DE19982072T1 - Hochgeschwindigkeits-Präzisionspositioniervor- richtung - Google Patents

Hochgeschwindigkeits-Präzisionspositioniervor- richtung

Info

Publication number
DE19982072T1
DE19982072T1 DE19982072T DE19982072T DE19982072T1 DE 19982072 T1 DE19982072 T1 DE 19982072T1 DE 19982072 T DE19982072 T DE 19982072T DE 19982072 T DE19982072 T DE 19982072T DE 19982072 T1 DE19982072 T1 DE 19982072T1
Authority
DE
Germany
Prior art keywords
stage
forces
motion
planar
cancellation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19982072T
Other languages
English (en)
Inventor
Steven P Cahill
Bradley L Hunter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novanta Inc
Original Assignee
General Scanning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Scanning Inc filed Critical General Scanning Inc
Publication of DE19982072T1 publication Critical patent/DE19982072T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Position Or Direction (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Vehicle Body Suspensions (AREA)
  • Automatic Control Of Machine Tools (AREA)
  • Machine Tool Units (AREA)
  • Linear Motors (AREA)
DE19982072T 1998-09-18 1999-09-13 Hochgeschwindigkeits-Präzisionspositioniervor- richtung Withdrawn DE19982072T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/156,895 US6144118A (en) 1998-09-18 1998-09-18 High-speed precision positioning apparatus
PCT/US1999/020932 WO2000017724A1 (en) 1998-09-18 1999-09-13 High-speed precision positioning apparatus

Publications (1)

Publication Number Publication Date
DE19982072T1 true DE19982072T1 (de) 2001-01-04

Family

ID=22561554

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69937547T Expired - Lifetime DE69937547T2 (de) 1998-09-18 1999-09-13 Geraet zur genauen hochgeschwindigkeits-positionierung
DE19982072T Withdrawn DE19982072T1 (de) 1998-09-18 1999-09-13 Hochgeschwindigkeits-Präzisionspositioniervor- richtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69937547T Expired - Lifetime DE69937547T2 (de) 1998-09-18 1999-09-13 Geraet zur genauen hochgeschwindigkeits-positionierung

Country Status (8)

Country Link
US (3) US6144118A (de)
EP (1) EP1055163B1 (de)
JP (3) JP4970651B2 (de)
KR (1) KR100583040B1 (de)
AT (1) ATE378625T1 (de)
DE (2) DE69937547T2 (de)
TW (1) TW449680B (de)
WO (1) WO2000017724A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013102477A1 (de) * 2013-03-12 2014-09-18 Carl Mahr Holding Gmbh Positioniervorrichtung für mehrachsige Verstelltische

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