KR950007331U - 반도체 제조용 도포장치 - Google Patents

반도체 제조용 도포장치

Info

Publication number
KR950007331U
KR950007331U KR2019930015786U KR930015786U KR950007331U KR 950007331 U KR950007331 U KR 950007331U KR 2019930015786 U KR2019930015786 U KR 2019930015786U KR 930015786 U KR930015786 U KR 930015786U KR 950007331 U KR950007331 U KR 950007331U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
coating device
manufacturing coating
semiconductor
manufacturing
Prior art date
Application number
KR2019930015786U
Other languages
English (en)
Other versions
KR970000386Y1 (ko
Inventor
최동규
Original Assignee
현대전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자 주식회사 filed Critical 현대전자 주식회사
Priority to KR2019930015786U priority Critical patent/KR970000386Y1/ko
Publication of KR950007331U publication Critical patent/KR950007331U/ko
Application granted granted Critical
Publication of KR970000386Y1 publication Critical patent/KR970000386Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
KR2019930015786U 1993-08-17 1993-08-17 반도체 제조용 도포장치 KR970000386Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930015786U KR970000386Y1 (ko) 1993-08-17 1993-08-17 반도체 제조용 도포장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930015786U KR970000386Y1 (ko) 1993-08-17 1993-08-17 반도체 제조용 도포장치

Publications (2)

Publication Number Publication Date
KR950007331U true KR950007331U (ko) 1995-03-21
KR970000386Y1 KR970000386Y1 (ko) 1997-01-17

Family

ID=19361294

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930015786U KR970000386Y1 (ko) 1993-08-17 1993-08-17 반도체 제조용 도포장치

Country Status (1)

Country Link
KR (1) KR970000386Y1 (ko)

Also Published As

Publication number Publication date
KR970000386Y1 (ko) 1997-01-17

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