19 | 1994-11-15 | Texas Instruments Incorporated | Color phase control for projection display using spatial light modulator |
US5510824A (en) * | 1993-07-26 | 1996-04-23 | Texas Instruments, Inc. | Spatial light modulator array |
US5526172A (en) | 1993-07-27 | 1996-06-11 | Texas Instruments Incorporated | Microminiature, monolithic, variable electrical signal processor and apparatus including same |
US5581272A (en) | 1993-08-25 | 1996-12-03 | Texas Instruments Incorporated | Signal generator for controlling a spatial light modulator |
US5552925A (en) | 1993-09-07 | 1996-09-03 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
FR2710161B1 (fr) | 1993-09-13 | 1995-11-24 | Suisse Electronique Microtech | Réseau miniature d'obturateurs de lumière. |
US5457493A (en) | 1993-09-15 | 1995-10-10 | Texas Instruments Incorporated | Digital micro-mirror based image simulation system |
US5629790A (en) | 1993-10-18 | 1997-05-13 | Neukermans; Armand P. | Micromachined torsional scanner |
US5526051A (en) | 1993-10-27 | 1996-06-11 | Texas Instruments Incorporated | Digital television system |
US5497197A (en) * | 1993-11-04 | 1996-03-05 | Texas Instruments Incorporated | System and method for packaging data into video processor |
US5459602A (en) | 1993-10-29 | 1995-10-17 | Texas Instruments | Micro-mechanical optical shutter |
US5452024A (en) | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
US5517347A (en) | 1993-12-01 | 1996-05-14 | Texas Instruments Incorporated | Direct view deformable mirror device |
CA2137059C (en) | 1993-12-03 | 2004-11-23 | Texas Instruments Incorporated | Dmd architecture to improve horizontal resolution |
US5583688A (en) | 1993-12-21 | 1996-12-10 | Texas Instruments Incorporated | Multi-level digital micromirror device |
US5448314A (en) | 1994-01-07 | 1995-09-05 | Texas Instruments | Method and apparatus for sequential color imaging |
US5500761A (en) | 1994-01-27 | 1996-03-19 | At&T Corp. | Micromechanical modulator |
FI94804C (fi) | 1994-02-17 | 1995-10-25 | Vaisala Oy | Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot-interferometri käytettäväksi optisessa materiaalianalyysissä |
DE4407067C2 (de) | 1994-03-03 | 2003-06-18 | Unaxis Balzers Ag | Dielektrisches Interferenz-Filtersystem, LCD-Anzeige und CCD-Anordnung sowie Verfahren zur Herstellung eines dielektrischen Interferenz-Filtersystems |
US5444566A (en) | 1994-03-07 | 1995-08-22 | Texas Instruments Incorporated | Optimized electronic operation of digital micromirror devices |
US5526327A (en) | 1994-03-15 | 1996-06-11 | Cordova, Jr.; David J. | Spatial displacement time display |
US5665997A (en) | 1994-03-31 | 1997-09-09 | Texas Instruments Incorporated | Grated landing area to eliminate sticking of micro-mechanical devices |
GB9407116D0 (en) | 1994-04-11 | 1994-06-01 | Secr Defence | Ferroelectric liquid crystal display with greyscale |
US20010003487A1 (en) | 1996-11-05 | 2001-06-14 | Mark W. Miles | Visible spectrum modulator arrays |
US7808694B2 (en) | 1994-05-05 | 2010-10-05 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US8081369B2 (en) * | 1994-05-05 | 2011-12-20 | Qualcomm Mems Technologies, Inc. | System and method for a MEMS device |
US7550794B2 (en) * | 2002-09-20 | 2009-06-23 | Idc, Llc | Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
US7738157B2 (en) * | 1994-05-05 | 2010-06-15 | Qualcomm Mems Technologies, Inc. | System and method for a MEMS device |
US7123216B1 (en) | 1994-05-05 | 2006-10-17 | Idc, Llc | Photonic MEMS and structures |
US6710908B2 (en) * | 1994-05-05 | 2004-03-23 | Iridigm Display Corporation | Controlling micro-electro-mechanical cavities |
US6680792B2 (en) | 1994-05-05 | 2004-01-20 | Iridigm Display Corporation | Interferometric modulation of radiation |
US6040937A (en) * | 1994-05-05 | 2000-03-21 | Etalon, Inc. | Interferometric modulation |
US7852545B2 (en) * | 1994-05-05 | 2010-12-14 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US7460291B2 (en) * | 1994-05-05 | 2008-12-02 | Idc, Llc | Separable modulator |
US7826120B2 (en) | 1994-05-05 | 2010-11-02 | Qualcomm Mems Technologies, Inc. | Method and device for multi-color interferometric modulation |
KR950033432A (ko) | 1994-05-12 | 1995-12-26 | 윌리엄 이. 힐러 | 공간 광 변조기 디스플레이 포인팅 디바이스 |
US5497172A (en) * | 1994-06-13 | 1996-03-05 | Texas Instruments Incorporated | Pulse width modulation for spatial light modulator with split reset addressing |
US5673106A (en) | 1994-06-17 | 1997-09-30 | Texas Instruments Incorporated | Printing system with self-monitoring and adjustment |
US5920418A (en) | 1994-06-21 | 1999-07-06 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator |
US5454906A (en) | 1994-06-21 | 1995-10-03 | Texas Instruments Inc. | Method of providing sacrificial spacer for micro-mechanical devices |
US5499062A (en) * | 1994-06-23 | 1996-03-12 | Texas Instruments Incorporated | Multiplexed memory timing with block reset and secondary memory |
FI98325C (fi) | 1994-07-07 | 1997-05-26 | Vaisala Oy | Selektiivinen infrapunadetektori |
US5485304A (en) | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
US5636052A (en) | 1994-07-29 | 1997-06-03 | Lucent Technologies Inc. | Direct view display based on a micromechanical modulation |
JP3363606B2 (ja) | 1994-08-05 | 2003-01-08 | 三洋電機株式会社 | 光起電力モジュール |
US5703710A (en) | 1994-09-09 | 1997-12-30 | Deacon Research | Method for manipulating optical energy using poled structure |
US5544268A (en) | 1994-09-09 | 1996-08-06 | Deacon Research | Display panel with electrically-controlled waveguide-routing |
US6053617A (en) | 1994-09-23 | 2000-04-25 | Texas Instruments Incorporated | Manufacture method for micromechanical devices |
US5619059A (en) | 1994-09-28 | 1997-04-08 | National Research Council Of Canada | Color deformable mirror device having optical thin film interference color coatings |
US6560018B1 (en) | 1994-10-27 | 2003-05-06 | Massachusetts Institute Of Technology | Illumination system for transmissive light valve displays |
US5650881A (en) | 1994-11-02 | 1997-07-22 | Texas Instruments Incorporated | Support post architecture for micromechanical devices |
FR2726960B1 (fr) | 1994-11-10 | 1996-12-13 | Thomson Csf | Procede de realisation de transducteurs magnetoresistifs |
US5552924A (en) | 1994-11-14 | 1996-09-03 | Texas Instruments Incorporated | Micromechanical device having an improved beam |
US5474865A (en) | 1994-11-21 | 1995-12-12 | Sematech, Inc. | Globally planarized binary optical mask using buried absorbers |
JPH08153700A (ja) * | 1994-11-25 | 1996-06-11 | Semiconductor Energy Lab Co Ltd | 導電性被膜の異方性エッチング方法 |
US5610624A (en) * | 1994-11-30 | 1997-03-11 | Texas Instruments Incorporated | Spatial light modulator with reduced possibility of an on state defect |
US6115014A (en) | 1994-12-26 | 2000-09-05 | Casio Computer Co., Ltd. | Liquid crystal display by means of time-division color mixing and voltage driving methods using birefringence |
US5550373A (en) | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
US5726480A (en) * | 1995-01-27 | 1998-03-10 | The Regents Of The University Of California | Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same |
US5567334A (en) | 1995-02-27 | 1996-10-22 | Texas Instruments Incorporated | Method for creating a digital micromirror device using an aluminum hard mask |
US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
US5636185A (en) | 1995-03-10 | 1997-06-03 | Boit Incorporated | Dynamically changing liquid crystal display timekeeping apparatus |
US5699074A (en) | 1995-03-24 | 1997-12-16 | Teletransaction, Inc. | Addressing device and method for rapid video response in a bistable liquid crystal display |
US5535047A (en) | 1995-04-18 | 1996-07-09 | Texas Instruments Incorporated | Active yoke hidden hinge digital micromirror device |
US5677785A (en) | 1995-04-21 | 1997-10-14 | Daewoo Electronics Co., Ltd. | Method for forming an array of thin film actuated mirrors |
US5784190A (en) | 1995-04-27 | 1998-07-21 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
US7898722B2 (en) | 1995-05-01 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with restoring electrode |
US5641391A (en) | 1995-05-15 | 1997-06-24 | Hunter; Ian W. | Three dimensional microfabrication by localized electrodeposition and etching |
US5661592A (en) | 1995-06-07 | 1997-08-26 | Silicon Light Machines | Method of making and an apparatus for a flat diffraction grating light valve |
US6849471B2 (en) * | 2003-03-28 | 2005-02-01 | Reflectivity, Inc. | Barrier layers for microelectromechanical systems |
US6046840A (en) * | 1995-06-19 | 2000-04-04 | Reflectivity, Inc. | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
US8139050B2 (en) | 1995-07-20 | 2012-03-20 | E Ink Corporation | Addressing schemes for electronic displays |
US6124851A (en) | 1995-07-20 | 2000-09-26 | E Ink Corporation | Electronic book with multiple page displays |
KR100213026B1 (ko) | 1995-07-27 | 1999-08-02 | 윤종용 | 디엠디 및 그 제조공정 |
US5893624A (en) * | 1996-07-05 | 1999-04-13 | Seiko Instruments Inc. | Liquid crystal display device |
US5963788A (en) | 1995-09-06 | 1999-10-05 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
US6324192B1 (en) | 1995-09-29 | 2001-11-27 | Coretek, Inc. | Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same |
US5661591A (en) | 1995-09-29 | 1997-08-26 | Texas Instruments Incorporated | Optical switch having an analog beam for steering light |
US5739945A (en) | 1995-09-29 | 1998-04-14 | Tayebati; Parviz | Electrically tunable optical filter utilizing a deformable multi-layer mirror |
GB9522135D0 (en) | 1995-10-30 | 1996-01-03 | John Mcgavigan Holdings Limite | Display panels |
JPH09127551A (ja) * | 1995-10-31 | 1997-05-16 | Sharp Corp | 半導体装置およびアクティブマトリクス基板 |
US5740150A (en) | 1995-11-24 | 1998-04-14 | Kabushiki Kaisha Toshiba | Galvanomirror and optical disk drive using the same |
US5999306A (en) | 1995-12-01 | 1999-12-07 | Seiko Epson Corporation | Method of manufacturing spatial light modulator and electronic device employing it |
US5825528A (en) | 1995-12-26 | 1998-10-20 | Lucent Technologies Inc. | Phase-mismatched fabry-perot cavity micromechanical modulator |
JP3799092B2 (ja) | 1995-12-29 | 2006-07-19 | アジレント・テクノロジーズ・インク | 光変調装置及びディスプレイ装置 |
US5638946A (en) | 1996-01-11 | 1997-06-17 | Northeastern University | Micromechanical switch with insulated switch contact |
US5751469A (en) | 1996-02-01 | 1998-05-12 | Lucent Technologies Inc. | Method and apparatus for an improved micromechanical modulator |
US6114862A (en) | 1996-02-14 | 2000-09-05 | Stmicroelectronics, Inc. | Capacitive distance sensor |
JP3597305B2 (ja) | 1996-03-05 | 2004-12-08 | 株式会社半導体エネルギー研究所 | 液晶表示装置およびその作製方法 |
US6624944B1 (en) | 1996-03-29 | 2003-09-23 | Texas Instruments Incorporated | Fluorinated coating for an optical element |
GB2313226A (en) * | 1996-05-17 | 1997-11-19 | Sharp Kk | Addressable matrix arrays |
US5710656A (en) * | 1996-07-30 | 1998-01-20 | Lucent Technologies Inc. | Micromechanical optical modulator having a reduced-mass composite membrane |
US5793504A (en) | 1996-08-07 | 1998-08-11 | Northrop Grumman Corporation | Hybrid angular/spatial holographic multiplexer |
US5838484A (en) | 1996-08-19 | 1998-11-17 | Lucent Technologies Inc. | Micromechanical optical modulator with linear operating characteristic |
US5920471A (en) | 1996-08-30 | 1999-07-06 | Sgs-Thomson Microelectronics, Srl | Method and apparatus for automatic average current mode controlled power factor correction without input voltage sensing |
US5912758A (en) | 1996-09-11 | 1999-06-15 | Texas Instruments Incorporated | Bipolar reset for spatial light modulators |
GB9619781D0 (en) | 1996-09-23 | 1996-11-06 | Secr Defence | Multi layer interference coatings |
FI108581B (fi) | 1996-10-03 | 2002-02-15 | Valtion Teknillinen | Sähköisesti säädettävä optinen suodin |
US5771116A (en) | 1996-10-21 | 1998-06-23 | Texas Instruments Incorporated | Multiple bias level reset waveform for enhanced DMD control |
US7830588B2 (en) * | 1996-12-19 | 2010-11-09 | Qualcomm Mems Technologies, Inc. | Method of making a light modulating display device and associated transistor circuitry and structures thereof |
JPH10186249A (ja) | 1996-12-24 | 1998-07-14 | Casio Comput Co Ltd | 表示装置 |
US6028689A (en) * | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
US5786927A (en) | 1997-03-12 | 1998-07-28 | Lucent Technologies Inc. | Gas-damped micromechanical structure |
US6034752A (en) | 1997-03-22 | 2000-03-07 | Kent Displays Incorporated | Display device reflecting visible and infrared radiation |
US6384952B1 (en) * | 1997-03-27 | 2002-05-07 | Mems Optical Inc. | Vertical comb drive actuated deformable mirror device and method |
DE69806846T2 (de) * | 1997-05-08 | 2002-12-12 | Texas Instruments Inc., Dallas | Verbesserungen für räumliche Lichtmodulatoren |
EP0879991A3 (en) | 1997-05-13 | 1999-04-21 | Matsushita Electric Industrial Co., Ltd. | Illuminating system |
US6142358A (en) | 1997-05-31 | 2000-11-07 | The Regents Of The University Of California | Wafer-to-wafer transfer of microstructures using break-away tethers |
US6147680A (en) | 1997-06-03 | 2000-11-14 | Koa T&T Corporation | Touchpad with interleaved traces |
US6480177B2 (en) | 1997-06-04 | 2002-11-12 | Texas Instruments Incorporated | Blocked stepped address voltage for micromechanical devices |
US5808780A (en) | 1997-06-09 | 1998-09-15 | Texas Instruments Incorporated | Non-contacting micromechanical optical switch |
JPH112764A (ja) | 1997-06-10 | 1999-01-06 | Sharp Corp | 光開閉装置及び表示装置並びに光開閉装置の製造方法 |
WO1998059382A1 (en) | 1997-06-23 | 1998-12-30 | Fed Corporation | Voltage controlled color organic light emitting device and method of producing the same |
US6239777B1 (en) | 1997-07-22 | 2001-05-29 | Kabushiki Kaisha Toshiba | Display device |
US5870221A (en) * | 1997-07-25 | 1999-02-09 | Lucent Technologies, Inc. | Micromechanical modulator having enhanced performance |
US5867302A (en) * | 1997-08-07 | 1999-02-02 | Sandia Corporation | Bistable microelectromechanical actuator |
KR19990016714A (ko) | 1997-08-19 | 1999-03-15 | 윤종용 | 다면 영상 디스플레이형 배면 투사 프로젝트 장치 |
US6031653A (en) | 1997-08-28 | 2000-02-29 | California Institute Of Technology | Low-cost thin-metal-film interference filters |
US5994174A (en) | 1997-09-29 | 1999-11-30 | The Regents Of The University Of California | Method of fabrication of display pixels driven by silicon thin film transistors |
US6028690A (en) * | 1997-11-26 | 2000-02-22 | Texas Instruments Incorporated | Reduced micromirror mirror gaps for improved contrast ratio |
FR2772141B1 (fr) | 1997-12-08 | 2001-10-05 | Commissariat Energie Atomique | Revetement absorbeur de lumiere a haut pouvoir absorbant |
US6180428B1 (en) * | 1997-12-12 | 2001-01-30 | Xerox Corporation | Monolithic scanning light emitting devices using micromachining |
KR100604621B1 (ko) | 1998-01-20 | 2006-07-28 | 세이코 엡슨 가부시키가이샤 | 광 스위칭 소자, 그의 제어 방법 및 화상 표시 장치 |
JPH11211999A (ja) | 1998-01-28 | 1999-08-06 | Teijin Ltd | 光変調素子および表示装置 |
US5914804A (en) | 1998-01-28 | 1999-06-22 | Lucent Technologies Inc | Double-cavity micromechanical optical modulator with plural multilayer mirrors |
US6660656B2 (en) | 1998-02-11 | 2003-12-09 | Applied Materials Inc. | Plasma processes for depositing low dielectric constant films |
US6100861A (en) | 1998-02-17 | 2000-08-08 | Rainbow Displays, Inc. | Tiled flat panel display with improved color gamut |
US6195196B1 (en) * | 1998-03-13 | 2001-02-27 | Fuji Photo Film Co., Ltd. | Array-type exposing device and flat type display incorporating light modulator and driving method thereof |
US6262697B1 (en) | 1998-03-20 | 2001-07-17 | Eastman Kodak Company | Display having viewable and conductive images |
US7532377B2 (en) | 1998-04-08 | 2009-05-12 | Idc, Llc | Movable micro-electromechanical device |
WO1999052006A2 (en) | 1998-04-08 | 1999-10-14 | Etalon, Inc. | Interferometric modulation of radiation |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US6097145A (en) | 1998-04-27 | 2000-08-01 | Copytele, Inc. | Aerogel-based phase transition flat panel display |
US5943158A (en) | 1998-05-05 | 1999-08-24 | Lucent Technologies Inc. | Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method |
US6160833A (en) | 1998-05-06 | 2000-12-12 | Xerox Corporation | Blue vertical cavity surface emitting laser |
CA2330950A1 (en) | 1998-05-12 | 1999-11-18 | E Ink Corporation | Microencapsulated electrophoretic electrostatically-addressed media for drawing device applications |
US6282010B1 (en) | 1998-05-14 | 2001-08-28 | Texas Instruments Incorporated | Anti-reflective coatings for spatial light modulators |
US6046659A (en) * | 1998-05-15 | 2000-04-04 | Hughes Electronics Corporation | Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications |
US6323982B1 (en) | 1998-05-22 | 2001-11-27 | Texas Instruments Incorporated | Yield superstructure for digital micromirror device |
US6147790A (en) | 1998-06-02 | 2000-11-14 | Texas Instruments Incorporated | Spring-ring micromechanical device |
US6295154B1 (en) | 1998-06-05 | 2001-09-25 | Texas Instruments Incorporated | Optical switching apparatus |
US6496122B2 (en) | 1998-06-26 | 2002-12-17 | Sharp Laboratories Of America, Inc. | Image display and remote control system capable of displaying two distinct images |
JP3865942B2 (ja) * | 1998-07-17 | 2007-01-10 | 富士フイルムホールディングス株式会社 | アクティブマトリクス素子、及びアクティブマトリクス素子を用いた発光素子、光変調素子、光検出素子、露光素子、表示装置 |
GB2341476A (en) | 1998-09-03 | 2000-03-15 | Sharp Kk | Variable resolution display device |
US6113239A (en) | 1998-09-04 | 2000-09-05 | Sharp Laboratories Of America, Inc. | Projection display system for reflective light valves |
US6242989B1 (en) | 1998-09-12 | 2001-06-05 | Agere Systems Guardian Corp. | Article comprising a multi-port variable capacitor |
JP4074714B2 (ja) * | 1998-09-25 | 2008-04-09 | 富士フイルム株式会社 | アレイ型光変調素子及び平面ディスプレイの駆動方法 |
US6972753B1 (en) | 1998-10-02 | 2005-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Touch panel, display device provided with touch panel and electronic equipment provided with display device |
US6323834B1 (en) * | 1998-10-08 | 2001-11-27 | International Business Machines Corporation | Micromechanical displays and fabrication method |
JP3919954B2 (ja) * | 1998-10-16 | 2007-05-30 | 富士フイルム株式会社 | アレイ型光変調素子及び平面ディスプレイの駆動方法 |
US6171945B1 (en) * | 1998-10-22 | 2001-01-09 | Applied Materials, Inc. | CVD nanoporous silica low dielectric constant films |
US6288824B1 (en) | 1998-11-03 | 2001-09-11 | Alex Kastalsky | Display device based on grating electromechanical shutter |
JP2000147262A (ja) | 1998-11-11 | 2000-05-26 | Nobuyuki Higuchi | 集光装置及びこれを利用した太陽光発電システム |
US6316289B1 (en) | 1998-11-12 | 2001-11-13 | Amerasia International Technology Inc. | Method of forming fine-pitch interconnections employing a standoff mask |
US6335831B2 (en) * | 1998-12-18 | 2002-01-01 | Eastman Kodak Company | Multilevel mechanical grating device |
US6465956B1 (en) | 1998-12-28 | 2002-10-15 | Pioneer Corporation | Plasma display panel |
US6215221B1 (en) | 1998-12-29 | 2001-04-10 | Honeywell International Inc. | Electrostatic/pneumatic actuators for active surfaces |
US6358021B1 (en) * | 1998-12-29 | 2002-03-19 | Honeywell International Inc. | Electrostatic actuators for active surfaces |
US6188519B1 (en) | 1999-01-05 | 2001-02-13 | Kenneth Carlisle Johnson | Bigrating light valve |
JP2000214804A (ja) | 1999-01-20 | 2000-08-04 | Fuji Photo Film Co Ltd | 光変調素子及び露光装置並びに平面表示装置 |
US6242932B1 (en) | 1999-02-19 | 2001-06-05 | Micron Technology, Inc. | Interposer for semiconductor components having contact balls |
JP3864204B2 (ja) | 1999-02-19 | 2006-12-27 | 株式会社日立プラズマパテントライセンシング | プラズマディスプレイパネル |
US6606175B1 (en) | 1999-03-16 | 2003-08-12 | Sharp Laboratories Of America, Inc. | Multi-segment light-emitting diode |
DE60027342T2 (de) * | 1999-03-26 | 2007-01-04 | Seiko Epson Corp. | Flexible gedruckte Leiterplatte, elektrooptische Vorrichtung, und elektronisches Gerät |
US6428173B1 (en) | 1999-05-03 | 2002-08-06 | Jds Uniphase, Inc. | Moveable microelectromechanical mirror structures and associated methods |
US6449084B1 (en) | 1999-05-10 | 2002-09-10 | Yanping Guo | Optical deflector |
US6323987B1 (en) | 1999-05-14 | 2001-11-27 | Agere Systems Optoelectronics Guardian Corp. | Controlled multi-wavelength etalon |
US6297811B1 (en) | 1999-06-02 | 2001-10-02 | Elo Touchsystems, Inc. | Projective capacitive touchscreen |
US6201633B1 (en) * | 1999-06-07 | 2001-03-13 | Xerox Corporation | Micro-electromechanical based bistable color display sheets |
US6525867B1 (en) | 1999-07-07 | 2003-02-25 | Lots Technology, Inc. | Fast response micro-modulator arrays |
US6862029B1 (en) * | 1999-07-27 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Color display system |
US6525310B2 (en) * | 1999-08-05 | 2003-02-25 | Microvision, Inc. | Frequency tunable resonant scanner |
US6331909B1 (en) | 1999-08-05 | 2001-12-18 | Microvision, Inc. | Frequency tunable resonant scanner |
US6674563B2 (en) | 2000-04-13 | 2004-01-06 | Lightconnect, Inc. | Method and apparatus for device linearization |
US6335235B1 (en) * | 1999-08-17 | 2002-01-01 | Advanced Micro Devices, Inc. | Simplified method of patterning field dielectric regions in a semiconductor device |
WO2003007049A1 (en) | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
US6351329B1 (en) * | 1999-10-08 | 2002-02-26 | Lucent Technologies Inc. | Optical attenuator |
US6741383B2 (en) | 2000-08-11 | 2004-05-25 | Reflectivity, Inc. | Deflectable micromirrors with stopping mechanisms |
US6960305B2 (en) | 1999-10-26 | 2005-11-01 | Reflectivity, Inc | Methods for forming and releasing microelectromechanical structures |
US6549338B1 (en) | 1999-11-12 | 2003-04-15 | Texas Instruments Incorporated | Bandpass filter to reduce thermal impact of dichroic light shift |
US6552840B2 (en) | 1999-12-03 | 2003-04-22 | Texas Instruments Incorporated | Electrostatic efficiency of micromechanical devices |
US6700554B2 (en) * | 1999-12-04 | 2004-03-02 | Lg. Philips Lcd Co., Ltd. | Transmissive display device using micro light modulator |
US6674090B1 (en) * | 1999-12-27 | 2004-01-06 | Xerox Corporation | Structure and method for planar lateral oxidation in active |
US6545335B1 (en) | 1999-12-27 | 2003-04-08 | Xerox Corporation | Structure and method for electrical isolation of optoelectronic integrated circuits |
US6548908B2 (en) | 1999-12-27 | 2003-04-15 | Xerox Corporation | Structure and method for planar lateral oxidation in passive devices |
JP2001249287A (ja) | 1999-12-30 | 2001-09-14 | Texas Instr Inc <Ti> | 双安定マイクロミラー・アレイを動作させる方法 |
US6519073B1 (en) * | 2000-01-10 | 2003-02-11 | Lucent Technologies Inc. | Micromechanical modulator and methods for fabricating the same |
AU2001211949B2 (en) | 2000-01-21 | 2005-08-18 | Viavi Solutions Inc. | Optically variable security devices |
US6307663B1 (en) | 2000-01-26 | 2001-10-23 | Eastman Kodak Company | Spatial light modulator with conformal grating device |
US6407851B1 (en) | 2000-08-01 | 2002-06-18 | Mohammed N. Islam | Micromechanical optical switch |
JP2001221913A (ja) | 2000-02-08 | 2001-08-17 | Yokogawa Electric Corp | ファブリペローフィルタ及び赤外線ガス分析計 |
FI20000339A (fi) * | 2000-02-16 | 2001-08-16 | Nokia Mobile Phones Ltd | Mikromekaaninen säädettävä kondensaattori ja integroitu säädettävä resonaattori |
JP2002174721A (ja) | 2000-12-06 | 2002-06-21 | Yokogawa Electric Corp | ファブリペローフィルタ |
US6590710B2 (en) | 2000-02-18 | 2003-07-08 | Yokogawa Electric Corporation | Fabry-Perot filter, wavelength-selective infrared detector and infrared gas analyzer using the filter and detector |
GB2359636B (en) | 2000-02-22 | 2002-05-01 | Marconi Comm Ltd | Wavelength selective optical filter |
EP1185972A1 (en) | 2000-02-24 | 2002-03-13 | Koninklijke Philips Electronics N.V. | Display device comprising a light guide |
US6836366B1 (en) | 2000-03-03 | 2004-12-28 | Axsun Technologies, Inc. | Integrated tunable fabry-perot filter and method of making same |
US6747775B2 (en) | 2000-03-20 | 2004-06-08 | Np Photonics, Inc. | Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same |
US6665109B2 (en) | 2000-03-20 | 2003-12-16 | Np Photonics, Inc. | Compliant mechanism and method of forming same |
JP2001340110A (ja) * | 2000-03-28 | 2001-12-11 | Sato Seisakusho:Kk | 靴底への付属品着脱構造 |
US6698295B1 (en) * | 2000-03-31 | 2004-03-02 | Shipley Company, L.L.C. | Microstructures comprising silicon nitride layer and thin conductive polysilicon layer |
US6400738B1 (en) | 2000-04-14 | 2002-06-04 | Agilent Technologies, Inc. | Tunable Fabry-Perot filters and lasers |
US6864882B2 (en) | 2000-05-24 | 2005-03-08 | Next Holdings Limited | Protected touch panel display system |
US7008812B1 (en) * | 2000-05-30 | 2006-03-07 | Ic Mechanics, Inc. | Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation |
US6466190B1 (en) | 2000-06-19 | 2002-10-15 | Koninklijke Philips Electronics N.V. | Flexible color modulation tables of ratios for generating color modulation patterns |
US6473274B1 (en) | 2000-06-28 | 2002-10-29 | Texas Instruments Incorporated | Symmetrical microactuator structure for use in mass data storage devices, or the like |
FR2811139B1 (fr) | 2000-06-29 | 2003-10-17 | Centre Nat Rech Scient | Dispositif optoelectronique a filtrage de longueur d'onde integre |
TW535024B (en) | 2000-06-30 | 2003-06-01 | Minolta Co Ltd | Liquid display element and method of producing the same |
EP1802114B1 (en) | 2000-07-03 | 2011-11-23 | Sony Corporation | Optical multilayer structure, optical switching device, and image display |
JP4830183B2 (ja) | 2000-07-19 | 2011-12-07 | ソニー株式会社 | 光学多層構造体および光スイッチング素子、並びに画像表示装置 |
EP1172681A3 (en) * | 2000-07-13 | 2004-06-09 | Creo IL. Ltd. | Blazed micro-mechanical light modulator and array thereof |
JP4460732B2 (ja) | 2000-07-21 | 2010-05-12 | 富士フイルム株式会社 | 平面表示装置および露光装置 |
JP3823016B2 (ja) | 2000-07-21 | 2006-09-20 | 株式会社日立製作所 | 液晶表示装置 |
US6456420B1 (en) | 2000-07-27 | 2002-09-24 | Mcnc | Microelectromechanical elevating structures |
US6853129B1 (en) * | 2000-07-28 | 2005-02-08 | Candescent Technologies Corporation | Protected substrate structure for a field emission display device |
US6778155B2 (en) | 2000-07-31 | 2004-08-17 | Texas Instruments Incorporated | Display operation with inserted block clears |
US6867897B2 (en) | 2003-01-29 | 2005-03-15 | Reflectivity, Inc | Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays |
JP2002062490A (ja) | 2000-08-14 | 2002-02-28 | Canon Inc | 干渉性変調素子 |
US6635919B1 (en) | 2000-08-17 | 2003-10-21 | Texas Instruments Incorporated | High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications |
JP4392970B2 (ja) | 2000-08-21 | 2010-01-06 | キヤノン株式会社 | 干渉性変調素子を用いる表示素子 |
US6376787B1 (en) | 2000-08-24 | 2002-04-23 | Texas Instruments Incorporated | Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer |
US6643069B2 (en) | 2000-08-31 | 2003-11-04 | Texas Instruments Incorporated | SLM-base color projection display having multiple SLM's and multiple projection lenses |
JP4304852B2 (ja) * | 2000-09-04 | 2009-07-29 | コニカミノルタホールディングス株式会社 | 非平面液晶表示素子及びその製造方法 |
US6466354B1 (en) | 2000-09-19 | 2002-10-15 | Silicon Light Machines | Method and apparatus for interferometric modulation of light |
US6707594B2 (en) | 2000-09-20 | 2004-03-16 | General Nutronics, Inc. | Method and device for switching wavelength division multiplexed optical signals using two-dimensional micro-electromechanical mirrors |
GB2371119A (en) | 2000-09-25 | 2002-07-17 | Marconi Caswell Ltd | Micro electro-mechanical systems |
US6714565B1 (en) | 2000-11-01 | 2004-03-30 | Agilent Technologies, Inc. | Optically tunable Fabry Perot microelectromechanical resonator |
US6556338B2 (en) * | 2000-11-03 | 2003-04-29 | Intpax, Inc. | MEMS based variable optical attenuator (MBVOA) |
US6859218B1 (en) * | 2000-11-07 | 2005-02-22 | Hewlett-Packard Development Company, L.P. | Electronic display devices and methods |
US6433917B1 (en) | 2000-11-22 | 2002-08-13 | Ball Semiconductor, Inc. | Light modulation device and system |
TW565726B (en) | 2000-11-27 | 2003-12-11 | Asulab Sa | Reflective liquid crystal display device with improved display contrast |
US6647171B1 (en) | 2000-12-01 | 2003-11-11 | Corning Incorporated | MEMS optical switch actuator |
US6847752B2 (en) | 2000-12-07 | 2005-01-25 | Bluebird Optical Mems Ltd. | Integrated actuator for optical switch mirror array |
US6906847B2 (en) | 2000-12-07 | 2005-06-14 | Reflectivity, Inc | Spatial light modulators with light blocking/absorbing areas |
US7307775B2 (en) | 2000-12-07 | 2007-12-11 | Texas Instruments Incorporated | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
CA2430741A1 (en) * | 2000-12-11 | 2002-06-20 | Rad H. Dabbaj | Electrostatic device |
US6614576B2 (en) * | 2000-12-15 | 2003-09-02 | Texas Instruments Incorporated | Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices |
US20020149834A1 (en) | 2000-12-22 | 2002-10-17 | Ball Semiconductor, Inc. | Light modulation device and system |
DE10064616C2 (de) * | 2000-12-22 | 2003-02-06 | Ovd Kinegram Ag Zug | Dekorfolie und Verfahren zum Beschriften der Dekorfolie |
US6775174B2 (en) | 2000-12-28 | 2004-08-10 | Texas Instruments Incorporated | Memory architecture for micromirror cell |
US6625047B2 (en) | 2000-12-31 | 2003-09-23 | Texas Instruments Incorporated | Micromechanical memory element |
US6911891B2 (en) * | 2001-01-19 | 2005-06-28 | Massachusetts Institute Of Technology | Bistable actuation techniques, mechanisms, and applications |
JP2002221678A (ja) | 2001-01-25 | 2002-08-09 | Seiko Epson Corp | 光スイッチングデバイス、その製造方法および画像表示装置 |
WO2002080255A1 (en) | 2001-03-16 | 2002-10-10 | Corning Intellisense Corporation | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
WO2002079853A1 (en) | 2001-03-16 | 2002-10-10 | Corning Intellisense Corporation | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
JP2002277771A (ja) | 2001-03-21 | 2002-09-25 | Ricoh Co Ltd | 光変調装置 |
US6661561B2 (en) | 2001-03-26 | 2003-12-09 | Creo Inc. | High frequency deformable mirror device |
US6630786B2 (en) | 2001-03-30 | 2003-10-07 | Candescent Technologies Corporation | Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance |
GB0108309D0 (en) | 2001-04-03 | 2001-05-23 | Koninkl Philips Electronics Nv | Matrix array devices with flexible substrates |
JP4603190B2 (ja) | 2001-04-16 | 2010-12-22 | 株式会社日立製作所 | 液晶表示装置 |
US20020149850A1 (en) | 2001-04-17 | 2002-10-17 | E-Tek Dynamics, Inc. | Tunable optical filter |
US6600587B2 (en) | 2001-04-23 | 2003-07-29 | Memx, Inc. | Surface micromachined optical system with reinforced mirror microstructure |
US6657832B2 (en) | 2001-04-26 | 2003-12-02 | Texas Instruments Incorporated | Mechanically assisted restoring force support for micromachined membranes |
US6465355B1 (en) | 2001-04-27 | 2002-10-15 | Hewlett-Packard Company | Method of fabricating suspended microstructures |
GB2375184A (en) | 2001-05-02 | 2002-11-06 | Marconi Caswell Ltd | Wavelength selectable optical filter |
FR2824643B1 (fr) | 2001-05-10 | 2003-10-31 | Jean Pierre Lazzari | Dispositif de modulation de lumiere |
AU2002303842A1 (en) | 2001-05-22 | 2002-12-03 | Reflectivity, Inc. | A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
US6598985B2 (en) | 2001-06-11 | 2003-07-29 | Nanogear | Optical mirror system with multi-axis rotational control |
US6822628B2 (en) | 2001-06-28 | 2004-11-23 | Candescent Intellectual Property Services, Inc. | Methods and systems for compensating row-to-row brightness variations of a field emission display |
EP1456699B1 (en) | 2001-07-05 | 2008-12-31 | International Business Machines Corporation | Microsystem switches |
JP3740444B2 (ja) * | 2001-07-11 | 2006-02-01 | キヤノン株式会社 | 光偏向器、それを用いた光学機器、ねじれ揺動体 |
JP4032216B2 (ja) * | 2001-07-12 | 2008-01-16 | ソニー株式会社 | 光学多層構造体およびその製造方法、並びに光スイッチング素子および画像表示装置 |
US6594059B2 (en) | 2001-07-16 | 2003-07-15 | Axsun Technologies, Inc. | Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof |
KR100452112B1 (ko) * | 2001-07-18 | 2004-10-12 | 한국과학기술원 | 정전 구동기 |
US6862022B2 (en) * | 2001-07-20 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method and system for automatically selecting a vertical refresh rate for a video display monitor |
US6589625B1 (en) | 2001-08-01 | 2003-07-08 | Iridigm Display Corporation | Hermetic seal and method to create the same |
US6600201B2 (en) | 2001-08-03 | 2003-07-29 | Hewlett-Packard Development Company, L.P. | Systems with high density packing of micromachines |
US6632698B2 (en) | 2001-08-07 | 2003-10-14 | Hewlett-Packard Development Company, L.P. | Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS |
US6661562B2 (en) * | 2001-08-17 | 2003-12-09 | Lucent Technologies Inc. | Optical modulator and method of manufacture thereof |
EP1291570A3 (en) * | 2001-09-07 | 2004-06-30 | Avon Polymer Products Limited | Noise and vibration suppressors |
US7015457B2 (en) | 2002-03-18 | 2006-03-21 | Honeywell International Inc. | Spectrally tunable detector |
US20030053078A1 (en) * | 2001-09-17 | 2003-03-20 | Mark Missey | Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators |
US6770014B2 (en) * | 2001-09-20 | 2004-08-03 | Robert W. Amore | Resistance type exercise device |
WO2003028059A1 (en) * | 2001-09-21 | 2003-04-03 | Hrl Laboratories, Llc | Mems switches and methods of making same |
US6866669B2 (en) | 2001-10-12 | 2005-03-15 | Cordis Corporation | Locking handle deployment mechanism for medical device and method |
US7004015B2 (en) | 2001-10-25 | 2006-02-28 | The Regents Of The University Of Michigan | Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein |
US6870581B2 (en) | 2001-10-30 | 2005-03-22 | Sharp Laboratories Of America, Inc. | Single panel color video projection display using reflective banded color falling-raster illumination |
AU2002359369A1 (en) | 2001-11-09 | 2003-05-26 | Coventor, Incorporated | Trilayered beam mems device and related methods |
US6761950B2 (en) | 2001-12-07 | 2004-07-13 | Matsushita Electric Industrial Co., Ltd. | Information recording medium and method for producing the same |
JP2003177336A (ja) | 2001-12-11 | 2003-06-27 | Fuji Photo Film Co Ltd | 光変調素子及び光変調素子アレイ並びにそれを用いた露光装置 |
JP2006506802A (ja) | 2001-12-14 | 2006-02-23 | レアード テクノロジーズ, インコーポレイテッド | 損失媒体を含むemiシールド |
JP3893421B2 (ja) | 2001-12-27 | 2007-03-14 | 富士フイルム株式会社 | 光変調素子及び光変調素子アレイ並びにそれを用いた露光装置 |
US6959990B2 (en) | 2001-12-31 | 2005-11-01 | Texas Instruments Incorporated | Prism for high contrast projection |
US6791735B2 (en) * | 2002-01-09 | 2004-09-14 | The Regents Of The University Of California | Differentially-driven MEMS spatial light modulator |
US6608268B1 (en) | 2002-02-05 | 2003-08-19 | Memtronics, A Division Of Cogent Solutions, Inc. | Proximity micro-electro-mechanical system |
US6794119B2 (en) | 2002-02-12 | 2004-09-21 | Iridigm Display Corporation | Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
KR100639547B1 (ko) | 2002-02-15 | 2006-10-30 | 가부시키가이샤 브리지스톤 | 화상표시장치 |
US6643053B2 (en) | 2002-02-20 | 2003-11-04 | The Regents Of The University Of California | Piecewise linear spatial phase modulator using dual-mode micromirror arrays for temporal and diffractive fourier optics |
US6574033B1 (en) | 2002-02-27 | 2003-06-03 | Iridigm Display Corporation | Microelectromechanical systems device and method for fabricating same |
AU2003211809A1 (en) | 2002-03-01 | 2003-09-16 | Sharp Kabushiki Kaisha | Light emitting device and display unit using the light emitting device and reading device |
US6891658B2 (en) | 2002-03-04 | 2005-05-10 | The University Of British Columbia | Wide viewing angle reflective display |
GB0205479D0 (en) | 2002-03-08 | 2002-04-24 | Koninkl Philips Electronics Nv | Matrix display devices |
US7145143B2 (en) | 2002-03-18 | 2006-12-05 | Honeywell International Inc. | Tunable sensor |
US6768555B2 (en) | 2002-03-21 | 2004-07-27 | Industrial Technology Research Institute | Fabry-Perot filter apparatus with enhanced optical discrimination |
US6965468B2 (en) | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
WO2003085728A1 (en) | 2002-04-11 | 2003-10-16 | Koninklijke Philips Electronics N.V. | Carrier, method of manufacturing a carrier and an electronic device |
US6972882B2 (en) | 2002-04-30 | 2005-12-06 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with light angle amplification |
US20030202264A1 (en) | 2002-04-30 | 2003-10-30 | Weber Timothy L. | Micro-mirror device |
US6954297B2 (en) | 2002-04-30 | 2005-10-11 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
US6778034B2 (en) | 2002-05-07 | 2004-08-17 | G.M.W.T. (Global Micro Wire Technology) Ltd. | EMI filters |
US20040212026A1 (en) | 2002-05-07 | 2004-10-28 | Hewlett-Packard Company | MEMS device having time-varying control |
JP2003340795A (ja) | 2002-05-20 | 2003-12-02 | Sony Corp | 静電駆動型mems素子とその製造方法、光学mems素子、光変調素子、glvデバイス及びレーザディスプレイ |
JP3801099B2 (ja) | 2002-06-04 | 2006-07-26 | 株式会社デンソー | チューナブルフィルタ、その製造方法、及びそれを使用した光スイッチング装置 |
DE10228946B4 (de) | 2002-06-28 | 2004-08-26 | Universität Bremen | Optischer Modulator, Display, Verwendung eines optischen Modulators und Verfahren zur Herstellung eines optischen Modulators |
US6813059B2 (en) | 2002-06-28 | 2004-11-02 | Silicon Light Machines, Inc. | Reduced formation of asperities in contact micro-structures |
US6741377B2 (en) | 2002-07-02 | 2004-05-25 | Iridigm Display Corporation | Device having a light-absorbing mask and a method for fabricating same |
JP4001066B2 (ja) | 2002-07-18 | 2007-10-31 | セイコーエプソン株式会社 | 電気光学装置、配線基板及び電子機器 |
US6738194B1 (en) | 2002-07-22 | 2004-05-18 | The United States Of America As Represented By The Secretary Of The Navy | Resonance tunable optical filter |
US6822798B2 (en) * | 2002-08-09 | 2004-11-23 | Optron Systems, Inc. | Tunable optical filter |
US6674033B1 (en) * | 2002-08-21 | 2004-01-06 | Ming-Shan Wang | Press button type safety switch |
TW544787B (en) * | 2002-09-18 | 2003-08-01 | Promos Technologies Inc | Method of forming self-aligned contact structure with locally etched gate conductive layer |
ATE498148T1 (de) * | 2002-09-19 | 2011-02-15 | Koninkl Philips Electronics Nv | Schaltbares optisches element |
JP4057871B2 (ja) | 2002-09-19 | 2008-03-05 | 東芝松下ディスプレイテクノロジー株式会社 | 液晶表示装置 |
CN100395607C (zh) | 2002-09-20 | 2008-06-18 | 株式会社日立显示器 | 半透过反射型液晶显示器件 |
KR100512960B1 (ko) | 2002-09-26 | 2005-09-07 | 삼성전자주식회사 | 플렉서블 mems 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 mems 무선 마이크로폰 |
US6885409B2 (en) | 2002-09-27 | 2005-04-26 | Eastman Kodak Company | Cholesteric liquid crystal display system |
JP4347654B2 (ja) | 2002-10-16 | 2009-10-21 | オリンパス株式会社 | 可変形状反射鏡及びその製造方法 |
US6986587B2 (en) | 2002-10-16 | 2006-01-17 | Olympus Corporation | Variable-shape reflection mirror and method of manufacturing the same |
US7085121B2 (en) * | 2002-10-21 | 2006-08-01 | Hrl Laboratories, Llc | Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters |
FR2846318B1 (fr) * | 2002-10-24 | 2005-01-07 | Commissariat Energie Atomique | Microstructure electromecanique integree comportant des moyens de reglage de la pression dans une cavite scellee et procede de reglage de la pression |
US6747785B2 (en) | 2002-10-24 | 2004-06-08 | Hewlett-Packard Development Company, L.P. | MEMS-actuated color light modulator and methods |
US6666561B1 (en) | 2002-10-28 | 2003-12-23 | Hewlett-Packard Development Company, L.P. | Continuously variable analog micro-mirror device |
US7370185B2 (en) * | 2003-04-30 | 2008-05-06 | Hewlett-Packard Development Company, L.P. | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
JP3796499B2 (ja) | 2002-11-06 | 2006-07-12 | キヤノン株式会社 | カラー表示素子、カラー表示素子の駆動方法及びカラー表示装置 |
US6983135B1 (en) | 2002-11-11 | 2006-01-03 | Marvell International, Ltd. | Mixer gain calibration method and apparatus |
US6909589B2 (en) | 2002-11-20 | 2005-06-21 | Corporation For National Research Initiatives | MEMS-based variable capacitor |
US6844959B2 (en) * | 2002-11-26 | 2005-01-18 | Reflectivity, Inc | Spatial light modulators with light absorbing areas |
US6958846B2 (en) | 2002-11-26 | 2005-10-25 | Reflectivity, Inc | Spatial light modulators with light absorbing areas |
US6741503B1 (en) | 2002-12-04 | 2004-05-25 | Texas Instruments Incorporated | SLM display data address mapping for four bank frame buffer |
US6813060B1 (en) | 2002-12-09 | 2004-11-02 | Sandia Corporation | Electrical latching of microelectromechanical devices |
TWI289708B (en) | 2002-12-25 | 2007-11-11 | Qualcomm Mems Technologies Inc | Optical interference type color display |
JP2004212638A (ja) | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 光変調素子及び平面表示素子 |
TW559686B (en) | 2002-12-27 | 2003-11-01 | Prime View Int Co Ltd | Optical interference type panel and the manufacturing method thereof |
JP2004212680A (ja) | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 光変調素子アレイ及びその製造方法 |
TW594155B (en) | 2002-12-27 | 2004-06-21 | Prime View Int Corp Ltd | Optical interference type color display and optical interference modulator |
US6808953B2 (en) * | 2002-12-31 | 2004-10-26 | Robert Bosch Gmbh | Gap tuning for surface micromachined structures in an epitaxial reactor |
US7002719B2 (en) | 2003-01-15 | 2006-02-21 | Lucent Technologies Inc. | Mirror for an integrated device |
JP2004219843A (ja) * | 2003-01-16 | 2004-08-05 | Seiko Epson Corp | 光変調器、表示装置及びその製造方法 |
US7079154B2 (en) | 2003-01-18 | 2006-07-18 | Hewlett-Packard Development Company, L.P. | Sub-pixel assembly with dithering |
US20040140557A1 (en) | 2003-01-21 | 2004-07-22 | United Test & Assembly Center Limited | Wl-bga for MEMS/MOEMS devices |
US20040147056A1 (en) | 2003-01-29 | 2004-07-29 | Mckinnell James C. | Micro-fabricated device and method of making |
TW200413810A (en) | 2003-01-29 | 2004-08-01 | Prime View Int Co Ltd | Light interference display panel and its manufacturing method |
US7205675B2 (en) | 2003-01-29 | 2007-04-17 | Hewlett-Packard Development Company, L.P. | Micro-fabricated device with thermoelectric device and method of making |
TW557395B (en) | 2003-01-29 | 2003-10-11 | Yen Sun Technology Corp | Optical interference type reflection panel and the manufacturing method thereof |
JP2004235465A (ja) | 2003-01-30 | 2004-08-19 | Tokyo Electron Ltd | 接合方法、接合装置及び封止部材 |
US7250930B2 (en) | 2003-02-07 | 2007-07-31 | Hewlett-Packard Development Company, L.P. | Transparent active-matrix display |
US7459402B2 (en) | 2003-02-12 | 2008-12-02 | Texas Instruments Incorporated | Protection layers in micromirror array devices |
US6903487B2 (en) | 2003-02-14 | 2005-06-07 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with increased mirror tilt |
TW200417806A (en) | 2003-03-05 | 2004-09-16 | Prime View Int Corp Ltd | A structure of a light-incidence electrode of an optical interference display plate |
US6844953B2 (en) | 2003-03-12 | 2005-01-18 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
TWI328805B (en) | 2003-03-13 | 2010-08-11 | Lg Electronics Inc | Write-once recording medium and defective area management method and apparatus for write-once recording medium |
KR100925195B1 (ko) | 2003-03-17 | 2009-11-06 | 엘지전자 주식회사 | 대화형 디스크 플레이어의 이미지 데이터 처리장치 및처리방법 |
JP2004286825A (ja) | 2003-03-19 | 2004-10-14 | Fuji Photo Film Co Ltd | 平面表示装置 |
US6913942B2 (en) | 2003-03-28 | 2005-07-05 | Reflectvity, Inc | Sacrificial layers for use in fabrications of microelectromechanical devices |
TWI226504B (en) * | 2003-04-21 | 2005-01-11 | Prime View Int Co Ltd | A structure of an interference display cell |
TW567355B (en) | 2003-04-21 | 2003-12-21 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
TWI224235B (en) | 2003-04-21 | 2004-11-21 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
TW594360B (en) | 2003-04-21 | 2004-06-21 | Prime View Int Corp Ltd | A method for fabricating an interference display cell |
US6853476B2 (en) | 2003-04-30 | 2005-02-08 | Hewlett-Packard Development Company, L.P. | Charge control circuit for a micro-electromechanical device |
US7072093B2 (en) | 2003-04-30 | 2006-07-04 | Hewlett-Packard Development Company, L.P. | Optical interference pixel display with charge control |
US6829132B2 (en) * | 2003-04-30 | 2004-12-07 | Hewlett-Packard Development Company, L.P. | Charge control of micro-electromechanical device |
US7447891B2 (en) * | 2003-04-30 | 2008-11-04 | Hewlett-Packard Development Company, L.P. | Light modulator with concentric control-electrode structure |
US7358966B2 (en) | 2003-04-30 | 2008-04-15 | Hewlett-Packard Development Company L.P. | Selective update of micro-electromechanical device |
US7400489B2 (en) | 2003-04-30 | 2008-07-15 | Hewlett-Packard Development Company, L.P. | System and a method of driving a parallel-plate variable micro-electromechanical capacitor |
US6741384B1 (en) | 2003-04-30 | 2004-05-25 | Hewlett-Packard Development Company, L.P. | Control of MEMS and light modulator arrays |
WO2004099629A2 (en) | 2003-05-01 | 2004-11-18 | University Of Florida | Vertical displacement device |
US6819469B1 (en) | 2003-05-05 | 2004-11-16 | Igor M. Koba | High-resolution spatial light modulator for 3-dimensional holographic display |
JP4075678B2 (ja) | 2003-05-06 | 2008-04-16 | ソニー株式会社 | 固体撮像素子 |
US7218499B2 (en) | 2003-05-14 | 2007-05-15 | Hewlett-Packard Development Company, L.P. | Charge control circuit |
JP4338442B2 (ja) | 2003-05-23 | 2009-10-07 | 富士フイルム株式会社 | 透過型光変調素子の製造方法 |
TW591716B (en) * | 2003-05-26 | 2004-06-11 | Prime View Int Co Ltd | A structure of a structure release and manufacturing the same |
TW570896B (en) * | 2003-05-26 | 2004-01-11 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
US6917459B2 (en) | 2003-06-03 | 2005-07-12 | Hewlett-Packard Development Company, L.P. | MEMS device and method of forming MEMS device |
US6811267B1 (en) | 2003-06-09 | 2004-11-02 | Hewlett-Packard Development Company, L.P. | Display system with nonvisible data projection |
TWI223855B (en) * | 2003-06-09 | 2004-11-11 | Taiwan Semiconductor Mfg | Method for manufacturing reflective spatial light modulator mirror devices |
JP2007027150A (ja) | 2003-06-23 | 2007-02-01 | Hitachi Chem Co Ltd | 集光型光発電システム |
US7221495B2 (en) | 2003-06-24 | 2007-05-22 | Idc Llc | Thin film precursor stack for MEMS manufacturing |
FR2857153B1 (fr) | 2003-07-01 | 2005-08-26 | Commissariat Energie Atomique | Micro-commutateur bistable a faible consommation. |
US7190337B2 (en) | 2003-07-02 | 2007-03-13 | Kent Displays Incorporated | Multi-configuration display driver |
US6980347B2 (en) | 2003-07-03 | 2005-12-27 | Reflectivity, Inc | Micromirror having reduced space between hinge and mirror plate of the micromirror |
US6862127B1 (en) * | 2003-11-01 | 2005-03-01 | Fusao Ishii | High performance micromirror arrays and methods of manufacturing the same |
US7190380B2 (en) * | 2003-09-26 | 2007-03-13 | Hewlett-Packard Development Company, L.P. | Generating and displaying spatially offset sub-frames |
JP3786106B2 (ja) * | 2003-08-11 | 2006-06-14 | セイコーエプソン株式会社 | 波長可変光フィルタ及びその製造方法 |
US7173314B2 (en) * | 2003-08-13 | 2007-02-06 | Hewlett-Packard Development Company, L.P. | Storage device having a probe and a storage cell with moveable parts |
TWI251712B (en) * | 2003-08-15 | 2006-03-21 | Prime View Int Corp Ltd | Interference display plate |
TW200506479A (en) * | 2003-08-15 | 2005-02-16 | Prime View Int Co Ltd | Color changeable pixel for an interference display |
TWI305599B (en) * | 2003-08-15 | 2009-01-21 | Qualcomm Mems Technologies Inc | Interference display panel and method thereof |
TW593127B (en) * | 2003-08-18 | 2004-06-21 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
TWI231865B (en) * | 2003-08-26 | 2005-05-01 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
US20050057442A1 (en) * | 2003-08-28 | 2005-03-17 | Olan Way | Adjacent display of sequential sub-images |
JP3979982B2 (ja) * | 2003-08-29 | 2007-09-19 | シャープ株式会社 | 干渉性変調器および表示装置 |
TWI230801B (en) | 2003-08-29 | 2005-04-11 | Prime View Int Co Ltd | Reflective display unit using interferometric modulation and manufacturing method thereof |
TWI232333B (en) * | 2003-09-03 | 2005-05-11 | Prime View Int Co Ltd | Display unit using interferometric modulation and manufacturing method thereof |
US7027204B2 (en) * | 2003-09-26 | 2006-04-11 | Silicon Light Machines Corporation | High-density spatial light modulator |
US6982820B2 (en) * | 2003-09-26 | 2006-01-03 | Prime View International Co., Ltd. | Color changeable pixel |
US20050068583A1 (en) * | 2003-09-30 | 2005-03-31 | Gutkowski Lawrence J. | Organizing a digital image |
TW593126B (en) * | 2003-09-30 | 2004-06-21 | Prime View Int Co Ltd | A structure of a micro electro mechanical system and manufacturing the same |
US6861277B1 (en) * | 2003-10-02 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method of forming MEMS device |
US7324176B2 (en) | 2003-10-07 | 2008-01-29 | American Panel Corporation | Flat panel display having integral heater, EMI shield, and thermal sensors |
US7265809B2 (en) | 2003-10-07 | 2007-09-04 | Universal Avionics Systems Corporation | Flat panel display having integral metal heater optically hidden behind an EMI shield |
JP2005121906A (ja) | 2003-10-16 | 2005-05-12 | Fuji Photo Film Co Ltd | 反射型光変調アレイ素子及び露光装置 |
US6994245B2 (en) | 2003-10-17 | 2006-02-07 | James M. Pinchot | Micro-reactor fabrication |
US20050122306A1 (en) | 2003-10-29 | 2005-06-09 | E Ink Corporation | Electro-optic displays with single edge addressing and removable driver circuitry |
US7198873B2 (en) * | 2003-11-18 | 2007-04-03 | Asml Netherlands B.V. | Lithographic processing optimization based on hypersampled correlations |
TW200524236A (en) | 2003-12-01 | 2005-07-16 | Nl Nanosemiconductor Gmbh | Optoelectronic device incorporating an interference filter |
US7161728B2 (en) | 2003-12-09 | 2007-01-09 | Idc, Llc | Area array modulation and lead reduction in interferometric modulators |
EP1544657B1 (en) | 2003-12-19 | 2012-04-04 | Barco N.V. | Broadband full white reflective display structure |
WO2005089098A2 (en) | 2004-01-14 | 2005-09-29 | The Regents Of The University Of California | Ultra broadband mirror using subwavelength grating |
TWI235345B (en) | 2004-01-20 | 2005-07-01 | Prime View Int Co Ltd | A structure of an optical interference display unit |
JP2005235403A (ja) | 2004-02-17 | 2005-09-02 | Hitachi Displays Ltd | 有機・el表示装置 |
TWI256941B (en) * | 2004-02-18 | 2006-06-21 | Qualcomm Mems Technologies Inc | A micro electro mechanical system display cell and method for fabricating thereof |
US7119945B2 (en) | 2004-03-03 | 2006-10-10 | Idc, Llc | Altering temporal response of microelectromechanical elements |
TW200530669A (en) | 2004-03-05 | 2005-09-16 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
TWI261683B (en) | 2004-03-10 | 2006-09-11 | Qualcomm Mems Technologies Inc | Interference reflective element and repairing method thereof |
JP4581453B2 (ja) | 2004-03-29 | 2010-11-17 | ソニー株式会社 | Mems素子、光学mems素子、回折型光学mems素子、並びにレーザディスプレイ |
JP2005308871A (ja) | 2004-04-19 | 2005-11-04 | Aterio Design Kk | 干渉カラーフィルター |
US7400041B2 (en) | 2004-04-26 | 2008-07-15 | Sriram Muthukumar | Compliant multi-composition interconnects |
US7245285B2 (en) | 2004-04-28 | 2007-07-17 | Hewlett-Packard Development Company, L.P. | Pixel device |
US7476327B2 (en) * | 2004-05-04 | 2009-01-13 | Idc, Llc | Method of manufacture for microelectromechanical devices |
US7787170B2 (en) | 2004-06-15 | 2010-08-31 | Texas Instruments Incorporated | Micromirror array assembly with in-array pillars |
US7075700B2 (en) * | 2004-06-25 | 2006-07-11 | The Boeing Company | Mirror actuator position sensor systems and methods |
MX2007000384A (es) | 2004-07-09 | 2007-03-28 | Univ Cincinnati | Pantalla con capacidad de valvula de iluminacion por electrohumedecimiento. |
TWI233916B (en) * | 2004-07-09 | 2005-06-11 | Prime View Int Co Ltd | A structure of a micro electro mechanical system |
TWI270722B (en) * | 2004-07-23 | 2007-01-11 | Au Optronics Corp | Dual-side display panel |
US7436389B2 (en) | 2004-07-29 | 2008-10-14 | Eugene J Mar | Method and system for controlling the output of a diffractive light device |
EP1779173A1 (en) | 2004-07-29 | 2007-05-02 | Idc, Llc | System and method for micro-electromechanical operating of an interferometric modulator |
US7126741B2 (en) * | 2004-08-12 | 2006-10-24 | Hewlett-Packard Development Company, L.P. | Light modulator assembly |
US7372348B2 (en) | 2004-08-20 | 2008-05-13 | Palo Alto Research Center Incorporated | Stressed material and shape memory material MEMS devices and methods for manufacturing |
DK1632804T3 (da) | 2004-09-01 | 2008-09-29 | Barco Nv | Prismeanordning |
KR100648310B1 (ko) | 2004-09-24 | 2006-11-23 | 삼성전자주식회사 | 영상의 휘도 정보를 이용한 색변환장치 및 이를 구비하는디스플레이 장치 |
US7184202B2 (en) | 2004-09-27 | 2007-02-27 | Idc, Llc | Method and system for packaging a MEMS device |
US7420728B2 (en) * | 2004-09-27 | 2008-09-02 | Idc, Llc | Methods of fabricating interferometric modulators by selectively removing a material |
US7944599B2 (en) | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US7327510B2 (en) | 2004-09-27 | 2008-02-05 | Idc, Llc | Process for modifying offset voltage characteristics of an interferometric modulator |
US7304784B2 (en) | 2004-09-27 | 2007-12-04 | Idc, Llc | Reflective display device having viewable display on both sides |
US7321456B2 (en) | 2004-09-27 | 2008-01-22 | Idc, Llc | Method and device for corner interferometric modulation |
US7302157B2 (en) | 2004-09-27 | 2007-11-27 | Idc, Llc | System and method for multi-level brightness in interferometric modulation |
US8008736B2 (en) * | 2004-09-27 | 2011-08-30 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device |
US7564612B2 (en) | 2004-09-27 | 2009-07-21 | Idc, Llc | Photonic MEMS and structures |
US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
US7130104B2 (en) | 2004-09-27 | 2006-10-31 | Idc, Llc | Methods and devices for inhibiting tilting of a mirror in an interferometric modulator |
US7898521B2 (en) | 2004-09-27 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Device and method for wavelength filtering |
US7630119B2 (en) | 2004-09-27 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Apparatus and method for reducing slippage between structures in an interferometric modulator |
US7684104B2 (en) | 2004-09-27 | 2010-03-23 | Idc, Llc | MEMS using filler material and method |
US7893919B2 (en) | 2004-09-27 | 2011-02-22 | Qualcomm Mems Technologies, Inc. | Display region architectures |
US7612932B2 (en) | 2004-09-27 | 2009-11-03 | Idc, Llc | Microelectromechanical device with optical function separated from mechanical and electrical function |
US7289259B2 (en) * | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
US7321457B2 (en) | 2006-06-01 | 2008-01-22 | Qualcomm Incorporated | Process and structure for fabrication of MEMS device having isolated edge posts |
US7684106B2 (en) | 2006-11-02 | 2010-03-23 | Qualcomm Mems Technologies, Inc. | Compatible MEMS switch architecture |
US20080121270A1 (en) | 2006-11-28 | 2008-05-29 | General Electric Company | Photovoltaic roof tile system |
US7535621B2 (en) | 2006-12-27 | 2009-05-19 | Qualcomm Mems Technologies, Inc. | Aluminum fluoride films for microelectromechanical system applications |
US7630121B2 (en) | 2007-07-02 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
-
2005
- 2005-02-11 US US11/057,045 patent/US7289259B2/en not_active Expired - Fee Related
- 2005-08-01 AU AU2005203376A patent/AU2005203376A1/en not_active Abandoned
- 2005-08-11 JP JP2005233651A patent/JP4501004B2/ja not_active Expired - Fee Related
- 2005-08-15 SG SG200505163A patent/SG121058A1/en unknown
- 2005-08-25 TW TW094129141A patent/TWI440889B/zh not_active IP Right Cessation
- 2005-08-25 CA CA002517048A patent/CA2517048A1/en not_active Abandoned
- 2005-09-07 MX MXPA05009546A patent/MXPA05009546A/es active IP Right Grant
- 2005-09-13 KR KR1020050085295A patent/KR101170706B1/ko not_active IP Right Cessation
- 2005-09-14 EP EP05255648.7A patent/EP1640765B1/en not_active Not-in-force
- 2005-09-14 EP EP13172916.2A patent/EP2642329A3/en not_active Withdrawn
- 2005-09-14 ES ES05255648.7T patent/ES2511765T3/es active Active
- 2005-09-15 CN CN2005101034453A patent/CN1755478B/zh not_active Expired - Fee Related
- 2005-09-15 CN CN201110316908.XA patent/CN102426405B/zh not_active Expired - Fee Related
- 2005-09-26 RU RU2005129915/09A patent/RU2005129915A/ru not_active Application Discontinuation
- 2005-09-27 BR BRPI0503899-5A patent/BRPI0503899A/pt not_active Application Discontinuation
-
2006
- 2006-08-18 HK HK06109190.3A patent/HK1087192A1/xx not_active IP Right Cessation
-
2007
- 2007-10-19 US US11/875,613 patent/US7982700B2/en not_active Expired - Fee Related
-
2011
- 2011-06-07 US US13/155,264 patent/US8390547B2/en not_active Expired - Fee Related
-
2012
- 2012-01-11 KR KR1020120003302A patent/KR101232205B1/ko not_active IP Right Cessation
- 2012-05-09 KR KR1020120049218A patent/KR101236288B1/ko not_active IP Right Cessation
-
2013
- 2013-03-04 US US13/784,491 patent/US9086564B2/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101688974B (zh) * | 2007-07-05 | 2011-10-19 | 高通Mems科技公司 | 衬底上的集成干涉式调制器与太阳能电池 |
CN102859574A (zh) * | 2010-04-22 | 2013-01-02 | 高通Mems科技公司 | 具有集成式处理器及存储器单元的有源矩阵像素 |
CN102809813A (zh) * | 2011-06-03 | 2012-12-05 | 株式会社日立显示器 | 显示装置 |
CN104718152A (zh) * | 2012-10-11 | 2015-06-17 | 高通Mems科技公司 | 背板电极传感器 |
CN110521143A (zh) * | 2017-05-23 | 2019-11-29 | 洛克利光子有限公司 | 用于光调制器的驱动器 |
CN110521143B (zh) * | 2017-05-23 | 2024-01-12 | 洛克利光子有限公司 | 用于光调制器的驱动器 |
CN112470271A (zh) * | 2018-07-23 | 2021-03-09 | 高通股份有限公司 | 沿第一方向延伸的第一功率总线和第二功率总线 |
CN112470271B (zh) * | 2018-07-23 | 2022-05-24 | 高通股份有限公司 | 沿第一方向延伸的第一功率总线和第二功率总线 |
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1755478A (zh) | 用于干涉式调制器阵列的导电总线结构 | |
CN1755492B (zh) | 具有一导电的光吸收性光罩的装置及其制作方法 | |
US7612933B2 (en) | Microelectromechanical device with spacing layer | |
US7561321B2 (en) | Process and structure for fabrication of MEMS device having isolated edge posts | |
US7630121B2 (en) | Electromechanical device with optical function separated from mechanical and electrical function | |
JP4550693B2 (ja) | マルチステート干渉性光変調のための方法および装置 | |
CN1755493A (zh) | 用于干涉式调制中的多级亮度的系统及方法 | |
EP2030947A2 (en) | Interferometric optical modulator with broadband reflection characteristics | |
CN1755850A (zh) | 可选电容电路 | |
CN1760970A (zh) | 用于降低显示器中的功率消耗的方法及系统 | |
TW200912501A (en) | Infrared and dual mode displays | |
JP2011076109A (ja) | ディスプレイでの色を操作するための色フィルター | |
CN101495900A (zh) | 具有静电激活及释放的模拟干涉式调制器装置 | |
JP2011237812A (ja) | Memsディスプレイアーキテクチャ用の低範囲ビット深度拡張のための方法および装置 | |
US20120019894A1 (en) | Interferometric modulation devices having triangular subpixels | |
CN1755495A (zh) | 制造mems系统的预结构的方法 | |
CN1755434A (zh) | 用于驱动一双稳显示器的方法及系统 | |
JP5123198B2 (ja) | セットおよびラッチ電極を備えたmemsスイッチ | |
CN1769956A (zh) | 具有一带有集成滤色器的空间光调制器阵列的显示装置 | |
CN1755489A (zh) | 布置成非矩形阵列的反射性显示像素 | |
CN1755474A (zh) | 使用背光照明照射干涉式调制器的系统及方法 | |
CN1755490A (zh) | 用于多状态干涉式光调制的方法和装置 | |
CN1755502A (zh) | 用于防止干涉式调制器静电放电的方法及装置 | |
CN1755506A (zh) | 用于操纵一显示器中的颜色的方法及装置 | |
CN1755500A (zh) | 用于补偿随视角而变化的色移的方法及装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1087192 Country of ref document: HK |
|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: GAOTONG MEMS SCIENCE AND TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: IDC CO., LTD. Effective date: 20100531 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20100531 Address after: American California Applicant after: Qualcomm MEMS Technology Corp. Address before: American California Applicant before: IDC LLC |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
REG | Reference to a national code |
Ref country code: HK Ref legal event code: GR Ref document number: 1087192 Country of ref document: HK |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111214 Termination date: 20160915 |