DE69529698D1 - Einkapselung eines Halbleiterbauelementes mit hoher Feuchtigkeitsfestigkeit - Google Patents
Einkapselung eines Halbleiterbauelementes mit hoher FeuchtigkeitsfestigkeitInfo
- Publication number
- DE69529698D1 DE69529698D1 DE69529698T DE69529698T DE69529698D1 DE 69529698 D1 DE69529698 D1 DE 69529698D1 DE 69529698 T DE69529698 T DE 69529698T DE 69529698 T DE69529698 T DE 69529698T DE 69529698 D1 DE69529698 D1 DE 69529698D1
- Authority
- DE
- Germany
- Prior art keywords
- encapsulation
- semiconductor device
- moisture resistance
- high moisture
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3135—Double encapsulation or coating and encapsulation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
- H01L23/4334—Auxiliary members in encapsulations
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/50—Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6134885A JP2531382B2 (ja) | 1994-05-26 | 1994-05-26 | ボ―ルグリッドアレイ半導体装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69529698D1 true DE69529698D1 (de) | 2003-04-03 |
DE69529698T2 DE69529698T2 (de) | 2004-01-15 |
Family
ID=15138791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69529698T Expired - Fee Related DE69529698T2 (de) | 1994-05-26 | 1995-05-23 | Einkapselung eines Halbleiterbauelementes mit hoher Feuchtigkeitsfestigkeit |
Country Status (5)
Country | Link |
---|---|
US (2) | US5989940A (de) |
EP (1) | EP0684641B1 (de) |
JP (1) | JP2531382B2 (de) |
KR (1) | KR0152700B1 (de) |
DE (1) | DE69529698T2 (de) |
Families Citing this family (74)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3007497B2 (ja) | 1992-11-11 | 2000-02-07 | 三菱電機株式会社 | 半導体集積回路装置、その製造方法、及びその実装方法 |
JP2531382B2 (ja) * | 1994-05-26 | 1996-09-04 | 日本電気株式会社 | ボ―ルグリッドアレイ半導体装置およびその製造方法 |
USRE39426E1 (en) | 1996-06-19 | 2006-12-12 | International Business Machines Corporation | Thermally enhanced flip chip package and method of forming |
CN1110846C (zh) * | 1996-07-12 | 2003-06-04 | 富士通株式会社 | 半导体装置的制造方法 |
US6881611B1 (en) | 1996-07-12 | 2005-04-19 | Fujitsu Limited | Method and mold for manufacturing semiconductor device, semiconductor device and method for mounting the device |
KR100306937B1 (ko) * | 1996-12-04 | 2001-12-17 | 모기 준이치 | 수지 밀폐형 반도체 장치 및 그의 제조 방법 |
JP3671563B2 (ja) * | 1996-12-09 | 2005-07-13 | 株式会社デンソー | モールドicをケースに固定した構造の半導体装置 |
JP3032964B2 (ja) * | 1996-12-30 | 2000-04-17 | アナムインダストリアル株式会社 | ボールグリッドアレイ半導体のパッケージ及び製造方法 |
JP3398004B2 (ja) * | 1997-03-24 | 2003-04-21 | ローム株式会社 | パッケージ型半導体装置の構造 |
JPH10294418A (ja) * | 1997-04-21 | 1998-11-04 | Oki Electric Ind Co Ltd | 半導体装置 |
JPH10321631A (ja) * | 1997-05-19 | 1998-12-04 | Oki Electric Ind Co Ltd | 半導体装置およびその製造方法 |
KR19990005515A (ko) * | 1997-06-30 | 1999-01-25 | 윤종용 | 금형을 이용한 씨오비(cob) 패키지 제조 방법 |
WO1999015582A1 (de) * | 1997-09-22 | 1999-04-01 | Siemens Aktiengesellschaft | Duroplast verbundwerkstoff mit ausdehnbare mikrohohlkugeln, sowie seine verwendung zur verkapselung |
JPH11219984A (ja) * | 1997-11-06 | 1999-08-10 | Sharp Corp | 半導体装置パッケージおよびその製造方法ならびにそのための回路基板 |
KR100246366B1 (ko) * | 1997-12-04 | 2000-03-15 | 김영환 | 에리어 어레이형 반도체 패키지 및 그 제조방법 |
JP3087709B2 (ja) * | 1997-12-08 | 2000-09-11 | 日本電気株式会社 | 半導体装置およびその製造方法 |
JPH11260863A (ja) * | 1998-03-09 | 1999-09-24 | Sumitomo Electric Ind Ltd | 半導体装置用接続端子とその製造方法 |
TW469611B (en) * | 1998-03-12 | 2001-12-21 | Delta Electronics Inc | Packaging method for electronic device |
JPH11283593A (ja) * | 1998-03-27 | 1999-10-15 | Mitsumi Electric Co Ltd | 電池パック |
JP3648053B2 (ja) | 1998-04-30 | 2005-05-18 | 沖電気工業株式会社 | 半導体装置 |
US6329709B1 (en) * | 1998-05-11 | 2001-12-11 | Micron Technology, Inc. | Interconnections for a semiconductor device |
US6190945B1 (en) * | 1998-05-21 | 2001-02-20 | Micron Technology, Inc. | Integrated heat sink |
KR100266693B1 (ko) | 1998-05-30 | 2000-09-15 | 김영환 | 적층가능한 비지에이 반도체 칩 패키지 및 그 제조방법 |
KR100266698B1 (ko) * | 1998-06-12 | 2000-09-15 | 김영환 | 반도체 칩 패키지 및 그 제조방법 |
JP2000068436A (ja) * | 1998-08-18 | 2000-03-03 | Oki Electric Ind Co Ltd | 半導体装置および半導体装置用フレーム |
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US6818968B1 (en) * | 2000-10-12 | 2004-11-16 | Altera Corporation | Integrated circuit package and process for forming the same |
US6645794B2 (en) | 2000-10-18 | 2003-11-11 | Hitachi, Ltd. | Method of manufacturing a semiconductor device by monolithically forming a sealing resin for sealing a chip and a reinforcing frame by transfer molding |
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JP4594237B2 (ja) * | 2003-09-04 | 2010-12-08 | パナソニック株式会社 | 半導体装置 |
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JP5428123B2 (ja) * | 2006-08-16 | 2014-02-26 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
JP4293563B2 (ja) | 2006-11-28 | 2009-07-08 | Okiセミコンダクタ株式会社 | 半導体装置及び半導体パッケージ |
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-
1994
- 1994-05-26 JP JP6134885A patent/JP2531382B2/ja not_active Expired - Fee Related
-
1995
- 1995-05-23 EP EP95107867A patent/EP0684641B1/de not_active Expired - Lifetime
- 1995-05-23 DE DE69529698T patent/DE69529698T2/de not_active Expired - Fee Related
- 1995-05-25 KR KR1019950013221A patent/KR0152700B1/ko not_active IP Right Cessation
-
1997
- 1997-08-06 US US08/907,037 patent/US5989940A/en not_active Expired - Fee Related
- 1997-08-22 US US08/916,824 patent/US5793118A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0684641B1 (de) | 2003-02-26 |
KR0152700B1 (ko) | 1998-10-01 |
JP2531382B2 (ja) | 1996-09-04 |
EP0684641A3 (de) | 1996-11-06 |
US5793118A (en) | 1998-08-11 |
DE69529698T2 (de) | 2004-01-15 |
US5989940A (en) | 1999-11-23 |
JPH07321248A (ja) | 1995-12-08 |
EP0684641A2 (de) | 1995-11-29 |
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