AU411601B2 - Magnetic positioning device - Google Patents
Magnetic positioning deviceInfo
- Publication number
- AU411601B2 AU411601B2 AU23548/67A AU2354867A AU411601B2 AU 411601 B2 AU411601 B2 AU 411601B2 AU 23548/67 A AU23548/67 A AU 23548/67A AU 2354867 A AU2354867 A AU 2354867A AU 411601 B2 AU411601 B2 AU 411601B2
- Authority
- AU
- Australia
- Prior art keywords
- positioning device
- magnetic positioning
- magnetic
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D15/00—Component parts of recorders for measuring arrangements not specially adapted for a specific variable
- G01D15/24—Drives for recording elements and surfaces not covered by G01D5/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R17/00—Measuring arrangements involving comparison with a reference value, e.g. bridge
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US554181A US3376578A (en) | 1966-05-31 | 1966-05-31 | Magnetic positioning device |
AU23548/67A AU411601B2 (en) | 1966-05-31 | 1967-06-22 | Magnetic positioning device |
US27436D USRE27436E (en) | 1966-05-31 | 1970-03-27 | Magnetic positioning device |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US554181A US3376578A (en) | 1966-05-31 | 1966-05-31 | Magnetic positioning device |
AU23548/67A AU411601B2 (en) | 1966-05-31 | 1967-06-22 | Magnetic positioning device |
US2406070A | 1970-03-27 | 1970-03-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2354867A AU2354867A (en) | 1969-01-09 |
AU411601B2 true AU411601B2 (en) | 1971-03-12 |
Family
ID=27152804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU23548/67A Expired AU411601B2 (en) | 1966-05-31 | 1967-06-22 | Magnetic positioning device |
Country Status (2)
Country | Link |
---|---|
US (1) | USRE27436E (en) |
AU (1) | AU411601B2 (en) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55501086A (en) * | 1978-12-21 | 1980-12-04 | ||
US4622609A (en) * | 1984-05-04 | 1986-11-11 | Barton R E | Read/write head positioning apparatus |
US4893071A (en) * | 1988-05-24 | 1990-01-09 | American Telephone And Telegraph Company, At&T Bell Laboratories | Capacitive incremental position measurement and motion control |
US4958115A (en) * | 1988-11-28 | 1990-09-18 | At&T Bell Laboratories | Capacitively commutated brushless DC servomotors |
US5247608A (en) * | 1991-04-01 | 1993-09-21 | At&T Bell Laboratories | Method and apparatus for achieving dynamic path control of multiple robots |
US5528118A (en) | 1994-04-01 | 1996-06-18 | Nikon Precision, Inc. | Guideless stage with isolated reaction stage |
US7365513B1 (en) | 1994-04-01 | 2008-04-29 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US5874820A (en) | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
US6989647B1 (en) | 1994-04-01 | 2006-01-24 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US6246204B1 (en) | 1994-06-27 | 2001-06-12 | Nikon Corporation | Electromagnetic alignment and scanning apparatus |
US5828142A (en) * | 1994-10-03 | 1998-10-27 | Mrs Technology, Inc. | Platen for use with lithographic stages and method of making same |
DE4436865A1 (en) * | 1994-10-17 | 1996-08-08 | Pasim Mikrosystemtechnik Gmbh | Modular planar rotor and process for its manufacture |
US5623853A (en) * | 1994-10-19 | 1997-04-29 | Nikon Precision Inc. | Precision motion stage with single guide beam and follower stage |
KR0159675B1 (en) * | 1995-01-11 | 1999-01-15 | 오카노 사다오 | Linear motor device for a machine |
TW318255B (en) | 1995-05-30 | 1997-10-21 | Philips Electronics Nv | |
US5760564A (en) * | 1995-06-27 | 1998-06-02 | Nikon Precision Inc. | Dual guide beam stage mechanism with yaw control |
US6252234B1 (en) | 1998-08-14 | 2001-06-26 | Nikon Corporation | Reaction force isolation system for a planar motor |
US6144118A (en) | 1998-09-18 | 2000-11-07 | General Scanning, Inc. | High-speed precision positioning apparatus |
US6188147B1 (en) | 1998-10-02 | 2001-02-13 | Nikon Corporation | Wedge and transverse magnet arrays |
US6208045B1 (en) | 1998-11-16 | 2001-03-27 | Nikon Corporation | Electric motors and positioning devices having moving magnet arrays and six degrees of freedom |
US6661125B2 (en) * | 2000-03-02 | 2003-12-09 | Shinano Electronics Co., Ltd. | Linear motor |
US6437463B1 (en) | 2000-04-24 | 2002-08-20 | Nikon Corporation | Wafer positioner with planar motor and mag-lev fine stage |
US6452292B1 (en) | 2000-06-26 | 2002-09-17 | Nikon Corporation | Planar motor with linear coil arrays |
US6445093B1 (en) | 2000-06-26 | 2002-09-03 | Nikon Corporation | Planar motor with linear coil arrays |
US7230355B2 (en) * | 2004-12-21 | 2007-06-12 | Baldor Electric Company | Linear hybrid brushless servo motor |
US7566997B2 (en) * | 2007-03-30 | 2009-07-28 | Baldor Electric Company | Gas bearing system |
US8803371B2 (en) | 2011-07-11 | 2014-08-12 | Baldor Electric Company | Secondary for linear drive motor comprising sheet of highly permeable magnetic material having synchronized motor teeth, encoder teeth, and commutation tracks integrally formed therein |
US8791608B2 (en) | 2011-07-11 | 2014-07-29 | Baldor Electric Company | Primary for linear drive motor with solid steel stacks |
US8418350B2 (en) | 2011-07-11 | 2013-04-16 | Baldor Electric Company | Method of forming a secondary for linear drive motor comprising sheet of highly permeable magnetic material having synchronized motor teeth, encoder teeth, and commutation tracks integrally formed therein |
US8922068B2 (en) | 2011-07-11 | 2014-12-30 | Baldor Electric Company | Linear drive motor with improved bearing system |
US9829347B2 (en) | 2015-06-03 | 2017-11-28 | Hiwin Mikrosystem Corp. | Capacitance sensation unit of plane position measurement device |
-
1967
- 1967-06-22 AU AU23548/67A patent/AU411601B2/en not_active Expired
-
1970
- 1970-03-27 US US27436D patent/USRE27436E/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
USRE27436E (en) | 1972-07-18 |
AU2354867A (en) | 1969-01-09 |
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