WO1998059382A1 - Voltage controlled color organic light emitting device and method of producing the same - Google Patents
Voltage controlled color organic light emitting device and method of producing the same Download PDFInfo
- Publication number
- WO1998059382A1 WO1998059382A1 PCT/US1998/012988 US9812988W WO9859382A1 WO 1998059382 A1 WO1998059382 A1 WO 1998059382A1 US 9812988 W US9812988 W US 9812988W WO 9859382 A1 WO9859382 A1 WO 9859382A1
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- WIPO (PCT)
- Prior art keywords
- light emitting
- color
- pixel
- emitting pixel
- transport layer
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/125—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2320/00—Control of display operating conditions
- G09G2320/06—Adjustment of display parameters
- G09G2320/0666—Adjustment of display parameters for control of colour parameters, e.g. colour temperature
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/2003—Display of colours
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/2007—Display of intermediate tones
- G09G3/2014—Display of intermediate tones by modulation of the duration of a single pulse during which the logic level remains constant
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3216—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using a passive matrix
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
- G09G3/3258—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix with pixel circuitry controlling the voltage across the light-emitting element
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
Definitions
- the present invention relates to an organic light emitting device (OLED). More specifically, the present invention relates to a color display produced from a monochrome organic light emitting device through voltage changes.
- OLED organic light emitting device
- OLEDs Organic light emitting devices
- OLEDs have been known for approximately two decades. All OLEDs work on the same general principles.
- One or more layers of semiconducting organic material is sandwiched between two electrodes.
- An electric current is applied to the device, causing negatively charged electrons to move into the organic material(s) from the cathode.
- Positive charge typically referred to as holes, moves in the anode.
- the positive and negative charges meet in the center layers (i.e., the semiconducting organic material), combine, and produce photons.
- the wave-length ⁇ and consequently the color ⁇ of the photons depends on the electronic properties of the organic material in which the photons are generated.
- Light emitting devices which may be generally classified as organic or inorganic, are well known in the graphic display and imaging art. Among the benefits of organic light emitting devices are high visibility due to self-emission, as well as superior impact resistance, and ease of handling of the solid state devices. Organic light emitting devices may have practical application for television and graphic displays, as well as in digital printing applications.
- An organic light emitting device is typically a laminate formed on a substrate such as soda-lime glass.
- a light-emitting layer of a luminescent organic solid, as well as adjacent semiconductor layers, are sandwiched between a cathode and an anode.
- the semiconductor layers may be hole-injecting and electron-injecting layers.
- the light-emitting layer may be any of a multitude of fluorescent organic solids.
- numerous light emitting devices are formed on a single substrate and arranged in groups in a regular grid pattern.
- Several light emitting device groups forming a column of the grid may share a common cathode, or cathode line.
- Several light emitting device groups forming a row of the grid may share a common anode, or anode line.
- the individual light emitting devices in a given group emit light when their cathode line and anode line are activated at the same time. Activation may be by rows and columns or in an active matrix with individual cathode and anode pads.
- Organic light emitting devices have a number of beneficial characteristics. These include a low activation voltage (about 4.5 volts), fast response when formed with a thin light-emitting layer, and high brightness in proportion to the injected electric current. By changing the kinds of flourescent organic solids making up the light-emitting layer, many different colors of light may be emitted, ranging from visible blue, to green, yellow, and red. Organic light emitting devices are currently the subject of aggressive investigative efforts.
- the color of light emitted from the OLED device can be controlled by the selection of the organic material.
- White light is produced by generating blue, red and green lights simultaneously.
- the precisely color of light emitted by a particular structure can be controlled both by selection of the organic material, as well as by selection of dopants.
- the formation of conventional color displays is typically more complex and expensive than the formation of monochrome displays.
- the present invention is directed to a color display.
- the color display includes at least one organic light emitting device.
- Each of the at least one organic light emitting device has at least one light emitting pixel.
- a pixel refers to an element of a multiple addressable light source array, or a single nonaddressable light source element.
- the color display also includes control means for controlling the color of light emitted from each of the at least one light emitting pixel.
- the control means controls the color of each of the at least one pixel by adjusting the voltage of each of the at least one light emitting pixel to produce a specific display color for a particular pixel.
- the control means may further control the brightness of each of the at least one light emitting pixel.
- the control means controls the color of each of the at least one pixel by adjusting the voltage of each of the at least one light emitting pixel to produce a specific display color for a particular pixel.
- Each at least one organic light emitting device includes a first conductor layer, a second conductor layer spaced from the first conductor layer, and an emitter layer positioned between the first and second conductor layers.
- the emitter layer may include an electron transport layer, and a hole transport layer.
- the hole transport layer is positioned adjacent the first conductor layer.
- the electron transport layer is positioned adjacent the second conductor layer. Light is generated at the location where a hole is extinguished. Typically, this occurs at the interface between the electron transport layer and the hole transport layer.
- the hole transport layer and the electron transport layer each have a predetermined thickness.
- the predetermined thickness of the electron transport layer is less than the predetermined thickness of the hole transport layer such that the interface is closer to the second conductor layer.
- the color display may further comprise at least one filter to control the light emitted from each of the at least one light emitting pixel.
- the present invention is directed to a method of producing a color display.
- the color display includes at least one organic light emitting device.
- the method includes the step of providing at least one organic light emitting device.
- Each of the at least one organic light emitting device has at least one light emitting pixel.
- the method further includes the step of setting each of the at least one light emitting pixel to a particular color.
- the at least one organic light emitting device includes a light emitter layer.
- the step of setting each of the at least one light emitting pixel to a particular color includes forming a light emitter layer having a reduced thickness. The reduced thickness permits the changing of the wavelength of the light emitted from a particular color producing a particular color.
- the method may further include the step of providing at least one filter to control the light emitted from each of the at least one light emitting pixel.
- the at least one filter is a triband filter.
- the method may further comprise the step of setting each of the at least one light emitting pixel to a selected brightness.
- the step of setting each of the at least one light emitting pixel to a particular color preferably include selecting a voltage for each of the at least one light emitting pixel to produce a specific display color for a particular pixel.
- the specific display color for a particular pixel may be adjusted by changing the voltage of the particular pixel.
- the light emitted from a particular pixel has a specific wavelength.
- the step of changing the voltage of a particular pixel may change the specific wavelength.
- the present invention is also directed to a method of adjusting the color output of a color display device.
- the color display device includes at least one organic light emitting device.
- the method includes the step of providing at least one organic light emitting device.
- Each of the at least one organic light emitting device has at least one light emitting pixel.
- the method further includes the step of adjusting the color of each of the at least one light emitting pixel to a particular color.
- the method also includes the step of providing at least one filter to control the light emitted from each of the at least one light emitting pixel.
- the method may also include the step of setting each of the at least one light emitting pixel to a selected brightness.
- the step of adjusting the color of each of the at least one light emitting pixel includes adjusting the voltage for each of the at least one light emitting pixel to produce a specific display color for a particular pixel.
- the specific display color for a particular pixel may be adjusted by changing the voltage of the particular pixel.
- the light emitted from a particular pixel has a specific wavelength, and the step of changing the voltage of a particular pixel changes the specific wavelength.
- Fig. 1 is a side view illustrating the layers of an organic light emitting device according to an embodiment of the present invention.
- Fig. 2 is a side view illustrating the layers of an organic light emitting device according to an embodiment of the present invention.
- the present invention is directed to an improved light emitting device that includes an organic light emitting device (OLED) that permits the use of a monochrome device to produce a color display.
- OLED organic light emitting device
- the OLED 1 preferably includes an array of light emitting pixels.
- a pixel refers to an element of a multiple addressable light source array, or a single nonaddressable light source element.
- the OLED 1 may comprise a plurality of rows of individual pixels. Alternatively, the individual pixels may be arranged in a line array.
- the array of pixels is an active array. However, it is contemplated that passive arrays (e.g., larger shaped pixels) are considered to be within the scope of the present invention.
- the OLED 1 is formed on a substrate 2.
- the substrate 2 is preferably an electrically insulator ultra thin substrate.
- the substrate 2 may be formed from a borosilicate glass, silicon on quartz or other suitable substrate material.
- the OLED 1 includes a first conductor layer 11 formed on the substrate 2.
- the first conductor layer 11 preferably consists of a plurality of light transmissive electrode elements.
- the electrode elements of the first conductor layer 11 are preferably formed as lines directly on the substrate 2 using conventional techniques.
- the first conductor layer 11 may be screen coated or lithographically patterned using conventional photoresist and etching techniques.
- the first conductor layer 11 is preferably formed from a mixture of indium oxide and tin oxide or indium tin oxide (ITO). However, it is contemplated that other suitable light transmissive electrically conductive materials may be used to construct the electrode elements (e.g.. tin oxide and indium oxide).
- a light emitter layer 12 is formed on the first conductor layer 11.
- the light emitter layer 12 may comprise one or more layers.
- the light emitter layer 12 is preferably form one or more organic material(s).
- the light emitter layer 12 includes a hole transport layer 121, a light emitting layer 122, and an electron transport layer 123.
- the hole transport layer 121 is located on top of the first conductor layer 11.
- the light emitting layer 122 is sandwiched between the hole transport layer 121 and the electron transport layer 123.
- the electron transport layer 123 is formed from a light emitting material such as Alq. However, other appropriate materials are also contemplated to be within the scope of the present invention.
- a second conductor layer 13 is located on top of the electron transport layer 123.
- a color display may be produced using either a top down or bottom up monochrome display, as described above.
- a color display may be produced by shifting the wavelength of the emitted light. This can be accomplished by changing the voltage of the OLED display. The process for shifting the wavelength of light will now be described.
- the electron transport layer 123 preferably has a thickness of under 40 nm.
- the reduced thickness of the electron transport layer 123 impacts (i.e., shifts) the region where recombination of the electrons and holes occurs. This changes the average exiton energy when recombination occurs, which shifts the wavelength. The shift in wavelength results in the emission of a different color light.
- the shift in wavelength may be further enhanced through the use of dyes, such as, for example, blue dye (e.g., BAlq-mpp and DPVBi), red dye and green dye (e.g., coumerin 6) and the use of dopants, such as, for example, DCM, DCJ, DMQA, C6 and perylene in the light emitter layer 12, and specifically in the hole transport layer 121 and the electron transport layer 123.
- the use of material, such as, poly(2,5-dialkoxy-p- phenylene vinylene) (PDAOPV) to form the hole transport layer 121 may be used to further shift the range where exitons are extinguished such that the wavelength of light is shifted. It is necessary to optimize the dopants for the electron transport layer 123 to allow for more voltage saturation to permit the control of the color of the display.
- dyes such as, for example, blue dye (e.g., BAlq-mpp and DPVBi), red dye and green dye (e.g.
- the reduced thickness of the electron transport layer 123 permits voltage changes that will shift the nominal wavelength of light emitted from each pixel.
- the color of individual pixels may be controlled by adjusting the voltage.
- the voltage may be adjusted using a suitable driver 3. For example, by increasing the voltage, the wavelength of the emitted light shortens, which produces a blue color. Decreasing the voltage increases the wavelength of the emitted light producing a light that is more red in color. Typically, a voltage in the range of 8 V will produce red light. Green light will be produced with voltages in the range of 1 IV. Blue light will be produced with voltages in the range of 14V.
- the control of voltage for individual pixels permits the fabrication of a color display from a simple monochrome display.
- Each pixel can be set to a particular color as well as a selected brightness.
- a color display may be obtained by running the display in a color sequential type mode. In this mode, a common electrode, such as the first conductor layer 11, and red data are activated. The green data is activated. Finally, the blue data is activated a row at a time. Similarly, full frames of each data for each color may be presented sequentially. The full frame approach permits the display to be run at a maximum brightness when an active matrix transistor array is used. This permits DC-like operation of the display where illuminated pixels stay on until the data is changed and a momentary inverse voltage pulse is applied. The frames would novelly be operating with the common electrode changing the predetermined voltages corresponding to color values every third frame.
- a voltage of 8 V would be used to produce the color red, 11 V to produce the color green, and 14V to produce the color blue.
- This approach may be used for multicolor systems such as red-green combinations (used, for example, in gun sites) and for full color displays where saturation is not required.
- a filter 14 may be provided on the second conductor layer 13.
- the filter 14 would be only light having wavelength near a target value to be passed through the filter 14 and emitted from the OLED.
- the filter 14 is preferably a triband filter. The use of a filter 14 may be used to obtain more saturated colors from such a display.
- the inventor of the present invention realizes that the some efficiency (i.e., shorter life expectancy) is lost due to the reduced thickness of the electron transport layer 123.
- the benefits of being able to produce a color display from a monochrome device is considered to be greater than the anticipated efficiency loss.
- this novel approach to the formation of color displays will result in a significant cost savings when compared to conventional techniques for forming color displays. Additionally, the above- described system produces crisper more vivid colors.
- the above described technique can be combined with other direct colors, such as, a blue-green modulatable pixel and red color to achieve full color.
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Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US5047397P | 1997-06-23 | 1997-06-23 | |
US60/050,473 | 1997-06-23 |
Publications (1)
Publication Number | Publication Date |
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WO1998059382A1 true WO1998059382A1 (en) | 1998-12-30 |
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Application Number | Title | Priority Date | Filing Date |
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PCT/US1998/012988 WO1998059382A1 (en) | 1997-06-23 | 1998-06-23 | Voltage controlled color organic light emitting device and method of producing the same |
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Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6801000B2 (en) | 2000-06-23 | 2004-10-05 | Cambridge Display Technology Ltd. | Light-emitting devices |
WO2005038763A1 (en) * | 2003-10-16 | 2005-04-28 | Koninklijke Philips Electronics N.V. | Color display panel |
JP2006351538A (en) * | 2005-06-14 | 2006-12-28 | Novaled Ag | Organic luminous component and its operation method |
WO2008040318A1 (en) * | 2006-09-29 | 2008-04-10 | Osram Opto Semiconductors Gmbh | Organic light-emitting component, device comprising such a component, illumination device and display device |
FR2931296A1 (en) * | 2008-05-13 | 2009-11-20 | Commissariat Energie Atomique | CONTROL CIRCUIT OF A PIXEL WITH VARIABLE CHROMATIC COORDINATES |
US8693084B2 (en) | 2008-03-07 | 2014-04-08 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
US8817357B2 (en) | 2010-04-09 | 2014-08-26 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of forming the same |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US8971675B2 (en) | 2006-01-13 | 2015-03-03 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US9086564B2 (en) | 2004-09-27 | 2015-07-21 | Qualcomm Mems Technologies, Inc. | Conductive bus structure for interferometric modulator array |
US9097885B2 (en) | 2004-09-27 | 2015-08-04 | Qualcomm Mems Technologies, Inc. | Device having a conductive light absorbing mask and method for fabricating same |
US9110289B2 (en) | 1998-04-08 | 2015-08-18 | Qualcomm Mems Technologies, Inc. | Device for modulating light with multiple electrodes |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
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Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9110289B2 (en) | 1998-04-08 | 2015-08-18 | Qualcomm Mems Technologies, Inc. | Device for modulating light with multiple electrodes |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
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WO2005038763A1 (en) * | 2003-10-16 | 2005-04-28 | Koninklijke Philips Electronics N.V. | Color display panel |
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US9086564B2 (en) | 2004-09-27 | 2015-07-21 | Qualcomm Mems Technologies, Inc. | Conductive bus structure for interferometric modulator array |
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