AU2001261578A1 - Method and subsystem for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site - Google Patents

Method and subsystem for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site

Info

Publication number
AU2001261578A1
AU2001261578A1 AU2001261578A AU6157801A AU2001261578A1 AU 2001261578 A1 AU2001261578 A1 AU 2001261578A1 AU 2001261578 A AU2001261578 A AU 2001261578A AU 6157801 A AU6157801 A AU 6157801A AU 2001261578 A1 AU2001261578 A1 AU 2001261578A1
Authority
AU
Australia
Prior art keywords
processing
subsystem
trajectory
laser
followed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001261578A
Inventor
Christopher P. Cullen
Bradley L. Hunter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Scanning Inc
Original Assignee
GEN SCANNING Inc
General Scanning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GEN SCANNING Inc, General Scanning Inc filed Critical GEN SCANNING Inc
Publication of AU2001261578A1 publication Critical patent/AU2001261578A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/04—Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
AU2001261578A 2000-05-16 2001-05-15 Method and subsystem for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site Abandoned AU2001261578A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US20427500P 2000-05-16 2000-05-16
US60204275 2000-05-16
PCT/US2001/015554 WO2001088639A2 (en) 2000-05-16 2001-05-15 Method and subsystem for generating a trajectory to be followed by a motor-driven stage

Publications (1)

Publication Number Publication Date
AU2001261578A1 true AU2001261578A1 (en) 2001-11-26

Family

ID=22757294

Family Applications (2)

Application Number Title Priority Date Filing Date
AU2001261577A Abandoned AU2001261577A1 (en) 2000-05-16 2001-05-15 Method and subsystem for determining a sequence in which microstructures are to be processed at a laser-processing site
AU2001261578A Abandoned AU2001261578A1 (en) 2000-05-16 2001-05-15 Method and subsystem for generating a trajectory to be followed by a motor-driven stage when processing microstructures at a laser-processing site

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AU2001261577A Abandoned AU2001261577A1 (en) 2000-05-16 2001-05-15 Method and subsystem for determining a sequence in which microstructures are to be processed at a laser-processing site

Country Status (3)

Country Link
AU (2) AU2001261577A1 (en)
TW (2) TW507120B (en)
WO (2) WO2001088639A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1452920A3 (en) * 2003-02-25 2006-06-21 ASML Netherlands B.V. Device manufacturing method,device manufactured thereby,computer program for performing the method,lithographic apparatus, and robotics system
US7341822B2 (en) 2003-02-25 2008-03-11 Asml Netherlands B.V. Time-optimal setpoint generator in a lithographic apparatus
AT505245B1 (en) 2007-05-25 2011-02-15 Krieger Martin Mag ELECTRONICALLY CONTROLLED CLOCK
GB2498943A (en) * 2012-01-31 2013-08-07 Ibm Evaluating and optimizing a trajectory function
US9678499B2 (en) 2012-06-27 2017-06-13 Mitsubishi Electric Research Laboratories, Inc. Method for controlling redundantly actuated machines for cutting a pattern of disconnected contours
US9104192B2 (en) * 2012-06-27 2015-08-11 Mitsubishi Electric Research Laboratories, Inc. System and method for controlling machines according to pattern of contours
TWI511820B (en) * 2013-12-02 2015-12-11 Ardentec Corp Parameter loading method of laser process machine
CN112787551A (en) * 2019-11-02 2021-05-11 天津职业技术师范大学(中国职业培训指导教师进修中心) Method for improving robustness and contour performance of double-shaft or three-shaft feed driving system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5808887A (en) * 1987-11-20 1998-09-15 Philips Electronics North America Corporation Animation of path planning
EP0523270A1 (en) * 1991-07-18 1993-01-20 International Business Machines Corporation Method to control a positioning system
US5871805A (en) * 1996-04-08 1999-02-16 Lemelson; Jerome Computer controlled vapor deposition processes
JPH10312961A (en) * 1997-03-11 1998-11-24 Nikon Corp Method for determining motion sequence and position aligner
EP0862089A3 (en) * 1997-02-28 2000-05-10 Nikon Corporation Method of determining movement sequence and apparatus for realizing it
US6294755B1 (en) * 1997-12-02 2001-09-25 Lacent Technologies, Inc. Gantry-mounted laser nozzle and method for controlling laser positioning
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus

Also Published As

Publication number Publication date
WO2001088638A3 (en) 2002-06-13
WO2001088638A2 (en) 2001-11-22
TW507120B (en) 2002-10-21
AU2001261577A1 (en) 2001-11-26
WO2001088639A2 (en) 2001-11-22
WO2001088639A3 (en) 2002-06-13
TW505956B (en) 2002-10-11

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