JP2013544370A - 干渉ディスプレイデバイスの電荷中性電極の作動及び較正 - Google Patents
干渉ディスプレイデバイスの電荷中性電極の作動及び較正 Download PDFInfo
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Abstract
Description
図12は、中間電極に電気的に接続されたスイッチ又は直列キャパシタを用いずに二つの帯電した電極間で移動又は作動可能な中間電極を含むアナログ干渉変調器1200の斜視図の一例を示す。図21〜図23を参照して以下で詳述するように、中間電極に電気的に接続されたスイッチ又は直列キャパシタを用いずに、中間電極をいずれかの帯電した電極に向けて移動させて、中間電極上に電荷を与えることができる。
図15Aは、中間可動電極1506と、上部電極1502と、上部電極1502から一定のギャップgで離隔された下部電極1510とを含むアナログ干渉変調器1500の断面図の例を示す。緩和(又は非作動)位置では、中間電極1506は電気的に絶縁されていて、ギャップg内に位置する。中間電極1506は、この構成において正味ゼロの電荷を有することができる。
上述のアナログ干渉変調器の実施形態は、電荷中性の電気的に絶縁された中間電極を作動させて、不均一な電場の存在下において、中間電極を上部電極又は下部電極に向けて移動させることができる。以下、図21〜図25を参照して、その移動を作動させた後に中間電極に電荷を与える方法を説明する。
図21は、中間電極2106と、上部電極2102と、下部電極2110とを含むアナログ干渉変調器2100の断面図の例を示す。この実施形態では、上部電極2102は、中間電極2106及び下部電極2110の表面積よりも小さい表面積を有する。中間電極2106は、上部電極2102と下部電極2110との間の不均一な電場の存在下において作動する前のものとして示されている。作動の前に、中間電極2106は、上部電極2102と下部電極2110との間のギャップg内の第一の位置に配置されている。図12を参照して上記で詳述したように、中間電極2106は第一の位置において電気的に絶縁されている。作動の前において、中間電極2106は正味中性の電荷を有する。また、変調器2100は、一つ以上の電気コンタクト、例えば、上部電極2102上に配置された一つ以上の導電性ポスト2132を含むことができる。
図24は、電荷中性の電気的に絶縁された中間電極上に電荷を与えることができるアナログ干渉変調器2400の断面図の一例を示す。変調器2400は、図21に示される変調器2100と同様のものであり、中間電極2406と、上部電極2402と、下部電極2410とを含む。この実施形態では、変調器2400は、上部電極2402に対して横方向に整列された相補電極2424を含む。図15Bに示される複合電極1526を参照して上述したように、相補電極2424及び上部電極2402は、電気的に接続可能であり、複合電極を形成する。しかしながら、図24に示される実施形態では、相補電極2424は上部電極2402から電気的に絶縁されていて、接地されている。
電極上に電荷を作動及び提供することに加えて、本明細書で説明されるアナログ干渉変調器の実施形態は、電極上に印加された電荷を較正することができる。干渉変調器のアレイ内の中間電極上の電荷の較正は、中間電極を保持する機械的構造体のばね定数のばらつきを補償することができる。以下で詳述する較正プロセスに続いて、一組の正又は負に帯電した電気的に絶縁された電極はそれぞれの上部電極と下部電極との間に懸架される。較正された各中間電極上の正(又は負)電荷は、その電極を保持する特定のばねの剛性の関数である。
電荷中性の電気的に絶縁された電極を誘導帯電させて較正するためのシステム及び方法を、図26〜図33を参照して以下詳述する。
以下、図34〜図41を参照して、スイッチを用いずに電荷中性の電気的に絶縁された電極を帯電及び較正するためのシステム及び方法を説明する。
1202 上部電極
1206 中間電極
1210 下部電極
Claims (33)
- ディスプレイ内のアナログ干渉変調器を較正する方法であって、
第一の電極及び第二の電極にわたって較正電圧を印加して、前記第一の電極と前記第二の電極との間のギャップ内に電場を生成して、前記ギャップ内に位置して且つ機械的復元力を受けている第三の電極を前記第一の電極に向けて電気的に絶縁された第一の位置から電気的に接続された第二の位置に移動させるステップと、
前記第一の電極に電気的に接続された一つ以上の導電性ポストに前記第三の電極を電気的に接続して、前記第三の電極が前記第二の位置にある際に、前記第三の電極の機械的復元力が前記第三の電極の電場力を超えるまで、前記第三の電極上の電荷を変更して、前記第三の電極を、前記第二の位置よりも前記第一の電極から離れていて且つ電気的に絶縁された第三の位置に移動させるステップとを備えた方法。 - 前記第一の電極が上部電極と、前記上部電極に対して横方向に整列された相補電極とを含み、前記方法が、前記相補電極を前記上部電極に電気的に接続して、複合電極を形成するステップを更に含み、前記較正電圧を印加することが、前記複合電極及び前記第二の電極にわたって較正電圧を印加することを含む、請求項1に記載の方法。
- 前記相補電極を前記上部電極に電気的に接続することが、一つ以上のスイッチを閉じて前記相補電極を前記上部電極に接続することを含む、請求項2に記載の方法。
- 前記複合電極及び前記第二の電極が実質的に同じ表面積を有し、前記複合電極と前記第二の電極との間に生成される電場が均一である、請求項2に記載の方法。
- 前記相補電極が、前記上部電極に電気的に接続される前に、接地されている、請求項2に記載の方法。
- 前記電荷を変更することが、前記第三の電極が前記第二の位置にある際に、一つ以上の導電性ポストを介して前記第三の電極上の電荷を散逸させることを含む、請求項2に記載の方法。
- 前記ディスプレイ内のアナログ干渉変調器のアレイ内に配置された複数のアナログ干渉変調器を較正するステップを更に備えた請求項2に記載の方法。
- 前記アレイ内の複数のアナログ干渉変調器にわたって散逸電圧を印加して、前記アレイ内の複数のアナログ干渉変調器の各々の第三の電極から電荷を散逸させて、前記第三の電極を電荷中性にするステップを更に備えた請求項7に記載の方法。
- 前記上部電極から前記相補電極を電気的に絶縁するステップと、前記複数のアナログ干渉変調器の各々において前記相補電極を接地するステップと、前記複数のアナログ干渉変調器の各々の上部電極及び第二の電極にわたって帯電作動電圧を印加するステップとを更に備えた請求項8に記載の方法。
- 前記第三の電極上の電荷を変更することが、前記第三の電極が前記第二の位置にある際に、前記一つ以上の導電性ポストを介して前記第三の電極上の電荷を散逸させることを含み、前記一つ以上の導電性ポストが、前記一つ以上の導電性ポストを流れる電流を減少させるように構成された抵抗素子を介して前記第一の電極に電気的に接続される、請求項1に記載の方法。
- 前記第二の電極が前記第一の電極よりも大きい表面積を有し、前記第一の電極と前記第二の電極との間に生成される電場が不均一である、請求項1に記載の方法。
- 前記ディスプレイ内のアナログ干渉変調器のアレイ内に配置された複数のアナログ干渉変調器を較正するステップを更に備えた請求項1に記載の方法。
- 前記アレイ内の複数のアナログ干渉変調器にわたって散逸電圧を印加して、前記アレイ内の複数のアナログ干渉変調器の各々の第三の電極から電荷を散逸させて、前記第三の電極を電荷中性にするステップを更に備えた請求項12に記載の方法。
- 前記複数のアナログ干渉変調器の各々の第一の電極及び第二の電極にわたって帯電作動電圧を印加して、前記第一の電極と前記第二の電極との間のギャップ内に不均一な電場を生成するステップを更に備え、前記較正電圧が前記帯電作動電圧よりも小さい、請求項12に記載の方法。
- 光を変調するためのデバイスであって、
前記デバイスがディスプレイ素子を備え、前記ディスプレイ素子が、
第一の電極と、
ギャップによって前記第一の電極から離隔された第二の電極と、
前記第一の電極に対して横方向に整列された相補電極と、
前記相補電極に配置された少なくとも一つの電気コンタクトと、
前記第一の電極と前記第二の電極との間に配置された可動性の第三の電極とを備え、
前記第一の電極及び前記第二の電極が、作動プロセス中に前記第一の電極及び前記第二の電極にわたって作動電圧が印加された際に、前記第一の電極と前記第二の電極との間に不均一な電場を生成するように構成されていて、
前記相補電極が、前記作動プロセス中に前記第一の電極から電気的に絶縁され、較正プロセス中に前記第一の電極に電気的に接続されて複合電極を形成するように構成されていて、前記複合電極及び前記第二の電極が、前記較正プロセス中に前記複合電極及び前記第二の電極にわたって較正電圧が印加された際に、前記複合電極と前記第二の電極との間に均一な電場を生成するように構成されていて、
前記第三の電極が、電気的に絶縁された第一の位置と、前記少なくとも一つの電気コンタクトと電気的に導通した第二の位置と、電気的に絶縁された第三の位置との間で前記ギャップ内を移動するように構成されていて、
前記電気コンタクトが、前記第三の電極が前記第二の位置にある際に前記第三の電極上の電荷を変更するように構成されていて、前記第三の電極が、前記第三の電極上の電荷が変更された後に前記第三の位置に移動するように構成されている、デバイス。 - 前記少なくとも一つの電気コンタクトが、前記相補電極に電気的に接続された一つ以上の導電性ポストを含む、請求項15に記載のデバイス。
- 前記第三の電極が、前記作動プロセス中に前記不均一な電場に応答して前記第二の位置に移動するように構成されている、請求項15に記載のデバイス。
- 前記第三の電極が、前記較正プロセス中に前記均一な電場に応答して前記第二の位置に移動するように構成されている、請求項15に記載のデバイス。
- 前記第三の電極が、前記作動プロセス中に前記第一の位置から前記第二の位置に移動し、前記第二の位置から前記第三の位置に移動するように構成されている、請求項15に記載のデバイス。
- 前記第三の電極が、前記較正プロセス中に前記第三の位置から前記第二の位置に移動し、前記第二の位置から前記第三の位置に移動するように構成されている、請求項15に記載のデバイス。
- 前記第三の電極が、前記第三の電極が前記第一の位置にある際に、正味中性の電荷を有するように構成されている、請求項15に記載のデバイス。
- 前記作動プロセス中に前記相補電極が前記第一の電極から電気的に絶縁される際に、前記相補電極が接地され、前記相補電極が、前記較正プロセス中にスイッチを介して前記第一の電極に電気的に接続される、請求項15に記載のデバイス。
- 複数のディスプレイ画素を含むディスプレイと、
前記ディスプレイと通信して画像データを処理するように構成されたプロセッサと、
前記プロセッサと通信するように構成されたメモリデバイスとを更に備えた請求項15に記載のデバイス。 - 前記ディスプレイに少なくとも一つの信号を送信するように構成されたドライバ回路を更に備えた請求項23に記載のデバイス。
- 前記画像データの少なくとも一部を前記ドライバ回路に送信するように構成されたコントローラを更に備えた請求項24に記載のデバイス。
- 前記コントローラが、前記較正プロセス中に前記複合電極及び前記第二の電極にわたって前記較正電圧を印加するように構成されている、請求項25に記載のデバイス。
- 前記画像データを前記プロセッサに送信するように構成された画像ソースモジュールを更に備えた請求項23に記載のデバイス。
- 前記画像ソースモジュールが、受信機、送受信機及び送信機のうち少なくとも一つを含む、請求項27に記載のデバイス。
- 入力データを受信して前記入力データを前記プロセッサに送信するように構成された入力デバイスを更に備えた請求項23に記載のデバイス。
- 光を変調するためのデバイスであって、
前記デバイスがディスプレイ素子を備え、前記ディスプレイ素子が、
不均一な電場を生成するための手段と、
均一な電場を生成するための手段と、
ギャップを形成する第一の電極と第二の電極との間に配置された可動電極であって、電気的に絶縁された第一の位置と、第二の位置と、電気的に絶縁された第三の位置との間で前記ギャップ内を移動するように構成された可動電極と、
前記可動電極が前記第二の位置にある際に前記可動電極上の電荷を変更するための手段とを備えた、デバイス。 - 前記不均一な電場を生成するための手段が前記第一の電極及び前記第二の電極を含み、前記第一の電極及び前記第二の電極が異なる表面積を有する、請求項30に記載のデバイス。
- 前記均一な電場を生成するための手段が前記第一の電極及び前記第二の電極を含み、前記第一の電極が相補電極に電気的に接続された上部電極を含み、前記相補電極が前記上部電極に対して横方向に整列されている、請求項30に記載のデバイス。
- 前記電荷を変更するための手段が少なくとも一つの電気コンタクトを含む、請求項30に記載のデバイス。
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7990604B2 (en) * | 2009-06-15 | 2011-08-02 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator |
US9035934B2 (en) * | 2012-05-02 | 2015-05-19 | Qualcomm Mems Technologies, Inc. | Voltage biased pull analog interferometric modulator with charge injection control |
US9305497B2 (en) * | 2012-08-31 | 2016-04-05 | Qualcomm Mems Technologies, Inc. | Systems, devices, and methods for driving an analog interferometric modulator |
JP5987573B2 (ja) * | 2012-09-12 | 2016-09-07 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び駆動方法 |
US20140267443A1 (en) * | 2013-03-14 | 2014-09-18 | Qualcomm Mems Technologies, Inc. | Electromechanical systems device with segmented electrodes |
US20160091708A1 (en) * | 2014-09-30 | 2016-03-31 | Sharp Kabushiki Kaisha | Reflective display device |
DE102019206758A1 (de) * | 2019-05-10 | 2020-11-12 | Robert Bosch Gmbh | Spiegeleinrichtung für eine Interferometereinrichtung, Interferometereinrichtung und Verfahren zum Herstellen einer Spiegeleinrichtung |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004334201A (ja) * | 2003-04-30 | 2004-11-25 | Hewlett-Packard Development Co Lp | 表示可能な画像のピクセルを少なくとも部分的に表示する電子デバイス |
US20060017689A1 (en) * | 2003-04-30 | 2006-01-26 | Faase Kenneth J | Light modulator with concentric control-electrode structure |
JP2006099087A (ja) * | 2004-09-27 | 2006-04-13 | Idc Llc | マルチステート干渉性光変調のための方法および装置 |
JP2006099078A (ja) * | 2004-09-27 | 2006-04-13 | Idc Llc | 透明コンポーネントが集積されたディスプレイのための方法および装置 |
US20070177247A1 (en) * | 1998-04-08 | 2007-08-02 | Miles Mark W | Method and device for modulating light with multiple electrodes |
JP2012530276A (ja) * | 2009-06-15 | 2012-11-29 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | アナログ干渉モジュレータ |
Family Cites Families (319)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2590906A (en) | 1946-11-22 | 1952-04-01 | Farrand Optical Co Inc | Reflection interference filter |
US2677714A (en) | 1951-09-21 | 1954-05-04 | Alois Vogt Dr | Optical-electrical conversion device comprising a light-permeable metal electrode |
US3247392A (en) | 1961-05-17 | 1966-04-19 | Optical Coating Laboratory Inc | Optical coating and assembly used as a band pass interference filter reflecting in the ultraviolet and infrared |
US3728030A (en) | 1970-06-22 | 1973-04-17 | Cary Instruments | Polarization interferometer |
US3679313A (en) | 1970-10-23 | 1972-07-25 | Bell Telephone Labor Inc | Dispersive element for optical pulse compression |
JPS4946974A (ja) | 1972-09-11 | 1974-05-07 | ||
US3886310A (en) | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
NL8001281A (nl) | 1980-03-04 | 1981-10-01 | Philips Nv | Weergeefinrichting. |
DE3109653A1 (de) | 1980-03-31 | 1982-01-28 | Jenoptik Jena Gmbh, Ddr 6900 Jena | "resonanzabsorber" |
US4421381A (en) | 1980-04-04 | 1983-12-20 | Yokogawa Hokushin Electric Corp. | Mechanical vibrating element |
US4441791A (en) | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
US4497974A (en) | 1982-11-22 | 1985-02-05 | Exxon Research & Engineering Co. | Realization of a thin film solar cell with a detached reflector |
US4498953A (en) | 1983-07-27 | 1985-02-12 | At&T Bell Laboratories | Etching techniques |
US5096279A (en) | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
US4560435A (en) | 1984-10-01 | 1985-12-24 | International Business Machines Corporation | Composite back-etch/lift-off stencil for proximity effect minimization |
US4655554A (en) | 1985-03-06 | 1987-04-07 | The United States Of America As Represented By The Secretary Of The Air Force | Spatial light modulator having a capacitively coupled photoconductor |
GB2186708B (en) | 1985-11-26 | 1990-07-11 | Sharp Kk | A variable interferometric device and a process for the production of the same |
US4705361A (en) | 1985-11-27 | 1987-11-10 | Texas Instruments Incorporated | Spatial light modulator |
GB8621438D0 (en) | 1986-09-05 | 1986-10-15 | Secr Defence | Electro-optic device |
US4786128A (en) | 1986-12-02 | 1988-11-22 | Quantum Diagnostics, Ltd. | Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction |
US4822993A (en) | 1987-02-17 | 1989-04-18 | Optron Systems, Inc. | Low-cost, substantially cross-talk free high spatial resolution 2-D bistable light modulator |
JPH02503713A (ja) | 1987-06-04 | 1990-11-01 | ルコツ バルター | 光学的な変調及び測定方法 |
US4956619A (en) | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
US5028939A (en) | 1988-08-23 | 1991-07-02 | Texas Instruments Incorporated | Spatial light modulator system |
US4925259A (en) | 1988-10-20 | 1990-05-15 | The United States Of America As Represented By The United States Department Of Energy | Multilayer optical dielectric coating |
JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
US4973131A (en) | 1989-02-03 | 1990-11-27 | Mcdonnell Douglas Corporation | Modulator mirror |
US5022745A (en) | 1989-09-07 | 1991-06-11 | Massachusetts Institute Of Technology | Electrostatically deformable single crystal dielectrically coated mirror |
US4954789A (en) | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
US5083857A (en) | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
US5062689A (en) | 1990-08-21 | 1991-11-05 | Koehler Dale R | Electrostatically actuatable light modulating device |
US5287215A (en) | 1991-07-17 | 1994-02-15 | Optron Systems, Inc. | Membrane light modulation systems |
US5170283A (en) | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
US5240818A (en) | 1991-07-31 | 1993-08-31 | Texas Instruments Incorporated | Method for manufacturing a color filter for deformable mirror device |
US5315370A (en) | 1991-10-23 | 1994-05-24 | Bulow Jeffrey A | Interferometric modulator for optical signal processing |
US6381022B1 (en) | 1992-01-22 | 2002-04-30 | Northeastern University | Light modulating device |
TW245772B (ja) | 1992-05-19 | 1995-04-21 | Akzo Nv | |
US5818095A (en) | 1992-08-11 | 1998-10-06 | Texas Instruments Incorporated | High-yield spatial light modulator with light blocking layer |
FI96450C (fi) | 1993-01-13 | 1996-06-25 | Vaisala Oy | Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto |
JP3402642B2 (ja) | 1993-01-26 | 2003-05-06 | 松下電工株式会社 | 静電駆動型リレー |
US7830587B2 (en) | 1993-03-17 | 2010-11-09 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light with semiconductor substrate |
US6674562B1 (en) | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
US5559358A (en) | 1993-05-25 | 1996-09-24 | Honeywell Inc. | Opto-electro-mechanical device or filter, process for making, and sensors made therefrom |
US5526172A (en) | 1993-07-27 | 1996-06-11 | Texas Instruments Incorporated | Microminiature, monolithic, variable electrical signal processor and apparatus including same |
FI94804C (fi) | 1994-02-17 | 1995-10-25 | Vaisala Oy | Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot-interferometri käytettäväksi optisessa materiaalianalyysissä |
US5665997A (en) | 1994-03-31 | 1997-09-09 | Texas Instruments Incorporated | Grated landing area to eliminate sticking of micro-mechanical devices |
US6710908B2 (en) | 1994-05-05 | 2004-03-23 | Iridigm Display Corporation | Controlling micro-electro-mechanical cavities |
US20010003487A1 (en) | 1996-11-05 | 2001-06-14 | Mark W. Miles | Visible spectrum modulator arrays |
US7460291B2 (en) | 1994-05-05 | 2008-12-02 | Idc, Llc | Separable modulator |
US7738157B2 (en) | 1994-05-05 | 2010-06-15 | Qualcomm Mems Technologies, Inc. | System and method for a MEMS device |
US8081369B2 (en) | 1994-05-05 | 2011-12-20 | Qualcomm Mems Technologies, Inc. | System and method for a MEMS device |
US7852545B2 (en) | 1994-05-05 | 2010-12-14 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US6040937A (en) | 1994-05-05 | 2000-03-21 | Etalon, Inc. | Interferometric modulation |
US7123216B1 (en) | 1994-05-05 | 2006-10-17 | Idc, Llc | Photonic MEMS and structures |
US7550794B2 (en) | 2002-09-20 | 2009-06-23 | Idc, Llc | Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
US6680792B2 (en) | 1994-05-05 | 2004-01-20 | Iridigm Display Corporation | Interferometric modulation of radiation |
US7808694B2 (en) | 1994-05-05 | 2010-10-05 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US7826120B2 (en) | 1994-05-05 | 2010-11-02 | Qualcomm Mems Technologies, Inc. | Method and device for multi-color interferometric modulation |
US5920418A (en) | 1994-06-21 | 1999-07-06 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator |
US5636052A (en) | 1994-07-29 | 1997-06-03 | Lucent Technologies Inc. | Direct view display based on a micromechanical modulation |
US5485304A (en) | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
FR2726960B1 (fr) | 1994-11-10 | 1996-12-13 | Thomson Csf | Procede de realisation de transducteurs magnetoresistifs |
JPH08153700A (ja) | 1994-11-25 | 1996-06-11 | Semiconductor Energy Lab Co Ltd | 導電性被膜の異方性エッチング方法 |
US5550373A (en) | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
US7898722B2 (en) | 1995-05-01 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with restoring electrode |
US5661592A (en) | 1995-06-07 | 1997-08-26 | Silicon Light Machines | Method of making and an apparatus for a flat diffraction grating light valve |
US6849471B2 (en) | 2003-03-28 | 2005-02-01 | Reflectivity, Inc. | Barrier layers for microelectromechanical systems |
US6046840A (en) | 1995-06-19 | 2000-04-04 | Reflectivity, Inc. | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
US6124851A (en) | 1995-07-20 | 2000-09-26 | E Ink Corporation | Electronic book with multiple page displays |
KR100213026B1 (ko) | 1995-07-27 | 1999-08-02 | 윤종용 | 디엠디 및 그 제조공정 |
US6324192B1 (en) | 1995-09-29 | 2001-11-27 | Coretek, Inc. | Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same |
JPH09127551A (ja) | 1995-10-31 | 1997-05-16 | Sharp Corp | 半導体装置およびアクティブマトリクス基板 |
US5999306A (en) | 1995-12-01 | 1999-12-07 | Seiko Epson Corporation | Method of manufacturing spatial light modulator and electronic device employing it |
US5825528A (en) | 1995-12-26 | 1998-10-20 | Lucent Technologies Inc. | Phase-mismatched fabry-perot cavity micromechanical modulator |
US5751469A (en) | 1996-02-01 | 1998-05-12 | Lucent Technologies Inc. | Method and apparatus for an improved micromechanical modulator |
US6114862A (en) | 1996-02-14 | 2000-09-05 | Stmicroelectronics, Inc. | Capacitive distance sensor |
US5710656A (en) | 1996-07-30 | 1998-01-20 | Lucent Technologies Inc. | Micromechanical optical modulator having a reduced-mass composite membrane |
US5838484A (en) | 1996-08-19 | 1998-11-17 | Lucent Technologies Inc. | Micromechanical optical modulator with linear operating characteristic |
GB9619781D0 (en) | 1996-09-23 | 1996-11-06 | Secr Defence | Multi layer interference coatings |
US5771116A (en) | 1996-10-21 | 1998-06-23 | Texas Instruments Incorporated | Multiple bias level reset waveform for enhanced DMD control |
US7830588B2 (en) | 1996-12-19 | 2010-11-09 | Qualcomm Mems Technologies, Inc. | Method of making a light modulating display device and associated transistor circuitry and structures thereof |
US6028689A (en) | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
US5786927A (en) | 1997-03-12 | 1998-07-28 | Lucent Technologies Inc. | Gas-damped micromechanical structure |
US6384952B1 (en) | 1997-03-27 | 2002-05-07 | Mems Optical Inc. | Vertical comb drive actuated deformable mirror device and method |
EP0879991A3 (en) | 1997-05-13 | 1999-04-21 | Matsushita Electric Industrial Co., Ltd. | Illuminating system |
US5870221A (en) | 1997-07-25 | 1999-02-09 | Lucent Technologies, Inc. | Micromechanical modulator having enhanced performance |
US5867302A (en) | 1997-08-07 | 1999-02-02 | Sandia Corporation | Bistable microelectromechanical actuator |
US6031653A (en) | 1997-08-28 | 2000-02-29 | California Institute Of Technology | Low-cost thin-metal-film interference filters |
DE69830153T2 (de) | 1998-01-20 | 2005-10-13 | Seiko Epson Corp. | Optische schaltvorrichtung und bildanzeigevorrichtung |
US5914804A (en) | 1998-01-28 | 1999-06-22 | Lucent Technologies Inc | Double-cavity micromechanical optical modulator with plural multilayer mirrors |
US6100861A (en) | 1998-02-17 | 2000-08-08 | Rainbow Displays, Inc. | Tiled flat panel display with improved color gamut |
US6262697B1 (en) | 1998-03-20 | 2001-07-17 | Eastman Kodak Company | Display having viewable and conductive images |
US7532377B2 (en) | 1998-04-08 | 2009-05-12 | Idc, Llc | Movable micro-electromechanical device |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US6046659A (en) | 1998-05-15 | 2000-04-04 | Hughes Electronics Corporation | Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications |
US6242989B1 (en) | 1998-09-12 | 2001-06-05 | Agere Systems Guardian Corp. | Article comprising a multi-port variable capacitor |
US6323834B1 (en) | 1998-10-08 | 2001-11-27 | International Business Machines Corporation | Micromechanical displays and fabrication method |
JP3919954B2 (ja) | 1998-10-16 | 2007-05-30 | 富士フイルム株式会社 | アレイ型光変調素子及び平面ディスプレイの駆動方法 |
JP2000147262A (ja) | 1998-11-11 | 2000-05-26 | Nobuyuki Higuchi | 集光装置及びこれを利用した太陽光発電システム |
US6188519B1 (en) | 1999-01-05 | 2001-02-13 | Kenneth Carlisle Johnson | Bigrating light valve |
US6242932B1 (en) | 1999-02-19 | 2001-06-05 | Micron Technology, Inc. | Interposer for semiconductor components having contact balls |
US6323987B1 (en) | 1999-05-14 | 2001-11-27 | Agere Systems Optoelectronics Guardian Corp. | Controlled multi-wavelength etalon |
US6335235B1 (en) | 1999-08-17 | 2002-01-01 | Advanced Micro Devices, Inc. | Simplified method of patterning field dielectric regions in a semiconductor device |
WO2003007049A1 (en) | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
US6351329B1 (en) | 1999-10-08 | 2002-02-26 | Lucent Technologies Inc. | Optical attenuator |
US6960305B2 (en) | 1999-10-26 | 2005-11-01 | Reflectivity, Inc | Methods for forming and releasing microelectromechanical structures |
US6519073B1 (en) | 2000-01-10 | 2003-02-11 | Lucent Technologies Inc. | Micromechanical modulator and methods for fabricating the same |
EP1252027A1 (en) | 2000-01-21 | 2002-10-30 | Flex Products, Inc. | Optically variable security devices |
US6307663B1 (en) | 2000-01-26 | 2001-10-23 | Eastman Kodak Company | Spatial light modulator with conformal grating device |
JP2001221913A (ja) | 2000-02-08 | 2001-08-17 | Yokogawa Electric Corp | ファブリペローフィルタ及び赤外線ガス分析計 |
GB2359636B (en) | 2000-02-22 | 2002-05-01 | Marconi Comm Ltd | Wavelength selective optical filter |
KR20010112456A (ko) | 2000-02-24 | 2001-12-20 | 요트.게.아. 롤페즈 | 광 가이드를 포함한 디스플레이 디바이스 |
US6836366B1 (en) | 2000-03-03 | 2004-12-28 | Axsun Technologies, Inc. | Integrated tunable fabry-perot filter and method of making same |
US6747775B2 (en) | 2000-03-20 | 2004-06-08 | Np Photonics, Inc. | Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same |
US6698295B1 (en) | 2000-03-31 | 2004-03-02 | Shipley Company, L.L.C. | Microstructures comprising silicon nitride layer and thin conductive polysilicon layer |
US6400738B1 (en) | 2000-04-14 | 2002-06-04 | Agilent Technologies, Inc. | Tunable Fabry-Perot filters and lasers |
FR2811139B1 (fr) | 2000-06-29 | 2003-10-17 | Centre Nat Rech Scient | Dispositif optoelectronique a filtrage de longueur d'onde integre |
DE60142383D1 (de) | 2000-07-03 | 2010-07-29 | Sony Corp | Optische mehrschichtige Struktur, optische Schalteinrichtung, und Bildanzeigevorrichtung |
JP2002062490A (ja) | 2000-08-14 | 2002-02-28 | Canon Inc | 干渉性変調素子 |
US6466354B1 (en) | 2000-09-19 | 2002-10-15 | Silicon Light Machines | Method and apparatus for interferometric modulation of light |
US6714565B1 (en) | 2000-11-01 | 2004-03-30 | Agilent Technologies, Inc. | Optically tunable Fabry Perot microelectromechanical resonator |
US6556338B2 (en) | 2000-11-03 | 2003-04-29 | Intpax, Inc. | MEMS based variable optical attenuator (MBVOA) |
US6433917B1 (en) * | 2000-11-22 | 2002-08-13 | Ball Semiconductor, Inc. | Light modulation device and system |
US6906847B2 (en) | 2000-12-07 | 2005-06-14 | Reflectivity, Inc | Spatial light modulators with light blocking/absorbing areas |
US6614576B2 (en) | 2000-12-15 | 2003-09-02 | Texas Instruments Incorporated | Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices |
DE10064616C2 (de) | 2000-12-22 | 2003-02-06 | Ovd Kinegram Ag Zug | Dekorfolie und Verfahren zum Beschriften der Dekorfolie |
US20020149834A1 (en) | 2000-12-22 | 2002-10-17 | Ball Semiconductor, Inc. | Light modulation device and system |
JP2002221678A (ja) | 2001-01-25 | 2002-08-09 | Seiko Epson Corp | 光スイッチングデバイス、その製造方法および画像表示装置 |
US6912078B2 (en) | 2001-03-16 | 2005-06-28 | Corning Incorporated | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
US6661561B2 (en) | 2001-03-26 | 2003-12-09 | Creo Inc. | High frequency deformable mirror device |
US6600587B2 (en) | 2001-04-23 | 2003-07-29 | Memx, Inc. | Surface micromachined optical system with reinforced mirror microstructure |
US6657832B2 (en) | 2001-04-26 | 2003-12-02 | Texas Instruments Incorporated | Mechanically assisted restoring force support for micromachined membranes |
WO2002095800A2 (en) | 2001-05-22 | 2002-11-28 | Reflectivity, Inc. | A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
JP3740444B2 (ja) | 2001-07-11 | 2006-02-01 | キヤノン株式会社 | 光偏向器、それを用いた光学機器、ねじれ揺動体 |
JP4032216B2 (ja) | 2001-07-12 | 2008-01-16 | ソニー株式会社 | 光学多層構造体およびその製造方法、並びに光スイッチング素子および画像表示装置 |
US6594059B2 (en) | 2001-07-16 | 2003-07-15 | Axsun Technologies, Inc. | Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof |
US6632698B2 (en) | 2001-08-07 | 2003-10-14 | Hewlett-Packard Development Company, L.P. | Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS |
US6661562B2 (en) | 2001-08-17 | 2003-12-09 | Lucent Technologies Inc. | Optical modulator and method of manufacture thereof |
US7015457B2 (en) | 2002-03-18 | 2006-03-21 | Honeywell International Inc. | Spectrally tunable detector |
US20030053078A1 (en) | 2001-09-17 | 2003-03-20 | Mark Missey | Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators |
DE60217924T2 (de) | 2001-11-09 | 2007-08-02 | Wispry, Inc. | Mems-einrichtung mit kontakt und abstandshöckern und damit zusammenhängende verfahren |
CN1255792C (zh) | 2001-12-07 | 2006-05-10 | 松下电器产业株式会社 | 信息记录介质及其制造方法 |
JP2003177336A (ja) | 2001-12-11 | 2003-06-27 | Fuji Photo Film Co Ltd | 光変調素子及び光変調素子アレイ並びにそれを用いた露光装置 |
US6791735B2 (en) * | 2002-01-09 | 2004-09-14 | The Regents Of The University Of California | Differentially-driven MEMS spatial light modulator |
US6608268B1 (en) | 2002-02-05 | 2003-08-19 | Memtronics, A Division Of Cogent Solutions, Inc. | Proximity micro-electro-mechanical system |
US6794119B2 (en) | 2002-02-12 | 2004-09-21 | Iridigm Display Corporation | Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
US6574033B1 (en) | 2002-02-27 | 2003-06-03 | Iridigm Display Corporation | Microelectromechanical systems device and method for fabricating same |
JP3733553B2 (ja) | 2002-03-01 | 2006-01-11 | シャープ株式会社 | 表示装置 |
US7145143B2 (en) | 2002-03-18 | 2006-12-05 | Honeywell International Inc. | Tunable sensor |
US6768555B2 (en) | 2002-03-21 | 2004-07-27 | Industrial Technology Research Institute | Fabry-Perot filter apparatus with enhanced optical discrimination |
US6965468B2 (en) | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
US6954297B2 (en) | 2002-04-30 | 2005-10-11 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
US6972882B2 (en) | 2002-04-30 | 2005-12-06 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with light angle amplification |
JP2003340795A (ja) | 2002-05-20 | 2003-12-02 | Sony Corp | 静電駆動型mems素子とその製造方法、光学mems素子、光変調素子、glvデバイス及びレーザディスプレイ |
JP3801099B2 (ja) | 2002-06-04 | 2006-07-26 | 株式会社デンソー | チューナブルフィルタ、その製造方法、及びそれを使用した光スイッチング装置 |
US6813059B2 (en) | 2002-06-28 | 2004-11-02 | Silicon Light Machines, Inc. | Reduced formation of asperities in contact micro-structures |
US6738194B1 (en) | 2002-07-22 | 2004-05-18 | The United States Of America As Represented By The Secretary Of The Navy | Resonance tunable optical filter |
US6822798B2 (en) | 2002-08-09 | 2004-11-23 | Optron Systems, Inc. | Tunable optical filter |
US7508566B2 (en) | 2002-09-19 | 2009-03-24 | Koninklijke Philips Electronics N.V. | Switchable optical element |
JP4057871B2 (ja) | 2002-09-19 | 2008-03-05 | 東芝松下ディスプレイテクノロジー株式会社 | 液晶表示装置 |
KR100512960B1 (ko) | 2002-09-26 | 2005-09-07 | 삼성전자주식회사 | 플렉서블 mems 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 mems 무선 마이크로폰 |
US7085121B2 (en) | 2002-10-21 | 2006-08-01 | Hrl Laboratories, Llc | Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters |
FR2846318B1 (fr) | 2002-10-24 | 2005-01-07 | Commissariat Energie Atomique | Microstructure electromecanique integree comportant des moyens de reglage de la pression dans une cavite scellee et procede de reglage de la pression |
US7370185B2 (en) | 2003-04-30 | 2008-05-06 | Hewlett-Packard Development Company, L.P. | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
US6958846B2 (en) | 2002-11-26 | 2005-10-25 | Reflectivity, Inc | Spatial light modulators with light absorbing areas |
US6844959B2 (en) | 2002-11-26 | 2005-01-18 | Reflectivity, Inc | Spatial light modulators with light absorbing areas |
US6813060B1 (en) | 2002-12-09 | 2004-11-02 | Sandia Corporation | Electrical latching of microelectromechanical devices |
TWI289708B (en) | 2002-12-25 | 2007-11-11 | Qualcomm Mems Technologies Inc | Optical interference type color display |
JP2004212680A (ja) | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 光変調素子アレイ及びその製造方法 |
TW594155B (en) | 2002-12-27 | 2004-06-21 | Prime View Int Corp Ltd | Optical interference type color display and optical interference modulator |
JP2004212638A (ja) | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 光変調素子及び平面表示素子 |
JP2004219843A (ja) | 2003-01-16 | 2004-08-05 | Seiko Epson Corp | 光変調器、表示装置及びその製造方法 |
TW200413810A (en) | 2003-01-29 | 2004-08-01 | Prime View Int Co Ltd | Light interference display panel and its manufacturing method |
TW557395B (en) | 2003-01-29 | 2003-10-11 | Yen Sun Technology Corp | Optical interference type reflection panel and the manufacturing method thereof |
US7436573B2 (en) | 2003-02-12 | 2008-10-14 | Texas Instruments Incorporated | Electrical connections in microelectromechanical devices |
US7459402B2 (en) | 2003-02-12 | 2008-12-02 | Texas Instruments Incorporated | Protection layers in micromirror array devices |
TW200417806A (en) | 2003-03-05 | 2004-09-16 | Prime View Int Corp Ltd | A structure of a light-incidence electrode of an optical interference display plate |
US6913942B2 (en) | 2003-03-28 | 2005-07-05 | Reflectvity, Inc | Sacrificial layers for use in fabrications of microelectromechanical devices |
TW567355B (en) | 2003-04-21 | 2003-12-21 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
TWI224235B (en) | 2003-04-21 | 2004-11-21 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
TWI226504B (en) | 2003-04-21 | 2005-01-11 | Prime View Int Co Ltd | A structure of an interference display cell |
TW594360B (en) | 2003-04-21 | 2004-06-21 | Prime View Int Corp Ltd | A method for fabricating an interference display cell |
WO2004099629A2 (en) | 2003-05-01 | 2004-11-18 | University Of Florida | Vertical displacement device |
JP4075678B2 (ja) | 2003-05-06 | 2008-04-16 | ソニー株式会社 | 固体撮像素子 |
TW570896B (en) | 2003-05-26 | 2004-01-11 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
TW591716B (en) | 2003-05-26 | 2004-06-11 | Prime View Int Co Ltd | A structure of a structure release and manufacturing the same |
TWI223855B (en) | 2003-06-09 | 2004-11-11 | Taiwan Semiconductor Mfg | Method for manufacturing reflective spatial light modulator mirror devices |
JP2007027150A (ja) | 2003-06-23 | 2007-02-01 | Hitachi Chem Co Ltd | 集光型光発電システム |
US7221495B2 (en) | 2003-06-24 | 2007-05-22 | Idc Llc | Thin film precursor stack for MEMS manufacturing |
US6862127B1 (en) | 2003-11-01 | 2005-03-01 | Fusao Ishii | High performance micromirror arrays and methods of manufacturing the same |
JP3786106B2 (ja) | 2003-08-11 | 2006-06-14 | セイコーエプソン株式会社 | 波長可変光フィルタ及びその製造方法 |
TW200506479A (en) | 2003-08-15 | 2005-02-16 | Prime View Int Co Ltd | Color changeable pixel for an interference display |
TWI251712B (en) | 2003-08-15 | 2006-03-21 | Prime View Int Corp Ltd | Interference display plate |
TWI231865B (en) | 2003-08-26 | 2005-05-01 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
TWI230801B (en) | 2003-08-29 | 2005-04-11 | Prime View Int Co Ltd | Reflective display unit using interferometric modulation and manufacturing method thereof |
JP3979982B2 (ja) | 2003-08-29 | 2007-09-19 | シャープ株式会社 | 干渉性変調器および表示装置 |
TWI232333B (en) | 2003-09-03 | 2005-05-11 | Prime View Int Co Ltd | Display unit using interferometric modulation and manufacturing method thereof |
US6982820B2 (en) | 2003-09-26 | 2006-01-03 | Prime View International Co., Ltd. | Color changeable pixel |
US7027204B2 (en) | 2003-09-26 | 2006-04-11 | Silicon Light Machines Corporation | High-density spatial light modulator |
TW593126B (en) | 2003-09-30 | 2004-06-21 | Prime View Int Co Ltd | A structure of a micro electro mechanical system and manufacturing the same |
JP2005121906A (ja) | 2003-10-16 | 2005-05-12 | Fuji Photo Film Co Ltd | 反射型光変調アレイ素子及び露光装置 |
US7782523B2 (en) | 2003-11-01 | 2010-08-24 | Fusao Ishii | Analog micromirror devices with continuous intermediate states |
TW200524236A (en) | 2003-12-01 | 2005-07-16 | Nl Nanosemiconductor Gmbh | Optoelectronic device incorporating an interference filter |
ATE552521T1 (de) | 2003-12-19 | 2012-04-15 | Barco Nv | Breitbandige reflektive anzeigevorrichtung |
WO2005089098A2 (en) | 2004-01-14 | 2005-09-29 | The Regents Of The University Of California | Ultra broadband mirror using subwavelength grating |
TWI235345B (en) | 2004-01-20 | 2005-07-01 | Prime View Int Co Ltd | A structure of an optical interference display unit |
JP2005235403A (ja) | 2004-02-17 | 2005-09-02 | Hitachi Displays Ltd | 有機・el表示装置 |
TWI256941B (en) | 2004-02-18 | 2006-06-21 | Qualcomm Mems Technologies Inc | A micro electro mechanical system display cell and method for fabricating thereof |
US7119945B2 (en) | 2004-03-03 | 2006-10-10 | Idc, Llc | Altering temporal response of microelectromechanical elements |
TW200530669A (en) | 2004-03-05 | 2005-09-16 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
TWI261683B (en) | 2004-03-10 | 2006-09-11 | Qualcomm Mems Technologies Inc | Interference reflective element and repairing method thereof |
JP4581453B2 (ja) | 2004-03-29 | 2010-11-17 | ソニー株式会社 | Mems素子、光学mems素子、回折型光学mems素子、並びにレーザディスプレイ |
JP2005308871A (ja) | 2004-04-19 | 2005-11-04 | Aterio Design Kk | 干渉カラーフィルター |
US7245285B2 (en) | 2004-04-28 | 2007-07-17 | Hewlett-Packard Development Company, L.P. | Pixel device |
US7476327B2 (en) | 2004-05-04 | 2009-01-13 | Idc, Llc | Method of manufacture for microelectromechanical devices |
US7787170B2 (en) | 2004-06-15 | 2010-08-31 | Texas Instruments Incorporated | Micromirror array assembly with in-array pillars |
CA2572952C (en) | 2004-07-09 | 2012-12-04 | The University Of Cincinnati | Display capable electrowetting light valve |
TWI233916B (en) | 2004-07-09 | 2005-06-11 | Prime View Int Co Ltd | A structure of a micro electro mechanical system |
TWI270722B (en) | 2004-07-23 | 2007-01-11 | Au Optronics Corp | Dual-side display panel |
WO2006014929A1 (en) | 2004-07-29 | 2006-02-09 | Idc, Llc | System and method for micro-electromechanical operating of an interferometric modulator |
US7372348B2 (en) | 2004-08-20 | 2008-05-13 | Palo Alto Research Center Incorporated | Stressed material and shape memory material MEMS devices and methods for manufacturing |
US7446927B2 (en) * | 2004-09-27 | 2008-11-04 | Idc, Llc | MEMS switch with set and latch electrodes |
US7310179B2 (en) | 2004-09-27 | 2007-12-18 | Idc, Llc | Method and device for selective adjustment of hysteresis window |
US7302157B2 (en) | 2004-09-27 | 2007-11-27 | Idc, Llc | System and method for multi-level brightness in interferometric modulation |
US8102407B2 (en) | 2004-09-27 | 2012-01-24 | Qualcomm Mems Technologies, Inc. | Method and device for manipulating color in a display |
US7304784B2 (en) | 2004-09-27 | 2007-12-04 | Idc, Llc | Reflective display device having viewable display on both sides |
US7630119B2 (en) | 2004-09-27 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Apparatus and method for reducing slippage between structures in an interferometric modulator |
US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
AU2005289445A1 (en) * | 2004-09-27 | 2006-04-06 | Idc, Llc | Method and device for multistate interferometric light modulation |
US7893919B2 (en) | 2004-09-27 | 2011-02-22 | Qualcomm Mems Technologies, Inc. | Display region architectures |
US7327510B2 (en) | 2004-09-27 | 2008-02-05 | Idc, Llc | Process for modifying offset voltage characteristics of an interferometric modulator |
US7936497B2 (en) | 2004-09-27 | 2011-05-03 | Qualcomm Mems Technologies, Inc. | MEMS device having deformable membrane characterized by mechanical persistence |
US7944599B2 (en) | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US7719500B2 (en) | 2004-09-27 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | Reflective display pixels arranged in non-rectangular arrays |
US7527995B2 (en) | 2004-09-27 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of making prestructure for MEMS systems |
US8008736B2 (en) | 2004-09-27 | 2011-08-30 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device |
US7184202B2 (en) | 2004-09-27 | 2007-02-27 | Idc, Llc | Method and system for packaging a MEMS device |
US7564612B2 (en) | 2004-09-27 | 2009-07-21 | Idc, Llc | Photonic MEMS and structures |
US7612932B2 (en) | 2004-09-27 | 2009-11-03 | Idc, Llc | Microelectromechanical device with optical function separated from mechanical and electrical function |
US7554714B2 (en) | 2004-09-27 | 2009-06-30 | Idc, Llc | Device and method for manipulation of thermal response in a modulator |
CN100547453C (zh) * | 2004-09-27 | 2009-10-07 | Idc公司 | 两侧均具有可观看显示器的反射性显示装置 |
US7130104B2 (en) | 2004-09-27 | 2006-10-31 | Idc, Llc | Methods and devices for inhibiting tilting of a mirror in an interferometric modulator |
US7289259B2 (en) | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
US7321456B2 (en) | 2004-09-27 | 2008-01-22 | Idc, Llc | Method and device for corner interferometric modulation |
JP4384005B2 (ja) | 2004-10-15 | 2009-12-16 | 株式会社東芝 | 表示装置 |
CN101048839B (zh) | 2004-10-27 | 2010-11-17 | 爱普科斯公司 | 电子设备 |
US20080068697A1 (en) | 2004-10-29 | 2008-03-20 | Haluzak Charles C | Micro-Displays and Their Manufacture |
US20060132927A1 (en) | 2004-11-30 | 2006-06-22 | Yoon Frank C | Electrowetting chromatophore |
US7521666B2 (en) | 2005-02-17 | 2009-04-21 | Capella Microsystems Inc. | Multi-cavity Fabry-Perot ambient light filter apparatus |
US7405852B2 (en) | 2005-02-23 | 2008-07-29 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
US7675665B2 (en) | 2005-02-23 | 2010-03-09 | Pixtronix, Incorporated | Methods and apparatus for actuating displays |
US8310442B2 (en) | 2005-02-23 | 2012-11-13 | Pixtronix, Inc. | Circuits for controlling display apparatus |
US7884989B2 (en) | 2005-05-27 | 2011-02-08 | Qualcomm Mems Technologies, Inc. | White interferometric modulators and methods for forming the same |
US7460292B2 (en) | 2005-06-03 | 2008-12-02 | Qualcomm Mems Technologies, Inc. | Interferometric modulator with internal polarization and drive method |
US7184195B2 (en) | 2005-06-15 | 2007-02-27 | Miradia Inc. | Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator |
US7733553B2 (en) | 2005-09-21 | 2010-06-08 | Hewlett-Packard Development Company, L.P. | Light modulator with tunable optical state |
US8574823B2 (en) | 2005-10-05 | 2013-11-05 | Hewlett-Packard Development Company, L.P. | Multi-level layer |
US7513327B1 (en) | 2005-10-13 | 2009-04-07 | Kent Peterson | System for converting a recreational vehicle |
US7760197B2 (en) | 2005-10-31 | 2010-07-20 | Hewlett-Packard Development Company, L.P. | Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field |
JP2007167998A (ja) | 2005-12-20 | 2007-07-05 | Toshiba Corp | 梁構造を有する装置、および半導体装置 |
US7417746B2 (en) | 2005-12-29 | 2008-08-26 | Xerox Corporation | Fabry-perot tunable filter systems and methods |
US7652814B2 (en) | 2006-01-27 | 2010-01-26 | Qualcomm Mems Technologies, Inc. | MEMS device with integrated optical element |
US7550810B2 (en) | 2006-02-23 | 2009-06-23 | Qualcomm Mems Technologies, Inc. | MEMS device having a layer movable at asymmetric rates |
JP5051123B2 (ja) | 2006-03-28 | 2012-10-17 | 富士通株式会社 | 可動素子 |
US7477440B1 (en) | 2006-04-06 | 2009-01-13 | Miradia Inc. | Reflective spatial light modulator having dual layer electrodes and method of fabricating same |
US7649671B2 (en) * | 2006-06-01 | 2010-01-19 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device with electrostatic actuation and release |
US7321457B2 (en) | 2006-06-01 | 2008-01-22 | Qualcomm Incorporated | Process and structure for fabrication of MEMS device having isolated edge posts |
US7876489B2 (en) | 2006-06-05 | 2011-01-25 | Pixtronix, Inc. | Display apparatus with optical cavities |
US7385744B2 (en) | 2006-06-28 | 2008-06-10 | Qualcomm Mems Technologies, Inc. | Support structure for free-standing MEMS device and methods for forming the same |
US7835061B2 (en) | 2006-06-28 | 2010-11-16 | Qualcomm Mems Technologies, Inc. | Support structures for free-standing electromechanical devices |
US7527998B2 (en) | 2006-06-30 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
US7593189B2 (en) | 2006-06-30 | 2009-09-22 | Seagate Technology Llc | Head gimbal assembly to reduce slider distortion due to thermal stress |
US7566664B2 (en) | 2006-08-02 | 2009-07-28 | Qualcomm Mems Technologies, Inc. | Selective etching of MEMS using gaseous halides and reactive co-etchants |
TWI331231B (en) | 2006-08-04 | 2010-10-01 | Au Optronics Corp | Color filter and frbricating method thereof |
DE102006039071B4 (de) | 2006-08-09 | 2012-04-19 | Universität Kassel | Optisches Filter und Verfahren zu seiner Herstellung |
US7629197B2 (en) | 2006-10-18 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Spatial light modulator |
US20080121270A1 (en) | 2006-11-28 | 2008-05-29 | General Electric Company | Photovoltaic roof tile system |
US7535621B2 (en) | 2006-12-27 | 2009-05-19 | Qualcomm Mems Technologies, Inc. | Aluminum fluoride films for microelectromechanical system applications |
US8115987B2 (en) | 2007-02-01 | 2012-02-14 | Qualcomm Mems Technologies, Inc. | Modulating the intensity of light from an interferometric reflector |
US7742220B2 (en) | 2007-03-28 | 2010-06-22 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing conducting layers separated by stops |
US7643202B2 (en) | 2007-05-09 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | Microelectromechanical system having a dielectric movable membrane and a mirror |
US7715085B2 (en) | 2007-05-09 | 2010-05-11 | Qualcomm Mems Technologies, Inc. | Electromechanical system having a dielectric movable membrane and a mirror |
US7643199B2 (en) | 2007-06-19 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | High aperture-ratio top-reflective AM-iMod displays |
US7782517B2 (en) | 2007-06-21 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Infrared and dual mode displays |
US7569488B2 (en) | 2007-06-22 | 2009-08-04 | Qualcomm Mems Technologies, Inc. | Methods of making a MEMS device by monitoring a process parameter |
US7630121B2 (en) | 2007-07-02 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
KR20100066452A (ko) | 2007-07-31 | 2010-06-17 | 퀄컴 엠이엠스 테크놀로지스, 인크. | 간섭계 변조기의 색 변이를 증강시키는 장치 |
US7773286B2 (en) | 2007-09-14 | 2010-08-10 | Qualcomm Mems Technologies, Inc. | Periodic dimple array |
US7847999B2 (en) | 2007-09-14 | 2010-12-07 | Qualcomm Mems Technologies, Inc. | Interferometric modulator display devices |
EP2191320A2 (en) | 2007-09-17 | 2010-06-02 | Qualcomm Mems Technologies, Inc. | Semi-transparent / transflective lighted interferometric modulator devices |
US20090078316A1 (en) | 2007-09-24 | 2009-03-26 | Qualcomm Incorporated | Interferometric photovoltaic cell |
US8058549B2 (en) | 2007-10-19 | 2011-11-15 | Qualcomm Mems Technologies, Inc. | Photovoltaic devices with integrated color interferometric film stacks |
EP2203765A1 (en) | 2007-10-23 | 2010-07-07 | Qualcomm Mems Technologies, Inc. | Adjustably transmissive mems-based devices |
US20090293955A1 (en) | 2007-11-07 | 2009-12-03 | Qualcomm Incorporated | Photovoltaics with interferometric masks |
US7729036B2 (en) | 2007-11-12 | 2010-06-01 | Qualcomm Mems Technologies, Inc. | Capacitive MEMS device with programmable offset voltage control |
US8941631B2 (en) | 2007-11-16 | 2015-01-27 | Qualcomm Mems Technologies, Inc. | Simultaneous light collection and illumination on an active display |
US7715079B2 (en) * | 2007-12-07 | 2010-05-11 | Qualcomm Mems Technologies, Inc. | MEMS devices requiring no mechanical support |
EP2225779A2 (en) | 2007-12-21 | 2010-09-08 | QUALCOMM MEMS Technologies, Inc. | Multijunction photovoltaic cells |
US8164821B2 (en) | 2008-02-22 | 2012-04-24 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with thermal expansion balancing layer or stiffening layer |
US7944604B2 (en) | 2008-03-07 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
US7612933B2 (en) | 2008-03-27 | 2009-11-03 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with spacing layer |
US7898723B2 (en) | 2008-04-02 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical systems display element with photovoltaic structure |
US7969638B2 (en) | 2008-04-10 | 2011-06-28 | Qualcomm Mems Technologies, Inc. | Device having thin black mask and method of fabricating the same |
US7746539B2 (en) | 2008-06-25 | 2010-06-29 | Qualcomm Mems Technologies, Inc. | Method for packing a display device and the device obtained thereof |
US7768690B2 (en) | 2008-06-25 | 2010-08-03 | Qualcomm Mems Technologies, Inc. | Backlight displays |
US8023167B2 (en) | 2008-06-25 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | Backlight displays |
US7859740B2 (en) | 2008-07-11 | 2010-12-28 | Qualcomm Mems Technologies, Inc. | Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control |
US7855826B2 (en) | 2008-08-12 | 2010-12-21 | Qualcomm Mems Technologies, Inc. | Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices |
US20100051089A1 (en) | 2008-09-02 | 2010-03-04 | Qualcomm Mems Technologies, Inc. | Light collection device with prismatic light turning features |
US8358266B2 (en) | 2008-09-02 | 2013-01-22 | Qualcomm Mems Technologies, Inc. | Light turning device with prismatic light turning features |
US20100096011A1 (en) | 2008-10-16 | 2010-04-22 | Qualcomm Mems Technologies, Inc. | High efficiency interferometric color filters for photovoltaic modules |
US20100096006A1 (en) | 2008-10-16 | 2010-04-22 | Qualcomm Mems Technologies, Inc. | Monolithic imod color enhanced photovoltaic cell |
US8270056B2 (en) | 2009-03-23 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with openings between sub-pixels and method of making same |
JP5281479B2 (ja) | 2009-05-18 | 2013-09-04 | 日本電信電話株式会社 | カメラ運動・物体形状復元方法、カメラ運動・物体形状復元装置、カメラ運動・物体形状復元プログラム及びこのプログラムを記録した記録媒体 |
US8270062B2 (en) | 2009-09-17 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with at least one movable stop element |
US7999995B2 (en) | 2009-09-28 | 2011-08-16 | Sharp Laboratories Of America, Inc. | Full color range interferometric modulation |
US8488228B2 (en) | 2009-09-28 | 2013-07-16 | Qualcomm Mems Technologies, Inc. | Interferometric display with interferometric reflector |
US20110169724A1 (en) | 2010-01-08 | 2011-07-14 | Qualcomm Mems Technologies, Inc. | Interferometric pixel with patterned mechanical layer |
IN2013CN01109A (ja) | 2010-08-17 | 2015-07-31 | Qualcomm Mems Technologies Inc |
-
2011
- 2011-08-15 CN CN2011800447819A patent/CN103109315A/zh active Pending
- 2011-08-15 WO PCT/US2011/047790 patent/WO2012024238A1/en active Application Filing
- 2011-08-15 EP EP11745909.9A patent/EP2606485A1/en not_active Withdrawn
- 2011-08-15 KR KR1020137006578A patent/KR20130091763A/ko not_active Application Discontinuation
- 2011-08-15 JP JP2013524917A patent/JP2013544370A/ja not_active Ceased
- 2011-08-16 US US13/211,136 patent/US8797632B2/en not_active Expired - Fee Related
- 2011-08-17 TW TW100129454A patent/TW201214002A/zh unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070177247A1 (en) * | 1998-04-08 | 2007-08-02 | Miles Mark W | Method and device for modulating light with multiple electrodes |
JP2004334201A (ja) * | 2003-04-30 | 2004-11-25 | Hewlett-Packard Development Co Lp | 表示可能な画像のピクセルを少なくとも部分的に表示する電子デバイス |
US20060017689A1 (en) * | 2003-04-30 | 2006-01-26 | Faase Kenneth J | Light modulator with concentric control-electrode structure |
JP2006099087A (ja) * | 2004-09-27 | 2006-04-13 | Idc Llc | マルチステート干渉性光変調のための方法および装置 |
JP2006099078A (ja) * | 2004-09-27 | 2006-04-13 | Idc Llc | 透明コンポーネントが集積されたディスプレイのための方法および装置 |
JP2012530276A (ja) * | 2009-06-15 | 2012-11-29 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | アナログ干渉モジュレータ |
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US8797632B2 (en) | 2014-08-05 |
US20120044237A1 (en) | 2012-02-23 |
TW201214002A (en) | 2012-04-01 |
WO2012024238A1 (en) | 2012-02-23 |
KR20130091763A (ko) | 2013-08-19 |
CN103109315A (zh) | 2013-05-15 |
EP2606485A1 (en) | 2013-06-26 |
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