TW507120B - Method and subsystem for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site - Google Patents

Abstract

Method and subsystem are provided for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site utilizing an estimated change in temperature of motors caused when the motors drive the stage according to a number of possible trajectories. The method includes receiving reference data which represent locations of microstructures to be processed at the site, determining a plurality of possible trajectories based on the data, and estimating a change of temperature of motors caused when the motors drive the stage based on each of the possible trajectories. The method also includes determining a substantially optimum trajectory from the possible trajectories wherein positioning accuracy of the stage is maximized by following the substantially optimum trajectory.

Description

507120 Α7 Β7 V. Description of the invention (1) The summer of the present invention1 · The scope of the present invention The present invention relates to a method for generating a trajectory of a mountain motor driving stage when processing a microstructure at a laser processing point And subsystems. 2. Technical Background Memory repair is a processing program that is used to manufacture memory crossbar circuits (DRAM or SRAM) to improve manufacturing yield. The memory wafer factory "is manufactured using additional memory cells and rows. When testing memory chips (although still in wafer form), any defects found will be recorded in the database. Crystals with defective wafers The circle can be repaired using a link with a pulsed laser. The system generally uses wafer processing equipment that transports semiconductor wafers to laser! Processing machines, and obtains information about the type of database, which indicates that the link should be in Where to cut off and carry out the necessary link melting of each wafer. Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs' consumer cooperatives printed successive generations of DRAM using delicate element geometries in order to pack more memory into smaller chips. This The manufacturing impact of smaller components is assigned to the link geometry of the excess radiation. When the component is smaller, the link is smaller and the N.interval (link-to-link interval) is shortened. Smaller The link geometry requires a smaller laser spot size in order to smoothly remove the selected link without affecting adjacent links, preferably with little (if possible) loss of yield. Groups are configured in a common gap. A general group can be made up of 20-50 groups of approximately 0 · 8 // Μ wide, 6 # Μ long and separated links with a 3 // Μ gap. Groups can be parallel to X or The gap vector on the y-axis is configured. 常 Often, multiple groups will be found to be collinear, and at the end of a group, the Chinese National Standard (CNS) A4 specification (210X297 mm) is applied at the paper scale 507120 A7 ____B7__ V. Description of the invention (>) 4 Then there are only 2 or 3 "gap" between the beginning of the group. At other times, the collinear group will be separated by hundreds of microns. General DRAM chips A group of links with an extended configuration with hundreds of wafers across the wafer. The above-mentioned utility patent application discloses a high-performance χ-y stage for placing a group of semiconductor wafers under a stationary laser beam. The χ-y stage is required to achieve the many high-speed movements required to process an area of the wafer. Usually the χ-y stage is limited by position, velocity, acceleration, and voltage conditions. The position limit is the limit of the stage travel. The rate limitation may be due to being used Limits for placing sensing elements at the stage and / or limits imposed by the type of bearing used. Acceleration limits are usually current limits that can be used to drive the stage due to considerations of motor, amplifier or gas power supply. Voltage limits are usually Rarely occurs. Movements that require excessive voltage must be avoided to prevent saturation of the receiver. Voltage limits are generally encountered during brief high-acceleration movements. ° This stage can be executed with a relatively large number of accelerations (such as 3G). It can be moved and stopped quickly at the end of the movement. At the same time, the stage must also be operated with very high accuracy (nano-level accuracy). The combination of very high performance and the need for extreme precision creates another stage stage Restriction. Stage Easy • 2 is affected by the power level consumed by the motor coil. If the consumed power does not cause the coil temperature to rise above 2 degrees Celsius, the accuracy of the stage will be endangered. At the same time, if the spectrum content of the force applied to the stage contains a frequency higher than the frequency of the first mechanical mode of the system The level of energy will cause resonance of the mechanical components of the stage. These resonances will impair accuracy or apply Chinese National Standard (CNS) A4 specifications (210X297 mm) at the required 5 paper sizes. I- _----ml In _ ------- 1¾ clothing II (Please Please read the notes on the back before filling in this page) Printed by the Consumers ’Cooperative of the Ministry of Economic Affairs, Intellectual Property Bureau, 507120 A7 B7 V. Description of the invention (&); Before the required accuracy level is reached, additional movement is required when the move is terminated Settling time. SUMMARY It is an object of the present invention to provide an improved method and a subsystem for generating a trajectory to be followed by a motor-driven stage when a microstructure is processed at a laser processing point. In order to accomplish the above and other objects of the present invention ', a trajectory method for producing a track driven by a motor when a microstructure is processed at a laser processing point is provided. The method includes receiving reference data representing the location of the microstructure to be processed, and based on that data, determining the most possible trajectories. When at least one set of motors drives the stage according to each possible trajectory, the resulting temperature change of the at least one set of motors is estimated. The method further includes determining a set of approximately optimal trajectories from the possible trajectories, wherein the positioning accuracy of the stage is maximized by following the approximately optimal trajectories. The at least one set of motors may include at least one set of coils, and the estimation step is based on the energy consumption of each possible trajectory in the at least one set of coils.

Part 1 ^ Page I Orders Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed in the middle circle line groups, one by one, to as few as the number of the line can be included. Predictable and step-by-step model estimation

It is estimated that it should be moved in parallel. The number of steps in a few steps includes the monthly weight of the daggers that are lifted by the degree of warmth on the lifting bag. Each consumption of the AN consumption daggers will be in the circle line group! As little as it should be. Each of the stage-level films-y-movement X-shift groups is counted to be inclusive. The bag is gathered at Luhaimir in three steps. L-CN I quasi-standard home country and country I used in primary school | moderately printed on paper | printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and the employee consumer cooperative 507120 A7 ______B7 V. Description of the invention (i) The Ei estimation step can estimate the temperature change caused by most motors when the motor drives the X-y stage according to each possible trajectory. The microstructure can be placed on a plurality of spaced apart slices of a semiconductor wafer supported on a stage. The microstructure can be a chip wire. The wafer may be a semiconductor memory element and wherein the wire will be ablated at a processing point to repair a defective memory cell of the element. At least one set of possible trajectories may have a set of acceleration / deceleration curves. In order to further accomplish the above object and other objects of the present invention, a trajectory subsystem for generating a trajectory tracked by a motor-driven stage when processing a microstructure at a laser processing point is provided. The subsystem includes a device for receiving reference data representing the microstructured location where the processing point will be processed, and a device for determining a plurality of possible trajectories based on the data. The subsystem also includes means for estimating changes in temperature of the at least one group of motors as the at least one group of motors drives the stage according to each possible trajectory. The subsystem further includes a device for determining a set of approximately optimal trajectories from possible trajectories, in which the positioning accuracy of the stage is maximized by following the approximately optimal trajectories. The at least one set of motors may include at least one set of coils and the estimation device therein estimates for each possible trajectory the consumption in the at least one set of coils. The estimation device may include a thermal response pattern of the at least one set of coils to predict the Each possible trajectory causes a temperature rise due to energy consumed in the at least one set of coils. 7 This paper size applies to China National Standard (CNS) A4 (210X297 mm) --------- ¾ clothing ------ 1T ------ 0 (Please read the note on the back first Please fill in this page again for details) 507120 A7 B7 V. Description of the invention (S) Each possible trajectory can contain a plurality of moving segments and wherein the estimation device estimates the energy consumption in at least one set of coils of each moving segment. The estimation device can estimate the temperature change of most of the motors when the motor drives the x_y stage according to each possible trajectory. The above and other objects, features, and advantages of the present invention can be understood from the following detailed description of the best mode of the present invention with reference to the drawings. Explanation of the figure: Figure 1 is a detailed exploded block diagram of a memory repair system showing the main subsystems according to the present invention; Figure 2 is a system structure diagram with a trajectory data flow; Figure 3 is a set of examples A diagram showing a wafer processing location containing a number of wafers, wafer locations, link groups, and reference areas positioned to form a relevant area of a reference surface; Figure 4 shows a wafer processing location within the wafer location An exploded view of a row of chip rows; Fig. 5 is an exploded view of various types of moving segments; Fig. 6 shows the amplitude with respect to time and a graph showing the pulse / stroke curve of the moving segments; Fig. 7 is relative to The amplitude of time and the graph showing the pulse / pulse curve of the moving segment; and Figure 8 is the graph of the amplitude with respect to time and the curve showing the stop / jump / start of the moving segment. Detailed description of the preferred embodiment 8 This paper size is applicable to China National Standard (CNS) A4 specification (210 X297 mm) --------- installed-(Please read the precautions on the back before this page)

1T dream 丨 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 507120 A7 B7 V. Description of the invention (b) The general indication of the laser processing system is 110, which is shown in Figure 1. It is printed by the Consumer Cooperatives of the Ministry of Economics and Intellectual Property Bureau Circle 4 is placed within the laser processing system 110 and database information from the user interface Π is provided to confirm the link on wafer 4 (33 in Figure 3) that is ablated to repair the defective memory cell. ). The database information is used by the trajectory planner 12 and the DSP-based controllers 15 and 16 and combined with the mobile stage 6 and 7 to calibrate to define the mobile segment of the trajectory generator. The trajectory generator uses laser The operations of, focusing optics, and xy-stages 6, 7 are performed and coordinated to ablate the links, as shown in the practical application above. These operations include controlling the x-y movement with better high-speed accuracy stages 6 and 7 and simultaneously placing optical elements when the laser generates pulses so that the middle narrow portion of the processing laser beam is co-located with the 33 coordinate of the link. All memory repair systems include dynamic mechanisms to provide relative movement between the circular surface and the plane of the focal point. In some cases, this may include using a movement along the Z-axis to control the wafer height of the wafer 4 relative to a fixed height tunnel. In addition, in this action, the focusing lens can be moved in a "step-by-step" manner so as to be at the same position as the depth position derived from the focus data of the wafer from the scene. With this system, the entire height of the wafer remains fixed and the lens height of the objective lens is finally The linear servo mechanism and the controller 1 of the optical box 18 are controlled by the controllers 1, 4 and 17. The positioning of the lens or optical element with a better placement spanning the z-axis using the precision placement system provides a z- of approximately 0.1 V m Axis resolution or more subtle and has a "signal" bandwidth of 3 decibels at approximately 150 Hz at a maximum movement range of approximately 3 mm. Batch-(Please read the precautions on the back before filling this page),? τ line · This paper size is applicable to Chinese National Standard (CNS) A4 specification (210 × 297 mm) 507120 A7 _____B7 V. Description of the invention (1) "Trajectory planner" 1 2 is used in conjunction with mobile systems 6, 7, 1 7 The relevant DSP-based controller 16 is used to design the channel 4 of the wafer 4 and the position of the narrow middle part of the beam 5. The trajectory planner combines the user interface 1 1 and the alignment system (the latter one Information that is installed on an accuracy level stage, such as a wafer level stage, that is used to define laser processing points relative to targets in the coordinate system. This information is derived from the database to generate a set of "Link diagrams", selections, and other information related to the operation of the memory repair. The technicians who are familiar with the movement control and estimation will understand the estimated demand for the accuracy of the three-dimensional space placement in the high-speed memory repair processing system. In strokes with a maximum range of approximately 300 mm or more, a few tenths of a micrometer is equivalent to the entire area of the latest wafers. Processing above 50 mm / s or " cutting rate " is advantageous. At the same time, U.S. Patent No. 6,144,118 is incorporated herein by reference for a detailed description of a preferred wafer placement system. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Referring next to Figure 3, a system with a broken link will generally need to process (ie, laser fuse) a large subset 33 of links 34 on the wafer 4. Information defining the chip link to be processed is provided to the control program. The program will in turn define a set of reference positions 32 around the wafer 35 to be processed, that is, a set of wafer positions. The location will generally contain a sufficient number of points to precisely define the trajectory of the wafer and lens system according to the commands generated by the mobile system control, as described in the utility application mentioned above. Cattle laser pulsed pulsed laser beams are generally provided by Q-switched YAG lasers. The lasers have a predetermined pulse width, repetition rate, and wavelength. For example, the US 10 paper standards are applicable to Chinese national standards ( CNS) A4 specification (210X297 mm) disclosed in No. 5,998,759. A set of control signals 20 are supplied to the laser to generate a set of pulse waves that cooperate with the continuous placement of the wafer and lens. Those skilled in this technology will recognize that laser parity and movement will likely be compounded by interpositional or cumulative position errors. In the preferred embodiment, adjusting one of the previously "arranged" sets of laser pulses to adjust the radiation delay is included to compensate for such positional errors. The time resolution for this correction is preferably in parts per billion or less. Preferably, this complete error correction is precisely defined by a set of " track vectors " which converts the total position error into a delay. This trajectory vector can be contained in a transformation matrix that is operatively connected to a controller to dynamically correlate the coordinate system. Referring next to Fig. 2, the trajectory generation is a procedure for designating, representing, and realizing continuous moving channels. For the system described here, it is necessary to synchronize the moving stage and laser emission so that each link will be fired at the center. The trajectory generation structure is shown in Figure 2. The beam movement is achieved by calculating segments from the application data; set points from the segments; and servo commands from the set points. The main functional items in this organization are planner, generator, and inserter. The planner uses the analysis of data in specific areas, such as link maps and patching data to form channels for the stage. The output of this module is a set of trajectories; a list of moving clips, each of which is selectively matched with the control clip. When the laser beam and the three-dimensional coordinates of the link to be processed are determined, a set of motion control programs uses the trajectory planner or generator 12 of Figure 1 to efficiently process the target structure. ______11 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 507120 A7 B7 V. Description of the invention (Gas) Then refer to Figure 4 and Figure 5. In the preferred system, the acceleration and velocity curves are the same as The following "moving clip" patterns are relevant: 1. PVT (position / rate / time) clip 1 10. It is used to accelerate to the desired position and speed. The time required to travel through this clip is optional: if If not specified, the minimum time will be calculated. 2. CVD (Fixed-Rate / Distance) segment Π1. This type has only a single scalar rule. The segment channel length. The beam moves at a fixed rate within a specified distance. The rate is specified by the end point of the previous segment. Program control is generally performed during the CVD segment. 3. CVT (fixed rate / time) segment. This is the same as the CVD segment, but the duration of the segment is specified and It is not its length. 4. Stop segment 3. This segment is not specified. It stops the stage as quickly as possible. "Destroyed" represents the emission of a laser pulse to cut the link Π4. Furthermore, "Stop" Fragment termination moves, preferably as fast as possible. Program control and link blowout are usually associated with fixed-rate segments. In the preferred system, the acceleration and velocity profiles are combined with a DSP-based servo controller 16 to generate the chip x-y movement. The lens transition along the optical axis is coordinated with the X, y movement, so that when the laser generates a pulse, the narrow part of the beam will be placed at the target position of the wafer. The z-coordinate of the narrow part of the beam can be dynamically adjusted between any two groups of structures on the wafer, including adjacent structures arranged in the same column (along the x or y direction) of a single wafer. For example, the Z-axis incremental resolution (minimum height difference) of the link fusing is preferably about O.lym and has a limit of about 0.05 // m. 12 This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) (Please read the precautions on the back before

#f Printed by the Ministry of Economic Affairs, Intellectual Property Bureau, Consumer Cooperatives 507120 A7 B7 V. Explanation of the Invention (L0 The channel planning within the system involves the following issues: give the initial and final position and rate (vector) regulations, find The "best" trajectory that meets the termination point conditions and limits on location packets, maximum speed, maximum acceleration, and maximum voltage. This optimal trajectory minimizes the "cost" of the trajectory. For the given trajectory The "cost of line" refers to the weighted sum of the time of the trajectory and the energy consumed in the motor coil. The weighting factor of time is always a unit (1.0). The weighting factor of energy is a variable. Many trajectories can meet the needs End point conditions and meet system constraints. However, the costs associated with multiple solutions can have large-scale variability. The algorithm of the present invention finds the best solution (the lowest "cost") and uses the trajectory to perform the movement. Consider A set of simple examples. The trajectory rule often encountered when performing memory repair is called "combination". Laser processing needs to follow Adjacent two sets of short-line segments. This segment is collinear and the segment is processed at the same fixed rate. Group gaps exist between collinear segments. Group "CV" segments are OK (please read the notes on the back before filling this page) The equipment is used to cross the gap (that is, using a fixed rate segment at the same rate as the previous segment). In addition, the gap can be crossed in a little less time using a short acceleration / deceleration curve. The cost of the CV solution is only Is the time required to cross the gap (distance / rate) because there is no energy consumption in the CV segment. However, the acceleration / deceleration curve will take less time but greater energy consumption. In this case, the best choice depends on Relative weighting of the time of energy consumption relative to the cost function. Movement curve 13 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) Printed by the Ministry of Economic Affairs Intellectual Property Bureau Employee Consumption Cooperative 507120 A7 B7 Ministry of Economy Wisdom Printed by the Consumer Cooperatives of the Property Bureau V. Invention Description (U) The track fragment contains a group or More intervals. A set of intervals is defined as a set of trajectory subsets, where acceleration is limited to a predetermined function of two sets of variables: APK (peak acceleration amplitude) and Tint (duration of interval). Type of acceleration curve It is trochoidal or harmonic. Because the pattern is predetermined, only the amplitude and duration are required to fully specify the movement during the trajectory interval. The trajectory is a series of continuous (time, position, velocity, acceleration and shaking) ) Interval, each interval has a variable duration and acceleration amplitude (may be zero). It should be noted that a set of CV (fixed rate) trajectory segments is a set of single intervals with APK = 0. The system of Figure 1 Reach a set of continuous trajectories to form a set of single moving curves. A single moving curve can last many seconds and contain hundreds of trajectory segments. Multiple intervals are generally required to meet the termination point requirements for trajectory segments. Intervals can generally be described as corresponding to "navigation" or "pulse C" or Π ". A set of C-segments has the feature of APK = 0. A set of P · segments has a non-zero APK. Previously In the example given, the navigation solution contains a single set of "C" zones, while the acceleration / deceleration solution is a set of "P-P" solutions. The other segment combinations are required to handle the various trajectory regulations required by the system in Figure 1: (C, CP, PC, PP, PCP, PPPP, PPCPP). Not all solution types are applicable to the given trajectory segment. For example, trajectory segments containing different start and final velocities (Viovf) cannot be satisfied in the C interval. Solution 14 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) Τ: Γ '-clothing-(Please read the precautions on the back before ^ Γ this page) Order 507120 A7 B7 V. Invention Explanation (\ >) The solution for printing CVT or CVD fragments by the Consumer Cooperatives of the Ministry of Economic Affairs and Intellectual Property Bureau is simple (zero acceleration at specified time or distance). Because time was specified and energy consumption was zero, no optimization was performed. CV fragments will not be discussed further. The solution to the PVT trajectory segment is more complicated. The solution includes the following steps: 1. Decompose the vector gauge into X and y axis specifications. 2 · Find the minimum cost solution for each axis separately. 3. Take the slowest axis time and find a "quick" axis solution, which depends on the same "slow" minimum cost of elapsed time. The minimum cost solution for a single axis consists of the following steps: 1. Find the best solution for each type of solution (ie, C, P, PC, CP, etc.). 2. Choose the best solution between multiple forms (if multiple solutions exist). The relative cost of energy is controlled by the variable Kp. Kp is used in the cost formula as follows: Cost = T + Ε / Κρ It should be noted that Kp has the dimension of power. This provides the choice of Kp straight 15 paper sizes applicable to Chinese National Standard (CNS) A4 specifications (210X297 mm); _ approved clothing-(Please read the precautions on the back before filling this page) Line 507120 A7 B7 V. Invention Explain (0) the criteria of perception. If Kp is set to be large, the cost of energy consumed is small. The resulting solution will be minimal. Conversely, setting Kp to be small would make the energy "expensive", and therefore the solution would often be to minimize power at the cost of time. Because Kρ is a variable, it can be set dynamically. The system of Figure 1 uses this capability to further control power consumption (and therefore improve accuracy). During production operations, a sequence of track segments must be provided to the channel planning algorithm. The channel planning algorithm determines the energy that will be consumed during each moving segment. Using the simple first-order mode of the thermal response of the coil, the channel planning algorithm will predict the temperature caused by the energy consumption history of the trajectory: rise. In a trajectory segment containing many short acceleration segments, the estimated temperature may rise more than required. The channel planning algorithm will then reduce Kρ 値 to bias the mobile optimization solution towards lower power areas. Conversely, when the estimated temperature rise is very small, the channel planning algorithm will increase κρ. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economics. Simulations achieved with real memory patching data reveal the dynamic adjustment of the relative cost of time to energy to reduce changes in motor temperature. The accuracy of the No. 1 system is quite sensitive to the rate of change of temperature (but not particularly sensitive to any particular temperature). The main source of stage temperature change is the change in motor power consumption caused by trajectory. Dynamically adjusting Kp as a function of estimated temperature significantly reduces variation and produces higher accuracy. When performing general memory repair trajectory, the power consumption level in the motor will be strongly affected by κρ. However, the total output of the system is κρ 16 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 507120 A7 B7 V. Description of the invention (ΐψ is a weak function. Therefore, the composition of the stage error caused by motor consumption Factors can be effectively controlled in a way that has a small impact on overall output. Because χ-y stages are significantly faster than competitive provision, this form of precise control can be achieved without much impact on market acceptance Solution Advantages The optimized multi-pulse solution provides the following advantages: The stable moving channel planning algorithm allows continuous movement on the xy plane with minimal stops. The movement curve is not limited to any position interruption and all shaking Derivative (derivative of acceleration). This limits the frequency content of the force applied to the stage, thereby reducing the excitation of the mechanical resonance of the stage and supporting structure (please read the precautions on the back before filling this page) to reduce power consumption. The trajectory is optimized (depending on the relative importance of time relative to power consumption) By using the control Kp as a function of the expected motor temperature, a simple device that reduces temperature variations and thus increases accuracy is implemented. Link Optimization As previously mentioned, the designated link sequence to be cut is rarely the guide link The optimal sequence of cutting procedures. The algorithm described here rearranges the links and thus reduces: 1) the execution time; 2) the power consumption of the motor; and 3) the frequency content of the force applied to the system. Reduced execution time leads to higher productivity of the system. Reduce motor power consumption and improve system accuracy. Borrowing 17 This paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 507120 A7 _____B7 V. Inventive Note (\ <) It may cause placement errors by avoiding The structural resonance excitation reduces the spectrum of the force t to improve accuracy and yield. The algorithm is modeled according to the conventional 'travel salesman' problem. However, in this case, what is of interest is the minimization of the cost of inspecting each link group rather than the minimization of the time of inspecting only each group. The classification algorithm also conveniently handles special cases and conditions that limit the performance of previous memory repair systems. The system of Figure 1 generally processes multiple wafers with a single " processing point ". The system's range size allows up to six or eight 64M DRAM wafers to be processed simultaneously. This process is called multi-wafer alignment (MDA). The use of MDA provides significant yield improvements by reducing the number of alignment operations required to process a wafer from one wafer at a time to one processing point at a time. The alignment operation may take approximately the same time as a single wafer dicing. MDA introduces another opportunity to take advantage of link rearrangement to improve yield. Link groups of adjacent chips may be collinear. Processing collinear groups without intervening PVT moving segments (ie, acceleration / deceleration segments) is usually the best solution. The link classification algorithm considers all groups within the processing point in order to find the best sequence. Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economics The algorithm is as follows: 1. Aggregate the link groups that need to be processed within all processing points. This often includes reading the "repair file" with the repair data, as shown in the second frame, and may convert the customer data format into an internal representation of the link to be cut. ___18 This paper size applies the Chinese National Standard (CNS) A4 specification (210X; 297 mm) 507120 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention uw) 2. Joint adjacent groups. When reading the list of link groups to be cut, the 'joint' neighboring groups become " aggregate ". Adjacent groups are combined if they are collinear. Groups can be processed at the same rate and the gap between the end point of a group and the start point of a subsequent group is larger than the minimum scale and smaller than the maximum scale. 3 _Confirm the "Edge" group. If the end point of an aggregation is too close to the actual limit of the stage packet, the stage cannot have enough acceleration to process the group at full speed and stop before the limit of the "impact" stage stroke. The aggregation uses the "all" proximity The link at the edge is scheduled to the new aggregate and the remainder stays in the original aggregate and is cut into two sets of aggregates. The new lower rate is assigned to the edge aggregate so that the stage has enough space to The new cutting rate is reached within the distance between the last link of the new group and the actual limit of the stage travel. 4. Classify the aggregation. The input to the classification is an aggregation with (arbitrary) direction assigned to each aggregation (arbitrary) (Ground) Sorted list. (Direction refers to the direction in which the links in the aggregation will be traversed, forward or backward.) The output of the classification process is a group of identical link groups assigned to each group in a new direction. The new sequence of the group. The reordered list is optimized. 5. Process the group. The sorted list of the group is entered into the channel gauge algorithm. The group uses the previously described The order of a single continuous-moving trajectory across the entire set of links is processed. Edge aggregation processing occurs as a group close to the stroke limit is a challenge for any memory patching system. The distance required to stop is a function of the square of the rate And the size of this paper is applicable to Chinese National Standard (CNS) A4 specification (210X297mm) ---------- install ------, 玎 ------ 0 (Please read the Please fill in this page again for attention) 507120 A7 _______B7_ V. Description of the invention) The reciprocal of speed. In the system of Figure 1, a compromise method is adopted when designing the xy stage to limit the end of the user's travel range and the actual limit of the travel The number of "overstrokes" that can be used between. Limits the part of the motor design optimized for the χ-y stage. If the stage is at the maximum cutting rate (15 mm / sec) at the user The edge of the packet travels, the limit distance between the edge of the user's packet and the actual limit of the stroke (about 200 // M) is not enough to stop the stage. One set of solutions is to reduce the maximum cutting rate to ensure the stage Can always Stop. This is not necessary because there is no need to increase the processing time of the internal link group. Another solution is to use a lower rate for the entire aggregation. This also unnecessarily increases the processing time. This is used here The solution is to make the minimum number of links accept the lower rate limit. The original aggregation is split on the first link that did not accept the reduced rate limit regardless of where the original group boundary occurred. Furthermore, specify The rate to the "edge" link is chosen as a fraction of the nominal rate (1 / η). A set of examples will help explain the advantages of this mechanism. Assume that the original group has a 4 // M link Gap. Also, assume that the maximum Q_ rate allowed for a particular laser in use is 20,000 pulses per second. The maximum rate during processing will be 80 mm / s. For a simple harmonic acceleration curve that accepts a maximum rate of 30 m / s squared, the stage will need _200 // Μ to stop (or reach the cutting rate from stopping). Assuming that some links in the group are sufficiently close to the edge of the user packet, the link will require a lower cut rate. The actual rate selected for the original aggregated fragment will be selected based on the minimum 値 η so that the new rate will be equal to the original rate divided by η. 20 This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 public shame) (Please read the notes on the back before ^^ this page), 1T Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperative, Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau ’s Consumer Cooperatives 507120 A7 ______B7 V. Invention Description () The η 値 utilization starts from 2 and increases until the generation rate is small enough to handle the last link (closest to the edge) in the aggregated fragment and the stage is kept adequate Stop distance and get interactively. Processing this aggregated fragment only at V / n will cause the laser emission rate to be reduced to Q / n (in this example, Q = 20,000). This may cause poor changes in link cut quality for links in segments that accept different laser Q-rates. This change is eliminated in the algorithm that introduces the concept of "damage. Every gap" (bpp). Under normal circumstances, bpp = 1 and the laser is fired once at each stage's moving gap. When the slice is processed at V / ri, bpp is set to η. The system in Figure 1 recognizes this parameter and emits a laser at a fixed rate equal to n * (V / n) / p = V / p = Q. The system " imaginary " has n-1 groups of " ghost " links are also distributed between each group of natural links. This forces the laser Q_rate to be the same as the Q-rate used on all other links and ensures that all links have a consistent U1 cut.) The quality algorithm further achieves the effect of affecting links near the edge of the user packet. An optimization. The link classification algorithm includes a set of parameters (T_settle), which specifies how long the stage should last at the cutting rate before the first link in the group. In general, the PVT segment (i.e., the segment where acceleration / deceleration of the stage occurs) will precede the CV segment (i.e., the segment where the stage rate is fixed and laser cutting occurs). If T_Settle is set to zero, the first link to be cut will happen exactly at the end point of the PVT segment and the beginning of the CV segment. In some cases, the stage cannot fully settle to the required level of accuracy without any settling time. This may cause laser misplacement of the first few links in the group. ______21 The size of this paper is applicable to Chinese National Standard (CNS) A4 (21〇297 mm) ---------- installed ------ 1T ------ 0 (Please read the Note: Please fill in this page again) 507120 A7 ______B7 V. Description of the invention (^) The T_settle parameter can be used to pre-expand the nominal CV segment to a distance equal to V * T_settle. This gives the stage some settling time and improves system accuracy with a small amount of production cost. This parameter is usually a few milliseconds. A non-zero T_Settle () affects the processing of "edge" links. Extend the CV segment to accommodate T_Settle applied only to the beginning of the segment. The algorithm can arbitrarily choose the preferred direction for cutting a group of link groups. If a group of edge groups is processed starting from the edge and moving towards the inside of the packet, the distance required to accommodate T_settle (D_settle) will further reduce the distance required to accelerate from 0 to V / n. Because the first link position is fixed, this means that a lower set of rates will need to be applied to the group if it is processed "inwardly". If the group is processed "out" (the stage stops just before the actual limit of the stroke), the D_settle distance will extend the link towards the inside of the stage packet without forcing a further reduction in the cutting rate of the fragment. Obviously, processing the edge-gathering fragments in the " outward M direction seems to maximize the cutting rate. This is not always the case. The function of the classification algorithm is to find the best direction. Gathering and sorting Printing and sorting of employee cooperatives by the Intellectual Property Bureau of the Ministry of Economy starts from the beginning position (Pi). This position corresponds to the last position (usually near the corner of the position) reached at the end of the alignment operation. The starting rate (Vi) is assumed to be zero. The classification algorithm determines the cost of processing all the 'available' aggregates in two possible directions. The calculation of the cost is as follows: Cost = Tpvt + Epvt / Kp + Tcvt where: __ 22 This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 507120 Μ ____ Β7_ V. Description of the invention (> ^)

Tpvt is the time from (Pi; Vi) to the start of the group;

Epvt is the energy consumption in the motor coil when moving:

Kp is the weighting factor (power unit) applied to the motor energy; and

Tcvt is the time required to complete the CV fragment. For each aggregation, the movement is assumed to start at (Pi; Vi). Each aggregation has two sets of cost figures-one for each direction. Costs in different directions can be significantly different. A parameter called N_level is used to control the classification algorithm. If N_level is set to 1, the aggregation / direction combination that exhibits the lowest cost is selected as the first processing aggregation. It is removed from the "Available" aggregate list and placed at the beginning of the "Program List". The starting position (Pi: Vi) is updated to reflect the position reached at the end of processing the first aggregation and the (non-zero) rate. The classification algorithm recalculates the cost of all available aggregations / directions. It should be noted that due to the significantly different starting conditions, there is no correlation between the cost determined by the second stage and the cost obtained by the first stage. The impact of non-zero start and end rates on costs may not be significant. The procedure of selecting the lowest cost aggregation / direction combination from the available groups is performed until no aggregation is available. The parameter N_level controls the search range of the best aggregation order. In the example given above, N_level is set to 1, and the best aggregation / direction is selected so that the processing result is not considered. Choosing the best aggregation is likely to result in a less efficient order of sequential aggregation. In addition to finding the best solution, if all the results of that choice can be detected, a truly best choice can be made. Then, considering all the results, the best solution is chosen. -------- 1¾ Clothing ------, 玎 ------ 0 (Please read the precautions on the back before filling in this page)

507120 A7 __________ B7 V. Description of the Invention (M) For example, suppose that there are ten groups (10) at the beginning that need to be classified. The cost of the initial set of twenty (20) clusters / directions will be considered. We can select the best five groups from this list of twenty groups (for example). These five sets of lists are then examined further. For each of the five groups, eighteen groups of untreated (18 = 2 * 9) clusters will be considered. From this list, select the best five groups and consider each of the five groups for a group of sixteen groups (16 = 2 * 8). Next, preferably five groups are selected from this list and the remaining aggregations are considered. This process continues until there are no unclassified aggregates. Then calculate the total cost of each group of the first five groups. The sum of the costs is obtained using the sum of the costs of the best solution selected from all the basic aggregation options. After that, one set of aggregates is selected and all processing procedures can be repeated again in the remaining set. Obviously, for a large number of aggregates, this thorough search to find the best aggregate is computationally very expensive. Patch data with multiple wafer locations may range from ten clusters to hundreds of clusters. For locations with many clusters, a thorough search can be time consuming. Fortunately, the experience of truly patching the data indicates that exhaustive searches at 1-level depth (N_leVel = l) are of little benefit. If N_level is set to 3 (for example), the search will be performed at the 3-level. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs It should be noted that the continuous search level is reached only after the first level at the optimal M-aggregation (M = 5, as described above). Although this may lead to the opportunity for the next best order to be selected, the additional costs associated with "inappropriate" first choices cannot be made up for by beneficial results (found at sequential search levels). There is a set of properties The argument can support experimental observations that the classification rule does not benefit when M or NJevel is a large number. For general repair capital 24 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 507120 Ministry of Economic Affairs Printed by A7 __ B7 of Intellectual Property Bureau Employee Cooperatives V. Invention Description (> >) It is expected that the stage will spend between 80% and 90% of the total time to launch lasers in CV clips. Rescheduling the data did not Affects CV processing time. Rescheduling optimizes PVT time (small amount) and can have a significant impact on the energy consumed. But 'once available " appropriate " channels are found (N__level = l), set N_level Being 2 or 3 results in only a small percentage of further time savings. Carrying the classification to the maximum level results in a small improvement over N_level = 3. Although the number of N_level is large Only a few improvements' Classification with N_level in the range of 1 to 3 has a significant impact on energy consumption and spectrum content. The classification rules look for opportunities to save momentum (because if you save momentum ', no energy is consumed). For example,' Dangxiang The two sets of clusters on adjacent wafers can be processed without intermediate pvt fragments, and 'stage' momentum is saved. Groups of adjacent links often appear. Classification will find a set of smooth moving curves, which starts from a set of columns The end point of the middle link group is transferred to the start point of another middle link group. This stable curve is generally transferred to three groups of stages than the traditional one: stop, jump, and start curves are faster and consume less. And has lower spectrum content. Finally, a set of examples will show why the direction of choosing to deal with edge link groups is not always obvious. Consider clustering at the end of the + X edge position. Assume that the original clustering must be divided into Two groups produce aggregated fragments. If the fragment is aggregated and processed in the + X direction, compared to if it is processed in the direction due to the impact of T_settle, it can High rate is processed. When clustering classification (assume N_leve] = l), it is assumed that the original clustering is selected to be processed in the + χ direction. In the following classification rule, the cost of processing fragmentation is false (please read the precautions on the back first) (Fill in this page again.) • Binding 'm1 -I 1 i-· 25_ This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) 507120 A7 B7 5. Description of the invention (> >) Economy The Ministry of Intellectual Property Bureau employee consumer cooperatives set up + X processing and -X processing and are determined. The cost will take into account the time difference in the CV segment according to the different speeds of the direction function. However, fragments cannot be processed at the same rate as previously gathered. The end point of the previous gather (the original gather, now cut) and the fragments often do not have enough distance between them to allow the stage to decelerate to + X fragment rate. The associated cost of attempting to process the fragment in the + X direction of the original aggregate and the + X traversal resulted in a rapid deceleration (from the original aggregate) to the _x rate, and then increased to a lower + X rate to cross the position . The cost of crossing the fragment in the -X direction is often less, because the stage can make a smoother transfer (that is, lower energy consumption) to stop near the end of the packet and then increase to a lower rate (-X direction) To reach the outermost link of the aggregate segment in an instant. Weighted energy savings (E / Kp) are often more significant than increased Tcv time. Benefits of the solution Aggregation classification shows the following benefits in comparison with previous implementations: 1. The algorithm considers links that span the entire location. This results in optimizations (opportunities to save momentum) that cannot be achieved when the classification is achieved with the wafer-to-wafer criteria. 2 The algorithm explicitly considers groups near the edge of the packet and treats them in the most efficient way that only accepts the limits of the actuating mechanism. 3. The algorithm takes into account the start and end velocities and the distance between the end point of a group and the start point of a subsequent group. This makes the combination of nearby groups clear. Previous algorithms combined nearby groups based on preset distance criteria only. It is very important to choose an appropriate distance threshold to meet the requirements. 26 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (2) 0X297 mm. (Please read the precautions on the back before H page). Binding. 507120 A7 B7 V. Explanation of invention (y +). In the algorithm, the only motivation for combining any nearby groups is to reduce the number of aggregates that need to be analyzed. This leads to the choice of shorter combined distances (i.e., groups that are not separated by more than X) than previous algorithms. The classification will be continuously placed " uncombined " aggregates, and CVT fragments may be replaced with PVT segments between groups. That is, if the initial " aggregated " stage is not aggregated, they can still be classified The steps are combined. < 4. Conversely, "uncombined" clustering may be easier to process outside the sequence. When the track being reviewed starts because the classification has four different start positions corresponding to the four sets of corners corresponding to the processing point This becomes obvious when the same data is generated. 5. The algorithm inherently reduces the spectrum content and energy consumption associated with the processing point. Because power consumption is included in the cost formula, optimizing the processing cost results in lower energy Consumption. Less significant may be that the same optimization results in longer sustained pulses with less acceleration. Segment planning multiple pulse curves are overly restricted-the curve has more parameters than boundary conditions. In many cases, it is possible Use more than one set of pulse wave and stroke combinations to adjust to the boundary conditions; for a single combination, there may be an infinite number of solutions. Briefly refer to a specific interval combination, the pulse wave is represented by P, and the stroke is represented by C ; For example, the pulse / navigation / pulse segment will be called PCP. When relevant, we will be calculated at the minimum time (" Μ "), and the time is The difference between the case of a given ("; Τ & quot). For example, there can be PCP-M and PC P-T solutions, but in fact they are completely different. 27 This paper size applies to China National Standard (CNS) Α4 specification (210X297 mm),-clothing-(Please read the precautions on the back before filling this page)

Line 1T Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 507120 A7 ______B7 V. Invention Description (/) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Many different combinations of sections, or structural types, will be produced. If we do n’t have a general solution, some boundary conditions will have infinite solutions. Sometimes more than one set of patterns will resolve the boundary conditions. In those cases, the lowest cost solution is chosen. For each type, both -M and -T solutions will be made. The currently resolved types are: * Pulse / Stroke in Figure 6: This produces C, P, CP, and PC segments. * Pulse / Pulse in Figure 7: This produces pp and PCP fragments. Pulses have the same acceleration amplitude but opposite signs; pulse times are independent. If the speed at the end point of the first pulse exceeds the maximum threshold, the navigation zone with the highest speed is used to form a PCP segment. * Stop / Jump / Start in Figure 8: This is also called a Z-movement. This produces a set of PPCPP fragments and the -T solution can simultaneously produce a set of PPCPCP fragments. If no other solution is appropriate, this is the last solution. It includes immediate stop, PCP point-to-point movement and stop to the "level of the stage", and then the last pulse to increase to the final position and velocity. This fragment type generally takes more time and more than other types. More energy. However, observing position constraints will make it important for a few, preferably infrequent, boundary condition sets. The strategy for solving the given multi-axis PVT segment is as follows: 1. Get the minimum time movement of each axis (Ie, solve the axis-M problem). Pick the largest from these times. Use the specified time (axis-T) solution to solve the other axes. The following sequence is used to solve both the minimum time and the specified time. Paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before this page) -Packing. -Ding ·, -'mouth line 507120 A7 B7 V. Description of invention (vb) Question : 1 · Try to design a set of PC and PP fragments; keep a list of the best feasible solutions of each type. If a feasible solution is available, choose the one with the lowest cost. So far, there is no feasible solution, so design a set of stop! 丨: / jump / start to move. The feasibility check includes the check of the number, for example, the interval time is non-negative, and the actual check, such as voltage, rate, And the position limit are violated. The following chart is a summary of the formula for the cycloidal and harmonic multi-pulse acceleration Θ. (Please read the precautions on the back before filling this page) -installed, -2 ' Mouthline • Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs X Consumption Cooperatives 29 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 507120 A7 B7 V. Description of the invention (> rp Employees ’Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Print

Item Cycloid Harmonic \ Acceleration IT «/ 4sin —r; zos ~ rj; Velocity, AT AT τγ v⑴ = V ---- COS ~ TJ! T. 1 A Λ T. 2« Tf v (f) = v ♦ a r- --sin- * 2 4 / r T Position ί p (/) = r — A. AT3 (2.rt 〆 /) · 1 Jerk ί —, Ajt 711 7 (0 = — cosy xA. Irtt j (J)-— sin— j Single Pulse! I 2AT Δ v-z τ AT: Δρ * Tv, * r AJl = Γν / * ~ A Ding Δ v = —— Ar Δρ = / v, * 一- — 4 aP = Γν / -— | 1 Stan or Stop KtiV1 Δ / 7 =-H 4A Αν: Δρ = — A i PoinMo-Point ί! Motion ί I 2 AT1 Δ / 7 = K AT1 st — ^ 一一 | Pulse Energy i 1 I εΛ [Ά 2 \ Kr J -i (f) 30 This paper size applies to China National Standard (CNS) A4 specification (210X29? Mm) Ί V Γ1 clothing-(Please read the precautions on the back first (Fill in this page again) 507120 A7

Binding 507120 A7 B7 V. Description of the invention (: / |) Although the best mode for completing the present invention has been explained in detail 'familiar with this) The person called tear off technology will know that there are various designs and practices of Vf For example, as defined in the patent application scope below. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives 2 3 This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 507120 A7 B7 V. Description of the invention (y >) For reference, refer to Table 4 .... .Wafer 6 '7 ... mobile stage 11 ... user interface 1 2 ... trace planner 14' 17 ... controller 15 '16. .... controller i 8 ... optical box t 3 2 ... reference position 3 3 ... link subset 3 4 ... link ^ 5 ... · ... piece 10 ... laser processing system 10 ... PVT (position / rate / time) segment 11 ... CVD (fixed-rate / distance) segment 13 ... Stop segment 14 ... Link-mounted i cable (please read the precautions on the back before filling this page) , ¾ Printed by the Consumers' Cooperative of the Ministry of Economic Affairs and Intellectual Property of the People's Republic of China. The paper size applies to the Chinese National Standard (CNS) A4 (210 X 297 mm).

Claims (1)

Printed clothing 507120 AS B8 CS D8 by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 夂, patent application scope 1 · A type for producing a trajectory to be followed by a motor-driven stage when processing microstructures at a laser processing point Method, the method includes: receiving reference data, which represents the positions of microstructures to be processed at the processing point; determining multiple arrays of possible trajectories based on the data; it is estimated that when at least one group of motors is based on each possible trajectory, The temperature change of at least one set of motors caused by driving the stage; and determining some of the approximate best trajectories from the possible trajectories, wherein the positioning accuracy of the stage is determined by following the approximate best trajectory maximize. 2. The method according to item 1 of the patent application scope, wherein at least one set of horses includes at least one set of coils and the estimation step therein is based on the estimated energy consumed by each possible trajectory in the at least one set of coils. 3. The method according to item 2 of the patent application range, wherein the estimating step includes: predicting the temperature rise caused by the energy consumed in the at least one set of coils of each possible trajectory based on the thermal response pattern to the at least one set of coils step. 4. The method of claim 3, wherein each possible trajectory includes a plurality of moving segments, and wherein the estimating step includes a step of estimating energy consumption in the at least one set of coils of the moving segments. 5. The method according to item 1 of the scope of patent application, wherein the stage is an χ-y stage. 6. The method according to item 5 of the patent application, wherein the estimation step accounts for the temperature change caused by the majority of motors when the motors drive the x-y stage according to each possible trajectory. 34 This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) 0l U — ^ U — IIII · 11111111 AVI I. (Please read the precautions on the back before filling this page) 507120 Ministry of Economic Affairs Wisdom Printed AS BS CS D8 by the Consumer Cooperative of the Property Bureau and applied for the scope of patent 7. The method of the first scope of the patent application, wherein the microstructure is placed in a plurality of space-separated semiconductor wafers supported by the stage. On the wafer. 8. The method of claim 7 in which the microstructure is a chip wire. 9. The method of claim 8 in which the wafer is a semiconductor memory element and wherein the wire is to be ablated at the processing point to repair a defective memory cell of the element. [0] The method according to item 1 of the scope of patent application, wherein at least one set of possible trajectories has an acceleration / deceleration curve. 11. A subsystem that generates a trajectory that is followed by a motor-driven stage when a microstructure is processed at a laser processing point, the subsystem includes: a device for receiving reference materials, which is represented at the processing point The position of the microstructure to be processed; the device used to determine the most possible trajectories based on the information; used to estimate the at least one set of motors caused when the at least one set of motors drives the stage according to each possible trajectory Means for changing the temperature; and a device for determining a set of approximately optimal trajectories from among the possible trajectories, wherein the positioning accuracy of the stage is tracked using the approximately optimal trajectory. Into. 12. The subsystem according to item 11 of the scope of patent application, wherein the at least one set of motors includes at least one set of coils and the estimation device therein estimates, for each possible trajectory, the energy consumed in the at least one set of coils. 1 3. If the subsystem of item 12 in the scope of patent application, the estimated paper size of 35 papers is applicable to China National Standard (CNS) A4 (210 X 297 mm) ------------ -Install -------- Order --------- line (please read the precautions on the back before filling this page) Printed by 507120 AS B8 CS DS of the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Consumption Cooperative The scope of the patent application includes a set of thermal response models of the at least one set of coils to predict the temperature rise caused by the energy consumed in the at least one set of coils for each possible trajectory. 14. The subsystem as claimed in claim 13, wherein each of the possible trajectories includes a plurality of moving segments, and wherein the estimation device estimates the energy consumption in at least one set of coils of each moving segment. 15. For the subsystem of item n in the scope of patent application, the stage is an X-y stage. 16. The subsystem according to item 15 of the scope of patent application, wherein the estimation device estimates the temperature change of most motors caused when the motor drives the x-y stage according to each possible trajectory. 17 • The subsystem of item 11 in the scope of patent application, wherein the at least one set of possible trajectories has an acceleration / deceleration channel. 1 8. The subsystem according to item 11 of the patent application scope, wherein the microstructure is placed on a plurality of space-separated wafers of a semiconductor wafer supported by a stage. 19. The subsystem of claim 18, wherein the microstructure is a chip wire. 2 0. The subsystem of claim 19, wherein the wafer is a semiconductor memory element and wherein the wire is to be ablated at the processing point to repair a defective memory cell of the element. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------ clothing -------- order --------- (Please read the notes on the back before filling this page)